JP2024002874A5 - - Google Patents
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- JP2024002874A5 JP2024002874A5 JP2022173236A JP2022173236A JP2024002874A5 JP 2024002874 A5 JP2024002874 A5 JP 2024002874A5 JP 2022173236 A JP2022173236 A JP 2022173236A JP 2022173236 A JP2022173236 A JP 2022173236A JP 2024002874 A5 JP2024002874 A5 JP 2024002874A5
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- JP
- Japan
- Prior art keywords
- exposure
- optical system
- mirror
- image
- light
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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- 230000003287 optical effect Effects 0.000 claims description 25
- 238000003384 imaging method Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022173236A JP2024002874A (ja) | 2022-06-24 | 2022-10-28 | 露光装置用露光ヘッドおよび露光装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022102070A JP7169480B1 (ja) | 2022-06-24 | 2022-06-24 | 露光装置用露光ヘッドおよび露光装置 |
JP2022173236A JP2024002874A (ja) | 2022-06-24 | 2022-10-28 | 露光装置用露光ヘッドおよび露光装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022102070A Division JP7169480B1 (ja) | 2022-06-24 | 2022-06-24 | 露光装置用露光ヘッドおよび露光装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2024002874A JP2024002874A (ja) | 2024-01-11 |
JP2024002874A5 true JP2024002874A5 (enrdf_load_stackoverflow) | 2025-05-23 |
Family
ID=83995288
Family Applications (2)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022102070A Active JP7169480B1 (ja) | 2022-06-24 | 2022-06-24 | 露光装置用露光ヘッドおよび露光装置 |
JP2022173236A Pending JP2024002874A (ja) | 2022-06-24 | 2022-10-28 | 露光装置用露光ヘッドおよび露光装置 |
Family Applications Before (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022102070A Active JP7169480B1 (ja) | 2022-06-24 | 2022-06-24 | 露光装置用露光ヘッドおよび露光装置 |
Country Status (1)
Country | Link |
---|---|
JP (2) | JP7169480B1 (enrdf_load_stackoverflow) |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP3285214B2 (ja) * | 1991-03-22 | 2002-05-27 | 株式会社日立製作所 | レーザ加工用光学装置 |
JP2009087995A (ja) * | 2007-09-27 | 2009-04-23 | Hitachi Via Mechanics Ltd | マスクレス露光装置 |
JP5881313B2 (ja) | 2011-05-30 | 2016-03-09 | 株式会社オーク製作所 | 露光装置 |
JP5881314B2 (ja) | 2011-05-30 | 2016-03-09 | 株式会社オーク製作所 | 露光装置 |
JP2014092707A (ja) * | 2012-11-05 | 2014-05-19 | Orc Manufacturing Co Ltd | 露光装置 |
JP6590638B2 (ja) * | 2015-10-29 | 2019-10-16 | 株式会社オーク製作所 | 露光装置用露光ヘッドおよび露光装置用投影光学系 |
JP2021096300A (ja) * | 2019-12-13 | 2021-06-24 | 株式会社ブイ・テクノロジー | 露光装置 |
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2022
- 2022-06-24 JP JP2022102070A patent/JP7169480B1/ja active Active
- 2022-10-28 JP JP2022173236A patent/JP2024002874A/ja active Pending