JP2023520781A - ケイ素含有膜を調製するための前駆体及び方法 - Google Patents
ケイ素含有膜を調製するための前駆体及び方法 Download PDFInfo
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- JP2023520781A JP2023520781A JP2022559935A JP2022559935A JP2023520781A JP 2023520781 A JP2023520781 A JP 2023520781A JP 2022559935 A JP2022559935 A JP 2022559935A JP 2022559935 A JP2022559935 A JP 2022559935A JP 2023520781 A JP2023520781 A JP 2023520781A
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- vapor deposition
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- 238000000034 method Methods 0.000 title claims abstract description 50
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 42
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 42
- 239000010703 silicon Substances 0.000 title claims abstract description 42
- 239000002243 precursor Substances 0.000 title claims description 32
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 49
- 229910052581 Si3N4 Inorganic materials 0.000 claims abstract description 27
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims abstract description 24
- 235000012239 silicon dioxide Nutrition 0.000 claims abstract description 23
- 239000000377 silicon dioxide Substances 0.000 claims abstract description 23
- 238000000151 deposition Methods 0.000 claims abstract description 21
- 238000007740 vapor deposition Methods 0.000 claims abstract description 12
- 150000001875 compounds Chemical class 0.000 claims description 47
- 230000008569 process Effects 0.000 claims description 26
- 238000000231 atomic layer deposition Methods 0.000 claims description 24
- 238000010926 purge Methods 0.000 claims description 24
- 229910052757 nitrogen Inorganic materials 0.000 claims description 21
- 238000005229 chemical vapour deposition Methods 0.000 claims description 17
- 238000004377 microelectronic Methods 0.000 claims description 16
- 239000000376 reactant Substances 0.000 claims description 15
- 239000011261 inert gas Substances 0.000 claims description 14
- YVOSZNNYXUPZJZ-UHFFFAOYSA-N C[SiH](C)N(N(C)[SiH](C)C)C Chemical compound C[SiH](C)N(N(C)[SiH](C)C)C YVOSZNNYXUPZJZ-UHFFFAOYSA-N 0.000 claims description 13
- 239000000460 chlorine Substances 0.000 claims description 12
- 229910052801 chlorine Inorganic materials 0.000 claims description 12
- 125000005843 halogen group Chemical group 0.000 claims description 12
- 229910052739 hydrogen Inorganic materials 0.000 claims description 11
- 239000001257 hydrogen Substances 0.000 claims description 11
- 229910052794 bromium Inorganic materials 0.000 claims description 10
- 229910052740 iodine Inorganic materials 0.000 claims description 10
- WHXSMMKQMYFTQS-UHFFFAOYSA-N Lithium Chemical group [Li] WHXSMMKQMYFTQS-UHFFFAOYSA-N 0.000 claims description 8
- MZRVEZGGRBJDDB-UHFFFAOYSA-N N-Butyllithium Chemical compound [Li]CCCC MZRVEZGGRBJDDB-UHFFFAOYSA-N 0.000 claims description 8
- CBENFWSGALASAD-UHFFFAOYSA-N Ozone Chemical compound [O-][O+]=O CBENFWSGALASAD-UHFFFAOYSA-N 0.000 claims description 8
