JP2023504743A - 複数の障壁材料から作製される拡散障壁、並びに関連する物品及び方法 - Google Patents
複数の障壁材料から作製される拡散障壁、並びに関連する物品及び方法 Download PDFInfo
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- JP2023504743A JP2023504743A JP2022534187A JP2022534187A JP2023504743A JP 2023504743 A JP2023504743 A JP 2023504743A JP 2022534187 A JP2022534187 A JP 2022534187A JP 2022534187 A JP2022534187 A JP 2022534187A JP 2023504743 A JP2023504743 A JP 2023504743A
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- diffusion barrier
- fluorides
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- MCMNRKCIXSYSNV-UHFFFAOYSA-N Zirconium dioxide Chemical compound O=[Zr]=O MCMNRKCIXSYSNV-UHFFFAOYSA-N 0.000 claims description 22
- 239000000758 substrate Substances 0.000 claims description 22
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Images
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0657—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body
- H01L29/0665—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by the shape of the body the shape of the body defining a nanostructure
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/02—Semiconductor bodies ; Multistep manufacturing processes therefor
- H01L29/06—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions
- H01L29/0603—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions
- H01L29/0607—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration
- H01L29/0638—Semiconductor bodies ; Multistep manufacturing processes therefor characterised by their shape; characterised by the shapes, relative sizes, or dispositions of the semiconductor regions ; characterised by the concentration or distribution of impurities within semiconductor regions characterised by particular constructional design considerations, e.g. for preventing surface leakage, for controlling electric field concentration or for internal isolations regions for preventing surface leakage or controlling electric field concentration for preventing surface leakage due to surface inversion layer, e.g. with channel stopper
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
- H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
- H01J37/32—Gas-filled discharge tubes
- H01J37/32431—Constructional details of the reactor
- H01J37/32458—Vessel
- H01J37/32467—Material
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- C—CHEMISTRY; METALLURGY
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- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/56—Apparatus specially adapted for continuous coating; Arrangements for maintaining the vacuum, e.g. vacuum locks
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C16/00—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes
