JP2024001524A - laser diode device - Google Patents

Abstract

To provide a laser diode device capable of reducing cost.SOLUTION: Mirrors 51 and 52 that bend a travelling direction of a laser beam by 90 degrees are disposed between a first laser module LM1 and a second laser module LM2. The mirrors 51 and 52 have a shape that includes a cut-off surface obtained by cutting off one corner of a rectangular solid, the one corner including one of the multiple sides of the rectangular solid that is in parallel with a height direction, from an upper end to a lower end in the height direction. A reflecting surface that reflects the laser beam and the cut-off surface form an angle of less than or equal to 45 degrees. The mirrors 51 and 52 are disposed proximate to each other to an extent that the mirror 51 does not interfere with the laser beam entering, and reflected by, the mirror 52 and the mirror 52 does not interfere with the laser beam entering, and reflected by, the mirror 51.SELECTED DRAWING: Figure 1

Description

The present invention relates to a laser diode device using a plurality of laser beam generation sources.

As described in Patent Document 1, a laser diode device used as an excitation light source for a laser oscillator includes a plurality of laser diodes as a laser beam generation source. A laser diode device is configured to combine laser beams emitted from a plurality of laser diodes and emit a high-power combined laser beam.

International Publication No. 2020/203326

There is a need to reduce the cost of laser diode devices.

One aspect of the one or more embodiments includes a first laser module that emits a laser beam in a first direction, and a laser beam directed toward the first laser module in a direction opposite to the first direction. and a second laser module that emits light in a second direction.

In the above laser diode device, a first laser beam source group includes a plurality of laser beam sources arranged at different positions in the height direction, and a laser beam emitted from the first laser beam source group. a first mirror group made of a plurality of mirrors that bends the traveling direction of the laser beam by 90 degrees and causes the first stacked laser beam stacked in the height direction to travel in the first direction.

In the above laser diode device, the second laser module includes a second laser beam generation source group including a plurality of laser beam generation sources arranged such that positions in the height direction are different from each other; A second laminated laser beam formed of a plurality of mirrors bends the traveling direction of the laser beam emitted from the laser beam generation source group by 90 degrees and causes the second laminated laser beam, which is laminated in the height direction, to travel in the second direction. 2 mirror groups.

The above laser diode device is arranged between the first laser module and the second laser module, and the first laminated laser beam is emitted from the first laser module in the first direction. is incident on the first laminated laser beam, a third mirror bends the traveling direction of the first laminated laser beam by 90 degrees, and causes the first laminated laser beam to travel in a third direction, and between the first laser module and the second laser module. The second laminated laser beam emitted from the second laser module in the second direction is incident, the traveling direction of the second laminated laser beam is bent by 90 degrees, and the third laminated laser beam is It further includes a fourth mirror that moves in the direction.

In the above laser diode device, the third mirror is a mirror formed by cutting off one corner of the plurality of sides of the rectangular parallelepiped that includes the side parallel to the height direction from the upper end to the lower end in the height direction. The fourth mirror has a shape including a cut-off surface, and the first reflective surface that reflects the first laminated laser beam and the first cut-off surface have an angle of 45 degrees or less, and the fourth mirror , has a shape including a second cut-off surface obtained by cutting off one corner of the plurality of sides of the rectangular parallelepiped including the side parallel to the height direction from the upper end to the lower end in the height direction, The second reflective surface that reflects the two laminated laser beams and the second cut-off surface have an angle of 45 degrees or less.

In the above laser diode device, the third mirror and the fourth mirror do not interfere with the second laminated laser beam that the third mirror enters and reflects on the fourth mirror, The fourth mirrors are arranged close to each other within a range that does not interfere with the first laminated laser beam that is incident on and reflected by the third mirror.

According to one aspect of one or more embodiments, the first and second mirrors can be placed closer to each other than if the first and second mirrors were rectangular in shape. Therefore, it is possible to reduce the cost of the laser diode device.

According to one or more embodiments, the cost of laser diode devices can be reduced.

FIG. 1 is a top view of a laser diode device 100 in accordance with one or more embodiments. FIG. 2 is a conceptual perspective view showing the fast axis and slow axis of the laser beam emitted from the chip-on submount 1 in FIG. FIG. 3 is a perspective view showing the first laser module LM1 and the second laser module LM2 in FIG. 1. FIG. 4 is a perspective view showing the three-dimensional shape of the mirrors 51, 52, 61, and 62 in FIG. FIG. 5 is a plan view partially showing a laser diode device 100c of a comparative example. FIG. 6 is a plan view showing a first arrangement example of rectangular parallelepiped mirrors 5L and 5R. FIG. 7 is a plan view showing a second arrangement example of rectangular parallelepiped mirrors 5L and 5R. FIG. 8 is a plan view showing a third arrangement example of rectangular parallelepiped mirrors 5L and 5R. FIG. 9 is a plan view showing a first arrangement example of mirrors 51 and 52 in which one corner of a rectangular parallelepiped is cut off. FIG. 10 is a plan view showing a second arrangement example of mirrors 51 and 52 in which one corner of a rectangular parallelepiped is cut off. FIG. 11 is a plan view showing mirrors 51, 52, 61, and 62 in the laser diode device 100 of FIG. FIG. 12 is a plan view showing mirrors 510, 520, 610, 620 which are modified examples of mirrors 51, 52, 61, 62. FIG. 13 is a perspective view showing mirrors 51', 52', 61', 62' which are other modified examples of the mirrors 51, 52, 61, 62.

A laser diode device according to one or more embodiments includes: a first laser module that emits a laser beam in a first direction; and a first laser module that emits a laser beam in a direction opposite to the first direction. and a second laser module that emits light in a second direction, which is a direction toward.

In the laser diode device according to one or more embodiments, a first laser beam source group including a plurality of laser beam sources arranged at different positions in the height direction, and the first laser a first laminated laser beam made of a plurality of mirrors that bends the traveling direction of the laser beam emitted from the beam generation source group by 90 degrees and causes the first laminated laser beam, which is laminated in the height direction, to travel in the first direction; including a group of mirrors.

In the laser diode device according to one or more embodiments, the second laser module includes a second laser beam generating source including a plurality of laser beam generating sources arranged such that positions in the height direction are different from each other. a second laminated laser beam that is stacked in the height direction by bending the traveling direction of the laser beam emitted from the source group and the second laser beam generation source group by 90 degrees and traveling in the second direction; and a second mirror group consisting of a plurality of mirrors.

The laser diode device according to one or more embodiments is arranged between the first laser module and the second laser module, and is emitted from the first laser module in the first direction. a third mirror into which the first laminated laser beam is incident, bends the traveling direction of the first laminated laser beam by 90 degrees and causes the first laminated laser beam to travel in a third direction; the first laser module; and the second mirror. The second laminated laser beam emitted from the second laser module in the second direction is incident, and the traveling direction of the second laminated laser beam is set at 90 degrees. It further includes a fourth mirror that is bent and moved in the third direction.

