JP2024033113A - Buffer material - Google Patents

Abstract

To provide a buffer material capable of shortening conveying time compared with when a sheet-like bubble buffer material is used and reducing cost for a material for conveyance.SOLUTION: The buffer material used for conveying a plate comprises: a buffer material body having one or more storage spaces inside and more flexible than the plate; and one or more magnets stored in the one or more storage spaces of the buffer material body, and is used in contact with the plate.SELECTED DRAWING: Figure 1

Description

The present invention relates to a cushioning material used when transporting a board.

BACKGROUND ART In electronic devices such as mobile phones and personal computers, a device chip that includes devices such as electronic circuits has become an essential component. For example, device chips are made by dividing the front side of a wafer made of a semiconductor such as silicon (Si) into multiple areas with processing lines called streets, forming devices in each area, and then cutting along these processing lines. Obtained by dividing the wafer.

Various processing devices such as a cutting device, a laser processing device, and a grinding device are used to process the wafer as described above. Each processing device includes a frame and an exterior cover attached to the frame, and most of the plurality of components of each processing device are housed inside this exterior cover (for example, Patent Document 1 reference).

By the way, when each processing device is shipped from the manufacturer, each of the multiple plates that make up the exterior cover is removed from the frame and wrapped in a sheet of bubble wrap to prevent damage to the exterior cover. It can be done. The board wrapped in bubble wrap is loaded onto a special trolley and transported separately from the frame.

Japanese Patent Application Publication No. 2018-179082

However, when the above-mentioned sheet-like bubble buffer material is used, there is a problem in that the complicated work of wrapping each of the plurality of plates with the bubble buffer material increases the time required for transportation. Moreover, since the bubble buffer material after being used is discarded without being used again, there is also a problem in terms of the cost of materials for transportation.

Therefore, it is an object of the present invention to be used when conveying a plurality of plates, and to reduce the time required for conveyance compared to the case of using a sheet-like bubble buffer material, and to keep the cost of materials for conveyance low. It is to provide a cushioning material.

According to one aspect of the present invention, there is provided a cushioning material used when transporting a board, which includes a cushioning material main body that has one or more accommodation spaces inside and is softer than the board; A cushioning material is provided that includes the one or more magnets housed in the one or more housing spaces and is used in contact with the plate.

Preferably, the plate is made of a ferromagnetic material, and the buffer material is used by being placed between the two plates, and when the two plates are transported, the buffer material is used. It is fixed to the two plates by the magnetic force of the magnet so as to maintain the positional relationship.

Preferably, when the cushioning material main body is fixed to the two plates, a first surface that contacts one of the two plates and a first surface that contacts the other of the two plates. The magnet has a columnar, plate-like, or spherical shape with an S pole and an N pole, with the S pole facing the first surface and the N pole facing the second surface. It is accommodated in the accommodation space of the cushioning material main body so as to face to the side. Preferably, the buffer material main body is configured such that the direction of the south pole or north pole of the magnet can be identified from the outside.

A cushioning material according to one aspect of the present invention includes a cushioning material main body that has a storage space inside and is softer than a board to be transported, and a magnet accommodated in the storage space of the cushioning material main body, used in contact with Therefore, the complicated work of wrapping the board, which is required when using a sheet-like bubble buffer material, is no longer necessary, and the time required for transportation is shortened.

Moreover, this cushioning material does not break easily unlike sheet-shaped bubble cushioning materials and can be used repeatedly, so that the cost of materials for transportation can be kept low as a result. Furthermore, if the plates to be transported are made of ferromagnetic material, a buffer material is placed between the two plates to maintain the positional relationship between the two plates during transportation. Therefore, each plate will not be damaged due to the positional relationship between the two plates changing during transportation.

FIG. 1 is a perspective view schematically showing the structure of a cushioning material. FIG. 2 is a cross-sectional view schematically showing the structure of the cushioning material. FIG. 3 is a perspective view schematically showing a cushioning material fixed to a plate. FIG. 4 is a side view schematically showing how a plurality of plates are transported. FIG. 5 is a perspective view schematically showing a cutting device using a plate.

