JP2024040302A5 - - Google Patents

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Publication number
JP2024040302A5
JP2024040302A5 JP2024017225A JP2024017225A JP2024040302A5 JP 2024040302 A5 JP2024040302 A5 JP 2024040302A5 JP 2024017225 A JP2024017225 A JP 2024017225A JP 2024017225 A JP2024017225 A JP 2024017225A JP 2024040302 A5 JP2024040302 A5 JP 2024040302A5
Authority
JP
Japan
Prior art keywords
sample holder
holder according
porous member
hole
dense layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2024017225A
Other languages
English (en)
Japanese (ja)
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JP2024040302A (ja
Filing date
Publication date
Priority claimed from JP2019212440A external-priority patent/JP7433857B2/ja
Application filed filed Critical
Priority to JP2024017225A priority Critical patent/JP2024040302A/ja
Publication of JP2024040302A publication Critical patent/JP2024040302A/ja
Publication of JP2024040302A5 publication Critical patent/JP2024040302A5/ja
Pending legal-status Critical Current

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JP2024017225A 2019-11-25 2024-02-07 試料保持具 Pending JP2024040302A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2024017225A JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2019212440A JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具
JP2024017225A JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2019212440A Division JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具

Publications (2)

Publication Number Publication Date
JP2024040302A JP2024040302A (ja) 2024-03-25
JP2024040302A5 true JP2024040302A5 (enExample) 2024-04-02

Family

ID=76088123

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2019212440A Active JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具
JP2024017225A Pending JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2019212440A Active JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具

Country Status (1)

Country Link
JP (2) JP7433857B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023006679A (ja) * 2021-06-30 2023-01-18 Toto株式会社 静電チャック
JP7514815B2 (ja) * 2021-12-22 2024-07-11 日本碍子株式会社 半導体製造装置用部材

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5633766B2 (ja) * 2013-03-29 2014-12-03 Toto株式会社 静電チャック
US10770270B2 (en) * 2016-06-07 2020-09-08 Applied Materials, Inc. High power electrostatic chuck with aperture-reducing plug in a gas hole
JP6865145B2 (ja) * 2016-12-16 2021-04-28 日本特殊陶業株式会社 保持装置
CN109891572B (zh) * 2017-07-06 2023-08-15 日本碍子株式会社 半导体制造装置用构件及其制造方法
WO2019082875A1 (ja) * 2017-10-26 2019-05-02 京セラ株式会社 試料保持具
JP6489277B1 (ja) * 2018-03-14 2019-03-27 Toto株式会社 静電チャック
JP6504532B1 (ja) * 2018-03-14 2019-04-24 Toto株式会社 静電チャック
JP7002014B2 (ja) * 2018-10-30 2022-01-20 Toto株式会社 静電チャック
JP7441402B2 (ja) * 2019-03-05 2024-03-01 Toto株式会社 静電チャック、および処理装置

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