JP7433857B2 - 試料保持具 - Google Patents

試料保持具 Download PDF

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Publication number
JP7433857B2
JP7433857B2 JP2019212440A JP2019212440A JP7433857B2 JP 7433857 B2 JP7433857 B2 JP 7433857B2 JP 2019212440 A JP2019212440 A JP 2019212440A JP 2019212440 A JP2019212440 A JP 2019212440A JP 7433857 B2 JP7433857 B2 JP 7433857B2
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Japan
Prior art keywords
porous member
hole
dense layer
plasma
sample holder
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JP2019212440A
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English (en)
Japanese (ja)
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JP2021086854A (ja
Inventor
啓真 竹森
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kyocera Corp
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Kyocera Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kyocera Corp filed Critical Kyocera Corp
Priority to JP2019212440A priority Critical patent/JP7433857B2/ja
Publication of JP2021086854A publication Critical patent/JP2021086854A/ja
Priority to JP2024017225A priority patent/JP2024040302A/ja
Application granted granted Critical
Publication of JP7433857B2 publication Critical patent/JP7433857B2/ja
Active legal-status Critical Current
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  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2019212440A 2019-11-25 2019-11-25 試料保持具 Active JP7433857B2 (ja)

Priority Applications (2)

Application Number Priority Date Filing Date Title
JP2019212440A JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具
JP2024017225A JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2019212440A JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2024017225A Division JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

Publications (2)

Publication Number Publication Date
JP2021086854A JP2021086854A (ja) 2021-06-03
JP7433857B2 true JP7433857B2 (ja) 2024-02-20

Family

ID=76088123

Family Applications (2)

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JP2019212440A Active JP7433857B2 (ja) 2019-11-25 2019-11-25 試料保持具
JP2024017225A Pending JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

Family Applications After (1)

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JP2024017225A Pending JP2024040302A (ja) 2019-11-25 2024-02-07 試料保持具

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JP (2) JP7433857B2 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2023006679A (ja) * 2021-06-30 2023-01-18 Toto株式会社 静電チャック
JP7514815B2 (ja) * 2021-12-22 2024-07-11 日本碍子株式会社 半導体製造装置用部材

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014209615A (ja) 2013-03-29 2014-11-06 Toto株式会社 静電チャック
WO2019009028A1 (ja) 2017-07-06 2019-01-10 日本碍子株式会社 半導体製造装置用部材及びその製法
JP6489277B1 (ja) 2018-03-14 2019-03-27 Toto株式会社 静電チャック
JP6504532B1 (ja) 2018-03-14 2019-04-24 Toto株式会社 静電チャック

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10770270B2 (en) * 2016-06-07 2020-09-08 Applied Materials, Inc. High power electrostatic chuck with aperture-reducing plug in a gas hole
JP6865145B2 (ja) * 2016-12-16 2021-04-28 日本特殊陶業株式会社 保持装置
CN111213230B (zh) * 2017-10-26 2023-10-10 京瓷株式会社 试料保持器具
JP7002014B2 (ja) * 2018-10-30 2022-01-20 Toto株式会社 静電チャック
JP7441402B2 (ja) * 2019-03-05 2024-03-01 Toto株式会社 静電チャック、および処理装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2014209615A (ja) 2013-03-29 2014-11-06 Toto株式会社 静電チャック
WO2019009028A1 (ja) 2017-07-06 2019-01-10 日本碍子株式会社 半導体製造装置用部材及びその製法
JP6489277B1 (ja) 2018-03-14 2019-03-27 Toto株式会社 静電チャック
JP6504532B1 (ja) 2018-03-14 2019-04-24 Toto株式会社 静電チャック

Also Published As

Publication number Publication date
JP2021086854A (ja) 2021-06-03
JP2024040302A (ja) 2024-03-25

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