DE112024001199T5 - Messvorrichtung - Google Patents

Messvorrichtung

Info

Publication number
DE112024001199T5
DE112024001199T5 DE112024001199.3T DE112024001199T DE112024001199T5 DE 112024001199 T5 DE112024001199 T5 DE 112024001199T5 DE 112024001199 T DE112024001199 T DE 112024001199T DE 112024001199 T5 DE112024001199 T5 DE 112024001199T5
Authority
DE
Germany
Prior art keywords
temperature
temperature correction
measurement
probe
measuring device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
DE112024001199.3T
Other languages
German (de)
English (en)
Inventor
Kunihiro Maeda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Seimitsu Co Ltd
Original Assignee
Tokyo Seimitsu Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Seimitsu Co Ltd filed Critical Tokyo Seimitsu Co Ltd
Publication of DE112024001199T5 publication Critical patent/DE112024001199T5/de
Pending legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/28—Measuring arrangements characterised by the use of mechanical techniques for measuring roughness or irregularity of surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G01B21/02—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness
    • G01B21/04—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant for measuring length, width, or thickness by measuring coordinates of points
    • G01B21/045—Correction of measurements
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/0011—Arrangements for eliminating or compensation of measuring errors due to temperature or weight
    • G01B5/0014—Arrangements for eliminating or compensation of measuring errors due to temperature or weight due to temperature
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B5/00—Measuring arrangements characterised by the use of mechanical techniques
    • G01B5/20—Measuring arrangements characterised by the use of mechanical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/60—Unique sensor identification

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • A Measuring Device Byusing Mechanical Method (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)
DE112024001199.3T 2023-03-13 2024-03-08 Messvorrichtung Pending DE112024001199T5 (de)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2023-039048 2023-03-13
JP2023039048A JP2024129692A (ja) 2023-03-13 2023-03-13 測定装置
PCT/JP2024/008970 WO2024190643A1 (ja) 2023-03-13 2024-03-08 測定装置

Publications (1)

Publication Number Publication Date
DE112024001199T5 true DE112024001199T5 (de) 2026-01-15

Family

ID=92755703

Family Applications (1)

Application Number Title Priority Date Filing Date
DE112024001199.3T Pending DE112024001199T5 (de) 2023-03-13 2024-03-08 Messvorrichtung

Country Status (4)

Country Link
JP (1) JP2024129692A (https=)
CN (1) CN120898109A (https=)
DE (1) DE112024001199T5 (https=)
WO (1) WO2024190643A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN120651078B (zh) * 2025-07-24 2025-11-18 中国电子产品可靠性与环境试验研究所（（工业和信息化部电子第五研究所）（中国赛宝实验室）） 一种光面环规自动校准装置和方法

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60214212A (ja) * 1984-04-10 1985-10-26 Mitsutoyo Mfg Co Ltd 測定装置
DE8813875U1 (de) * 1988-11-05 1988-12-22 Fa. Carl Zeiss, 7920 Heidenheim Taster für Koordinatenmeßgeräte
CN115461593B (zh) * 2020-04-30 2023-08-29 株式会社东京精密 测量装置

Also Published As

Publication number Publication date
JP2024129692A (ja) 2024-09-27
CN120898109A (zh) 2025-11-04
WO2024190643A1 (ja) 2024-09-19

Similar Documents

Publication Publication Date Title
DE60311527T3 (de) Werkstückinspektionsverfahren und vorrichtung
EP2776785B1 (de) Vorbereitung des betriebes eines taktil antastenden koordinatenmessgeräts
US7376261B2 (en) Surface scan measuring device and method of forming compensation table for scanning probe
DE102011080242B4 (de) Industrielle Maschine
DE69723213T2 (de) System zum Messen des Spiels und der Koplanarität zweier nebeneinander liegender Objekte
DE112021002520B4 (de) Messvorrichtung
DE102008041524B4 (de) Verfahren und Vorrichtung zur Durchführung dreidimensionaler Messungen
US7882723B2 (en) Abnormality detecting method for form measuring mechanism and form measuring mechanism
US6701267B2 (en) Method for calibrating probe and computer-readable medium
DE102021211384A1 (de) Verfahren und Vorrichtung zum Bestimmen systematischer Führungsfehler von beweglichen Elementen eines Koordinatenmessgeräts
DE102017001750A1 (de) Innenwandmessinstrument und Versatzbetragsberechnungsverfahren
DE112024001199T5 (de) Messvorrichtung
CN112082482B (zh) 对仅有棱边特征工件的视觉定位方法、应用及精度评估方法
WO2021106767A1 (ja) 表面検査装置および形状矯正装置、並びに表面検査方法および形状矯正方法
DE112015004528T5 (de) Formmessvorrichtung und Formmessverfahren
DE102008025896A1 (de) Verfahren zur Ermittlung der Messunsicherheit bei der Geometriemessung
DE10161060A1 (de) Fehlerprüfverfahren für einen dreidimensionalen Gegenstand
DE102020004572A1 (de) Verfahren für ein kalibrieren von parametern eines oberflächentextur-messapparats, computerprogrammprodukt und kalibriersystem
DE102022113710A1 (de) Verfahren zum korrigieren einer messsondenvorrichtung
US20020131633A1 (en) System and method for machine vision inspection through platen
DE102016212651B4 (de) Verfahren zum Vermessen eines Werkstücks unter Verwendung von zumindest einem Referenzkörper
DE102005059251A1 (de) Optischer Hybrid-Zylinderpositionssensor
DE112024001225T5 (de) Messvorrichtung
US12379197B2 (en) Abnormality determination apparatus, abnormality determination method, and abnormality determination system
US11885754B2 (en) Tolerance error estimating apparatus, method, program, reconstruction apparatus and control apparatus

Legal Events

Date Code Title Description
R012 Request for examination validly filed