- 238000006243 chemical reaction Methods 0.000 claims description 8
- 238000002347 injection Methods 0.000 claims description 8
- 239000007924 injection Substances 0.000 claims description 8
- 229910052744 lithium Inorganic materials 0.000 claims description 8
- 125000002496 methyl group Chemical group [H]C([H])([H])* 0.000 claims description 8
- ZLMJMSJWJFRBEC-UHFFFAOYSA-N Potassium Chemical group [K] ZLMJMSJWJFRBEC-UHFFFAOYSA-N 0.000 claims description 7
- 229910052700 potassium Chemical group 0.000 claims description 7
- 239000011591 potassium Chemical group 0.000 claims description 7
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 claims description 5
- 239000001301 oxygen Substances 0.000 claims description 5
- 229910052760 oxygen Inorganic materials 0.000 claims description 5
- ZCSHNCUQKCANBX-UHFFFAOYSA-N lithium diisopropylamide Chemical compound [Li+].CC(C)[N-]C(C)C ZCSHNCUQKCANBX-UHFFFAOYSA-N 0.000 claims description 4
- 125000004433 nitrogen atom Chemical group N* 0.000 claims description 3
- 125000004169 (C1-C6) alkyl group Chemical group 0.000 claims description 2
- KCMZYCFSSYXEQR-UHFFFAOYSA-N CCCC[K] Chemical compound CCCC[K] KCMZYCFSSYXEQR-UHFFFAOYSA-N 0.000 claims description 2
- 125000004122 cyclic group Chemical group 0.000 claims description 2
- 229910052736 halogen Inorganic materials 0.000 claims description 2
- UBJFKNSINUCEAL-UHFFFAOYSA-N lithium;2-methylpropane Chemical compound [Li+].C[C-](C)C UBJFKNSINUCEAL-UHFFFAOYSA-N 0.000 claims description 2
- BHGADZKHWXCHKX-UHFFFAOYSA-N methane;potassium Chemical compound C.[K] BHGADZKHWXCHKX-UHFFFAOYSA-N 0.000 claims description 2
- DVSDBMFJEQPWNO-UHFFFAOYSA-N methyllithium Chemical compound C[Li] DVSDBMFJEQPWNO-UHFFFAOYSA-N 0.000 claims description 2
- QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen group Chemical group [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 claims description 2
- 125000004435 hydrogen atom Chemical class [H]* 0.000 claims 5
- 125000001495 ethyl group Chemical group [H]C([H])([H])C([H])([H])* 0.000 claims 2
- 125000001309 chloro group Chemical group Cl* 0.000 claims 1
- 239000012686 silicon precursor Substances 0.000 abstract description 12
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 abstract description 7
- 229910010271 silicon carbide Inorganic materials 0.000 abstract description 5
- 239000007788 liquid Substances 0.000 abstract description 4
- 210000002381 plasma Anatomy 0.000 description 38
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 34
- 239000007789 gas Substances 0.000 description 20
- 239000000758 substrate Substances 0.000 description 15
- 230000008021 deposition Effects 0.000 description 14
- 230000001590 oxidative effect Effects 0.000 description 10
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 9
- 230000015572 biosynthetic process Effects 0.000 description 9
- 229910052799 carbon Inorganic materials 0.000 description 9
