JP6375577B2 - Substrate storage container - Google Patents

Description

  The present invention relates to a substrate storage container for storing and transporting a plurality of substrates such as semiconductor wafers, and particularly suitable for storing and transporting a substrate processed thinly or thickly and safely. The present invention relates to a substrate storage container equipped with a retainer.

  Such a substrate storage container is comprised from the container main body which has an opening, and the cover body which can close this opening of a container main body, for example as disclosed by the following patent documents 1-3.

  A plurality of substrates can be accommodated in the container body through the openings, and the substrates are arranged horizontally and spaced apart from each other. For this reason, the support part which supports each peripheral part of each board | substrate is provided in the inner wall surface of the both sides seen from the opening side of the container main body.

  In addition, a retainer is attached to the back surface of the lid (the surface facing the opening of the container body), and the retainer is supported in the front-rear direction of each substrate supported by the support portion when the lid is closed to the container body. The vibration at the time of movement or transportation is regulated to prevent damage to the substrate and the generation of contaminants such as abrasion powder.

  The retainer is generally made of plastic, has an engaging portion (for example, a V-shaped groove) that can be engaged with the front end portion (end portion on the lid side) of each substrate, and has a leaf spring-like structure or the like. Each substrate is elastically supported. For example, for a 300 mm wafer, the international standard defines the wafer support pitch as 10 mm, but since the deflection of a 775 micron thick wafer is usually less than 1 mm, the wide part has a V-shaped groove with a width of about 3 mm above and below. When the lid is closed by a retainer having a structure, the tip of the wafer is picked up and elastically held.

  However, after the electronic circuit is formed on the wafer surface, the back surface thereof is polished, and the thinned wafer may be stored and transported in a substrate storage container. In this case, for example, since a normal wafer thickness of 775 microns is thinly processed to 10 μm to 400 μm, which is less than half, the wafer has a large deflection due to its own weight, and a large warp occurs in polishing or various processing steps. Even when the retainer is placed and stored in a support groove such as a conventional retainer, the front end of each wafer cannot be picked up by the V-groove when closing the lid. As a result, the wafer may be damaged. To cope with this, the 300 mm substrate storage container can normally store 25 wafers. However, after placing 13 sheets of 20 mm pitch every other sheet, if the warpage / deflection is very large, remove the retainer. By using this, contact between wafers and contact with the retainer due to bending / vibration during conveyance was avoided. However, this operation not only reduces the storage and transfer efficiency, but also causes dust generation and breakage due to the wafers rattling inside the container during transfer, and the wafer position at the time of removal is not stable. Problems often arise in wafer removal and equipment loading. In addition, in the case of a wafer thicker than a normal wafer, there are cases where it cannot be accommodated in the V-groove.

Japanese Patent No. 5253410 JP 2004-247467 A JP 2005-294386 A

  The present invention has been made in view of such circumstances, and an object of the present invention is to prevent a substrate having a smaller thickness than usual from being damaged even if the substrate is bent by its own weight or warped in a processing step. By adopting a frame body that follows the structure of attaching the conventional retainer to the lid, it can be easily replaced with the retainer of the existing substrate storage container, and the substrate is thicker than the V-groove. Another object of the present invention is to provide a substrate storage container including a retainer capable of holding a substrate, which can be stably held.

