JP2023140531A5 - - Google Patents

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Publication number
JP2023140531A5
JP2023140531A5 JP2022046416A JP2022046416A JP2023140531A5 JP 2023140531 A5 JP2023140531 A5 JP 2023140531A5 JP 2022046416 A JP2022046416 A JP 2022046416A JP 2022046416 A JP2022046416 A JP 2022046416A JP 2023140531 A5 JP2023140531 A5 JP 2023140531A5
Authority
JP
Japan
Prior art keywords
processing apparatus
valve
flow rate
substrate processing
pipe
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022046416A
Other languages
English (en)
Japanese (ja)
Other versions
JP2023140531A (ja
Filing date
Publication date
Application filed filed Critical
Priority to JP2022046416A priority Critical patent/JP2023140531A/ja
Priority claimed from JP2022046416A external-priority patent/JP2023140531A/ja
Priority to PCT/JP2023/009752 priority patent/WO2023182064A1/ja
Priority to KR1020247023993A priority patent/KR20240116843A/ko
Priority to TW112110205A priority patent/TWI852412B/zh
Publication of JP2023140531A publication Critical patent/JP2023140531A/ja
Publication of JP2023140531A5 publication Critical patent/JP2023140531A5/ja
Pending legal-status Critical Current

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JP2022046416A 2022-03-23 2022-03-23 基板処理装置 Pending JP2023140531A (ja)

Priority Applications (4)

Application Number Priority Date Filing Date Title
JP2022046416A JP2023140531A (ja) 2022-03-23 2022-03-23 基板処理装置
PCT/JP2023/009752 WO2023182064A1 (ja) 2022-03-23 2023-03-14 基板処理装置
KR1020247023993A KR20240116843A (ko) 2022-03-23 2023-03-14 기판 처리 장치
TW112110205A TWI852412B (zh) 2022-03-23 2023-03-20 基板處理裝置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022046416A JP2023140531A (ja) 2022-03-23 2022-03-23 基板処理装置

Publications (2)

Publication Number Publication Date
JP2023140531A JP2023140531A (ja) 2023-10-05
JP2023140531A5 true JP2023140531A5 (enrdf_load_stackoverflow) 2025-04-18

Family

ID=88101417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022046416A Pending JP2023140531A (ja) 2022-03-23 2022-03-23 基板処理装置

Country Status (4)

Country Link
JP (1) JP2023140531A (enrdf_load_stackoverflow)
KR (1) KR20240116843A (enrdf_load_stackoverflow)
TW (1) TWI852412B (enrdf_load_stackoverflow)
WO (1) WO2023182064A1 (enrdf_load_stackoverflow)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP6487168B2 (ja) * 2014-09-29 2019-03-20 株式会社Ｓｃｒｅｅｎホールディングス 基板処理装置および基板処理方法
JP7184547B2 (ja) * 2018-06-27 2022-12-06 株式会社Ｓｃｒｅｅｎホールディングス 補正方法、基板処理装置、及び基板処理システム
JP7352419B2 (ja) * 2019-09-13 2023-09-28 株式会社Ｓｃｒｅｅｎホールディングス ノズル内部における気液界面の検出方法および基板処理装置

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