Embodiments of the present invention will be described below with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing the structure of a cushioning material 1 used while being fixed to an object to be transported, and FIG. 2 is a sectional view schematically showing the structure of the cushioning material 1. As shown in FIGS. 1 and 2, the cushioning material 1 includes a plate-shaped (or columnar) cushioning material main body 3. As shown in FIGS. This cushioning material main body 3 is constructed by, for example, adhering a plate-shaped (or column-shaped) first member 5 and a plate-shaped (or column-shaped) second member 7.

The first member 5 is made of, for example, a resin that is softer than the object to be conveyed, and has a generally flat first surface 5a, a second surface 5b opposite to the first surface 5a, and a second surface 5b that is opposite to the first surface 5a. It has a side surface 5c (FIG. 1) that connects the second surface 5b. This first member 5 is provided with nine (plural) recesses 5d (FIG. 2), and each recess 5d is open on the second surface 5b.

Examples of the resin constituting the first member 5 include soft resins such as urethane, epoxy, polypropylene (PP), and polyethylene (PE). However, for the first member 5, any resin that is softer than the object to be transported and has shock absorbing properties may be used without limitation. Further, in this embodiment, the first member 5 is provided with nine recesses 5d, but the first member 5 only needs to be provided with at least one recess 5d.

The second member 7 is configured similarly to the first member 5. That is, the second member 7 is made of a resin that is softer than the object to be transported, and has a generally flat first surface 7a, a second surface 7b opposite to the first surface 7a, and a second surface 7b that is opposite to the first surface 7a. It has a side surface 7c (FIG. 1) that connects the two surfaces 7b. This second member 7 is also provided with nine (plural) recesses 7d (FIG. 2), and each recess 7d is open on the second surface 7b.

The resin forming the second member 7 is the same as the resin forming the first member 5. In other words, any resin that is softer than the object to be transported and has shock absorbing properties can be used for the second member 7 without any restriction. In this embodiment, the second member 7 is provided with nine recesses 7d, but if the second member 7 is provided with the same number of recesses 7d as the recesses 5d of the first member 5. good.

The cushioning material body 3 is formed by bonding the second surface 7b of the second member 7 to the second surface 5b of the first member 5. The recess 7d of the second member 7 is provided at a position corresponding to the recess 5d of the first member 5, and when the second surface 7b is bonded to the second surface 5b, the corresponding recess 5d and the recess 7d are combined to form the accommodation space 3d. Note that the first surface 5a of the first member 5 becomes the first surface 3a of the cushioning material main body 3, and the first surface 7a of the second member 7 becomes the second surface 3b of the cushioning material main body 3. The side surface 5c and the side surface 7c of the second member 7 become the side surface 3c of the cushioning material main body 3.

Nine magnets 9 having a shape corresponding to the shape of each accommodation space 3d are accommodated in nine accommodation spaces 3d formed by combining nine recesses 5d and nine depressions 7d. Specifically, each magnet 9 has a columnar (or plate-like) shape with an S pole 9a and an N pole 9b, with the S pole 9a facing the first surface 3a of the cushioning material main body 3, and the N pole 9b facing toward the first surface 3a of the cushioning material body 3. are accommodated in each accommodation space 3d so as to face the second surface 3b of the cushioning material main body 3.

That is, in this embodiment, one magnet is placed in each of the nine housing spaces 3d so that the south poles 9a of the nine magnets 9 face the same direction, and the north poles 9b of the nine magnets 9 face the same direction. A magnet 9 is housed therein. Here, each magnet 9 may be fixed to the cushioning material body 3 with an adhesive or the like, or may not be fixed to the cushioning material body 3 only by being accommodated in each accommodation space 3d. Further, the shape of the magnet 9 is not limited to a columnar shape (or a plate shape). The magnet 9 may have a spherical shape or the like as long as it has a south pole 9a and a north pole 9b facing in opposite directions.