- 229910052681 coesite Inorganic materials 0.000 description 9
- 229910052906 cristobalite Inorganic materials 0.000 description 9
- 229910052682 stishovite Inorganic materials 0.000 description 9
- 229910052905 tridymite Inorganic materials 0.000 description 9
- VLKZOEOYAKHREP-UHFFFAOYSA-N n-Hexane Chemical compound CCCCCC VLKZOEOYAKHREP-UHFFFAOYSA-N 0.000 description 8
- 239000000243 solution Substances 0.000 description 7
- OFBQJSOFQDEBGM-UHFFFAOYSA-N Pentane Chemical compound CCCCC OFBQJSOFQDEBGM-UHFFFAOYSA-N 0.000 description 6
- 238000005137 deposition process Methods 0.000 description 6
- 150000002431 hydrogen Chemical class 0.000 description 5
- 239000004065 semiconductor Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 5
- QGZKDVFQNNGYKY-UHFFFAOYSA-N Ammonia Chemical compound N QGZKDVFQNNGYKY-UHFFFAOYSA-N 0.000 description 4
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 4
- GQPLMRYTRLFLPF-UHFFFAOYSA-N Nitrous Oxide Chemical compound [O-][N+]#N GQPLMRYTRLFLPF-UHFFFAOYSA-N 0.000 description 4
- JUJWROOIHBZHMG-UHFFFAOYSA-N Pyridine Chemical compound C1=CC=NC=C1 JUJWROOIHBZHMG-UHFFFAOYSA-N 0.000 description 4
- YGHUUVGIRWMJGE-UHFFFAOYSA-N chlorodimethylsilane Chemical compound C[SiH](C)Cl YGHUUVGIRWMJGE-UHFFFAOYSA-N 0.000 description 4
- 239000003989 dielectric material Substances 0.000 description 4
- 239000000203 mixture Substances 0.000 description 4
- 125000006850 spacer group Chemical group 0.000 description 4
- DIIIISSCIXVANO-UHFFFAOYSA-N 1,2-Dimethylhydrazine Chemical compound CNNC DIIIISSCIXVANO-UHFFFAOYSA-N 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 3
- 230000006870 function Effects 0.000 description 3
- 238000010348 incorporation Methods 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 239000011541 reaction mixture Substances 0.000 description 3
- 229920006395 saturated elastomer Polymers 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000003786 synthesis reaction Methods 0.000 description 3
- RHUYHJGZWVXEHW-UHFFFAOYSA-N 1,1-Dimethyhydrazine Chemical compound CN(C)N RHUYHJGZWVXEHW-UHFFFAOYSA-N 0.000 description 2
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 2
- OAKJQQAXSVQMHS-UHFFFAOYSA-N Hydrazine Chemical compound NN OAKJQQAXSVQMHS-UHFFFAOYSA-N 0.000 description 2
- 238000004833 X-ray photoelectron spectroscopy Methods 0.000 description 2
- 150000003973 alkyl amines Chemical class 0.000 description 2
- 229910021529 ammonia Inorganic materials 0.000 description 2
- 229910052786 argon Inorganic materials 0.000 description 2
- 230000004888 barrier function Effects 0.000 description 2
- 239000006227 byproduct Substances 0.000 description 2
- 239000012043 crude product Substances 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 229910052732 germanium Inorganic materials 0.000 description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000001307 helium Substances 0.000 description 2
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 229910044991 metal oxide Inorganic materials 0.000 description 2