In the laser diode device according to one or more embodiments, the third mirror has one corner including a side parallel to the height direction of the plurality of sides of the rectangular parallelepiped as an upper end in the height direction. The first reflective surface that reflects the first laminated laser beam and the first cut-off surface form an angle of 45 degrees or less. In the laser diode device according to one or more embodiments, the fourth mirror has one corner including a side parallel to the height direction of the plurality of sides of the rectangular parallelepiped as an upper end in the height direction. The second reflective surface that reflects the second laminated laser beam and the second cut-off surface have an angle of 45 degrees or less.

In the laser diode device according to one or more embodiments, the third mirror and the fourth mirror are formed in the second laminated layer where the third mirror is incident on and reflected by the fourth mirror. They are arranged close to each other within a range that does not interfere with the laser beam and the fourth mirror does not interfere with the first laminated laser beam that is incident on and reflected by the third mirror.

Hereinafter, laser diode devices according to one or more embodiments will be specifically described with reference to the accompanying drawings. FIG. 1 is a top view of a laser diode device 100 in accordance with one or more embodiments. Laser diode device 100 is used as an excitation light source for a laser oscillator. An example of the laser oscillator is a fiber laser oscillator.

In FIG. 1, a first laser module LM1 and a second laser module LM2 are arranged on a water-cooled plate 50. As an example, the water cooling plate 50 has a structure in which copper pipes 501 and 502, which serve as waterways through which cooling water flows, are sandwiched between two aluminum plates. Each base 30 of the first laser module LM1 and the second laser module LM2 is fixed to the water cooling plate 50 with four bolts 40. The base 30 is formed of a copper plate, for example. The water channel of the water cooling plate 50 may be formed by cutting.

The first laser module LM1 and the second laser module LM2 have the same configuration. The first laser module LM1 and the second laser module LM2 are two laser modules having the same configuration and arranged facing each other. The first laser module LM1 and the second laser module LM2 include nine chip-on submounts (hereinafter referred to as COS) 1 arranged in the horizontal direction on the upper side of FIG. It has nine COS1s arranged in . The nine arrays of COS1 are just an example, and the number of arrays is not limited to nine. The number of COSs 1 arranged on the upper side may be different from the number of COSs 1 arranged on the lower side.

FIG. 2 is a conceptual perspective view showing the fast axis and slow axis of the laser beam emitted from the COS 1 in FIG. As shown in FIG. 2, the COS 1 has a structure in which a laser diode 12 is placed on a submount 11. In FIG. 2, illustrations of electrodes, wiring, etc. are omitted. Laser diode 12 is a single emitter diode. The COS 1 emits a laser beam from the front end face of the laser diode 12 in FIG. 2, as shown by a dashed line. In the laser beam of diverging light emitted from the laser diode 12, the direction in which the divergence angle of light is large is called a fast axis, and the direction in which the divergence angle is small is called a slow axis.

Returning to FIG. 1, a fast-axis collimating lens 2 is arranged on the end face of each COS 1. As shown in FIG. 2, the exit surface of the fast-axis collimating lens 2 has a curved surface that collimates the laser beam in the fast-axis direction.

The first laser module LM1 and the second laser module LM2 have nine slow-axis collimating lenses 3 arranged in the left-right direction and nine slow-axis collimating lenses 3 arranged in the left-right direction, corresponding to the nine COSs 1 on the upper side. A mirror 4 is provided. The first laser module LM1 and the second laser module LM2 include nine slow-axis collimating lenses 3 arranged in the left-right direction, and nine slow-axis collimating lenses 3 arranged in the left-right direction, corresponding to the nine COSs 1 on the lower side. A mirror 4 is provided.

FIG. 3 is a perspective view showing the first laser module LM1 and the second laser module LM2 in FIG. 1. The 18 COSs 1, the fast-axis collimating lens 2, the slow-axis collimating lens 3, and the mirror 4 in the first laser module LM1 and the second laser module LM2 are distinguished using subscripts as follows. As shown in FIG. 3, the 18 COS1s are COS1 ₁ to 1 ₁₈ , the 18 fast-axis collimating lenses 2 are fast-axis collimating lenses 2 ₁ to 2 ₁₈ , and the 18 slow-axis collimating lenses 3 are slow-axis collimating lenses. 3 ₁ to 3 ₁₈ , the 18 mirrors 4 are referred to as mirrors 4 ₁ to 4 ₁₈ .

The first arrangement surface of the COSs _{1 1} to 1 ₉ on the base 30 is formed in a step-like manner such that it becomes lower in the order from the arrangement surface of the COS _{1 1} to the arrangement surface of the COS 1 ₉ . Similarly, the second arrangement surface of the COS 1 ₁₀ to 1 ₁₈ on the base 30 is formed in a step-like manner so that it becomes lower in order from the arrangement surface of the COS 1 ₁₀ to the arrangement surface of the COS 1 ₁₈ . The opposing arrangement surfaces of the first arrangement surface of the COSs _{1 1} to 1 ₉ and the second arrangement surface of the COSs _{1 10} to 1 ₁₈ are at the same height.

The slow-axis collimating lenses 3 ₁ to 3 ₉ , the mirrors 4 ₁ to 4 ₉ , the slow-axis collimating lenses 3 ₁₀ to 3 ₁₈ , and the mirrors 4 ₁₀ to 4 ₁₈ in the base 30 are arranged on the third arrangement surface. The third arrangement plane is arranged in the order from the arrangement plane of slow-axis collimating lenses 3 ₁ and 3 ₁₀ and mirrors 4 ₁ and 4 ₁₀ to the arrangement plane of slow-axis collimating lenses 3 ₉ and 3 ₁₈ and mirrors 4 ₉ and 4 ₁₈ . It is shaped like a staircase.

In FIG. 1 or 3, the laser beams emitted from the COSs _{1 1} to 1 ₉ are converted into collimated light only in the fast axis direction by the fast axis collimating lenses 2 ₁ to 2 ₉ , respectively, and the slow axis collimating lenses 3 ₁ to 3 Enter into ₉ . The exit surfaces of the slow-axis collimating lenses 3 ₁ to 3 ₉ have curved surfaces that collimate the laser beam in the slow-axis direction. The laser beams emitted from the fast-axis collimating lenses 2 ₁ to 2 ₉ are converted into collimated light in the slow-axis direction by the slow-axis collimating lenses 3 ₁ to 3 ₉ , respectively. Therefore, the laser beams emitted from the slow-axis collimating lenses 3 ₁ to 3 ₉ are collimated laser beams in both the fast-axis direction and the slow-axis direction.

Similarly, the laser beams emitted from the COSs _{1 10} to 1 ₁₈ are converted into collimated light only in the fast axis direction by the fast axis collimating lenses 2 ₁₀ to 2 ₁₈ , respectively, and then enter the slow axis collimating lenses 3 ₁₀ to 3 ₁₈ . do. The exit surfaces of the slow-axis collimating lenses 3 ₁₀ to 3 ₁₈ have curved surfaces that collimate the laser beam in the slow-axis direction. The laser beams emitted from the fast-axis collimating lenses 2 ₁₀ to 2 ₁₈ are converted into collimated light in the slow-axis direction by the slow-axis collimating lenses 3 ₁₀ to 3 ₁₈ , respectively. Therefore, the laser beams emitted from the slow axis collimating lenses 3 ₁₀ to 3 ₁₈ are collimated laser beams in both the fast axis direction and the slow axis direction.