Note that it is desirable that the cushioning material main body 3 be configured so that the directions of the S pole 9a and the N pole 9b of the magnet 9 can be easily identified from the outside. For example, by making the color of the whole or a part of the first member 5 different from the color of the whole or a part of the second member 7, it becomes easy to identify the orientation of the south pole 9a and the north pole 9b. Of course, symbols such as letters, three-dimensional structures such as unevenness, etc. may be applied to the cushioning material main body 3 together with or instead of the color.

Note that when the distance from each magnet 9 to the first surface 3a of the cushioning material main body 3 and the distance from each magnet 9 to the second surface 3b of the cushioning material main body 3 become smaller, the cushioning material near the accommodation space 3d becomes smaller. The main body 3 becomes thinner, and the strength of the cushioning material 1 decreases. In other words, the cushioning material 1 cannot withstand repeated use. Furthermore, when the distance from each magnet 9 to the first surface 3a of the cushioning material main body 3 and the distance from each magnet 9 to the second surface 3b of the cushioning material main body 3 become large, the distance from each magnet 9 to the first surface 3a of the cushioning material main body 3 increases. The magnetic force acting on the outside becomes weaker.

Therefore, the distance to the first surface 3a of the cushioning material main body 3 and the distance to the second surface 3b of the cushioning material main body 3 of each magnet 9 are typically 1.0 mm or more and 3.0 mm or less. It is desirable to accommodate each accommodation space 3d so that the distance is 2.0 mm. That is, it is desirable that the thickness of the cushioning material main body 3 and the size of the accommodation space 3d be set within a range that can realize the above-mentioned distance. Thereby, high durability of the cushioning material 1 and appropriate fixing ability can be achieved at the same time.

Further, in the present embodiment, the cushioning material main body 3 is formed by pasting together the first member 5 and the second member 7 having similar structures. The cushioning material main body may be formed by bonding together a second member that is not included. At least, the cushioning material main body only needs to be provided with an appropriate accommodation space that can accommodate the magnet.

The buffer material 1 configured in this manner is typically used when transporting a plurality of plates made of ferromagnetic material. FIG. 3 is a perspective view schematically showing the cushioning material 1 fixed to the plate 11, and FIG. 4 is a side view schematically showing how the plurality of plates 11 are conveyed. The plate 11 is made of, for example, a ferromagnetic material represented by ferritic or martensitic stainless steel, and has a rectangular first surface 11a and a rectangular second surface opposite to the first surface 11a. It has two surfaces 11b.

However, the plate 11 may be any member as long as the buffer material 1 can be fixed by the magnetic force of the magnet 9. For example, the plate 11 may be made of other materials, or may have a non-rectangular first surface 11a and a second surface 11b. It may have. As shown in FIG. 3, when the first surface 3a or the second surface 3b of the cushioning material 1 is brought into contact with the first surface 11a or the second surface 11b of the plate 11, the cushioning material 1 It is fixed to the plate 11 by magnetic force. Since the cushioning material main body 3 is softer than the plate 11 to which it is fixed, which is the object to be transported, the plate 11 will not be damaged even if the cushioning material 1 is brought into contact with the plate 11.

When transporting a plurality of boards 11, the cushioning material 1 is used, for example, by being placed between two adjacent boards 11, as shown in FIG. In addition, in FIG. 4, the first surface 3a of the cushioning material 1 is in contact with the first surface 11a of the plate 11, and the second surface 3b of the cushioning material 1 is in contact with the second surface 11b of the plate 11. are doing. In this way, when the cushioning material 1 is arranged between the two plates 11, the positional relationship of the two plates 11 is maintained by the cushioning material 1 during transportation, so the positional relationship of the two plates 11 is Each plate 11 will not be damaged due to a change in the relationship during transportation.

As shown in FIG. 4, the plurality of boards 11 are placed on a trolley 13 with the cushioning material 1 placed between two adjacent boards 11. The trolley 13 is provided with a support frame 15 that is made of, for example, a ferromagnetic material and can support a plurality of plates 11. A cushioning material 1 is also arranged.

