JP2017045893A - Conveyance case - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a conveyance case capable of preventing breakdown of a tabular object to be conveyed.SOLUTION: A conveyance case (2) for housing a tabular object (11) at the time of conveyance includes a box (4) consisting of a bottom plate (6), a ceiling plate (10) and a sidewall (8), and having a tabular object housing chamber (4a) formed internally, a pair of clamp plates (12, 14) provided, respectively, with contact surfaces (12a, 14a) coming into contact with the tabular object, and housed in the housing chamber while clamping the tabular object, and springs (16) installed on the surfaces (12b, 14b) of the clamp plates on the opposite side to the contact surface. When the clamp plates are housed in the housing chamber while clamping the tabular object, the springs press the clamp plates in an expandable/contractable state and protect the tabular object against impact.SELECTED DRAWING: Figure 1

Description

  The present invention relates to a transport case that accommodates a plate-shaped object to be transported during transport.

  In recent years, in order to realize a small and light device chip, there are increasing opportunities to thinly process a substrate made of a material such as a semiconductor, ceramic, or resin. For example, these substrates are thinned by grinding the back side after devices such as ICs are formed in each region defined by the division lines (streets) on the surface.

  The thinned substrate is processed by a cutting device, a laser processing device, or the like along the division line, and is divided into a plurality of device chips corresponding to each device (for example, see Patent Document 1). The divided device chip is incorporated into various electronic devices such as a mobile phone and a personal computer.

  When such substrates are transported collectively between processes, a cassette that can accommodate a plurality of substrates is usually used. On the other hand, there is a case where one or a small number of thinned substrates are desired to be carried as sales promotion materials. In this case, in order to prevent damage to the substrate due to impact during transportation, the substrate is sandwiched between cushioning materials such as sponges and accommodated in a transportation case.

JP 2002-359111 A

  However, even if the substrate is sandwiched between the buffer materials as described above, there is a problem that the impact during transportation cannot always be sufficiently reduced. For example, when transporting a substrate in which only the central portion is thinned and the thickness of the peripheral portion is maintained so as to maintain rigidity, the substrate is easily damaged at the boundary between the central portion and the peripheral portion, which is susceptible to stress. It was.

  This invention is made | formed in view of this problem, The place made into the objective is to provide the conveyance case which can prevent damage to a plate-shaped to-be-conveyed object.

  According to the present invention, there is a transport case for storing a plate-shaped object during transport, which is composed of a bottom plate, a ceiling plate, and a side wall, and a box body in which a storage chamber for storing the plate-shaped object is formed. Each having a contact surface in contact with an object, a pair of sandwiching plates housed in the housing chamber in a state of sandwiching a plate-like object, and a spring installed on a surface opposite to the contact surface of the sandwiching plate, When the holding plate in a state of holding the plate-like object is accommodated in the accommodation chamber, the plate-like object is protected from an impact by pressing the holding plate in a state where the spring can be expanded and contracted. A transport case is provided.

  The transport case according to the present invention includes a pair of sandwiching plates that sandwich the plate-like object to be transported and a spring that presses the sandwiching plate in a stretchable state, so that the impact during transportation can be mitigated by expansion and contraction of the spring. At the same time, the impact during conveyance can be distributed to the entire plate-like object by the sandwiching plate. That is, in the transport case according to the present invention, it is difficult to apply a strong local impact, and damage to the plate-like object can be prevented.

It is a disassembled perspective view which shows the structural example of a conveyance case typically. FIG. 2A is a partial cross-sectional side view schematically illustrating a transport case in which a transported object is accommodated, and FIG. 2B schematically illustrates the transport case in a state where an impact is applied. It is a partial cross section side view shown.

  Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is an exploded perspective view schematically showing a configuration example of a transport case according to the present embodiment. In addition, in FIG. 1, the plate-shaped to-be-conveyed object (plate-shaped object) accommodated in a conveyance case is shown collectively.

  As shown in FIG. 1, the transport case 2 includes a rectangular parallelepiped box 4 that houses a plate-shaped object (plate-shaped object) 11. The box 4 is connected to a substantially flat rectangular bottom plate 6, four side walls 8 fixed to the peripheral edge of the bottom plate 6, and one of the side walls 8 with a hinge (not shown) or the like, and can be opened and closed. And ceiling plate 10 functioning as a lid. The box 4 (the bottom plate 6, the side wall 8, and the ceiling plate 10) is formed of a material such as resin, fiber (paper), or metal.