The present invention is grasped by the following composition.
(1) The substrate storage container of the present invention is provided in a container main body for storing a substrate, a lid for closing the opening of the container main body, and a recess on the container main body side of the lid, and the opening side of the substrate A retainer that restricts the movement of the retainer, and the retainer includes a frame body that is detachably provided in the recess on the container body side of the lid body, and an elastic member that is detachably provided on the frame body. An elongated support portion, and the support portion protrudes from a base portion disposed between the frame body and the recess on the container body side of the lid body and a slit provided in the frame body. A protrusion extending in one direction from one surface of the base, and at least a part of the protrusion serves as a contact surface with the substrate, and the contact surface is a flat surface or a constant circular arc shape through the longitudinal direction of the support portion. And projecting from the frame Both longitudinal ends of the protruding portion that is characterized by being provided so as to reach both ends of the frame along the longitudinal direction of each said protrusion.
(2) In the substrate storage container of the present invention, in the configuration of (1), when the contact surface is formed in a cross-sectional arc shape through the longitudinal direction of the support portion, the protrusion is short of the support portion. The protrusion amount of the center part along a hand direction is formed so that it may become larger than the protrusion amount of the both ends along the transversal direction of the said support part.
(3) In the substrate storage container of the present invention, in the configuration of (1) or (2), at least a part of each of both ends in the longitudinal direction of the protruding portion has a notch for engaging with the frame body. It is provided.
(4) In the substrate storage container of the present invention, in any one of the constitutions (1) to (3), the base is a flat plate shape, and the support portion is a plurality of legs extending from the base to the other. And having a hollow section.
(5) In the substrate storage container of the present invention, in the configuration of (4), the pair of central leg portions extending from the central portion in the short direction of the base portion to the other of the plurality of leg portions has a cross-section of a square shape. It is characterized by being formed.
(6) In the substrate storage container according to the present invention, in the configuration of (4) or (5), the pair of legs of the plurality of legs extends to the other from both ends in the short direction of the base. It is characterized by that.
(7) The substrate storage container of the present invention is characterized in that, in any one of the constitutions (1) to (3), a surface of the base that faces the one surface is formed as a concavely curved surface. To do.
(8) The substrate storage container of the present invention is characterized in that, in any one of the constitutions (1) to (7), the contact surface is divided into a contact region and a non-contact region.
(9) In the substrate storage container of the present invention, in any one of the constitutions (1) to (8), the height of the support portion is set between the recess on the container body side of the lid and the support portion. A spacer for adjustment is arranged.

  By adopting the substrate storage container configured in this way, even if the substrate is bent by its own weight or warped in the processing process, the substrate can be held without being damaged, and the existing substrate storage container can be easily retained. It is replaceable with a retainer, and even a thick substrate can be stably held.

It is a disassembled perspective view which shows one Embodiment of the substrate storage container of this invention. It is the front view which looked at the cover provided in one Embodiment of the substrate storage container of this invention from the back side to which the retainer is attached. It is a fragmentary sectional view in the AA line of FIG. Fig.4 (a) is a fragmentary sectional view of another embodiment in the AA line of FIG. Here, the shape of the support portion is different from that in FIG. FIG. 4B shows only the support portion in FIG. It is a fragmentary sectional view of another embodiment in the AA line of FIG. Here, the shape of the support portion is different from that in FIGS. 3 and 4. Fig.6 (a) is a fragmentary sectional view of another embodiment in the AA line of FIG. Here, the shape of the support portion is different from those in FIGS. 4, 5, and 6. FIG. 6B shows an enlarged view of only the support portion in FIG. It is a fragmentary perspective view (reference drawing) of the substrate storage container (especially cover body) to which the retainer was attached. FIGS. 8A and 8B are drawings (reference diagrams) for explaining a phenomenon that occurs in the retainer when the lid is opened and closed in the substrate storage container including the retainer of FIG. 9 (a) and 9 (b) show an enlarged view of both ends along the longitudinal direction of the frame body and the support portion in FIG. It is a fragmentary perspective view which shows the positional relationship between the frame of a retainer and support part in one Embodiment of the board | substrate storage apparatus of this invention. FIGS. 11A to 11C are diagrams for explaining a phenomenon that occurs in the retainer when the lid is opened and closed in the substrate storage container according to the embodiment of the present invention. It is the elements on larger scale of the retainer which concerns on another embodiment which provided the grid | lattice-like pattern in the outer surface (contact surface) of the support part. It is a fragmentary sectional view of another embodiment in the AA line of FIG. The shape of the support portion is the same as that shown in FIG. 5 except that a groove is formed on the outer surface (contact surface) of the support portion. It is the disassembled perspective view which decomposed | disassembled the retainer from the cover body with which the board | substrate storage container which concerns on one Embodiment of this invention is equipped. It is characterized by the use of spacers. It is a perspective view of the assembly which assembled each component of FIG. FIG. 15 is a perspective view of the spacer shown in FIG. 14.

  DESCRIPTION OF EMBODIMENTS Hereinafter, embodiments for carrying out the present invention (hereinafter referred to as embodiments) will be described in detail with reference to the accompanying drawings. Note that the same number is assigned to the same element throughout the description of the embodiment.

