JP2024112393A - 真空ポンプおよびルーツロータの形状を決定する方法 - Google Patents

真空ポンプおよびルーツロータの形状を決定する方法 Download PDF

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Publication number
JP2024112393A
JP2024112393A JP2023017363A JP2023017363A JP2024112393A JP 2024112393 A JP2024112393 A JP 2024112393A JP 2023017363 A JP2023017363 A JP 2023017363A JP 2023017363 A JP2023017363 A JP 2023017363A JP 2024112393 A JP2024112393 A JP 2024112393A
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JP
Japan
Prior art keywords
rotor
roots
root
rotors
gaps
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2023017363A
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English (en)
Japanese (ja)
Other versions
JP2024112393A5 (enExample
Inventor
哲郎 杉浦
Tetsuo Sugiura
真己 長山
Masaki Nagayama
アナガ カマタカラ
Kamatkar Anagha
悠河 堀部
Yuga Horibe
真志 大渕
Shinji Obuchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ebara Corp
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Priority to JP2023017363A priority Critical patent/JP2024112393A/ja
Priority to KR1020240016398A priority patent/KR20240124210A/ko
Priority to CN202410156189.7A priority patent/CN118462579A/zh
Priority to TW113104505A priority patent/TW202438768A/zh
Priority to EP25159220.0A priority patent/EP4534846A3/en
Priority to EP24155938.4A priority patent/EP4424974A3/en
Publication of JP2024112393A publication Critical patent/JP2024112393A/ja
Publication of JP2024112393A5 publication Critical patent/JP2024112393A5/ja
Pending legal-status Critical Current

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    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/12—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type
    • F04C18/126—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing of other than internal-axis type with radially from the rotor body extending elements, not necessarily co-operating with corresponding recesses in the other rotor, e.g. lobes, Roots type
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F01—MACHINES OR ENGINES IN GENERAL; ENGINE PLANTS IN GENERAL; STEAM ENGINES
    • F01C—ROTARY-PISTON OR OSCILLATING-PISTON MACHINES OR ENGINES
    • F01C21/00—Component parts, details or accessories not provided for in groups F01C1/00 - F01C20/00
    • F01C21/08—Rotary pistons
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C18/00—Rotary-piston pumps specially adapted for elastic fluids
    • F04C18/08—Rotary-piston pumps specially adapted for elastic fluids of intermeshing-engagement type, i.e. with engagement of co-operating members similar to that of toothed gearing
    • F04C18/082—Details specially related to intermeshing engagement type pumps
    • F04C18/084—Toothed wheels
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C25/00—Adaptations of pumps for special use of pumps for elastic fluids
    • F04C25/02—Adaptations of pumps for special use of pumps for elastic fluids for producing high vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C29/00—Component parts, details or accessories of pumps or pumping installations, not provided for in groups F04C18/00 - F04C28/00
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F17/00—Digital computing or data processing equipment or methods, specially adapted for specific functions
    • G06F17/10—Complex mathematical operations
    • G—PHYSICS
    • G06—COMPUTING OR CALCULATING; COUNTING
    • G06F—ELECTRIC DIGITAL DATA PROCESSING
    • G06F30/00—Computer-aided design [CAD]
    • G06F30/10—Geometric CAD
    • G06F30/17—Mechanical parametric or variational design
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2220/00—Application
    • F04C2220/10—Vacuum
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2240/00—Components
    • F04C2240/20—Rotors
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04C—ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; ROTARY-PISTON, OR OSCILLATING-PISTON, POSITIVE-DISPLACEMENT PUMPS
    • F04C2250/00—Geometry
    • F04C2250/20—Geometry of the rotor

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Theoretical Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Geometry (AREA)
  • Mathematical Physics (AREA)
  • Mathematical Optimization (AREA)
  • Pure & Applied Mathematics (AREA)
  • Mathematical Analysis (AREA)
  • Data Mining & Analysis (AREA)
  • Computational Mathematics (AREA)
  • Computer Hardware Design (AREA)
  • Evolutionary Computation (AREA)
  • Algebra (AREA)
  • Databases & Information Systems (AREA)
  • Software Systems (AREA)
  • Applications Or Details Of Rotary Compressors (AREA)
  • Rotary Pumps (AREA)
JP2023017363A 2023-02-08 2023-02-08 真空ポンプおよびルーツロータの形状を決定する方法 Pending JP2024112393A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2023017363A JP2024112393A (ja) 2023-02-08 2023-02-08 真空ポンプおよびルーツロータの形状を決定する方法
KR1020240016398A KR20240124210A (ko) 2023-02-08 2024-02-02 진공 펌프 및 루츠 로터의 형상을 결정하는 방법
CN202410156189.7A CN118462579A (zh) 2023-02-08 2024-02-04 真空泵及决定罗茨转子的形状的方法
TW113104505A TW202438768A (zh) 2023-02-08 2024-02-05 真空泵及決定魯氏轉子的形狀之方法
EP25159220.0A EP4534846A3 (en) 2023-02-08 2024-02-06 Vacuum pump and method of determining shape of roots rotor
EP24155938.4A EP4424974A3 (en) 2023-02-08 2024-02-06 Vacuum pump and method of determining shape of roots rotor

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2023017363A JP2024112393A (ja) 2023-02-08 2023-02-08 真空ポンプおよびルーツロータの形状を決定する方法

Publications (2)

Publication Number Publication Date
JP2024112393A true JP2024112393A (ja) 2024-08-21
JP2024112393A5 JP2024112393A5 (enExample) 2025-09-25

Family

ID=89853490

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2023017363A Pending JP2024112393A (ja) 2023-02-08 2023-02-08 真空ポンプおよびルーツロータの形状を決定する方法

Country Status (5)

Country Link
EP (2) EP4534846A3 (enExample)
JP (1) JP2024112393A (enExample)
KR (1) KR20240124210A (enExample)
CN (1) CN118462579A (enExample)
TW (1) TW202438768A (enExample)

Family Cites Families (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6477782A (en) 1987-09-19 1989-03-23 Ebara Corp Rotary machine of roots type
DE59005764D1 (de) * 1990-08-27 1994-06-23 Leybold Ag Rotor für eine Wälzkolbenvakuumpumpe.
JP3254457B2 (ja) * 1992-09-18 2002-02-04 株式会社日立製作所 無給油式スクリュー圧縮機のロータ形成方法およびそのロータを用いた無給油式スクリュー圧縮機
CN203641003U (zh) * 2013-12-31 2014-06-11 大连交通大学 罗茨真空泵的45°节圆压力角渐开线型转子
US11131307B2 (en) * 2015-08-17 2021-09-28 Eaton Intelligent Power Limited Hybrid profile supercharger rotors
CN108799111B (zh) * 2018-01-09 2023-09-22 中国石油大学(华东) 一种不对称罗茨转子

Also Published As

Publication number Publication date
CN118462579A (zh) 2024-08-09
EP4534846A2 (en) 2025-04-09
TW202438768A (zh) 2024-10-01
EP4424974A3 (en) 2024-11-27
KR20240124210A (ko) 2024-08-16
EP4534846A3 (en) 2025-07-02
EP4424974A2 (en) 2024-09-04

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