- C23C16/44—Chemical coating by decomposition of gaseous compounds, without leaving reaction products of surface material in the coating, i.e. chemical vapour deposition [CVD] processes characterised by the method of coating
- C23C16/4401—Means for minimising impurities, e.g. dust, moisture or residual gas, in the reaction chamber
- C23C16/4404—Coatings or surface treatment on the inside of the reaction chamber or on parts thereof
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Abstract
Description
本出願は、2019年12月9日に出願された米国仮出願第62/945,602号の利益及び優先権を主張し、その全体はあらゆる目的のために参照により本明細書に組み込まれる。
Claims (19)
- 少なくとも2種の異なる障壁材料を含む拡散障壁であって、前記少なくとも2種の異なる障壁材料は、
イットリウムの酸化物、窒化物若しくはフッ化物から選択されるイットリウム化合物、
アルミニウムの酸化物、窒化物若しくはフッ化物から選択されるアルミニウム化合物、
チタンの酸化物、窒化物若しくはフッ化物から選択されるチタン化合物、
ジルコニウムの酸化物、窒化物若しくはフッ化物から選択されるジルコニウム化合物、又は
タンタルの酸化物、窒化物若しくはフッ化物から選択されるタンタル化合物
を含む、拡散障壁。 - 前記少なくとも2種の異なる障壁材料のうちの1種は、第1の微量金属不純物に対する障壁として作用するのに効果的であり、前記少なくとも2種の障壁材料のうちの第2の障壁材料は、前記第1の微量金属不純物とは異なる第2の微量金属不純物に対する障壁として作用するのに効果的である、請求項1に記載の拡散障壁。
- 不純物としての鉄、コバルト、ニッケル、及び銅のうちの1種又は複数に対する拡散障壁として効果的な第1の障壁材料と、
不純物としてのZn、Mg、Mn、Na、Ca、Kのうちの1種又は複数に対する拡散障壁として有効な第2の障壁材料と
を含む、請求項1に記載の拡散障壁。 - 前記少なくとも2種の異なる障壁材料の2つから5つの層を備え、各層は2~10ナノメートルの範囲の厚さを有する、請求項1に記載の拡散障壁。
- ジルコニア層、チタニア層、イットリア層、タンタラ層、及びアルミナ層から選択される2つ又は3つの層を備える、請求項4に記載の拡散障壁。
- 前記少なくとも2種の異なる障壁材料の8~1000の層を備え、各層は0.1~10ナノメートルの範囲の厚さを有する、請求項1に記載の拡散障壁。
- 複数のジルコニア層、複数のチタニア層、複数のイットリア層、複数のタンタラ層、複数のアルミナ層のうちの少なくとも2つを含む、請求項6に記載の拡散障壁。
- 前記少なくとも2種の異なる障壁材料は複合材料である、請求項1に記載の拡散障壁。
- ジルコニア、チタニア、イットリア、タンタラ、及びアルミナから選択される障壁材料を含む、請求項8に記載の拡散障壁。
- イットリウムの酸化物、窒化物若しくはフッ化物から選択されるイットリウム化合物、
アルミニウムの酸化物、窒化物若しくはフッ化物から選択されるアルミニウム化合物、
チタンの酸化物、窒化物若しくはフッ化物から選択されるチタン化合物、
ジルコニウムの酸化物、窒化物若しくはフッ化物から選択されるジルコニウム化合物、又は
タンタルの酸化物、窒化物若しくはフッ化物から選択されるタンタル化合物
を含む少なくとも2種の異なる障壁材料から本質的になる、請求項1に記載の拡散障壁。 - ジルコニア層、チタニア層、イットリア層、タンタラ層、又はアルミナ層から選択される少なくとも2種の異なる障壁材料から本質的になる、請求項1に記載の拡散障壁。
- 5~1000ナノメートルの範囲の厚さを有する、請求項1に記載の拡散障壁。
- 拡散障壁を有する基板を備える物品であって、前記拡散障壁は、
イットリウムの酸化物、窒化物若しくはフッ化物から選択されるイットリウム化合物と、
アルミニウムの酸化物、窒化物若しくはフッ化物から選択されるアルミニウム化合物と、
チタンの酸化物、窒化物若しくはフッ化物から選択されるチタン化合物と、
ジルコニウムの酸化物、窒化物若しくはフッ化物から選択されるジルコニウム化合物、又は
タンタルの酸化物、窒化物若しくはフッ化物から選択されるタンタル化合物
を含む少なくとも2種の異なる障壁材料を含む、物品。 - 前記2種の異なる障壁材料のうちの1種は、第1の微量金属不純物に対する障壁として作用するのに効果的であり、前記2種の異なる障壁材料のうちの第2の障壁材料は、前記第1の微量金属不純物とは異なる第2の微量金属不純物に対する障壁として作用するのに効果的である、請求項13に記載の物品。
- 不純物としての鉄、コバルト、ニッケル及び銅のうちの1種又は複数に対する拡散障壁として効果的な第1の障壁材料と、
不純物としてのZn、Mg、Mn、Na、Ca、Kのうちの1種又は複数に対する拡散障壁として効果的な第2の障壁材料と
を含む、請求項13に記載の物品。 - 半導体製造ツールのプロセスチャンバ構成要素である、請求項13に記載の物品。
- 前記半導体製造ツールは、イオン注入デバイス、堆積チャンバ、エッチングチャンバ、又は表面改質チャンバである、請求項13に記載の物品。
- 前記プロセスチャンバ構成要素が、内壁面、ウエハサセプタ、静電チャック、シャワーヘッド、ノズル、バッフル、締結具、ウエハ搬送構造、又はこれらのいずれかの一部若しくは構成要素から選択される、請求項13に記載の物品。
- 前記半導体製造ツールはイオン注入デバイスであり、前記構成要素は静電チャックである、請求項13に記載の物品。
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PCT/US2020/063783 WO2021119000A1 (en) | 2019-12-09 | 2020-12-08 | Diffusion barriers made from multiple barrier materials, and related articles and methods |
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