FIG. 1 is an exploded perspective view showing an embodiment of a substrate storage container of the present invention.
As shown in FIG. 1, an embodiment 10 of a substrate storage container according to the present invention includes a so-called front open box type container body 11 having an opening 11A on the front surface, and a lid for closing the opening 11A of the container body 1. 12 and a retainer 21 (also referred to as “front retainer”) provided on the lid body 12. On the side wall of the container body 11, a pair of support members 14 (only one support member is shown in FIG. 1) for horizontally supporting the peripheral edge of the substrate W are formed at regular intervals in the vertical direction. The support member 14 is a shelf-like member that protrudes inward from the container main body 11, and the substrate W is horizontally supported by the support member 14 in a state where the opening of the container main body 11 is open. A retainer 21 is attached to the lid body 12, and the lid body 12 and the retainer 21 are integrally attached to or removed from the container body 11.

  FIG. 2 is a front view of a lid provided in an embodiment of the substrate storage container of the present invention as seen from the back side to which a retainer is attached. As shown in FIG. 2, the retainer 21 of the lid body 12 includes an outer frame body 22 formed of a rectangular frame, and a central frame disposed substantially at the center of the outer frame body 22 along the longitudinal direction of the outer frame body 22. The body 23 and the support part 24 hold | maintained along the longitudinal direction of this center frame 23 are provided. The outer frame body 22 is formed as a rectangular frame with a horizontal frame 22a arranged in parallel with each other and a vertical frame 22b arranged in parallel with each other. The central frame body 23 has column parts 23a arranged in parallel with each other and connecting parts 23b arranged in parallel with each other, and a slit (hollow part) 23d along the longitudinal direction is formed at the center thereof. The support portion 24 is covered with the central frame body 23 on both sides except for the central portion along the longitudinal direction, and is sandwiched between the lid body 12 and the central frame body 23. Further, as shown in FIG. 3 and the like, a protruding portion 24T that protrudes from the central frame 23 through the slit 23d is provided in the central portion along the longitudinal direction of the support portion 24. In a state where the lid 12 is closed by the container body 11, the protruding portion 24 </ b> T of the support portion 24 comes into contact with the front end portion (end portion on the lid side) around the substrate W. Thereby, the movement of the substrate W toward the opening side of the container body 11 is regulated by the support portion 24. For this reason, the protruding portion 24T of the support portion 24 is also referred to as a “(substrate) contact portion”. A detailed configuration of the support portion 24 such as the protruding portion 24T will be described later.

  The outer frame body 22 and the central frame body 23 as a frame body can be formed of, for example, various thermoplastic resins such as polybutylene terephthalate and polyether ether ketone, or various thermoplastic elastomers such as polyester and polyolefin. .

  As shown in FIG. 3, the support portion 24 is disposed on the back portion of the central frame body 23 and has a portion protruding forward from the slit 23 d of the central frame body 23. That is, the support portion 24 has a convex cross section and is flat or has a base portion 24a having a flat portion and a central portion of the base portion 24a in the longitudinal direction in one direction. And a projecting portion 24T that extends. The top surface or the outer surface of the projecting portion 24T (that is, the contact surface with the substrate W) is a smooth surface having no irregularities along its longitudinal direction. In FIG. 3, the top surface or the outer surface of the protrusion 24T (that is, the contact surface with the substrate W) is provided as a flat surface without a groove. The base portion 24a of the support portion 24 is a portion disposed on the back portion of the central frame body 23, and at least a part of the projecting portion 24T projects from the slit 23d of the central frame body 23. In this example, both the base 24a and the protrusion 24T of the support 24 are clogged (that is, not hollow). Thus, by forming the contact surface of the protrusion 24T with the substrate W as a flat surface without a groove through the longitudinal direction of the support portion, a thick substrate that cannot be held by the conventional V-groove can be stably held. it can.

