JP2023147159A5 - - Google Patents
Info
- Publication number
- JP2023147159A5 JP2023147159A5 JP2022154960A JP2022154960A JP2023147159A5 JP 2023147159 A5 JP2023147159 A5 JP 2023147159A5 JP 2022154960 A JP2022154960 A JP 2022154960A JP 2022154960 A JP2022154960 A JP 2022154960A JP 2023147159 A5 JP2023147159 A5 JP 2023147159A5
- Authority
- JP
- Japan
- Prior art keywords
- publication
- special table
- special
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Priority Applications (6)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022154960A JP7829838B2 (ja) | 2022-03-29 | 2022-09-28 | 静電チャック |
| KR1020230014667A KR102716890B1 (ko) | 2022-03-29 | 2023-02-03 | 정전 척 |
| US18/121,627 US12341050B2 (en) | 2022-03-29 | 2023-03-15 | Electrostatic chuck |
| CN202310302696.2A CN116895591A (zh) | 2022-03-29 | 2023-03-27 | 静电吸盘 |
| US19/223,387 US20250293071A1 (en) | 2022-03-29 | 2025-05-30 | Electrostatic chuck |
| JP2026033413A JP2026090573A (ja) | 2022-03-29 | 2026-03-03 | 静電チャック |
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022053876 | 2022-03-29 | ||
| JP2022053876 | 2022-03-29 | ||
| JP2022154960A JP7829838B2 (ja) | 2022-03-29 | 2022-09-28 | 静電チャック |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2026033413A Division JP2026090573A (ja) | 2022-03-29 | 2026-03-03 | 静電チャック |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023147159A JP2023147159A (ja) | 2023-10-12 |
| JP2023147159A5 true JP2023147159A5 (cg-RX-API-DMAC10.html) | 2025-07-22 |
| JP7829838B2 JP7829838B2 (ja) | 2026-03-16 |
Family
ID=88193581
Family Applications (2)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022154960A Active JP7829838B2 (ja) | 2022-03-29 | 2022-09-28 | 静電チャック |
| JP2026033413A Pending JP2026090573A (ja) | 2022-03-29 | 2026-03-03 | 静電チャック |
Family Applications After (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2026033413A Pending JP2026090573A (ja) | 2022-03-29 | 2026-03-03 | 静電チャック |
Country Status (4)
| Country | Link |
|---|---|
| US (2) | US12341050B2 (cg-RX-API-DMAC10.html) |
| JP (2) | JP7829838B2 (cg-RX-API-DMAC10.html) |
| KR (1) | KR102716890B1 (cg-RX-API-DMAC10.html) |
| CN (1) | CN116895591A (cg-RX-API-DMAC10.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2026000821A (ja) * | 2024-06-18 | 2026-01-06 | Toto株式会社 | 静電チャック |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2844915B2 (ja) * | 1990-11-21 | 1999-01-13 | 富士電機株式会社 | 薄膜形成用基板加熱装置 |
| JP4505169B2 (ja) | 1999-09-29 | 2010-07-21 | 東京エレクトロン株式会社 | 多重領域抵抗ヒータ |
| US9666466B2 (en) | 2013-05-07 | 2017-05-30 | Applied Materials, Inc. | Electrostatic chuck having thermally isolated zones with minimal crosstalk |
| US11158526B2 (en) | 2014-02-07 | 2021-10-26 | Applied Materials, Inc. | Temperature controlled substrate support assembly |
| JP6219229B2 (ja) | 2014-05-19 | 2017-10-25 | 東京エレクトロン株式会社 | ヒータ給電機構 |
| US10079165B2 (en) * | 2014-05-20 | 2018-09-18 | Applied Materials, Inc. | Electrostatic chuck with independent zone cooling and reduced crosstalk |
| US9786539B2 (en) * | 2014-07-16 | 2017-10-10 | Taiwan Semiconductor Manufacturing Co., Ltd | Wafer chuck |
| CN107004626B (zh) | 2014-11-20 | 2019-02-05 | 住友大阪水泥股份有限公司 | 静电卡盘装置 |
| CN108475656B (zh) * | 2015-12-28 | 2023-09-05 | 日本碍子株式会社 | 圆盘状加热器以及加热器冷却板组件 |
| JP6530333B2 (ja) * | 2016-02-29 | 2019-06-12 | 日本特殊陶業株式会社 | 加熱部材及び静電チャック |
| JP6730861B2 (ja) * | 2016-06-22 | 2020-07-29 | 日本特殊陶業株式会社 | 保持装置 |
| JP6341457B1 (ja) | 2017-03-29 | 2018-06-13 | Toto株式会社 | 静電チャック |
| JP6762432B2 (ja) * | 2018-02-16 | 2020-09-30 | 日本特殊陶業株式会社 | 保持装置 |
| JP6918042B2 (ja) | 2019-03-26 | 2021-08-11 | 日本碍子株式会社 | ウエハ載置装置 |
| JP7411383B2 (ja) * | 2019-11-05 | 2024-01-11 | 日本特殊陶業株式会社 | 加熱装置 |
| KR102776505B1 (ko) | 2020-07-09 | 2025-03-07 | 삼성전자주식회사 | 플라즈마 처리 장치 및 이를 이용한 반도체 소자 제조방법 |
-
2022
- 2022-09-28 JP JP2022154960A patent/JP7829838B2/ja active Active
-
2023
- 2023-02-03 KR KR1020230014667A patent/KR102716890B1/ko active Active
- 2023-03-15 US US18/121,627 patent/US12341050B2/en active Active
- 2023-03-27 CN CN202310302696.2A patent/CN116895591A/zh active Pending
-
2025
- 2025-05-30 US US19/223,387 patent/US20250293071A1/en active Pending
-
2026
- 2026-03-03 JP JP2026033413A patent/JP2026090573A/ja active Pending