As a result, the plurality of plates 11 are fixed to the support frame 15 by the cushioning material 1, so that the plates 11 do not fall off from the carriage 13 during transportation on the carriage 13. Moreover, since the cushioning material main body 3 is softer than the plate 11, which is the object to be transported, it can appropriately absorb the impact generated during transport and prevent damage to the board 11.

FIG. 5 is a perspective view schematically showing a cutting device 2 in which the plate 11 described above is used. In addition, in FIG. 5, some elements constituting the cutting device 2 are expressed as functional blocks. Further, the X axis, Y axis, and Z axis used in the following description are perpendicular to each other.

The cutting device 2 includes a frame (not shown) that supports each element. This frame is covered with an exterior cover 4 made up of a plurality of plates 11, as shown in FIG. A space for cutting a plate-shaped workpiece 21 is formed inside the frame and exterior cover 4, and a cutting unit 6 is housed in this space. The cutting unit 6 is supported by a cutting unit moving mechanism (not shown), and is moved in a direction along the Y axis and a direction along the Z axis by this cutting unit moving mechanism.

The workpiece 21 is typically a disk-shaped wafer formed using a semiconductor such as silicon. For example, the surface of the workpiece 21 is divided into a plurality of regions by dividing lines (street) set in a grid pattern, and a device such as an IC (Integrated Circuit) is formed in each region. .

However, conditions such as the material, shape, structure, size, etc. of the workpiece 21 can be set arbitrarily. For example, a substrate formed using other semiconductors, ceramics, resins, metals, etc. may be used as the workpiece 21. Similarly, conditions such as device type, quantity, shape, structure, size, arrangement, etc. can also be set arbitrarily. Further, the workpiece 21 does not need to have a device formed thereon.

A chuck table 8 that can hold a workpiece 21 is arranged below the cutting unit 6. The chuck table 8 is connected to a chuck table rotation mechanism (not shown) including a motor, and is rotated by this chuck table rotation mechanism around a rotation axis that is generally parallel to the Z axis. Further, the chuck table 8 is supported by a chuck table moving mechanism (not shown), and is moved in the direction along the X-axis by this chuck table moving mechanism.

A part of the upper surface of the chuck table 8 is made of, for example, a porous material, and functions as a holding surface 8a that holds the workpiece 21. The holding surface 8a is generally parallel to the X-axis and the Y-axis, and is connected to a suction source (not shown) through a suction path (not shown) formed inside the chuck table 8 or the like. When a negative pressure from a suction source is applied with the workpiece 21 placed on the holding surface 8a, the workpiece 21 is sucked by the holding surface 8a.

A cassette support stand 10 is provided outside the frame and exterior cover 4. On the upper surface of the cassette support base 10, cassettes 12 are placed which can accommodate workpieces 21 at a plurality of different height positions (positions along the Z-axis). The height of the cassette support stand 10 is determined, for example, to transport the workpiece 21 from the cassette 12 to the space inside the exterior cover 4, or to transport the workpiece 21 from the space inside the exterior cover 4 to the cassette 12. When the cassette is transported, it is controlled by a cassette lifting mechanism (not shown).

A touch screen (display device, input device) 14 serving as a user interface is arranged on the front surface 4a of the exterior cover 4. Furthermore, an indicator light 16 is arranged on the upper surface 4b of the exterior cover 4. The touch screen 14 and indicator light 16 are connected to a controller (control unit) 18 along with the above-mentioned cutting unit 6, cutting unit movement mechanism, chuck table rotation mechanism, chuck table movement mechanism, cassette lifting mechanism, and the like.

The controller 18 is configured by a computer including, for example, a processing device and a storage device, and controls the plurality of elements described above in accordance with a series of steps necessary for cutting the workpiece 21. The processing device is typically a CPU (Central Processing Unit), which performs various processes necessary to control each element.

The storage device includes, for example, a main storage device such as a DRAM (Dynamic Random Access Memory), and an auxiliary storage device such as a hard disk drive or flash memory. The functions of the controller 18 are realized, for example, by the processing device operating in accordance with software stored in a storage device. However, the functions of the controller 18 may be realized only by hardware.