  The shape of the support 24 described above is mainly based on FIG. 3, but in FIGS. 4 and 5, neither the base 24a nor the protrusion 24T is clogged, that is, it is hollow (thin). Show things. An advantage of making these hollow is that the support is soft and easy to handle. In addition, in the shape of the support portion 24 shown in FIGS. 4A and 4B, a plurality of leg portions are provided on the flat base portion 24a along the longitudinal direction of the support portion. Of a pair of symmetrically formed leg portions, a pair of leg portions (hereinafter also referred to as “central leg portions”) 24F provided near the center portion (in the short direction) of the support portion 24. (C) is a letter C in cross section. A pair of leg portions (ie, outer leg portions) provided on the outer side extend in the vertical direction (relative to the flat plate) from both ends in the short direction of the flat plate-like base portion 24a (in the direction opposite to the protruding portion 24T). ing. Although FIG. 5 also shows the support part 24 having two pairs of legs formed symmetrically, the angle of the pair of legs (center leg) forming the letter C is shown in FIG. And different. More specifically, the angle between the pair of central leg portions forming the C shape of the support portion 24 (obtained by extrusion molding) shown in FIG. 4 is about 90 °, whereas FIG. In addition, the angle between the pair of central leg portions forming the letter C of the support portion 24 (obtained by press molding) is much smaller than that in FIG. 6 (a) and 6 (b), the shape of the support portion is the same as the support portion shown in FIG. 3, but the base 24a and the protrusion 24T are not hollow, but face one surface of the base where the protrusion 24T is formed. The surface on the opposite side is a concave curved surface (curved surface). Thus, even if it is not hollow, the support part 24 can be finished softly as a whole by forming a concave curved surface or the like. Advantages of adopting press molding rather than extrusion molding in forming the support portion 24 are that finer processing is possible, material can be changed (change in hardness, etc.), and contact with the substrate W is possible. For example, the surface (the top surface or the outer surface of the protrusion 24T) can be further changed. The processing of the top surface or outer surface of the protrusion 24T that contacts the substrate W (that is, the contact surface with the substrate W) will be described in detail with reference to FIGS.

  The width K (FIG. 3) of the protruding portion 24T of the support portion 24 can be set as appropriate. However, the support portion 24 composed of the substrate W and the elastic member sticks, and the substrate W is opened when the lid is opened. The area of the top surface (that is, the contact surface) of the protrusion 24T can be made small so as not to be dragged out. This can be achieved by reducing the width K of the protrusion 24T of the support 24. For example, the width K of the protrusion 24T of the support 24 is not more than the width of the slit 23d, and may be 1/2 or less, preferably 1/3 or less of the width of the base 24a. In order to further reduce the area of the top surface of the protrusion 24T (ie, the contact surface with the substrate W), the top surface or the outer surface of the protrusion 24T in FIG. 4, FIG. 5, and FIG. Although it is a smooth surface without irregularities, the amount of protrusion at the center in the short direction of the protruding portion 24T is shorter than the flat surface shown in FIG. 3 (in the cross section along the line AA in FIG. 2). It is formed in a curved shape (that is, a circular arc shape) that is larger than both end portions. Thus, the contact area with the substrate W can be further reduced by increasing the amount of protrusion at the central portion rather than at both ends. Further, by making the contact surface of the protruding portion 24T with the substrate W into a circular arc shape having no groove through the longitudinal direction of the support portion, it is possible to stably hold a thick substrate that cannot be held by the conventional V-groove.

  The support portion 24 is formed of an elastic member such as a thermoplastic elastomer or a rubber material. That is, the support portion 24 is configured to include one selected from fluorine rubber, nitrile rubber, silicon rubber, chloroprene rubber, and ethylene propylene rubber. Alternatively, the support 24 is configured to include one selected from fluorine rubber sponge, chloroprene rubber sponge, silicon rubber sponge, nitrile rubber sponge, chloroprene rubber sponge, and ethylene propylene rubber sponge. Preferably, the support portion 24 is made of fluororubber that has little influence on the substrate and has high heat resistance and compression set. By configuring the support portion 24 with an elastic member, even if the substrate (particularly a thin substrate) W is bent or warped, the elastic force of the elastic member accompanying the closure of the lid body 2 to the container body 1 The front end of each substrate W can be pressed and held. As a result, damage and contamination due to rattling of the substrate W during transportation can be avoided, and the front end portion of each substrate W can be flexibly pressed regardless of the degree of bending or warping, and movement or vibration of the substrate W can be prevented. It becomes possible to regulate appropriately.

