JP2024014030A5 - - Google Patents

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Publication number
JP2024014030A5
JP2024014030A5 JP2022116574A JP2022116574A JP2024014030A5 JP 2024014030 A5 JP2024014030 A5 JP 2024014030A5 JP 2022116574 A JP2022116574 A JP 2022116574A JP 2022116574 A JP2022116574 A JP 2022116574A JP 2024014030 A5 JP2024014030 A5 JP 2024014030A5
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JP
Japan
Prior art keywords
mark
light
detection device
detection system
illumination
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Withdrawn
Application number
JP2022116574A
Other languages
English (en)
Japanese (ja)
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JP2024014030A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022116574A priority Critical patent/JP2024014030A/ja
Priority claimed from JP2022116574A external-priority patent/JP2024014030A/ja
Priority to TW112125384A priority patent/TWI912618B/zh
Priority to US18/350,067 priority patent/US20240027921A1/en
Priority to KR1020230093554A priority patent/KR20240013060A/ko
Publication of JP2024014030A publication Critical patent/JP2024014030A/ja
Publication of JP2024014030A5 publication Critical patent/JP2024014030A5/ja
Withdrawn legal-status Critical Current

Links

JP2022116574A 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法 Withdrawn JP2024014030A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022116574A JP2024014030A (ja) 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法
TW112125384A TWI912618B (zh) 2022-07-21 2023-07-07 檢測裝置、微影蝕刻設備及物品製造方法
US18/350,067 US20240027921A1 (en) 2022-07-21 2023-07-11 Detection device, lithography apparatus, and article manufacturing method
KR1020230093554A KR20240013060A (ko) 2022-07-21 2023-07-19 검출 장치, 리소그래피 장치 및 물품 제조 방법

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022116574A JP2024014030A (ja) 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法

Publications (2)

Publication Number Publication Date
JP2024014030A JP2024014030A (ja) 2024-02-01
JP2024014030A5 true JP2024014030A5 (https=) 2025-07-16

Family

ID=89577325

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022116574A Withdrawn JP2024014030A (ja) 2022-07-21 2022-07-21 検出装置、リソグラフィー装置および物品製造方法

Country Status (4)

Country Link
US (1) US20240027921A1 (https=)
JP (1) JP2024014030A (https=)
KR (1) KR20240013060A (https=)
TW (1) TWI912618B (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024014031A (ja) * 2022-07-21 2024-02-01 キヤノン株式会社 検出装置、リソグラフィー装置および物品製造方法

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003092246A (ja) * 2001-09-17 2003-03-28 Canon Inc アライメントマーク及びアライメント装置とその方法、及び露光装置、デバイスの製造方法
JP2006023221A (ja) * 2004-07-09 2006-01-26 Tokyo Seimitsu Co Ltd 外観検査装置及び投影方法
JP5713961B2 (ja) * 2011-06-21 2015-05-07 キヤノン株式会社 位置検出装置、インプリント装置及び位置検出方法
JP5706861B2 (ja) * 2011-10-21 2015-04-22 キヤノン株式会社 検出器、検出方法、インプリント装置及び物品製造方法
JP6685821B2 (ja) * 2016-04-25 2020-04-22 キヤノン株式会社 計測装置、インプリント装置、物品の製造方法、光量決定方法、及び、光量調整方法
CN118456729A (zh) * 2017-05-25 2024-08-09 奇跃公司 双面压印
KR102648880B1 (ko) * 2017-11-07 2024-03-15 에이에스엠엘 네델란즈 비.브이. 관심 특성을 결정하는 계측 장치 및 방법
JP7500258B2 (ja) * 2020-04-10 2024-06-17 キヤノン株式会社 検出装置、リソグラフィ装置、物品の製造方法、及び検出方法
US11604149B2 (en) * 2020-04-23 2023-03-14 Kla Corporation Metrology methods and optical schemes for measurement of misregistration by using hatched target designs
US11346657B2 (en) * 2020-05-22 2022-05-31 Kla Corporation Measurement modes for overlay
JP7510280B2 (ja) * 2020-06-02 2024-07-03 キヤノン株式会社 検出器、インプリント装置および物品製造方法

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