The laser diode device 100 may include a plurality of collimating lenses that convert the laser beam emitted from each laser diode 12 in the COSs _{1 10} to 1 ₁₈ into collimated light in the fast axis direction and the slow axis direction. The plural collimating lenses may be provided between the COSs _{1 1} to 1 ₉ and the mirrors 4 ₁ to 4 ₉ and between the COSs 1 ₁₀ to 1 ₁₈ and the mirrors 4 ₁₀ to 4 ₁₈ .

The laser beams emitted from the slow-axis collimating lenses 3 ₁ to 3 ₉ are respectively incident on mirrors 4 ₁ to 4 ₉ at an incident angle of 45 degrees and reflected, and their traveling direction is bent by 90 degrees. The laser beams reflected by the mirrors 4 ₁ to 4 ₉ travel to lower positions in the order of the laser beam reflected by the mirror 4 ₁ to the laser beam reflected by the mirror 4 ₉ . The laser beams emitted from the slow-axis collimating lenses 3 ₁₀ - 3 ₁₈ are respectively incident on the mirrors 4 ₁₀ - 4 ₁₈ at an incident angle of 45 degrees and reflected, and their traveling direction is bent by 90 degrees. The laser beams reflected by the mirrors 4 ₁₀ to 4 ₁₈ travel to lower positions in the order of the laser beam reflected by the mirror 4 ₁₀ to the laser beam reflected by the mirror 4 ₁₈ .

As described above, the first laser module LM1 emits a laser beam in the first direction toward the second laser module LM2. The second laser module LM2 emits a laser beam in a second direction, which is a direction opposite to the first direction and toward the first laser module LM1.

In the first laser module LM1, COS1 ₁ to 1 ₉ or COS1 ₁₀ to 1 ₁₈ constitute a first laser diode group consisting of a plurality of laser diodes 12 arranged in a line. In the first laser module LM1, the fast-axis collimating lenses 2 ₁ to 2 ₉ and the slow-axis collimating lenses 3 ₁ to 3 ₉ , or the fast-axis collimating lenses 2 ₁₀ to 2 ₁₈ and the slow-axis collimating lenses 3 ₁₀ to 3 ₁₈ are A first collimating lens group is composed of a plurality of collimating lenses. In the first laser module LM1, the mirrors 4 ₁ to 4 ₉ or the mirrors 4 ₁₀ to 4 ₁₈ constitute a first mirror group consisting of a plurality of mirrors arranged in a line.

Assuming that the first laser diode group, the first collimating lens group, and the first mirror group are one group, the first laser module LM1 is arranged side by side in a direction perpendicular to the first direction. It includes a first group and a second group. The first laser module LM1 may have a configuration including only one group. In order to increase the output of the laser beam, the first laser module LM1 is preferably provided with two groups.

In the second laser module LM2, COS1 ₁ to 1 ₉ or COS1 ₁₀ to 1 ₁₈ constitute a second laser diode group consisting of a plurality of laser diodes 12 arranged in a line. In the second laser module LM2, the fast-axis collimating lenses 2 ₁ to 2 ₉ and the slow-axis collimating lenses 3 ₁ to 3 ₉ , or the fast-axis collimating lenses 2 ₁₀ to 2 ₁₈ and the slow-axis collimating lenses 3 ₁₀ to 3 ₁₈ are A second collimating lens group is composed of a plurality of collimating lenses. In the second laser module LM2, the mirrors 4 ₁ to 4 ₉ or the mirrors 4 ₁₀ to 4 ₁₈ constitute a second mirror group consisting of a plurality of mirrors arranged in a line.

Assuming that the second laser diode group, the second collimating lens group, and the second mirror group are one group, the second laser module LM2 is arranged side by side in a direction perpendicular to the second direction. including a third group and a fourth group. The second laser module LM2 may have a configuration including only one group. In order to increase the output of the laser beam, the second laser module LM2 is preferably provided with two groups.

As shown in FIG. 1, mirrors 51, 52, 61, and 62 are arranged between the bases 30 of the first laser module LM1 and the second laser module LM2. Mirror 51 is a third mirror, mirror 52 is a fourth mirror, mirror 61 is a fifth mirror, and mirror 62 is a sixth mirror. Note that when the first laser module LM1 and the second laser module LM2 each include only one group, between the bases 30 of the first laser module LM1 and the second laser module LM2, Only mirrors 51 and 52 need be arranged.

The laser beam reflected by the mirrors 4 ₁ to 4 ₉ in the first laser module LM1 and traveling in a stacked state in the height direction is incident on the mirror 51 at an incident angle of 45 degrees and is reflected, so that the traveling direction is 90 degrees. Can be bent. The laser beam reflected by the mirrors 4 ₁₀ to 4 ₁₈ in the first laser module LM1 and traveling in a stacked state in the height direction is incident on the mirror 61 at an incident angle of 45 degrees and is reflected, so that the traveling direction is 90 degrees. Can be bent. The laser beam that is reflected by the mirrors 4 ₁ to 4 ₉ or the mirrors 4 ₁₀ to 4 ₁₈ in the first laser module LM1 and travels in a stacked state in the height direction is a first stacked laser beam.

The laser beam reflected by the mirrors 4 ₁ to 4 ₉ in the second laser module LM2 and traveling in a stacked state in the height direction is incident on the mirror 62 at an incident angle of 45 degrees and is reflected, so that the traveling direction is 90 degrees. Can be bent. The laser beam reflected by the mirrors 4 ₁₀ to 4 ₁₈ in the second laser module LM2 and traveling in a stacked state in the height direction is incident on the mirror 52 at an incident angle of 45 degrees and is reflected, so that the traveling direction is 90 degrees. Can be bent. The laser beam reflected by the mirrors 4 ₁ to 4 ₉ or the mirrors 4 ₁₀ to 4 ₁₈ in the second laser module LM2 and traveling in a stacked state in the height direction is a second laminated laser beam.

The mirrors 51 and 61 bend the traveling direction of the laser beam emitted from the first laser module LM1 in the first direction by 90 degrees, and cause the laser beam to travel in the third direction. The mirrors 52 and 62 bend the traveling direction of the laser beam emitted from the second laser module LM2 in the second direction by 90 degrees, and cause the laser beam to travel in the third direction.

FIG. 4 is a perspective view showing the three-dimensional shape of the mirrors 51, 52, 61, and 62 in FIG. The mirrors 51, 52, 61, and 62 each include one of the multiple sides of the rectangular parallelepiped that is parallel to the height direction, which is the lamination direction of the first or second laminated laser beam, as shown by the two-dot chain line. It has a shape with two corners cut off from the top end to the bottom end in the height direction.

The mirrors 51, 52, 61, and 62 have a reflective surface Sf1 surrounded by vertices V1 to V4, a cut-off surface Sf2 surrounded by vertices V3, V4, V7, and V8, and a cut-off surface Sf2 surrounded by vertices V1, V2, V5, and V6. It has an adjacent surface Sf3. The first or second laminated laser beam enters the reflecting surface Sf1 and is reflected. The cut-off surface Sf2 is an adjacent surface adjacent to the reflective surface Sf1, where one side of the cut-off surface Sf2 and one side of the reflective surface Sf1 are a common side V3-V4. The angle θ1 between the reflective surface Sf1 and the cut-off surface Sf2 is 45 degrees or less.

