KR20230002643A - 효과적인 자기 전력 전달 (magnetic power transfer) 을 위한 RF 차폐 구조체를 갖는 변압기 절연기 (isolation transformer) - Google Patents

효과적인 자기 전력 전달 (magnetic power transfer) 을 위한 RF 차폐 구조체를 갖는 변압기 절연기 (isolation transformer) Download PDF

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Publication number
KR20230002643A
KR20230002643A KR1020227039438A KR20227039438A KR20230002643A KR 20230002643 A KR20230002643 A KR 20230002643A KR 1020227039438 A KR1020227039438 A KR 1020227039438A KR 20227039438 A KR20227039438 A KR 20227039438A KR 20230002643 A KR20230002643 A KR 20230002643A
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South Korea
Prior art keywords
primary
shield
radial
ferrite
segments
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Pending
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KR1020227039438A
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English (en)
Korean (ko)
Inventor
네일 벤자민
헤마 스와루프 모피데비
존 피즈
Original Assignee
램 리써치 코포레이션
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Publication of KR20230002643A publication Critical patent/KR20230002643A/ko
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • H01F27/36—Electric or magnetic shields or screens
    • H01F27/363—Electric or magnetic shields or screens made of electrically conductive material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/24—Magnetic cores
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/28—Coils; Windings; Conductive connections
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F27/00—Details of transformers or inductances, in general
    • H01F27/34—Special means for preventing or reducing unwanted electric or magnetic effects, e.g. no-load losses, reactive currents, harmonics, oscillations, leakage fields
    • H01F27/36—Electric or magnetic shields or screens
    • H01F27/366—Electric or magnetic shields or screens made of ferromagnetic material
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F38/00—Adaptations of transformers or inductances for specific applications or functions
    • H01F38/14—Inductive couplings
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32697—Electrostatic control
    • H01J37/32706—Polarising the substrate
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32431—Constructional details of the reactor
    • H01J37/32715—Workpiece holder
    • H01J37/32724—Temperature
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/20—Positioning, supporting, modifying or maintaining the physical state of objects being observed or treated
    • H01J2237/2007—Holding mechanisms
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/32—Gas-filled discharge tubes
    • H01J37/32009—Arrangements for generation of plasma specially adapted for examination or treatment of objects, e.g. plasma sources
    • H01J37/32082—Radio frequency generated discharge
    • H01J37/32174—Circuits specially adapted for controlling the RF discharge
    • H01J37/32183—Matching circuits

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Plasma Technology (AREA)
  • Drying Of Semiconductors (AREA)
KR1020227039438A 2020-04-14 2021-03-23 효과적인 자기 전력 전달 (magnetic power transfer) 을 위한 RF 차폐 구조체를 갖는 변압기 절연기 (isolation transformer) Pending KR20230002643A (ko)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
US202063010019P 2020-04-14 2020-04-14
US63/010,019 2020-04-14
PCT/US2021/023670 WO2021211269A1 (en) 2020-04-14 2021-03-23 Transformer isolator having rf shield structure for effective magnetic power transfer

Publications (1)

Publication Number Publication Date
KR20230002643A true KR20230002643A (ko) 2023-01-05

Family

ID=78083665

Family Applications (1)

Application Number Title Priority Date Filing Date
KR1020227039438A Pending KR20230002643A (ko) 2020-04-14 2021-03-23 효과적인 자기 전력 전달 (magnetic power transfer) 을 위한 RF 차폐 구조체를 갖는 변압기 절연기 (isolation transformer)

Country Status (5)

Country Link
US (1) US20230134296A1 (https=)
JP (1) JP7768895B2 (https=)
KR (1) KR20230002643A (https=)
CN (1) CN115769320A (https=)
WO (1) WO2021211269A1 (https=)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12523690B2 (en) 2021-03-17 2026-01-13 Advanced Energy Industries, Inc. Capacitance sensing systems and methods
JPWO2024004256A1 (https=) * 2022-06-29 2024-01-04
WO2025126437A1 (ja) * 2023-12-14 2025-06-19 東京エレクトロン株式会社 プラズマ処理装置
KR20250117020A (ko) * 2024-01-26 2025-08-04 삼성전자주식회사 기판 처리 장치
US20250266281A1 (en) * 2024-02-15 2025-08-21 Advanced Energy Industries, Inc. Electrostatic wafer clamping and sensing system

Family Cites Families (11)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4837556A (en) * 1985-04-15 1989-06-06 Kabushiki Kaisha Nihon Denzai Kogyo Kenkyusho Signal transmission device
US5442956A (en) * 1992-06-03 1995-08-22 Trw Inc. Torque sensor for a power assist steering system
KR20000068364A (ko) * 1997-07-03 2000-11-25 후루까와 준노스께 분리형 트랜스포머 및 분리형 트랜스포머를 이용한전송제어장치
US7084728B2 (en) * 2003-12-15 2006-08-01 Nokia Corporation Electrically decoupled integrated transformer having at least one grounded electric shield
EP2169692B1 (en) * 2008-09-26 2011-07-06 Bruker Biospin SA High voltage step-up dry power transformer and power supply unit comprising at least one such transformer
US8755204B2 (en) * 2009-10-21 2014-06-17 Lam Research Corporation RF isolation for power circuitry
WO2012082854A2 (en) * 2010-12-17 2012-06-21 Mattson Technology, Inc. Inductively coupled plasma source for plasma processing
US10460914B2 (en) 2017-11-30 2019-10-29 Lam Research Corporation Ferrite cage RF isolator for power circuitry
US11177067B2 (en) 2018-07-25 2021-11-16 Lam Research Corporation Magnetic shielding for plasma sources
US12125631B2 (en) * 2018-08-06 2024-10-22 Google Llc Shielded electrical transformer
WO2021071765A1 (en) 2019-10-08 2021-04-15 Lam Research Corporation Power source isolation circuits for heater elements of substrate supports of substrate processing systems

Also Published As

Publication number Publication date
JP7768895B2 (ja) 2025-11-12
US20230134296A1 (en) 2023-05-04
JP2023522614A (ja) 2023-05-31
CN115769320A (zh) 2023-03-07
WO2021211269A1 (en) 2021-10-21

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