JP2023167897A5 - - Google Patents

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Publication number
JP2023167897A5
JP2023167897A5 JP2022079432A JP2022079432A JP2023167897A5 JP 2023167897 A5 JP2023167897 A5 JP 2023167897A5 JP 2022079432 A JP2022079432 A JP 2022079432A JP 2022079432 A JP2022079432 A JP 2022079432A JP 2023167897 A5 JP2023167897 A5 JP 2023167897A5
Authority
JP
Japan
Prior art keywords
sheet
body according
covering body
sheet patch
inner layer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022079432A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023167897A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022079432A priority Critical patent/JP2023167897A/ja
Priority claimed from JP2022079432A external-priority patent/JP2023167897A/ja
Priority to TW112117752A priority patent/TWI870850B/zh
Priority to CN202380038871.XA priority patent/CN119156500A/zh
Priority to PCT/JP2023/018153 priority patent/WO2023219176A1/ja
Priority to KR1020247037556A priority patent/KR20250003785A/ko
Priority to US18/864,971 priority patent/US20250311057A1/en
Publication of JP2023167897A publication Critical patent/JP2023167897A/ja
Publication of JP2023167897A5 publication Critical patent/JP2023167897A5/ja
Pending legal-status Critical Current

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JP2022079432A 2022-05-13 2022-05-13 発熱要素と熱電対とを有する被覆体 Pending JP2023167897A (ja)

Priority Applications (6)

Application Number Priority Date Filing Date Title
JP2022079432A JP2023167897A (ja) 2022-05-13 2022-05-13 発熱要素と熱電対とを有する被覆体
TW112117752A TWI870850B (zh) 2022-05-13 2023-05-12 具有發熱元件及熱電偶之被覆體
CN202380038871.XA CN119156500A (zh) 2022-05-13 2023-05-15 具有发热元件和热电偶的包覆体
PCT/JP2023/018153 WO2023219176A1 (ja) 2022-05-13 2023-05-15 発熱要素と熱電対とを有する被覆体
KR1020247037556A KR20250003785A (ko) 2022-05-13 2023-05-15 발열 요소와 열전쌍을 가지는 피복체
US18/864,971 US20250311057A1 (en) 2022-05-13 2023-05-15 Cover body including heat-generating element and thermocouple

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022079432A JP2023167897A (ja) 2022-05-13 2022-05-13 発熱要素と熱電対とを有する被覆体

Publications (2)

Publication Number Publication Date
JP2023167897A JP2023167897A (ja) 2023-11-24
JP2023167897A5 true JP2023167897A5 (https=) 2025-04-24

Family

ID=88730417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022079432A Pending JP2023167897A (ja) 2022-05-13 2022-05-13 発熱要素と熱電対とを有する被覆体

Country Status (6)

Country Link
US (1) US20250311057A1 (https=)
JP (1) JP2023167897A (https=)
KR (1) KR20250003785A (https=)
CN (1) CN119156500A (https=)
TW (1) TWI870850B (https=)
WO (1) WO2023219176A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA219928S (en) * 2023-03-10 2025-03-03 Ipex Tech Inc Mechanical pipe fitting

Family Cites Families (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TW562854B (en) * 2001-08-13 2003-11-21 New Qu Energy Ltd Heat transfer element with high heat transfer rate
JP2007024830A (ja) * 2005-07-21 2007-02-01 Okazaki Mfg Co Ltd 表面温度計の取付構造
JP2008082775A (ja) * 2006-09-26 2008-04-10 Okazaki Mfg Co Ltd 内面温度測定装置および内面温度測定方法
KR101304503B1 (ko) * 2012-01-04 2013-09-05 송범식 파이프 라인 히팅 장치 및 그 제조 방법
JP6616265B2 (ja) * 2015-10-16 2019-12-04 株式会社Ｋｏｋｕｓａｉ Ｅｌｅｃｔｒｉｃ 加熱部、基板処理装置、及び半導体装置の製造方法

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