  Inside the box 4, a storage chamber 4 a that can store the transported object 11 is formed. That is, the storage chamber 4 a corresponds to a region surrounded by the bottom plate 6, the side wall 8, and the ceiling plate 10 with the ceiling plate 10 closed. In addition, the insertion part 10a is provided in the front-end | tip part of the ceiling board 10, and the ceiling board 10 is maintained in the closed state by inserting this insertion part 10a in the storage chamber 4a.

  The transport case 2 further includes a pair of sandwiching plates 12 and 14 that sandwich the transported object 11. Each sandwiching plate 12, 14 has contact surfaces 12 a, 14 a that come into contact with the object to be transported 11. For example, the contact surface 12 a is brought into contact with the lower surface side (front surface side) of the object to be transported 11 to contact the contact surface 14 a. Is brought into contact with the upper surface side (back surface side) of the object 11 to be conveyed, so that the object 11 to be conveyed can be sandwiched.

  The pair of sandwiching plates 12 and 14 are formed in a size that can be accommodated in the accommodation chamber 4a. Specifically, the contours of the sandwiching plates 12 and 14 are slightly smaller than the contour of the storage chamber 4 a defined by the four side walls 8. The pair of sandwiching plates 12 and 14 are accommodated in the accommodation chamber 4a in a state where the transported object 11 is sandwiched.

  On the non-contact surfaces 12b and 14b opposite to the contact surfaces 12a and 14a of the sandwiching plates 12 and 14, springs 16 such as compression coil springs (push springs) are respectively installed. The length of the spring 16 (natural length) is such that each spring 16 has a bottom plate 6 or a ceiling in a state where the pair of sandwiching plates 12 and 14 sandwiching the object to be transported 11 are accommodated in the accommodating chamber 4a and the ceiling plate 10 is closed. The range of contact with the plate 10 is adjusted.

  Therefore, when the pair of sandwiching plates 12 and 14 sandwiching the object to be transported 11 are accommodated in the accommodating chamber 4a and the ceiling plate 10 is closed, the spring 16 provided on the sandwiching plate 12 is brought into contact with the bottom plate 6 to be contracted and sandwiched. The plate 12 is pressed from below. Further, the spring 16 provided on the sandwiching plate 14 contracts by contacting the ceiling plate 10 and presses the sandwiching plate 14 from above. As a result, the conveyed object 11 is held at a predetermined position in the transfer chamber 4a while being held between the pair of holding plates 12 and 14.

  In the present embodiment, a plurality of (four in the present embodiment) springs 16 are provided at corresponding positions of the sandwiching plates 12 and 14. In this case, the impact applied to the conveyed object 11 by the upper and lower corresponding springs 16 can be appropriately mitigated. However, conditions such as the number, size, arrangement, and spring constant of the springs 16 can be arbitrarily set and changed within a range in which the object to be transported 11 is held at a predetermined position and an impact can be appropriately mitigated.

  The transported object 11 is, for example, a disk-shaped wafer made of a semiconductor such as silicon, and includes a device region (center portion) 13 on the radial center side and an outer peripheral surplus region (peripheral portion) 15 surrounding the device region 13. It is divided. The device region 13 is further divided into a plurality of regions by division lines (streets) arranged in a grid pattern, and devices 17 such as IC and LSI are formed on the surface side (lower surface side) of each region. ing.

  The device region 13 is thinned by grinding the back surface side (upper surface side). On the other hand, the thickness of the outer peripheral surplus area 15 is maintained, and the rigidity of the conveyed object 11 is maintained. In addition, in this embodiment, although the to-be-conveyed object 11 in which only the center part was thinned and the thickness of the peripheral part was maintained is illustrated, the aspect of the to-be-conveyed object 11 has no restriction | limiting.

  For example, it is good also as the to-be-conveyed object 11 the semiconductor wafer which thinned the whole, the semiconductor wafer before thinning, etc. Moreover, the semiconductor wafer etc. which were supported by the cyclic | annular flame | frame via the adhesive tape can also be used as the to-be-conveyed object 11. FIG. There is no restriction | limiting also in the material of the to-be-conveyed object 11, a shape, etc. For example, a substrate made of a material such as ceramic, resin, or metal can be used as the transported object 11.

  Next, the state of the transport case 2 when transporting the transported object 11 will be described. FIG. 2A is a partial cross-sectional side view schematically showing the transport case 2 in a state in which the article 11 is accommodated, and FIG. 2B shows the transport case 2 in a state where an impact is applied. It is a partial section side view showing typically.