- 150000004706 metal oxides Chemical class 0.000 description 2
- VNWKTOKETHGBQD-UHFFFAOYSA-N methane Chemical compound C VNWKTOKETHGBQD-UHFFFAOYSA-N 0.000 description 2
- VYIRVGYSUZPNLF-UHFFFAOYSA-N n-(tert-butylamino)silyl-2-methylpropan-2-amine Chemical compound CC(C)(C)N[SiH2]NC(C)(C)C VYIRVGYSUZPNLF-UHFFFAOYSA-N 0.000 description 2
- 150000004767 nitrides Chemical class 0.000 description 2
- 238000001208 nuclear magnetic resonance pulse sequence Methods 0.000 description 2
- 238000002161 passivation Methods 0.000 description 2
- UMJSCPRVCHMLSP-UHFFFAOYSA-N pyridine Natural products COC1=CC=CN=C1 UMJSCPRVCHMLSP-UHFFFAOYSA-N 0.000 description 2
- 230000009257 reactivity Effects 0.000 description 2
- 238000001577 simple distillation Methods 0.000 description 2
- 239000002002 slurry Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000003039 volatile agent Substances 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Chemical compound O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- WKYWHPWEQYJUAT-UHFFFAOYSA-N 7-[3-(aminomethyl)-4-propoxyphenyl]-4-methylquinolin-2-amine Chemical compound CCCOC1=C(C=C(C=C1)C2=CC3=C(C=C2)C(=CC(=N3)N)C)CN WKYWHPWEQYJUAT-UHFFFAOYSA-N 0.000 description 1
- BSYNRYMUTXBXSQ-UHFFFAOYSA-N Aspirin Chemical compound CC(=O)OC1=CC=CC=C1C(O)=O BSYNRYMUTXBXSQ-UHFFFAOYSA-N 0.000 description 1
- 229910052582 BN Inorganic materials 0.000 description 1
- ZOXJGFHDIHLPTG-UHFFFAOYSA-N Boron Chemical compound [B] ZOXJGFHDIHLPTG-UHFFFAOYSA-N 0.000 description 1
- PZNSFCLAULLKQX-UHFFFAOYSA-N Boron nitride Chemical compound N#B PZNSFCLAULLKQX-UHFFFAOYSA-N 0.000 description 1
- 239000005046 Chlorosilane Substances 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- OTMSDBZUPAUEDD-UHFFFAOYSA-N Ethane Chemical compound CC OTMSDBZUPAUEDD-UHFFFAOYSA-N 0.000 description 1
- LFQSCWFLJHTTHZ-UHFFFAOYSA-N Ethanol Chemical compound CCO LFQSCWFLJHTTHZ-UHFFFAOYSA-N 0.000 description 1
- VGGSQFUCUMXWEO-UHFFFAOYSA-N Ethene Chemical compound C=C VGGSQFUCUMXWEO-UHFFFAOYSA-N 0.000 description 1
- 239000005977 Ethylene Substances 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZOKXTWBITQBERF-UHFFFAOYSA-N Molybdenum Chemical compound [Mo] ZOKXTWBITQBERF-UHFFFAOYSA-N 0.000 description 1
- ZMXDDKWLCZADIW-UHFFFAOYSA-N N,N-Dimethylformamide Chemical compound CN(C)C=O ZMXDDKWLCZADIW-UHFFFAOYSA-N 0.000 description 1
- KJTLSVCANCCWHF-UHFFFAOYSA-N Ruthenium Chemical compound [Ru] KJTLSVCANCCWHF-UHFFFAOYSA-N 0.000 description 1
- 229910020286 SiOxNy Inorganic materials 0.000 description 1
- ATJFFYVFTNAWJD-UHFFFAOYSA-N Tin Chemical compound [Sn] ATJFFYVFTNAWJD-UHFFFAOYSA-N 0.000 description 1
- PDPXHRBRYUQCQA-SFOWXEAESA-N [(1s)-1-fluoro-2-(hydroxyamino)-2-oxoethyl]phosphonic acid Chemical compound ONC(=O)[C@@H](F)P(O)(O)=O PDPXHRBRYUQCQA-SFOWXEAESA-N 0.000 description 1
- 150000001298 alcohols Chemical class 0.000 description 1
