JP2023522614A5 - - Google Patents

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Publication number
JP2023522614A5
JP2023522614A5 JP2022562423A JP2022562423A JP2023522614A5 JP 2023522614 A5 JP2023522614 A5 JP 2023522614A5 JP 2022562423 A JP2022562423 A JP 2022562423A JP 2022562423 A JP2022562423 A JP 2022562423A JP 2023522614 A5 JP2023522614 A5 JP 2023522614A5
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JP
Japan
Prior art keywords
primary
transformer
shield
type isolator
radial
Prior art date
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Granted
Application number
JP2022562423A
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English (en)
Japanese (ja)
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JP7768895B2 (ja
JP2023522614A (ja
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Application filed filed Critical
Priority claimed from PCT/US2021/023670 external-priority patent/WO2021211269A1/en
Publication of JP2023522614A publication Critical patent/JP2023522614A/ja
Publication of JP2023522614A5 publication Critical patent/JP2023522614A5/ja
Application granted granted Critical
Publication of JP7768895B2 publication Critical patent/JP7768895B2/ja
Active legal-status Critical Current
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JP2022562423A 2020-04-14 2021-03-23 効果的な磁気電力伝送のためのｒｆシールド構造を有する変圧器型アイソレータ Active JP7768895B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063010019P 2020-04-14 2020-04-14
US63/010,019 2020-04-14
PCT/US2021/023670 WO2021211269A1 (en) 2020-04-14 2021-03-23 Transformer isolator having rf shield structure for effective magnetic power transfer

Publications (3)

Publication Number Publication Date
JP2023522614A JP2023522614A (ja) 2023-05-31
JP2023522614A5 true JP2023522614A5 (https=) 2024-04-02
JP7768895B2 JP7768895B2 (ja) 2025-11-12

Family

ID=78083665

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022562423A Active JP7768895B2 (ja) 2020-04-14 2021-03-23 効果的な磁気電力伝送のためのｒｆシールド構造を有する変圧器型アイソレータ

Country Status (5)

Country Link
US (1) US20230134296A1 (https=)
JP (1) JP7768895B2 (https=)
KR (1) KR20230002643A (https=)
CN (1) CN115769320A (https=)
WO (1) WO2021211269A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12523690B2 (en) 2021-03-17 2026-01-13 Advanced Energy Industries, Inc. Capacitance sensing systems and methods
JPWO2024004256A1 (https=) * 2022-06-29 2024-01-04
WO2025126437A1 (ja) * 2023-12-14 2025-06-19 東京エレクトロン株式会社 プラズマ処理装置
KR20250117020A (ko) * 2024-01-26 2025-08-04 삼성전자주식회사 기판 처리 장치
US20250266281A1 (en) * 2024-02-15 2025-08-21 Advanced Energy Industries, Inc. Electrostatic wafer clamping and sensing system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4837556A (en) * 1985-04-15 1989-06-06 Kabushiki Kaisha Nihon Denzai Kogyo Kenkyusho Signal transmission device
US5442956A (en) * 1992-06-03 1995-08-22 Trw Inc. Torque sensor for a power assist steering system
KR20000068364A (ko) * 1997-07-03 2000-11-25 후루까와 준노스께 분리형 트랜스포머 및 분리형 트랜스포머를 이용한전송제어장치
US7084728B2 (en) * 2003-12-15 2006-08-01 Nokia Corporation Electrically decoupled integrated transformer having at least one grounded electric shield
EP2169692B1 (en) * 2008-09-26 2011-07-06 Bruker Biospin SA High voltage step-up dry power transformer and power supply unit comprising at least one such transformer
US8755204B2 (en) * 2009-10-21 2014-06-17 Lam Research Corporation RF isolation for power circuitry
WO2012082854A2 (en) * 2010-12-17 2012-06-21 Mattson Technology, Inc. Inductively coupled plasma source for plasma processing
US10460914B2 (en) 2017-11-30 2019-10-29 Lam Research Corporation Ferrite cage RF isolator for power circuitry
US11177067B2 (en) 2018-07-25 2021-11-16 Lam Research Corporation Magnetic shielding for plasma sources
US12125631B2 (en) * 2018-08-06 2024-10-22 Google Llc Shielded electrical transformer
WO2021071765A1 (en) 2019-10-08 2021-04-15 Lam Research Corporation Power source isolation circuits for heater elements of substrate supports of substrate processing systems

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