Typically, the long sides (sides V1-V2) of the reflective surface Sf1 have a length that is more than twice the length of the short sides (sides V1-V4). This is because the first or second laminated laser beams stacked in the height direction need to be reflected by the reflecting surface Sf1.

As shown in FIG. 1, the first laser module LM1 and the second laser module LM2 are arranged in the traveling direction (first or second direction) of the laser beam reflected by the mirrors 4 ₁ to 4 ₉ and 4 ₁₀ to 4 ₁₈ . The position is not shifted in the direction perpendicular to the third direction (the direction parallel to the third direction).

That is, COSs _{1 1} to 1 ₉ , slow-axis collimating lenses 3 ₁ to 3 ₉ , and mirrors 4 ₁ to 4 ₉ in the first laser module LM1, and COSs _{1 1} to 1 ₉ and slow-axis collimating lenses in the second laser module LM2. Mirrors 3 ₁ to 3 ₉ and mirrors 4 ₁ to 4 ₉ are each located on one straight line. Further, mirrors 4 ₁₀ to 4 ₁₈ , slow axis collimating lenses 3 ₁₀ to 3 ₁₈ , COS 1 ₁₀ to 1 ₁₈ in the first laser module LM1, and mirrors 4 ₁₀ to 4 ₁₈ and slow axis collimating lenses in the second laser module LM2 The lenses 3 ₁₀ to 3 ₁₈ and the COSs _{1 10} to 1 ₁₈ are each located on one straight line.

Therefore, the mirrors 51 and 52 and the mirrors 61 and 62 are not misaligned in the direction perpendicular to the traveling direction of the laser beam reflected by the mirrors 4 ₁ to 4 ₉ and 4 ₁₀ to ₄₁₈ . The mirrors 51 and 52 are located on one straight line parallel to the traveling direction of the laser beam reflected by the mirrors 4 ₁ to 4 ₉ . The mirrors 61 and 62 are located on one straight line parallel to the traveling direction of the laser beam reflected by the mirrors 4 ₁₀ to 4 ₁₈ .

Mirrors 51 and 52 are line symmetrical with respect to a straight line parallel to the third direction. Mirrors 51 and 52 have a cut-off surface Sf2 (first cut-off surface) adjacent to reflective surface Sf1 (first reflective surface) of mirror 51, and a cut-off surface Sf2 (first cut-off surface) adjacent to reflective surface Sf1 (second reflective surface) of mirror 52. The cut-off surface Sf2 (second cut-off surface) is arranged so as to face the cut-off surface Sf2 (second cut-off surface). Mirrors 61 and 62 are line symmetrical with respect to a straight line parallel to the third direction. The mirrors 61 and 62 have a cut-off surface Sf2 (third cut-off surface) adjacent to the reflective surface Sf1 (third reflective surface) of the mirror 61 and a cut-off surface Sf2 (third cut-off surface) adjacent to the reflective surface Sf1 (fourth reflective surface) of the mirror 62. The cut-off surface Sf2 (fourth cut-off surface) is arranged so as to face the cut-off surface Sf2 (fourth cut-off surface).

Mirror 51 does not interfere with the second laminated laser beam that is incident on mirror 52 or 62 and reflected, and does not interfere with the first laminated laser beam that is incident on mirror 61 and reflected. Mirror 52 does not interfere with the first laminated laser beam that is incident on mirror 51 or 61 and reflected, and does not interfere with the second laminated laser beam that is incident on mirror 62 and reflected. Mirror 61 does not interfere with the first laminated laser beam that is incident on mirror 51 and reflected, and does not interfere with the second laminated laser beam that is incident on mirror 52 or 62 and reflected. The mirror 62 does not interfere with the first laminated laser beam that is incident on the mirror 51 or 61 and reflected, and does not interfere with the second laminated laser beam that is incident on the mirror 52 and is reflected. In this way, the mirrors 51, 52, 61, and 62 are arranged close to each other within a range that does not interfere with the laser beam that is incident on and reflected by other mirrors.

The laser beam reflected by the mirrors 51 and 61 enters the polarizing beam splitter 8. Polarizing beam splitter 8 is formed by joining prisms 81 to 83. As an example, a dielectric multilayer film that transmits P-polarized light and reflects S-polarized light is provided on the joint surface 812 between the prisms 81 and 82 and the joint surface 823 between the prisms 82 and 83. A half-wave plate 7 is attached to the laser beam entrance surface of the prism 82.

The laser beams reflected by the mirrors 51 and 61 enter the prism 81, and the P-polarized light contained in the laser beams reflected by the mirrors 51 and 61 passes through the cemented surface 812 and exits from the exit surface. The S-polarized light contained in the laser beam reflected by the mirrors 51 and 61 is reflected by the bonding surface 812, and therefore does not exit from the exit surface.

The laser beam reflected by the mirrors 52 and 62 enters the polarizing beam splitter 8 via the 1/2 wavelength plate 7. P-polarized light included in the laser beam reflected by mirrors 52 and 62 is converted into S-polarized light by half-wave plate 7 and enters prism 82 . The S-polarized light incident on the prism 82 is reflected by the cemented surface 823, further reflected by the cemented surface 812, and exits from the exit surface. The S-polarized light contained in the laser beam reflected by the mirrors 52 and 62 is converted into P-polarized light by the half-wave plate 7 and enters the prism 82, but it is transmitted through the cemented surface 823, so it does not head toward the cemented surface 812. do not have.

Therefore, the polarizing beam splitter 8 emits a combined laser beam in which the P-polarized components of the laser beam reflected by the mirrors 51 and 61 and the laser beam reflected by the mirrors 52 and 62 are combined.

The combined laser beam emitted from the polarizing beam splitter 8 enters a focusing lens 10 via a filter 9. The filter 9 removes unnecessary bands such as wavelengths of stimulated Raman scattered light. The focusing lens 10 focuses the incident combined laser beam and makes it enter the core of the optical fiber 20 . The combined laser beam incident on the core of the optical fiber 20 is a laser beam in which the first and second laminated laser beams reflected by the mirrors 51, 52, 61, and 62 are aligned in the plane of the core. Optical fiber 20 transmits the incident combined laser beam. Note that the optical fiber 20 is directly or indirectly fixed to the water cooling plate 50 using a predetermined fixture.

In the laser diode device 100 shown in FIG. 1, COSs _{1 1} to 1 ₉ in the first laser module LM1 and COSs _{1 1} to 1 ₉ in the second laser module LM2 are located on one straight line. Therefore, the copper pipe 501 (first water channel) is formed in a straight line. Further, COS1 ₁₀ to 1 ₁₈ in the first laser module LM1 and COS1 ₁₀ to 1 ₁₈ in the second laser module LM2 are located on one straight line. Therefore, the copper pipe 502 (second water channel) is formed in a straight line. Since the copper tubes 501 and 502 are formed in a straight line and are not bent in the middle, almost no pressure loss occurs.

Note that the copper tubes 501 and 502 are arranged below the first laser diode group and the second laser diode group, and mainly cool the heat generated in the COSs _{1 1} to 1 ₁₈ .