- 229910052783 alkali metal Inorganic materials 0.000 description 1
- 150000001340 alkali metals Chemical class 0.000 description 1
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- BIVUUOPIAYRCAP-UHFFFAOYSA-N aminoazanium;chloride Chemical compound Cl.NN BIVUUOPIAYRCAP-UHFFFAOYSA-N 0.000 description 1
- 239000006117 anti-reflective coating Substances 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- 239000002585 base Substances 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 239000003153 chemical reaction reagent Substances 0.000 description 1
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 229910017052 cobalt Inorganic materials 0.000 description 1
- 239000010941 cobalt Substances 0.000 description 1
- GUTLYIVDDKVIGB-UHFFFAOYSA-N cobalt atom Chemical compound [Co] GUTLYIVDDKVIGB-UHFFFAOYSA-N 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- UBHZUDXTHNMNLD-UHFFFAOYSA-N dimethylsilane Chemical compound C[SiH2]C UBHZUDXTHNMNLD-UHFFFAOYSA-N 0.000 description 1
- 230000000459 effect on growth Effects 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 230000008030 elimination Effects 0.000 description 1
- 238000003379 elimination reaction Methods 0.000 description 1
- 230000007613 environmental effect Effects 0.000 description 1
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- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 1
- 239000012467 final product Substances 0.000 description 1
- 150000002367 halogens Chemical group 0.000 description 1
- 238000009616 inductively coupled plasma Methods 0.000 description 1
- 229910010272 inorganic material Inorganic materials 0.000 description 1
- 239000011147 inorganic material Substances 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 229910052741 iridium Inorganic materials 0.000 description 1
- GKOZUEZYRPOHIO-UHFFFAOYSA-N iridium atom Chemical compound [Ir] GKOZUEZYRPOHIO-UHFFFAOYSA-N 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
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- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 239000011733 molybdenum Substances 0.000 description 1
- HDZGCSFEDULWCS-UHFFFAOYSA-N monomethylhydrazine Chemical compound CNN HDZGCSFEDULWCS-UHFFFAOYSA-N 0.000 description 1
- 229910052754 neon Inorganic materials 0.000 description 1
- GKAOGPIIYCISHV-UHFFFAOYSA-N neon atom Chemical compound [Ne] GKAOGPIIYCISHV-UHFFFAOYSA-N 0.000 description 1
- 239000001272 nitrous oxide Substances 0.000 description 1
- 239000007800 oxidant agent Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 238000000623 plasma-assisted chemical vapour deposition Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 229910052707 ruthenium Inorganic materials 0.000 description 1
- 238000009738 saturating Methods 0.000 description 1
- 229910000077 silane Inorganic materials 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
- MUQNAPSBHXFMHT-UHFFFAOYSA-N tert-butylhydrazine Chemical compound CC(C)(C)NN MUQNAPSBHXFMHT-UHFFFAOYSA-N 0.000 description 1
