JP2023536819A - 環境に敏感な基板用の犠牲保護層としての低天井温度ホモポリマー - Google Patents

環境に敏感な基板用の犠牲保護層としての低天井温度ホモポリマー Download PDF

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JP2023536819A
JP2023536819A JP2023505859A JP2023505859A JP2023536819A JP 2023536819 A JP2023536819 A JP 2023536819A JP 2023505859 A JP2023505859 A JP 2023505859A JP 2023505859 A JP2023505859 A JP 2023505859A JP 2023536819 A JP2023536819 A JP 2023536819A
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srp
substrate
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mol
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JP2023536819A5 (https=
Inventor
シラード・スティーブン・エム．
ブラシュート・グレゴリー
リマリー・ラッチャナ
ハイムズ・ダイアン
パン・ヤン
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Lam Research Corp
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Lam Research Corp
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    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L61/00—Compositions of condensation polymers of aldehydes or ketones; Compositions of derivatives of such polymers
    • C08L61/18—Condensation polymers of aldehydes or ketones with aromatic hydrocarbons or their halogen derivatives only
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B05—SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D—PROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D1/00—Processes for applying liquids or other fluent materials
    • B05D1/002—Processes for applying liquids or other fluent materials the substrate being rotated
    • B05D1/005—Spin coating
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08G—MACROMOLECULAR COMPOUNDS OBTAINED OTHERWISE THAN BY REACTIONS ONLY INVOLVING UNSATURATED CARBON-TO-CARBON BONDS
    • C08G61/00—Macromolecular compounds obtained by reactions forming a carbon-to-carbon link in the main chain of the macromolecule
    • C08G61/12—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule
    • C08G61/122—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule derived from five- or six-membered heterocyclic compounds, other than imides
    • C08G61/123—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule derived from five- or six-membered heterocyclic compounds, other than imides derived from five-membered heterocyclic compounds
    • C08G61/125—Macromolecular compounds containing atoms other than carbon in the main chain of the macromolecule derived from five- or six-membered heterocyclic compounds, other than imides derived from five-membered heterocyclic compounds with a five-membered ring containing one oxygen atom in the ring
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/01—Manufacture or treatment
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/134—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being in grooves in the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/10—Encapsulations, e.g. protective coatings characterised by their shape or disposition
    • H10W74/131—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed
    • H10W74/137—Encapsulations, e.g. protective coatings characterised by their shape or disposition the semiconductor body being only partially enclosed the encapsulations being directly on the semiconductor body
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10W—GENERIC PACKAGES, INTERCONNECTIONS, CONNECTORS OR OTHER CONSTRUCTIONAL DETAILS OF DEVICES COVERED BY CLASS H10
    • H10W74/00—Encapsulations, e.g. protective coatings
    • H10W74/40—Encapsulations, e.g. protective coatings characterised by their materials
    • H10W74/47—Encapsulations, e.g. protective coatings characterised by their materials comprising organic materials, e.g. plastics or resins
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00—Applications
    • C08L2203/16—Applications used for films
    • C08L2203/162—Applications used for films sealable films
    • C—CHEMISTRY; METALLURGY
    • C08—ORGANIC MACROMOLECULAR COMPOUNDS; THEIR PREPARATION OR CHEMICAL WORKING-UP; COMPOSITIONS BASED THEREON
    • C08L—COMPOSITIONS OF MACROMOLECULAR COMPOUNDS
    • C08L2203/00—Applications
    • C08L2203/20—Applications use in electrical or conductive gadgets
    • C08L2203/206—Applications use in electrical or conductive gadgets use in coating or encapsulating of electronic parts
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/004—Photosensitive materials
    • G03F7/09—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers
    • G03F7/11—Photosensitive materials characterised by structural details, e.g. supports, auxiliary layers having cover layers or intermediate layers, e.g. subbing layers
    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/16—Coating processes; Apparatus therefor

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  • Chemical & Material Sciences (AREA)
  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Medicinal Chemistry (AREA)
  • Organic Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • Polymers & Plastics (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Engineering & Computer Science (AREA)
  • Architecture (AREA)
  • Structural Engineering (AREA)
  • Formation Of Insulating Films (AREA)
  • Organic Low-Molecular-Weight Compounds And Preparation Thereof (AREA)
  • Addition Polymer Or Copolymer, Post-Treatments, Or Chemical Modifications (AREA)
  • Compositions Of Macromolecular Compounds (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
  • Dicing (AREA)
  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
JP2023505859A 2020-07-28 2021-07-23 環境に敏感な基板用の犠牲保護層としての低天井温度ホモポリマー Pending JP2023536819A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202062706035P 2020-07-28 2020-07-28
US62/706,035 2020-07-28
PCT/US2021/042978 WO2022026323A1 (en) 2020-07-28 2021-07-23 Low ceiling temperature homopolymers as sacrificial protection layers for environmentally sensitive substrates

