JP2023139392A5 - - Google Patents

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Publication number
JP2023139392A5
JP2023139392A5 JP2022044900A JP2022044900A JP2023139392A5 JP 2023139392 A5 JP2023139392 A5 JP 2023139392A5 JP 2022044900 A JP2022044900 A JP 2022044900A JP 2022044900 A JP2022044900 A JP 2022044900A JP 2023139392 A5 JP2023139392 A5 JP 2023139392A5
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JP
Japan
Prior art keywords
modules
processing system
substrate processing
substrate
processing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022044900A
Other languages
English (en)
Japanese (ja)
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JP7825476B2 (ja
JP2023139392A (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from JP2022044900A external-priority patent/JP7825476B2/ja
Priority to JP2022044900A priority Critical patent/JP7825476B2/ja
Priority to KR1020230030871A priority patent/KR102867756B1/ko
Priority to US18/120,195 priority patent/US12438025B2/en
Priority to CN202310241262.6A priority patent/CN116798909A/zh
Publication of JP2023139392A publication Critical patent/JP2023139392A/ja
Publication of JP2023139392A5 publication Critical patent/JP2023139392A5/ja
Priority to US19/304,971 priority patent/US20250372427A1/en
Priority to KR1020250139972A priority patent/KR20250150507A/ko
Priority to JP2026016791A priority patent/JP2026063525A/ja
Publication of JP7825476B2 publication Critical patent/JP7825476B2/ja
Application granted granted Critical
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022044900A 2022-03-22 2022-03-22 基板処理システム Active JP7825476B2 (ja)

Priority Applications (7)

Application Number Priority Date Filing Date Title
JP2022044900A JP7825476B2 (ja) 2022-03-22 2022-03-22 基板処理システム
KR1020230030871A KR102867756B1 (ko) 2022-03-22 2023-03-09 기판 처리 시스템
US18/120,195 US12438025B2 (en) 2022-03-22 2023-03-10 Substrate processing system
CN202310241262.6A CN116798909A (zh) 2022-03-22 2023-03-14 基板处理系统
US19/304,971 US20250372427A1 (en) 2022-03-22 2025-08-20 Substrate Processing System
KR1020250139972A KR20250150507A (ko) 2022-03-22 2025-09-26 기판 처리 시스템
JP2026016791A JP2026063525A (ja) 2022-03-22 2026-02-04 システムおよび基板処理システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022044900A JP7825476B2 (ja) 2022-03-22 2022-03-22 基板処理システム

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2026016791A Division JP2026063525A (ja) 2022-03-22 2026-02-04 システムおよび基板処理システム

Publications (3)

Publication Number Publication Date
JP2023139392A JP2023139392A (ja) 2023-10-04
JP2023139392A5 true JP2023139392A5 (https=) 2025-01-07
JP7825476B2 JP7825476B2 (ja) 2026-03-06

Family

ID=88045767

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2022044900A Active JP7825476B2 (ja) 2022-03-22 2022-03-22 基板処理システム
JP2026016791A Pending JP2026063525A (ja) 2022-03-22 2026-02-04 システムおよび基板処理システム

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2026016791A Pending JP2026063525A (ja) 2022-03-22 2026-02-04 システムおよび基板処理システム

Country Status (4)

Country Link
US (2) US12438025B2 (https=)
JP (2) JP7825476B2 (https=)
KR (2) KR102867756B1 (https=)
CN (1) CN116798909A (https=)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP7433159B2 (ja) * 2020-07-30 2024-02-19 東京エレクトロン株式会社 真空搬送装置、基板処理システム、および基板処理方法
JP7771651B2 (ja) * 2021-11-12 2025-11-18 東京エレクトロン株式会社 基板搬送装置及び基板搬送方法
WO2026070572A1 (ja) * 2024-09-27 2026-04-02 東京エレクトロン株式会社 基板処理システム、および搬送方法

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH07117849A (ja) * 1993-10-22 1995-05-09 Ebara Corp 磁気浮上搬送装置
JP2013098354A (ja) * 2011-11-01 2013-05-20 Nikon Corp 移動体装置及び露光装置
DE102014106400A1 (de) * 2014-04-25 2015-11-12 Weber Maschinenbau Gmbh Breidenbach Individueller transport von lebensmittelportionen
TWI676227B (zh) * 2015-01-23 2019-11-01 美商應用材料股份有限公司 半導體工藝設備
JP7296862B2 (ja) * 2019-11-29 2023-06-23 東京エレクトロン株式会社 基板搬送装置及び基板処理システム
JP7370233B2 (ja) 2019-11-29 2023-10-27 東京エレクトロン株式会社 基板搬送装置及び基板処理システム
JP7433159B2 (ja) * 2020-07-30 2024-02-19 東京エレクトロン株式会社 真空搬送装置、基板処理システム、および基板処理方法
JP7608898B2 (ja) * 2021-03-16 2025-01-07 東京エレクトロン株式会社 基板を処理する装置及び基板を搬送する方法
JP7743708B2 (ja) * 2021-03-30 2025-09-25 東京エレクトロン株式会社 基板を搬送する装置、基板を処理するシステム及び基板の搬送を行う方法

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