JP2024002874A5 - - Google Patents

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Publication number
JP2024002874A5
JP2024002874A5 JP2022173236A JP2022173236A JP2024002874A5 JP 2024002874 A5 JP2024002874 A5 JP 2024002874A5 JP 2022173236 A JP2022173236 A JP 2022173236A JP 2022173236 A JP2022173236 A JP 2022173236A JP 2024002874 A5 JP2024002874 A5 JP 2024002874A5
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JP
Japan
Prior art keywords
exposure
optical system
mirror
image
light
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JP2022173236A
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English (en)
Japanese (ja)
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JP2024002874A (ja
JP7854919B2 (ja
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Priority claimed from JP2022102070A external-priority patent/JP7169480B1/ja
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Priority to JP2022173236A priority Critical patent/JP7854919B2/ja
Publication of JP2024002874A publication Critical patent/JP2024002874A/ja
Publication of JP2024002874A5 publication Critical patent/JP2024002874A5/ja
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JP2022173236A 2022-10-28 露光装置用露光ヘッドおよび露光装置 Active JP7854919B2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022173236A JP7854919B2 (ja) 2022-10-28 露光装置用露光ヘッドおよび露光装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022102070A JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置
JP2022173236A JP7854919B2 (ja) 2022-10-28 露光装置用露光ヘッドおよび露光装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022102070A Division JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置

Publications (3)

Publication Number Publication Date
JP2024002874A JP2024002874A (ja) 2024-01-11
JP2024002874A5 true JP2024002874A5 (https=) 2025-05-23
JP7854919B2 JP7854919B2 (ja) 2026-05-07

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