By the way, in the laser diode device described in Patent Document 1, the mirrors corresponding to the mirrors 51, 52, 61, and 62 are rectangular parallelepiped mirrors 5L, 5R, 6L, and 6R, respectively. A relatively wide interval is provided between the mirror 5L and the mirror 5R, and between the mirror 6L and the mirror 6R. In order to reduce costs by downsizing the laser diode device, it is necessary to narrow the distance between mirror 5L and mirror 5R and the distance between mirror 6L and mirror 6R. Preferably, the distance between mirror 5L and mirror 6L and the distance between mirror 5R and mirror 6R are preferably narrowed.

However, when mirror 5L and mirror 5R, mirror 6L and mirror 6R are located on one straight line parallel to the traveling direction of the laser beam, mirror 5L and mirror 5R, mirror 6L and mirror 6R are , it is necessary to arrange them so that they do not interfere with each other. Therefore, there is a limit to narrowing the distance between mirror 5L and mirror 5R and the distance between mirror 6L and mirror 6R.

FIG. 5 is a plan view partially showing a laser diode device 100c of a comparative example. As shown in FIG. 5, the mirrors 5L and 5R, and the mirrors 6L and 6R are shifted in the direction parallel to the third direction to create a space between the mirrors 5L and 5R, and between the mirrors 6L and 6R. It is conceivable to narrow the distance between the two in the direction parallel to the first and second directions. The mirrors 5L, 5R, 6L, and 6R can be placed close to each other as long as each mirror does not interfere with the laser beam reflected by the other mirrors.

In FIG. 5, illustration of the half-wave plate 7, polarizing beam splitter 8, filter 9, focusing lens 10, and optical fiber 20 is omitted. In the laser diode device 100c of the comparative example, the first laser module LM1 and the second laser module LM2 are shifted in position in a direction parallel to the third direction.

That is, COSs _{1 1} to 1 ₉ , slow-axis collimating lenses 3 ₁ to 3 ₉ , and mirrors 4 ₁ to 4 ₉ in the first laser module LM1, and COSs _{1 1} to 1 ₉ and slow-axis collimating lenses in the second laser module LM2. Mirrors 3 ₁ to 3 ₉ and mirrors 4 ₁ to 4 ₉ are located on separate straight lines. Further, mirrors 4 ₁₀ to 4 ₁₈ , slow axis collimating lenses 3 ₁₀ to 3 ₁₈ , COS 1 ₁₀ to 1 ₁₈ in the first laser module LM1, and mirrors 4 ₁₀ to 4 ₁₈ and slow axis collimating lenses in the second laser module LM2 The lenses 3 ₁₀ to 3 ₁₈ and the COSs _{1 10} to 1 ₁₈ are located on different straight lines.

In the laser diode device 100c, the mirror 5L and the mirror 5R need to be spaced apart from each other in the direction parallel to the third direction, and the mirror 6L and the mirror 6R need to be spaced apart from each other in the direction parallel to the third direction. It is necessary to place the Therefore, the laser diode device 100c is larger than the laser diode device 100, making it difficult to reduce costs.

Furthermore, in the laser diode device 100c, COSs _{1 1} to 1 ₉ in the first laser module LM1 and COSs _{1 1} to 1 ₉ in the second laser module LM2 are located on different straight lines. For good cooling, it is better to use a bent copper tube 511 rather than a straight copper tube. Furthermore, since the COSs _{1 10} to 1 ₁₈ in the first laser module LM1 and the COSs _{1 10} to 1 ₁₈ in the second laser module LM2 are located on different straight lines, it is possible to bend the copper tubes rather than using straight copper tubes. It is preferable to use a copper tube 512 made of aluminum.

The copper tube 511 includes a straight copper tube 5111, a straight copper tube 5113, and an inclined copper tube 5112 connecting the copper tube 5111 and the copper tube 5113. The copper tube 512 includes a straight copper tube 5121, a straight copper tube 5123, and an inclined copper tube 5122 that connects the copper tube 5121 and the copper tube 5123. If the bent copper tubes 511 and 512 are used, the cost will increase compared to the case where the straight copper tubes 501 and 502 are used. Therefore, the cost of the laser diode device 100c is significantly higher than that of the laser diode device 100. Further, bent copper tubes 511 and 512 are not preferable because pressure loss occurs.

Note that the copper tubes 511 and 512 are connected to other copper tubes by a joint outside the laser diode device 100c. When the cross-sectional shape of the copper tubes 511 and 512 is circular, the pressure loss is smaller than when the cross-sectional shape is rectangular or oval. If the other copper tubes on the outside have a circular cross-sectional shape, the copper tubes 511 and 512 also have a circular cross-sectional shape, so that the connection by the joint can be made at low cost. In this way, even if the cross-sectional shape of the copper tubes 511 and 512 is circular, using bent copper tubes 511 and 512 will increase pressure loss and increase cost. It is not preferable to use

When forming a waterway by cutting, it is necessary to bend the waterway as well, which increases the cost of the laser diode device 100c. Forming the water channel by cutting is also undesirable because pressure loss occurs.

Here, using FIGS. 6 to 10, we will consider how the positional relationship of the mirrors 5L and 5R or 51 and 52 affects the size of the laser diode device 100c or 100 and the waterway.

FIG. 6 is a plan view showing a first arrangement example of rectangular parallelepiped mirrors 5L and 5R. In the first arrangement example shown in FIG. 6, the mirror 5L is placed on the first laser module LM1 side, and the mirror 5R is placed on the second laser module LM2 side, so that they are in contact with or in close proximity to each other. In FIG. 6, the distance between both ends of mirrors 5L and 5R is a relatively long distance D6. If the distance between the ends of the mirrors 5L and 5R becomes longer, the distance between the ends of the mirrors 6L and 6R also becomes longer, and the laser diode device 100c becomes larger.

In FIG. 6, a gap G6 is formed between the laser beam reflected by the mirror 5L and traveling in the third direction and the laser beam reflected by the mirror 5R and traveling in the third direction. When the gap G6 exists, the diameter of the laser beam reflected by the mirrors 5L, 5R, 6L, and 6R and incident on the focusing lens 10 increases. Then, the focused laser beam may exceed the numerical aperture (NA) of the optical fiber 20, and a portion of the laser beam may not propagate through the core of the optical fiber 20 and leak into the cladding.

Furthermore, when the first arrangement example shown in FIG. 6 is adopted, the mirrors 5L, 5R, 6L, and 6R are arranged so that the laser beams reflected by the mirrors 5L, 5R, 6L, and 6R enter the core of the optical fiber 20 without any gaps. An additional configuration is required to bring the optical paths of the reflected laser beams close to each other. Therefore, the first arrangement example of mirrors 5L and 5R shown in FIG. 6 is not preferable.

FIG. 7 is a plan view showing a second arrangement example of rectangular parallelepiped mirrors 5L and 5R. In the second arrangement example shown in FIG. 7, mirrors 5L and 5R are arranged so that an adjacent surface adjacent to the reflective surface of mirror 5R is in contact with an opposing surface opposite to the reflective surface of mirror 5L. In FIG. 7, the distance between both ends of the mirrors 5L and 5R is a distance D7 shorter than the distance D6, and the laser beam is reflected by the mirror 5L and travels in the third direction, and the laser beam is reflected by the mirror 5R and travels in the third direction. The gap between the laser beam and the laser beam traveling in the direction is a gap G7, which is smaller than the gap G6. However, there is a distance L7 in a direction parallel to the third direction between the laser beam that travels in the first direction and enters the mirror 5L and the laser beam that travels in the second direction and enters the mirror 5R. exists.

