JP2024002874A5 - - Google Patents

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Publication number
JP2024002874A5
JP2024002874A5 JP2022173236A JP2022173236A JP2024002874A5 JP 2024002874 A5 JP2024002874 A5 JP 2024002874A5 JP 2022173236 A JP2022173236 A JP 2022173236A JP 2022173236 A JP2022173236 A JP 2022173236A JP 2024002874 A5 JP2024002874 A5 JP 2024002874A5
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JP
Japan
Prior art keywords
exposure
optical system
mirror
image
light
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022173236A
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English (en)
Japanese (ja)
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JP2024002874A (ja
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Priority claimed from JP2022102070A external-priority patent/JP7169480B1/ja
Application filed filed Critical
Priority to JP2022173236A priority Critical patent/JP2024002874A/ja
Publication of JP2024002874A publication Critical patent/JP2024002874A/ja
Publication of JP2024002874A5 publication Critical patent/JP2024002874A5/ja
Pending legal-status Critical Current

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JP2022173236A 2022-06-24 2022-10-28 露光装置用露光ヘッドおよび露光装置 Pending JP2024002874A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2022173236A JP2024002874A (ja) 2022-06-24 2022-10-28 露光装置用露光ヘッドおよび露光装置

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2022102070A JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置
JP2022173236A JP2024002874A (ja) 2022-06-24 2022-10-28 露光装置用露光ヘッドおよび露光装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP2022102070A Division JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置

Publications (2)

Publication Number Publication Date
JP2024002874A JP2024002874A (ja) 2024-01-11
JP2024002874A5 true JP2024002874A5 (https=) 2025-05-23

Family

ID=83995288

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022102070A Active JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置
JP2022173236A Pending JP2024002874A (ja) 2022-06-24 2022-10-28 露光装置用露光ヘッドおよび露光装置

Family Applications Before (1)

Application Number Title Priority Date Filing Date
JP2022102070A Active JP7169480B1 (ja) 2022-06-24 2022-06-24 露光装置用露光ヘッドおよび露光装置

Country Status (1)

Country Link
JP (2) JP7169480B1 (https=)

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP3285214B2 (ja) * 1991-03-22 2002-05-27 株式会社日立製作所 レーザ加工用光学装置
US7061586B2 (en) * 2004-03-02 2006-06-13 Asml Netherlands Bv Lithographic apparatus and device manufacturing method
JP2006330574A (ja) * 2005-05-30 2006-12-07 Fujifilm Holdings Corp 投影ヘッドピント位置測定方法および露光方法
JP2009087995A (ja) * 2007-09-27 2009-04-23 Hitachi Via Mechanics Ltd マスクレス露光装置
JP5881314B2 (ja) * 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置
JP5881313B2 (ja) * 2011-05-30 2016-03-09 株式会社オーク製作所 露光装置
JP2014092707A (ja) * 2012-11-05 2014-05-19 Orc Manufacturing Co Ltd 露光装置
JP6590638B2 (ja) * 2015-10-29 2019-10-16 株式会社オーク製作所 露光装置用露光ヘッドおよび露光装置用投影光学系
JP2021096300A (ja) * 2019-12-13 2021-06-24 株式会社ブイ・テクノロジー 露光装置

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