  Thus, although the support part 24 is formed of an elastic member, in the case of using a thermoplastic elastomer in view of the above-described functions and functions, the hardness measured by a durometer type E conforming to JIS K 6253 is 10 ° or more and 70 °. In the following, a foaming type of preferably 20 ° to 50 °, particularly about 35 ° is preferred. General rubber with low hardness is sticky due to a plasticizer or the like, and in some cases, the substrate is dragged out. In addition, even when rubber having a hardness measured by durometer type A conforming to JIS K 6253 and having a hardness of 30 ° or more and 90 ° or less is used, the same effect can be obtained by forming the inner hollow thin shape. Further, when 13 substrates W are stored, the holding force (pressing force) is preferably 3N or less per substrate, and when 25 substrates W are stored, 1.6 N per substrate. The following holding force (pressing force) is preferable. By adjusting the holding force in this way, the opening / closing device of the lid body 12 can be made to have a force (40N) or less when the lid body 12 is pressed against the container body 11, so that a trouble of stopping due to the specification over of the opening / closing device is avoided. As a result, the lid 12 can be automatically opened and closed without any trouble. Further, the holding force needs to be set to an appropriate value so that each substrate W does not rotate during transportation. In addition to the hardness of the material forming the support portion 24 described above, the holding force depends on the protrusion amount of the support portion 24. Can also be adjusted.

  The support portion 24 configured as described above can be detachably attached to a conventional retainer attachment portion. First, when assembling the frame body of the retainer 21, the central frame body 23 and the outer frame body 22 are assembled based on a conventional method. As for the support portion 24, at least a part of the protruding portion 24 </ b> T is protruded from the hollow portion 23 d (see FIG. 3) of the central frame body 23, and the base portion 24 a is disposed on the back portion of the central frame body 23. In order to attach the support part 24 to the conventional retainer attachment part, for example, the convex support part is pushed into the central frame 23, or a rib or the like that bites into the support part 24 in the central frame 23 is provided, When the dimensions vary, claw portions opposed to the central frame body 23 are formed, and the short support portions 24 are extended and fixed in the vertical direction or the horizontal direction by these claw portions.

  Hereinafter, a method for attaching the retainer 21 assembled in this manner to the lid 12 will be described. A concave portion 12c (FIG. 14) on the container main body side extending in the vertical direction (vertical direction in FIG. 1) is formed in the center of the back surface of the lid body 12. The retainer 21 is disposed in the concave portion 12 c such that the longitudinal direction of the support portion 24 is aligned with the vertical direction of the lid body 12. Further, according to FIG. 14, the retainer fixed to the pair of side wall surfaces 12 s in the vertical direction of the recess 12 c (one side wall surface is not shown) is arranged in parallel at substantially equal intervals along the vertical direction. Part 12d is attached. The support portion 24 is sandwiched and positioned between the central frame body 23 and the lid body 12 by attaching the outer frame body 22 for fixing the central frame body 23 to the concave portion 12c of the lid body 12. Yes. In addition, the recessed part 12c formed in the lid body 12 is a place where a retainer having a conventional configuration is disposed, and the retainer 21 according to the present invention can be disposed and attached as it is instead of the retainer having the conventional configuration. . As shown in FIG. 14, the retainer 21 is disposed so as to be embedded in the recess 12 c of the lid body 12, and its fixed portion (not shown) is fixed to the retainer formed on the side wall surface 12 s of the recess 12 c. It is fixed to the part 12d.

  Next, based on FIG.7 and FIG.8 as a reference figure, the relationship between the support part 24 and the frame bodies 22 and 23 of a retainer is demonstrated. According to FIG. 7, a gap C exists between one end in the longitudinal direction of the support portion 24 and one end in the longitudinal direction of the frame body (particularly, the central frame body 23) of the retainer 21. Although not shown in FIG. 7, the same applies to the other end in the longitudinal direction of the support portion 24. If the structure shown in FIG. 7 is adopted, the phenomenon shown in FIG. 8 may occur. 8A is a cross-sectional view showing a state before the support portion 24 and the substrate W are in contact with each other, and FIG. 8B is a state in which the substrate W is in contact with the support portion 24 with the lid closed. FIG. More specifically, when the lid is closed, the support portion 24 comes into contact with the substrate W and is deformed (that is, pushed) (see FIG. 8B). During use, the states of FIG. 8A and FIG. 8B are repeated, so that there is a possibility that dust will be generated by rubbing the frames 22 and 23 and the support portion 24. Further, when the structure shown in FIG. 7 is adopted, there is a possibility that the substrate cannot be held completely if a bent substrate enters the gap C by mistake.