When the cutting device 2 configured in this way is shipped from the manufacturer to the customer, each of the plurality of plates 11 making up the exterior cover 4 is removed from the frame to prevent the exterior cover 4 from being damaged. and is transported separately from the frame etc. in a manner as shown in FIG. 4 using the cushioning material 1. The cushioning material 1 of this embodiment includes a cushioning material main body 3 having an accommodation space 3d inside and being softer than the plate 11 to which it is fixed, and a magnet 9 accommodated in the accommodation space 3d of the cushioning material main body 3. It is used while in contact with each plate 11.

Therefore, the complicated work of wrapping the plate 11, which is required when using a sheet-like bubble buffer material, becomes unnecessary, and the time required for conveyance is shortened. Furthermore, the cushioning material 1 is not easily damaged unlike sheet-shaped bubble cushioning materials and can be used repeatedly, so that as a result, the cost of materials for transportation can be kept low. Furthermore, by placing the cushioning material between the two plates made of ferromagnetic material, the positional relationship between the two plates 11 is maintained during transportation. Each plate 11 will not be damaged due to a change in the relationship during transportation.

Note that the present invention is not limited to the description of the embodiments described above, and can be implemented with various modifications. For example, in the above-described embodiment, the case where the plate 11 used as the exterior cover 4 in the cutting device 2 is the object to be transported (fixed destination) is described, but the cushioning material according to the present invention is made of ferromagnetic material. It can be used when transporting any board including the following.

For example, processing equipment such as a grinding device, polishing device, laser processing device, etc., a conveyance device that transports the workpiece 21 to each processing device, a tape pasting device that pastes tape or the like to the workpiece 21, and a The cushioning material according to the present invention can be similarly used when transporting a plate used in a device such as a tape expansion device that expands a pasted tape.

In addition, in the embodiment described above, as shown in FIGS. 3 and 4, five cushioning materials 1 are arranged between two plates 11, but between two plates 11, Any number of cushioning materials 1 may be arranged. For example, if the board 11 is small, four cushioning materials 1 may be placed corresponding to the four corners of the board 11. On the other hand, if the plates 11 are large, it is desirable that five or more cushioning materials 1 be arranged between the two plates 11.

In addition, the structures, methods, etc. of the embodiments and modifications described above can be modified and implemented as appropriate without departing from the scope of the objective of the present invention.

1: Cushioning material 3: Cushioning material main body 3a: First surface 3b: Second surface 3c: Side surface 3d: Accommodation space 5: First member 5a: First surface 5b: Second surface 5c: Side surface 5d: Recessed portion 7: No. 2 members 7a: First surface 7b: Second surface 7c: Side surface 7d: Recess 9: Magnet 9a: S pole 9b: N pole 11: Plate 11a: First surface 11b: Second surface 13: Cart 15: Frame 21: Workpiece 2: Cutting device 4: Exterior cover 4a: Front 4b: Top surface 6: Cutting unit 8: Chuck table 8a: Holding surface 10: Cassette support base 12: Cassette 14: Touch screen (display device, input device)
16: Indicator light 18: Controller (control unit)

Claims (4)

A cushioning material used when transporting a board,
a cushioning material main body that has one or more storage spaces inside and is softer than the board;
the one or more magnets accommodated in the one or more accommodation spaces of the cushioning material main body,
Cushioning material used in contact with the board. The plate is made of ferromagnetic material,
The cushioning material is used by being placed between the two plates, and is arranged between the two plates so as to maintain the positional relationship between the two plates when the two plates are transported. The cushioning material according to claim 1, wherein the cushioning material is fixed to the material by the magnetic force of the magnet. The cushioning material main body has a first surface that contacts one of the two plates when fixed to the two plates, and a second surface that contacts the other of the two plates. has
The magnet has a columnar, plate-like, or spherical shape with an S pole and a N pole, and the cushioning material body is arranged such that the S pole faces the first surface and the N pole faces the second surface. The cushioning material according to claim 2, which is accommodated in the accommodation space. 4. The cushioning material according to claim 3, wherein the cushioning material main body is configured so that the direction of the south pole or north pole of the magnet can be identified from the outside.

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