- 238000005979 thermal decomposition reaction Methods 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
- 238000009834 vaporization Methods 0.000 description 1
- 230000008016 vaporization Effects 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Images
Classifications
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- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/025—Silicon compounds without C-silicon linkages
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/10—Compounds having one or more C—Si linkages containing nitrogen having a Si-N linkage
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/34—Nitrides
- C23C16/345—Silicon nitride
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/22—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the deposition of inorganic material, other than metallic material
- C23C16/30—Deposition of compounds, mixtures or solid solutions, e.g. borides, carbides, nitrides
- C23C16/40—Oxides
- C23C16/401—Oxides containing silicon
- C23C16/402—Silicon dioxide
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/448—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials
- C23C16/4481—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material
- C23C16/4482—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating characterised by the method used for generating reactive gas streams, e.g. by evaporation or sublimation of precursor materials by evaporation using carrier gas in contact with the source material by bubbling of carrier gas through liquid source material
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
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Abstract
Description
(式中、各R1は、水素、C1~C4アルキル、又はCl、Br及びIから選択されるハロゲン原子から独立して選択される。)の化合物を提供する。一実施形態では、各R1は、メチルである。
式(I)の化合物は、以下の反応スキームに従って調製することができる。
上記の工程2に示すように、ヒドラジドジメチルシラン(又は他のいくつかのヒドラジド(R1)2--シラン)をn-ブチルリチウム又は窒素原子を任意選択で含有する他のいくつかの反応性アルカリ金属C1~C6アルカンと反応させることができる。他の潜在的な反応物としては、メチルリチウム、t-ブチルリチウム、リチウムジイソプロピルアミド、メチルカリウム、n-ブチルカリウムなどが挙げられ、以下に示すような新規中間体(II):
(式中、各R1は、水素、C1~C4アルキル、又はCl、Br及びIから選択されるハロゲン原子から独立して選択され、R2は、リチウム又はカリウムから選択される。)が得られ、これは、今度は式(I)の化合物の合成に有用である。次いで、式(II)の化合物を、このスキームにおいて、例えば、クロロジメチルシランと反応させる。したがって、本発明の第3の態様では、上記の式(II)の化合物が提供される。
A.式:
の化合物を式M-R3(式中、Mは、リチウム又はカリウムであり、R3は、窒素原子を任意選択で含むC1~C6アルキル基である。)の化合物と接触させて、式(II):
(式中、各R1は、水素、C1~C4アルキル、又はCl、Br及びIから選択されるハライド原子から独立して選択され、R2は、リチウム又はカリウムから選択される。)の化合物を提供する工程と、その後に
B.式(II)の化合物を式:
式中、Xは、ハロゲンである。)の化合物と反応させる工程と
を含む、式(I)の化合物:
(式中、各R1は、水素、C1~C4アルキル、又はCl、Br及びIから選択されるハロゲン原子から独立して選択される。)を調製するための方法が提供される。
(i)0.1~30秒間の式(I)の前駆体の注入、その後の、
(ii)1~30秒間の不活性ガスを用いたパージング、その後の、
(iii)約0.1~30秒間の50~500sccm(標準立方センチメートル毎分)の流速でのオゾンの注入、その後の
(iv)1~30秒間の不活性ガスを用いたパージング。(1サイクル)。したがって、所望の厚さの膜が得られるまで、工程(i)~(iv)を繰り返すことができる。
(i)0.1~30秒間の式(I)の前駆体の注入工程、その後に、
(ii)不活性ガスを使用した1~30秒間のパージング工程、その後に、
(iii)約0.1~30秒間の50~500sccmの流速でのオゾンの注入工程、その後に、
(iv)不活性ガスを使用した1~30秒間のパージング、及び所望の厚さの膜が得られるまで工程(i)~(iv)を繰り返す工程
を含むパルシングシーケンスとを含む、方法を提供する。
(i)式(I)の前駆体を0.1~30秒間注入すること、その後の、