Publications (2)

Publication Number Publication Date
JP2023536819A true JP2023536819A (ja) 2023-08-30
JP2023536819A5 JP2023536819A5 (https=) 2024-07-08

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JP2023505859A Pending JP2023536819A (ja) 2020-07-28 2021-07-23 環境に敏感な基板用の犠牲保護層としての低天井温度ホモポリマー

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US (1) US20230295412A1 (https=)
JP (1) JP2023536819A (https=)
KR (1) KR102939373B1 (https=)
CN (1) CN116194843A (https=)
TW (1) TWI900618B (https=)
WO (1) WO2022026323A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102890564B1 (ko) 2019-01-29 2025-11-24 램 리써치 코포레이션 기판들의 환경에 민감한 표면들을 위한 희생적 보호 층
CN114375489A (zh) 2019-09-04 2022-04-19 朗姆研究公司 刺激响应聚合物膜和制剂
EP4363552A1 (en) * 2021-07-02 2024-05-08 Boise State University Layered constructions with removable layers
KR20250088540A (ko) * 2022-10-10 2025-06-17 램 리써치 코포레이션 화학적 기상 증착 (chemical vapor deposition) 동안 일시적인 표면 보호를 위한 옥시메틸렌 공중합체들 (oxymethylene copolymers)
CN118852506A (zh) * 2024-06-25 2024-10-29 华东理工大学 三线态能量转移诱导聚合光催化剂及其制备方法和应用

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311932A (ja) * 1986-04-11 1988-01-19 ジエイムズ・シ−・ダブリユ・チエン 自己現像する放射レジスト
WO2014161036A1 (en) * 2013-04-02 2014-10-09 University Of South Australia Stimulus responsive substrates
US20160086829A1 (en) * 2014-09-18 2016-03-24 Lam Research Corporation Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material
JP2017207497A (ja) * 2008-06-05 2017-11-24 ジ アドミニストレイターズ オブ ザ チューレン エデュケイショナル ファンドＴｈｅ Ａｄｍｉｎｉｓｔｒａｔｏｒｓ Ｏｆ Ｔｈｅ Ｔｕｌａｎｅ Ｅｄｕｃａｔｉｏｎａｌ Ｆｕｎｄ ポリマー合成中におけるポリマーの機能の進展をモニタリングする方法及び装置
WO2020033015A2 (en) * 2018-03-26 2020-02-13 Georgia Tech Research Corporation Transient polymer formulations, articles thereof, and methods of making and using same
WO2021030252A1 (en) * 2019-08-09 2021-02-18 Georgia Tech Research Corporation Rapid synthesis of polyaldehydes

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11111378B2 (en) * 2018-04-16 2021-09-07 The Board Of Trustees Of The University Of Illinois Bulk transient materials made of cyclic poly(phthalaldehyde)

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6311932A (ja) * 1986-04-11 1988-01-19 ジエイムズ・シ−・ダブリユ・チエン 自己現像する放射レジスト
JP2017207497A (ja) * 2008-06-05 2017-11-24 ジ アドミニストレイターズ オブ ザ チューレン エデュケイショナル ファンドＴｈｅ Ａｄｍｉｎｉｓｔｒａｔｏｒｓ Ｏｆ Ｔｈｅ Ｔｕｌａｎｅ Ｅｄｕｃａｔｉｏｎａｌ Ｆｕｎｄ ポリマー合成中におけるポリマーの機能の進展をモニタリングする方法及び装置
WO2014161036A1 (en) * 2013-04-02 2014-10-09 University Of South Australia Stimulus responsive substrates
US20160086829A1 (en) * 2014-09-18 2016-03-24 Lam Research Corporation Systems and methods for drying high aspect ratio structures without collapse using stimuli-responsive sacrificial bracing material
WO2020033015A2 (en) * 2018-03-26 2020-02-13 Georgia Tech Research Corporation Transient polymer formulations, articles thereof, and methods of making and using same
WO2021030252A1 (en) * 2019-08-09 2021-02-18 Georgia Tech Research Corporation Rapid synthesis of polyaldehydes

Non-Patent Citations (1)

* Cited by examiner, † Cited by third party
Title
JOSHUAA.KAITZ,ET.AL: "End Group Characterization of Poly(phthalaldehyde):Surprising Discovery of a Reversible,Cationic Mac", JOURNAL OF THE AMERICAN CHEMISTRY SOCIETY, vol. 135, JPN6025013215, 7 August 2013 (2013-08-07), US, pages 12755 - 12761, ISSN: 0005563818 *

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Publication number Publication date
KR102939373B1 (ko) 2026-03-13
KR20230044288A (ko) 2023-04-03
US20230295412A1 (en) 2023-09-21
WO2022026323A1 (en) 2022-02-03
TWI900618B (zh) 2025-10-11
TW202225832A (zh) 2022-07-01
CN116194843A (zh) 2023-05-30

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