JP2023130812A5 - - Google Patents
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- JP2023130812A5 JP2023130812A5 JP2022035318A JP2022035318A JP2023130812A5 JP 2023130812 A5 JP2023130812 A5 JP 2023130812A5 JP 2022035318 A JP2022035318 A JP 2022035318A JP 2022035318 A JP2022035318 A JP 2022035318A JP 2023130812 A5 JP2023130812 A5 JP 2023130812A5
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Priority Applications (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022035318A JP7673671B2 (ja) | 2022-03-08 | 2022-03-08 | 微小振動体の実装構造 |
| US18/169,438 US12287203B2 (en) | 2022-03-08 | 2023-02-15 | Mounting structure of micro vibrator |
| CN202310202688.0A CN116730274A (zh) | 2022-03-08 | 2023-03-06 | 微振动器的安装结构 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2022035318A JP7673671B2 (ja) | 2022-03-08 | 2022-03-08 | 微小振動体の実装構造 |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2023130812A JP2023130812A (ja) | 2023-09-21 |
| JP2023130812A5 true JP2023130812A5 (https=) | 2024-05-29 |
| JP7673671B2 JP7673671B2 (ja) | 2025-05-09 |
Family
ID=87908570
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2022035318A Active JP7673671B2 (ja) | 2022-03-08 | 2022-03-08 | 微小振動体の実装構造 |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US12287203B2 (https=) |
| JP (1) | JP7673671B2 (https=) |
| CN (1) | CN116730274A (https=) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024077035A1 (en) * | 2022-10-04 | 2024-04-11 | Enertia Microsystems Inc. | Vibratory gyroscopes with resonator attachments |
Family Cites Families (16)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4157041A (en) * | 1978-05-22 | 1979-06-05 | General Motors Corporation | Sonic vibrating bell gyro |
| JP4591000B2 (ja) * | 2004-09-16 | 2010-12-01 | 株式会社デンソー | 半導体力学量センサおよびその製造方法 |
| US9878901B2 (en) * | 2014-04-04 | 2018-01-30 | Analog Devices, Inc. | Fabrication of tungsten MEMS structures |
| WO2017101813A1 (zh) * | 2015-12-18 | 2017-06-22 | 东南大学 | 微三维壳体谐振陀螺 |
| CN105540530B (zh) * | 2015-12-18 | 2017-03-15 | 东南大学 | 微玻璃半球谐振陀螺及其圆片级制备方法 |
| CN108883927B (zh) | 2016-02-29 | 2023-06-13 | 密歇根大学董事会 | 制造三维微结构器件的方法 |
| CN107055457A (zh) * | 2016-12-12 | 2017-08-18 | 北京自动化控制设备研究所 | 一种熔融石英微半球陀螺敏感结构 |
| JP7006017B2 (ja) * | 2017-03-10 | 2022-01-24 | Tdk株式会社 | 振動デバイス |
| JP2020025019A (ja) * | 2018-08-07 | 2020-02-13 | キオクシア株式会社 | 半導体装置 |
| KR102172636B1 (ko) * | 2018-10-12 | 2020-11-03 | 삼성전기주식회사 | 체적 음향 공진기 |
| US11703330B2 (en) | 2019-04-01 | 2023-07-18 | The Regents Of The University Of California | Fused quartz dual shell resonator and method of fabrication |
| CN110749315A (zh) * | 2019-11-13 | 2020-02-04 | 中国人民解放军国防科技大学 | 一种微半球谐振陀螺结构、装配方法及圆片夹具 |
| JP7533193B2 (ja) * | 2020-12-16 | 2024-08-14 | 株式会社デンソー | 微小振動体の把持構造、慣性センサの製造方法 |
| JP7456412B2 (ja) * | 2021-03-30 | 2024-03-27 | 株式会社デンソー | 慣性センサ |
| JP7452492B2 (ja) * | 2021-05-21 | 2024-03-19 | 株式会社デンソー | 慣性センサおよびその製造方法 |
| CN114105075B (zh) * | 2021-11-12 | 2025-07-15 | 中国电子科技集团公司第二十六研究所 | 一种曲面电极的微半球陀螺结构及其制备方法 |
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2022
- 2022-03-08 JP JP2022035318A patent/JP7673671B2/ja active Active
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2023
- 2023-02-15 US US18/169,438 patent/US12287203B2/en active Active
- 2023-03-06 CN CN202310202688.0A patent/CN116730274A/zh active Pending