  Therefore, the present inventors have improved the shape of both ends in the longitudinal direction of the support portion 24 as shown in FIGS. In FIG. 7, there is a gap C between the longitudinal ends (both ends) of the support 24 and the longitudinal ends (both ends) of the retainer frame (in particular, the central frame 23). In FIG. 10, there is no gap between the longitudinal end portions (both end portions) of the support portion 24 and the longitudinal end portions (both end portions) of the central frame 23 of the retainer, and the support portion 24 (in particular, A shape is adopted in which at least a part of the protruding portion 24T is placed on a longitudinal end portion (corresponding to the connecting portion 23b of the central frame) of the central frame 23 of the retainer. At this time, the length in the longitudinal direction of the support portion 24 (particularly, the protruding portion 24T) and the length in the longitudinal direction of the retainer frames 22 and 23 are substantially the same. However, the length in the longitudinal direction of the base portion 24 a of the support portion 24 is the same as that shown in FIG. 7, and does not necessarily match the length in the longitudinal direction of the retainer frame bodies 22 and 23. That is, the length in the longitudinal direction of the base portion 24a of the support portion 24 (in addition to that, the portion of the protruding portion 24T that does not protrude from the hollow portion 23d) can be formed shorter than the length in the longitudinal direction of the retainer frame bodies 22 and 23. . In this connection, as shown in FIG. 11, notches 24N for engaging with the frame bodies 22 and 23 are provided at both ends in the longitudinal direction of the support portion 24, and the protrusion 24T of the support portion is provided. The projecting portion 24T without the notch at both ends has a length that the portion protruding from the slit 23d reaches both ends in the longitudinal direction of the frame bodies 22, 23 (or both ends of the frame body along the longitudinal direction of the support portion). (That is, the portion of the protruding portion 24T protruding from the slit 23d) is placed on both ends of the frame. At this time, the length in the longitudinal direction of the portion of the support portion 24 including both ends mounted on both ends of the frame (the region having no notch or the portion of the protruding portion 24T protruding from the slit 23d) is the longitudinal direction of the frame (Or the lengths of both ends of the frame body along the longitudinal direction of the support portion). Hereinafter, advantages of employing the structure shown in FIGS. 9 and 10 will be described with reference to FIG.

  11A is a cross-sectional view showing a state before the support portion 24 and the substrate W are in contact with each other, and FIG. 11B is a state in which the substrate W is in contact with the support portion 24 with the lid closed. FIG. 11C is a cross-sectional view showing a state where the lid is opened and the contact state is eliminated. Since at least a part of the longitudinal end portion of the support portion 24 is placed on the retainer frames 22 and 23 due to the notch 24N, the support portion 24 comes into contact with the substrate W as shown in FIG. Even if it is pushed in, the longitudinal direction end portion (portion placed on the frame body) of the support portion 24 does not sink more than the longitudinal direction end portions of the frame bodies 22 and 23, and returns to the original state (FIG. 11C). ) In the area surrounded by a dotted line). Therefore, the frames 22 and 23 and the support portion 24 are not rubbed to generate dust. Such a unique shape of the end portion in the longitudinal direction of the support portion 24 is easier to form by using press molding than extrusion molding. Further, by adopting such a shape of the end portion of the support portion 24, a gap C (FIG. 7) does not occur between the retainer frame bodies 22, 23 and the support portion 24. This also solves the problem that the gap cannot be held in the gap C.

  Next, a structure for further reducing the contact area between the substrate W and the support portion 24 will be described with reference to FIGS. In FIG. 12, a lattice-like pattern is formed on the top surface (outer surface or contact surface with the substrate W) of the support portion 24 (particularly, the protrusion 24T). In FIG. 13, a groove G is formed along the longitudinal direction of the support portion 24 on the top surface (outer surface or contact surface with the substrate W) of the protrusion 24 </ b> T of the support portion 24. FIG. 13 can be said to be a modification of FIG. However, the groove provided in the protrusion 24T is not limited to this, and may have various shapes. In addition, it is conceivable that the top surface (outer surface or contact surface with the substrate W) of the projecting portion 24T is provided with a texture. These all help to reduce the contact area between the substrate W and the support portion 24. In this way, the contact surface of the protrusion 24T with the substrate W is divided into a contact area and a non-contact area.