Therefore, even if the laser diode device 100c adopts the second arrangement example shown in FIG. 7, the first laser module LM1 and the second laser module LM2 are arranged parallel to the third direction, as in FIG. need to be shifted in the direction. The laser diode device 100c employing the second arrangement example also requires the use of bent copper tubes 511 and 512, leading to an increase in cost. Therefore, the second arrangement example of mirrors 5L and 5R shown in FIG. 7 is also not preferable.

FIG. 8 is a plan view showing a third arrangement example of rectangular parallelepiped mirrors 5L and 5R. A third arrangement example shown in FIG. 8 is an arrangement example of mirrors 5L and 5R in the laser diode device 100c of FIG. 5. In FIG. 8, the distance between both ends of the mirrors 5L and 5R is a distance D8 shorter than the distance D6, and the laser beam is reflected by the mirror 5L and travels in the third direction, and the laser beam is reflected by the mirror 5R and travels in the third direction. There is almost no gap between the laser beam and the laser beam.

However, as shown in FIG. 5, it is necessary to shift the first laser module LM1 and the second laser module LM2 in a direction parallel to the third direction. As shown in FIG. 8, between the laser beam traveling in the first direction and incident on the mirror 5L and the laser beam traveling in the second direction and incident on the mirror 5R, there is a gap parallel to the third direction. There is a distance L8 in the direction. Therefore, the third arrangement example of the mirrors 5L and 5R shown in FIG. 8 increases the cost and is not preferable.

FIG. 9 is a plan view showing a first arrangement example of mirrors 51 and 52 in which one corner of a rectangular parallelepiped is cut off. The first arrangement example shown in FIG. 9 corresponds to the arrangement example in which mirrors 5L and 5R in FIG. 8 are replaced with mirrors 51 and 52, respectively. In FIG. 9, the distance between both ends of the mirrors 51 and 52 is a distance D9, which is shorter than the distance D8 in FIG. When the laser diode device 100 adopts the first arrangement example of the mirrors 51 and 52 shown in FIG. 9, the laser diode device 100 can be downsized. However, there is a distance L9 in a direction parallel to the third direction between the laser beam that travels in the first direction and enters the mirror 51 and the laser beam that travels in the second direction and enters the mirror 52. exists.

Although the laser diode device 100 adopting the first arrangement example of the mirrors 51 and 52 shown in FIG. 9 needs to use bent copper tubes 511 and 512, the laser diode device 100 can be miniaturized. Therefore, the laser diode device 100 that adopts the first arrangement example of the mirrors 51 and 52 can achieve cost reduction compared to the laser diode device 100c.

In FIG. 9, the reflective surface Sf1 of the mirror 51 that reflects the laser beam and the cut-off surface Sf2 adjacent to the reflective surface Sf1 have an angle of 45 degrees or less. The reflective surface Sf1 of the mirror 52 that reflects the laser beam and the cut-off surface Sf2 adjacent to the reflective surface Sf1 have an angle of 45 degrees or less. The mirror 51 and the mirror 52 are arranged close to each other to the extent that the mirror 51 does not interfere with the laser beam that is incident on the mirror 52 and reflected, and the mirror 52 does not interfere with the laser beam that is incident on the mirror 51 and is reflected. has been done.

FIG. 10 is a plan view showing a second arrangement example of mirrors 51 and 52 in which one corner of a rectangular parallelepiped is cut off. A second arrangement example shown in FIG. 10 is an arrangement example of the mirrors 51 and 52 in the laser diode device 100 of FIG. 1. The mirror 51 and the mirror 52 are arranged so that the cut-off surface Sf2 of the mirror 51 and the cut-off surface Sf2 of the mirror 52 face each other. In FIG. 10, the distance between both ends of the mirrors 51 and 52 is a distance D10, which is shorter than the distance D8 in FIG. According to the second arrangement example of mirrors 51 and 52 shown in FIG. 10, the distance between both ends of mirrors 51 and 52 can be shortened by the distance obtained by dividing the plate thickness of mirrors 51 and 52 by the square root of 2. .

Moreover, since the laser diode device 100 adopting the second arrangement example of mirrors 51 and 52 shown in FIG. 10 can use straight copper tubes 501 and 502, further cost reduction is possible. By using straight copper tubes 501 and 502, no pressure loss occurs. The laser diode device 100 that adopts the second arrangement example shown in FIG. 10 is more preferable than the laser diode device 100 that uses the first arrangement example shown in FIG. 9.

FIG. 11 is a plan view showing mirrors 51, 52, 61, and 62 in the laser diode device 100 of FIG. As shown in FIG. 11, there is a third direction between the laser beam that travels in the first direction and enters the mirror 51, and the laser beam that travels in the first direction and enters the mirror 61. A distance L11 exists in the parallel direction. Similarly, between the laser beam that travels in the second direction and enters the mirror 52, and the laser beam that travels in the second direction and enters the mirror 62, there is a direction parallel to the third direction. A distance L11 exists.

FIG. 12 is a plan view showing mirrors 510, 520, 610, 620 which are modified examples of mirrors 51, 52, 61, 62. Mirrors 510, 520, 610, and 620 are also third, fourth, fifth, and sixth mirrors, respectively. The mirrors 510, 520, 610, and 620 have a shape in which the other corners of a plurality of sides of a rectangular parallelepiped, including the side parallel to the height direction, are further cut off from the top end to the bottom end in the height direction. The mirrors 510, 520, 610, and 620 have a cut-off surface Sf3' in addition to the cut-off surface Sf2. The cut-off surface Sf3' is an adjacent surface adjacent to the reflective surface Sf1, in which one side of the cut-off surface Sf3' and one side of the reflective surface Sf1 are common. The angle θ2 between the reflective surface Sf1 and the cut-off surface Sf3' is 45 degrees or less.

Mirror 610 is arranged between the optical path of the laser beam that is incident on mirror 510 and reflected, and the optical path of the laser beam that is incident on mirror 610 and reflected. The mirror 620 is arranged between the optical path of the laser beam that is incident on the mirror 520 and reflected, and the optical path of the laser beam that is incident on the mirror 620 and reflected. When the mirrors 61 and 62 in the laser diode device 100 are replaced with mirrors 610 and 620, the mirror 610 has a cut-off surface Sf3' (fifth cut-off surface), and the mirror 620 has a cut-off surface Sf3' (sixth cut-off surface). Therefore, the distance corresponding to distance L11 can be set to distance L12, which is shorter than distance L11. In FIG. 12, mirrors 51 and 52 shown in FIG. 11 may be used instead of mirrors 510 and 520.