(ii)不活性ガスを用いて1~30秒間パージングすること、その後の
(iii)N2を用いて、50~500sccmの流速、約50ワット~1000ワットの出力で、0.1~30秒間、窒素プラズマを注入、その後の、
(iv)プラズマ曝露後に不活性ガスを使用した1~30秒の任意選択のパージ。(1サイクル)。したがって、所望の厚さの膜が得られるまで、工程(i)~(iv)を繰り返すことができる。
(i)0.1~30秒間の式(I)の前駆体の注入、その後の、
(ii)不活性ガスを使用した1~30秒間のパージ、その後の、
(iii)0.1~30秒間の50~500sccmの流速、約50ワット~500ワットの出力でのN2を使用した窒素プラズマの注入、その後の、
(iv)プラズマ曝露後の不活性ガスを使用した1~30秒の任意選択のパージ、及び所望の厚さの膜が得られるまで工程(i)~(iv)を繰り返すこと
を含むパルシングシーケンスとを含む。
N,N’-ジメチルヒドラジン(88.93g、1.48mol)のn-ペンタン(350g、4.85mol)氷冷溶液に、クロロジメチルシラン(70g、0.74mol)のn-ペンタン(70g、0.97mol)溶液を滴下し、-10℃未満で撹拌した。クロロジメチルシラン溶液を添加した後、反応混合物を室温で5時間撹拌した。得られた白色スラリーをろ過し、n-ペンタン(125g)で洗浄した。揮発性物質を除去した後、得られた粗生成物を50℃、240トルでの単蒸留によって精製し、標題化合物を無色液体として得た(62.50g、71.4%)。
ジメチルヒドラジド-ジメチルシラン(60g、0.507mol)のn-ヘキサン(210g、2.44mol)溶液に、n-ブチルリチウムのn-ヘキサン(203mL、2.5mol)溶液を-20℃で滴下した。n-ブチルリチウム溶液を添加した後、反応混合物を室温で2時間撹拌し、次いで10℃に冷却した。この反応混合物に、クロロジメチルシランのn-ヘキサン溶液を滴下し、室温で5時間撹拌した。得られた白色スラリーをろ過し、n-ヘキサン(90g)で洗浄した。揮発性物質を除去した後、得られた粗生成物を80℃、80トルでの単蒸留によって精製して、最終生成物を無色の液体として得た(78.71g、63.5%)。
ケイ素前駆体として、ビス(ジメチルシリル)ジメチルヒドラジン蒸気を使用して、酸化ケイ素膜を堆積した。ビス(ジメチルシリル)ジメチルヒドラジンを室温でバブラーに入れた。ダブルシャワーヘッドALD反応器を使用して、ウエハ温度として500~600℃のオゾン共反応物を用いてケイ素ウエハ上に酸化ケイ素膜を堆積させた。反応器の圧力は、0.5~1.5トルに制御した。酸化ケイ素膜を、以下のパルスシークエンス、28秒のケイ素前駆体パルスパルス、20秒のArパージ、25秒のオゾンパルス及び20秒のArパージを使用して形成した。このシークエンスを160サイクル繰り返し、400Åの膜厚を得た。堆積速度は、膜中に炭素及び塩素不純物がなく、550℃で約2.5Å/サイクルで飽和した。0.2%HF希釈溶液を使用して、膜のウェットエッチング速度を51.4Å/分で得た。
ケイ素原料前駆体材料として、ビス(ジメチルシリル)ジメチルヒドラジンを使用して、窒化ケイ素膜を堆積した。BDMSDMHのバブラーを室温(約23℃)に保持し、反応器の圧力を0.5~1.5トルに制御した。以下のパルスシークエンスを使用して窒化ケイ素膜を形成した:28秒のケイ素前駆体パルス、20秒のArパージ、200又は300Wでの13.56MHzの周波数パルスでの15又は20秒の直接窒素プラズマ、及び20秒のArパージ。このシークエンスを170サイクル繰り返し、200Åの膜厚を得た。このプロセスは、膜中に炭素及び塩素不純物がなく、300℃で約1.16Å/サイクルで飽和した。
Claims (20)
- 各R1がHである、請求項1に記載の化合物。
- 各R1がメチルである、請求項1に記載の化合物。
- 各R1がエチルである、請求項1に記載の化合物。
- 各R1が、Cl、Br及びIから選択されるハロゲン原子である、請求項1に記載の化合物。
- 式(I):
(式中、各R1は、水素、C1~C4アルキル、又はCl、Br及びIから選択されるハロゲン原子から独立して選択される。)の化合物を調製するための方法であって、
A.式:
の化合物を式M-R3(式中、Mは、リチウム又はカリウムであり、R3は、窒素原子を任意選択で含むC1~C6アルキル基である。)の化合物と接触させて、式(II):
(式中、各R1は、水素、C1~C4アルキル、又はCl、Br及びIから選択されるハライド原子から独立して選択され、R2は、リチウム又はカリウムから選択される。)の化合物を提供する工程と、その後に
B.式(II)の化合物を式:
(式中、Xは、ハロゲンである。)の化合物と反応させる工程と
を含む、方法。 - 各R1がメチルである、請求項6に記載の方法。
- 式M-R3の化合物が、n-ブチルリチウム、メチルリチウム、t-ブチルリチウム、リチウムジイソプロピルアミド、メチルカリウム、及びn-ブチルカリウムから選択される、請求項6に記載の方法。
- 各R1がメチルであり、Xがクロロであり、Mがリチウムである、請求項6に記載の方法。
- 各R1がメチルであり、R2がリチウムである、請求項10に記載の化合物。
- 各R1がメチルであり、R2がカリウムである、請求項10に記載の化合物。
- 各R2がエチルである、請求項10に記載の化合物。
- ケイ素含有膜が二酸化ケイ素である、請求項14に記載の方法。
- ケイ素含有膜が窒化ケイ素である、請求項14に記載の方法。
- 蒸気堆積条件が、化学蒸着(CVD)、原子層堆積(ALD)、プラズマ強化ALD(PEALD)、プラズマ強化周期性化学蒸着(PECCVD)、流動性化学蒸着(FCVD)、プラズマ強化ALD様プロセス、又は酸素含有反応物、窒素含有反応物、若しくはそれらの組合せを用いるALDプロセスから選択される、請求項10に記載の方法。
- 蒸気堆積条件が、約150℃~約650℃の温度と、
(v)0.1~30秒間の式(I)の前駆体の注入工程、その後に、
(vi)不活性ガスを使用した1~30秒間のパージング工程、その後に、
(vii)約0.1~30秒間の50~500sccmの流速でのオゾンの注入工程、その後に、
(viii)不活性ガスを使用した1~30秒間のパージング、及び所望の厚さの膜が得られるまで工程(i)~(iv)を繰り返す工程
を含むパルシングシーケンスと
を含む、請求項15に記載の方法。 - 式(I)の化合物がビス(ジメチルシリル)ジメチルヒドラジンである、請求項18に記載の方法。
- 温度が約500~550℃である、請求項18に記載の方法。
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