  Next, the height adjustment of the support portion 24 will be described with reference to FIGS. A spacer (height adjustment component) 25 is disposed between the recess 12c of the lid 12 in which the retainer 21 is embedded and the retainer 21 (particularly, the support portion 24), and the support portion 24 is centered at a predetermined height. You may make it protrude from the frame 23. FIG. An example of the spacer 25 is shown in FIG. The spacer 25 has a cross-shaped flat base portion 25Aa and a pair of bent portions 25b formed by bending a pair of both ends of the cross in parallel with each other at a certain length substantially perpendicular to the base portion 25a, Have Since the notch N is formed in the pair of bent portions 25b in accordance with the shape of the retainer fixing portion 12d, it can be fixed to the retainer 21. Thereby, the support part 24 is sandwiched between the lid body 2 and the central frame body 23 together with the spacer 25 and can be positioned and arranged.

  As mentioned above, although this invention was demonstrated using embodiment, it cannot be overemphasized that the technical scope of this invention is not limited to the range as described in the said embodiment. It will be apparent to those skilled in the art that various modifications or improvements can be added to the above-described embodiments. Further, it is apparent from the description of the scope of claims that embodiments with such changes or improvements can also be included in the technical scope of the present invention.

DESCRIPTION OF SYMBOLS 10 Substrate storage container 11 Container main body 11A Opening part 14 Support member 12 Cover body 12c Concave part 22 container main body side Outer frame body 23 Central frame body 23d Hollow part (slit)
24 support part 24a base part 24T protrusion part 24F leg part 24F (c) center leg part 25 spacer W substrate

Claims (9)

A container body for storing a substrate;
A lid for closing the opening of the container body;
A retainer that is provided in a recess on the container body side of the lid and restricts movement of the substrate to the opening;
A substrate storage container comprising:
The retainer includes a frame body that is detachably provided in a recess on the container body side of the lid body, and an elongated support portion that is detachably provided on the frame body and is made of an elastic member.
The support portion protrudes in one direction from one surface of the base portion so as to protrude from a base portion disposed between the frame body and the recess on the container body side of the lid body, and a slit provided in the frame body. And comprising
At least a part of the protrusion becomes a contact surface with the substrate;
The contact surface is formed in a certain shape having a flat surface or a circular arc shape through the longitudinal direction of the support portion; and
A substrate storage container, wherein both ends in the longitudinal direction of the projecting portion projecting from the frame body are provided so as to reach both ends of the frame body along the longitudinal direction of the projecting portion.   When the contact surface is formed in a circular arc shape through the longitudinal direction of the support portion, the protrusion portion has a protrusion amount at the center portion along the short direction of the support portion. The substrate storage container according to claim 1, wherein the substrate storage container is formed so as to be larger than a protruding amount at both ends along the line.   3. The substrate storage container according to claim 1, wherein a notch for engaging with the frame body is provided in at least a part of each of both ends in the longitudinal direction of the protruding portion. The base is planar, and
The substrate storage container according to any one of claims 1 to 3, wherein the support portion includes a plurality of legs extending from the base portion to the other and is formed to have a hollow cross section.   5. The substrate storage container according to claim 4, wherein, of the plurality of legs, a pair of center legs extending from the center in the short direction of the base to the other are formed in a cross-sectional C shape.   6. The substrate storage container according to claim 4, wherein a pair of legs of each of the plurality of legs extends to the other from both ends of the base in the short direction.   The board | substrate storage container as described in any one of Claims 1-3 in which the surface facing the said one surface in the said base is formed as a surface curved in a concave shape.   The substrate storage container according to claim 1, wherein the contact surface is divided into a contact area and a non-contact area.   The board | substrate as described in any one of Claims 1-8 by which the spacer for adjusting the height of the said support part is arrange | positioned between the recessed part by the side of the container main body of the said cover body, and the said support part. Storage container.

Images