FIG. 13 is a perspective view showing mirrors 51', 52', 61', 62' which are other modified examples of the mirrors 51, 52, 61, 62. In place of the mirrors 51, 52, 61, 62 shown in FIG. 4, mirrors 51', 52', 61', 62' shown in FIG. 13 may be used. The mirrors 51', 52', 61', and 62' have one corner including a side parallel to the height direction of the rectangular parallelepiped, for example, at an angle of 45 degrees, and the upper end of the rectangular parallelepiped in the height direction with a plane that does not pass through sides V3-V4. It has a shape that looks like it has been cut off from the top to the bottom. The mirrors 51', 52', 61', and 62' have an adjacent surface Sf4 surrounded by vertices V3, V4, V9, and V10 adjacent to the reflective surface Sf1, and an adjacent surface Sf4 surrounded by vertices V7', V8', V9, and V10. It has a cut-off surface Sf5. The angle formed by the reflective surface Sf1 and the cut-off surface Sf5 is 45 degrees or less.

If mirrors 51' and 52' are arranged with their cut-off surfaces Sf5 facing each other, and mirrors 61' and 62' are arranged with their cut-off surfaces Sf5 facing each other, rectangular parallelepiped mirrors 5L, 5R, 6L, and 6R can be formed. The laser diode device 100 can be made smaller than when the laser diode device 100 is used. Therefore, by using the mirrors 51', 52', 61', and 62', it is possible to reduce the cost of the laser diode device 100. Note that it is preferable to use mirrors 51, 52, 61, and 62 rather than mirrors 51', 52', 61', and 62' because the laser diode device 100 can be made more compact.

By the way, it is possible to reduce the size of the laser diode device 100c by reducing the plate thickness of the rectangular parallelepiped mirrors 5L, 5R, 6L, and 6R. However, if the thickness of the mirrors 5L, 5R, 6L, and 6R is made thinner, the bonding area with the water-cooled plate 50 decreases, and the reliability when vibration is applied to the laser diode device 100c decreases. Furthermore, if the plate thicknesses of the mirrors 5L, 5R, 6L, and 6R are made thinner, distortion is likely to occur in the mirrors 5L, 5R, 6L, and 6R. In particular, distortion is likely to occur when the long sides of the reflective surfaces Sf1 of the mirrors 5L, 5R, 6L, and 6R are twice or more longer than the short sides. Therefore, it is not a good idea to reduce the thickness of the mirrors 5L, 5R, 6L, and 6R.

On the other hand, when the mirrors 51, 52, 61, and 62 are used, the laser diode device 100 can be downsized without reducing the plate thickness. According to the laser diode device 100, it is possible to secure a bonding area of the mirrors 51, 52, 61, 62 and the water-cooled plate 50 that is larger than a predetermined area, so that sufficient reliability can be obtained. Since the mirrors 51, 52, 61, 62 can have a thickness greater than a predetermined thickness, the mirrors 51, 52, 61, 62 are hardly distorted. These secondary effects can be achieved in the same way even when mirrors 51', 52', 61', 62' or 510, 520, 610, 620 are used.

The present invention is not limited to the one or more embodiments described above, and can be modified in various ways without departing from the gist of the present invention. The laser diode device 100 shown in FIG. 1 includes two laser modules, a first laser module LM1 and a second laser module LM2, but in order to further increase the output of the laser beam, four or more laser modules are installed. You may prepare.

In the laser diode device 100 shown in FIG. 1, a photonic crystal surface emitting laser (PCSEL) may be used instead of the COSs _{1 1} to 1 ₁₈ . PCSEL is a surface-emitting type semiconductor laser. When a PCSEL is used instead of COS1 ₁ to 1 ₁₈ , the laser beam emitted from the PCSEL is not a diverging beam, so the fast axis collimating lenses 2 ₁ to 2 ₁₈ and the slow axis collimating lenses 3 ₁ to 3 ₁₈ can be omitted. I can do it.

The laser diodes 12 of COS1 ₁ -1 ₁₈ are a first example of a laser beam source, and the PCSEL is a second example of a laser beam source. The first and second laser diode groups are first and second laser beam generation source groups, respectively. If PCSELs are used instead of the chip-on-submounts 1 ₁ to 1 ₁₈ , the group of PCSELs is the first or second laser beam source group.

1, _{1 1} ~ 1 ₁₈ chip-on submount 2, _{2 1} ~ 2 ₁₈ speed axis collimating lens 3, _{3 1} ~ 3 ₁₈ slow axis collimating lens 4 _{, 4 1} ~ 4 ₁₈ mirror 7 1/2 wave plate 8 Polarized beam Splitter 9 Filter 10 Focusing lens 20 Optical fiber 30 Base 50 Water cooling plate 51, 52, 61, 62, 51', 52', 61', 62', 510, 520, 610, 620 Mirror 100 Laser diode device 501, 502 Copper pipe (waterway)
LM1 First laser module LM2 Second laser module

In the above laser diode device, the first mirror group and the second mirror group are located on one straight line, and the third mirror is located along the height direction of the plurality of sides of the rectangular parallelepiped. a first reflective surface that has a shape including a first cut-off surface in which one corner including parallel sides is cut off from the upper end to the lower end in the height direction, and that reflects the first laminated laser beam; The fourth mirror has an angle of 45 degrees or less with the first cut-off surface, and the fourth mirror has one corner including a side parallel to the height direction of the plurality of sides of the rectangular parallelepiped in the height direction. The second reflective surface that reflects the second laminated laser beam and the second cut-off surface have a shape that includes a second cut-off surface cut off from the upper end to the lower end, and the angle between the second cut-off surface and the second cut-off surface is 45 degrees or less. has.

In the above laser diode device , the third mirror is arranged closer to the first laser module than the second laser module, and the fourth mirror is arranged closer to the first laser module than the first laser module. The third mirror and the fourth mirror are arranged in a position close to the second laser module, and the third mirror is incident on the fourth mirror and reflected. The first cut-off surface and the second cut-off surface do not interfere with the beam and the fourth mirror does not interfere with the first laminated laser beam that is incident on and reflected by the third mirror. are arranged close to each other in a facing state .

In the above laser diode device, the first mirror group and the second mirror group are located on one straight line, and the third mirror is located along the height direction of the plurality of sides of the rectangular parallelepiped. a first reflective surface that has a shape including a first cut-off surface in which only one corner including parallel sides is cut off from the upper end to the lower end in the height direction, and that reflects the first laminated laser beam; and the first cut-off surface have an angle of 45 degrees or less, and the fourth mirror has only one corner including the side parallel to the height direction of the plurality of sides of the rectangular parallelepiped at the height. The shape includes a second cut-off surface cut off from the upper end to the lower end in the horizontal direction, and the second reflective surface that reflects the second laminated laser beam and the second cut-off surface are at an angle of 45 degrees or less. has an angle of