  When the transported object 11 is accommodated in the transport case 2, as described above, first, the contact surface 12 a of the sandwiching plate 12 is brought into contact with the lower surface side (front surface side) of the transported object 11, and The contact surface 14a is brought into contact with the upper surface side (back surface side) of the object 11 to be conveyed. Thereby, the conveyed object 11 is clamped by the pair of clamping plates 12 and 14.

  Next, the pair of sandwiching plates 12 and 14 that sandwich the object to be transported 11 are housed in the housing chamber 4a of the transport case 2, and the ceiling plate 10 is closed. As described above, the length (natural length) of the spring 16 is such that the pair of sandwiching plates 12 and 14 sandwiching the object to be transported 11 are accommodated in the accommodating chamber 4a and the ceiling plate 10 is closed, and each spring 16 Is adjusted to a range in contact with the bottom plate 6 or the ceiling plate 10.

  Therefore, when the pair of sandwiching plates 12 and 14 sandwiching the object to be conveyed 11 are accommodated in the accommodation chamber 4a and the ceiling plate 10 is closed, each spring 16 contracts in contact with the bottom plate 6 or the ceiling plate 10, and the sandwiching plate. 12 or the clamping plate 14 is pressed from below or above. As a result, the transported object 11 is held at a predetermined position where the gravity acting on each element and the restoring force of each spring 16 are balanced, as shown in FIG.

  For example, it is assumed that an impact is applied to the transport case 2 that houses the object 11 to be transported, and a downward force F as shown in FIG. In this case, the box 4 is moved downward by the force F, while the spring 16 on the clamping plate 14 side is contracted and the spring 16 on the clamping plate 12 side is expanded, so that an instantaneous force applied to the conveyed object 11 Is greatly reduced.

  Further, the transported object 11 is sandwiched between a pair of sandwiching plates 12 and 14, and the contact surface 12a and the contact surface 14a of the sandwiching plate 12 are in contact with the lower surface side and the upper surface side of the transported object 11, respectively. Therefore, the force transmitted from the box 4 via the spring 16 is distributed over the entire transported object 11. That is, no local force is applied to the workpiece 11.

  As described above, the transport case 2 according to the present embodiment includes a pair of sandwiching plates 12 and 14 that sandwich the plate-shaped transported object (plate-like object) 11 and a spring 16 that presses the sandwiching plate in a stretchable state. Therefore, the impact during transportation can be reduced by the expansion and contraction of the spring 16, and the impact during transportation can be distributed to the entire transported object 11 by the sandwiching plates 12 and 14. That is, in the transport case 2 according to the present embodiment, it is difficult to apply a strong local impact and damage to the transported object 11 can be prevented.

  In addition, this invention is not limited to description of the said embodiment, A various change can be implemented. For example, in the above embodiment, the spring 16 is installed on the pair of sandwiching plates 12 and 14 (specifically, the non-contact surfaces 12b and 14b), but the box 4 side (that is, the bottom plate 6 and the ceiling plate). 10), a spring 16 may be installed.

  In addition, when impact from the side becomes a problem, a cushioning material such as sponge may be disposed between the sandwiching plates 12, 14, the conveyed object 11, and the side wall 8. Further, a spring 16 can be installed between the sandwiching plates 12 and 14 and the side wall 8. In this case, for example, a wide gap is formed between the sandwiching plates 12 and 14 and the side wall 8, and the spring 16 is provided in this gap. Thereby, the impact from the side of the conveyance case 2 can be relieved significantly.

  In addition, the configurations, methods, and the like according to the above-described embodiments can be appropriately modified and implemented without departing from the scope of the object of the present invention.

2 Transport case 4 Box 4a Storage chamber 6 Bottom plate 8 Side wall 10 Ceiling plate 10a Insertion part 12, 14 Holding plate 12a, 14a Contact surface 12b, 14b Non-contact surface 16 Spring 11 Conveyed object (plate-like object)
13 Device area (central part)
15 Peripheral surplus area (periphery)
17 Device F force

Claims (1)

A transport case for storing a plate-shaped object during transport,
A box body including a bottom plate, a ceiling plate, and a side wall, in which a storage chamber for storing a plate-like object is formed;
A pair of clamping plates each having a contact surface in contact with the plate-like object, and being accommodated in the accommodation chamber in a state where the plate-like object is held in contact with the contact surface;
A spring installed on a surface opposite to the contact surface of the sandwich plate,
When the holding plate in a state of holding a plate-like object is accommodated in the accommodation chamber, the conveyance is characterized in that the plate-like object is protected from an impact by pressing the holding plate in a state where the spring can be expanded and contracted. Case.

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