Claims (7)

a first laser module that emits a laser beam in a first direction;
a second laser module that emits a laser beam in a second direction that is a direction toward the first laser module that is opposite to the first direction;
Equipped with
The first laser module is
a first laser beam source group consisting of a plurality of laser beam sources arranged such that their positions in the height direction are different from each other;
a plurality of mirrors that bend the traveling direction of the laser beam emitted from the first laser beam generation source group by 90 degrees and cause the first laminated laser beams stacked in the height direction to travel in the first direction; a first mirror group consisting of;
including;
The second laser module is
a second laser beam generation source group consisting of a plurality of laser beam generation sources arranged such that positions in the height direction are different from each other;
a plurality of mirrors that bend the traveling direction of the laser beams emitted from the second laser beam generation source group by 90 degrees and cause the second laminated laser beams stacked in the height direction to travel in the second direction; a second mirror group consisting of;
including;
The first laminated laser beam is disposed between the first laser module and the second laser module, and the first laminated laser beam emitted from the first laser module in the first direction is incident on the first laminated laser beam. a third mirror that bends the traveling direction of the laminated laser beam by 90 degrees and causes the laminated laser beam to travel in a third direction;
The second laminated laser beam is disposed between the first laser module and the second laser module, and is emitted from the second laser module in the second direction. a fourth mirror that bends the traveling direction of the laminated laser beam by 90 degrees and causes it to travel in the third direction;
Furthermore,
The third mirror has a shape including a first cut-off surface obtained by cutting off one corner of a plurality of sides of a rectangular parallelepiped that includes a side parallel to the height direction from an upper end to a lower end in the height direction. a first reflective surface that reflects the first laminated laser beam and the first cut-off surface have an angle of 45 degrees or less,
The fourth mirror has a shape including a second cut-off surface obtained by cutting off one corner of the plurality of sides of the rectangular parallelepiped that includes the side parallel to the height direction from the upper end to the lower end in the height direction. a second reflective surface that reflects the second laminated laser beam and the second cut-off surface have an angle of 45 degrees or less,
The third mirror and the fourth mirror are such that the third mirror does not interfere with the second laminated laser beam that is incident on and reflected by the fourth mirror, and the fourth mirror does not interfere with the second laminated laser beam that is reflected by the fourth mirror. The laser diode device is arranged close to each other within a range that does not interfere with the first laminated laser beam that is incident on and reflected by the third mirror. The first cut-off surface of the third mirror is an adjacent surface adjacent to the first reflective surface, where one side of the first cut-off surface and one side of the first reflective surface are a common side. and
The second cut-off surface of the fourth mirror is an adjacent surface adjacent to the second reflective surface, where one side of the second cut-off surface and one side of the second reflective surface are a common side. The laser diode device according to claim 1. The first mirror group and the second mirror group are located on one straight line,
The laser diode device according to claim 1 or 2, wherein the third mirror and the fourth mirror are arranged such that the first cut-off surface and the second cut-off surface face each other. The first laser module includes a first group including the first laser beam generation source group and the first mirror group, which are arranged side by side in a direction parallel to the third direction; including a second group;
The second laser module includes a third group including the second laser beam generation source group and the second mirror group, which are arranged side by side in a direction parallel to the third direction; including a fourth group;
the third mirror causes the first laminated laser beam emitted in the first direction from the first mirror group in the first group to travel in the third direction;
the fourth mirror causes the second laminated laser beam emitted in the second direction from the second mirror group in the third group to travel in the third direction;
The first laminated laser beam emitted in the first direction from the first mirror group in the second group is incident, and the traveling direction of the first laminated laser beam is bent by 90 degrees to form the first laminated laser beam. a fifth mirror that is moved in the direction of 3;
The second laminated laser beam emitted in the second direction from the second mirror group in the fourth group is incident, and the traveling direction of the second laminated laser beam is bent by 90 degrees to form the second laminated laser beam. a sixth mirror that is moved in the direction of 3;
Furthermore,
The fifth mirror has a shape including a third cut-off surface obtained by cutting off one corner of the plurality of sides of the rectangular parallelepiped that includes the side parallel to the height direction from the upper end to the lower end in the height direction. a third reflective surface that reflects the first laminated laser beam and the third cut-off surface have an angle of 45 degrees or less,
The sixth mirror has a shape including a fourth cut-off surface obtained by cutting off one corner of the plurality of sides of the rectangular parallelepiped that includes the side parallel to the height direction from the upper end to the lower end in the height direction. a fourth reflective surface that reflects the second laminated laser beam and the fourth cut-off surface have an angle of 45 degrees or less,
The third mirror, the fourth mirror, the fifth mirror, and the sixth mirror are such that the second mirror is reflected by the third mirror and is incident on the fourth and sixth mirrors. The fourth mirror does not interfere with the laminated laser beam and the first laminated laser beam that is incident on and reflected by the fifth mirror, and the fourth mirror that is incident on and reflected by the third and fifth mirrors. The first laminated laser beam does not interfere with the first laminated laser beam and the second laminated laser beam that is incident on and reflected by the sixth mirror, and the fifth mirror is incident on and reflected by the third laminated laser beam. The sixth mirror enters and reflects the third and fifth mirrors without interfering with the laser beam and the second laminated laser beam that enters and reflects the fourth and sixth mirrors. The laser diode device according to claim 1, wherein the first laminated laser beam and the second laminated laser beam that are incident on and reflected by the fourth mirror are arranged close to each other within a range that does not interfere with each other. The first cut-off surface of the third mirror is an adjacent surface adjacent to the first reflective surface, where one side of the first cut-off surface and one side of the first reflective surface are a common side. and
The second cut-off surface of the fourth mirror is an adjacent surface adjacent to the second reflective surface, where one side of the second cut-off surface and one side of the second reflective surface are a common side. and
The third cut-off surface of the fifth mirror is an adjacent surface adjacent to the third reflective surface, where one side of the third cut-off surface and one side of the third reflective surface are a common side. and
The fourth cut-off surface of the sixth mirror is an adjacent surface adjacent to the fourth reflective surface, where one side of the fourth cut-off surface and one side of the fourth reflective surface are a common side. The laser diode device according to claim 4. The first mirror group in the first group and the second mirror group in the third group are located on one straight line, and the first mirror group in the second group and the second mirror group in the third group are located on one straight line. and the second mirror group in the group No. 4 are located on one straight line,
The third mirror and the fourth mirror are arranged such that the first cut-off surface and the second cut-off surface face each other, and the fifth mirror and the sixth mirror are arranged so that the first cut-off surface and the second cut-off surface face each other. The laser diode device according to claim 5, wherein the third cut-off surface and the fourth cut-off surface are arranged to face each other. The fifth mirror has an optical path of the first laminated laser beam that is incident on the third mirror and reflected, and an optical path of the first laminated laser beam that is incident on the fifth mirror and reflected. placed between
The sixth mirror has an optical path of the second laminated laser beam that is incident on the fourth mirror and reflected, and an optical path of the second laminated laser beam that is incident on the sixth mirror and reflected. placed between
The fifth mirror has a fifth cut-off surface obtained by further cutting off other corners of the plurality of sides of the rectangular parallelepiped, including the side parallel to the height direction, from an upper end to a lower end in the height direction. The fifth cut-off surface has a shape including an adjacent side adjacent to the third reflective surface, where one side of the fifth cut-off surface and one side of the third reflective surface are a common side. a surface, and the third reflective surface and the fifth cut-off surface have an angle of 45 degrees or less,
The sixth mirror has a sixth cut-off surface obtained by further cutting off other corners of the plurality of sides of the rectangular parallelepiped, including sides parallel to the height direction, from an upper end to a lower end in the height direction. The sixth cut-off surface has a shape including an adjacent side adjacent to the fourth reflective surface, where one side of the sixth cut-off surface and one side of the fourth reflective surface are a common side. The laser diode device according to claim 6, wherein the fourth reflective surface and the sixth cut-off surface have an angle of 45 degrees or less.

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