JP2023124546A5 - - Google Patents

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Publication number
JP2023124546A5
JP2023124546A5 JP2022028362A JP2022028362A JP2023124546A5 JP 2023124546 A5 JP2023124546 A5 JP 2023124546A5 JP 2022028362 A JP2022028362 A JP 2022028362A JP 2022028362 A JP2022028362 A JP 2022028362A JP 2023124546 A5 JP2023124546 A5 JP 2023124546A5
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JP
Japan
Prior art keywords
polishing
motor
end point
polished
detection unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022028362A
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English (en)
Japanese (ja)
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JP2023124546A (ja
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Publication date
Application filed filed Critical
Priority to JP2022028362A priority Critical patent/JP2023124546A/ja
Priority claimed from JP2022028362A external-priority patent/JP2023124546A/ja
Priority to PCT/JP2023/000030 priority patent/WO2023162478A1/ja
Priority to US18/840,195 priority patent/US20250178152A1/en
Publication of JP2023124546A publication Critical patent/JP2023124546A/ja
Publication of JP2023124546A5 publication Critical patent/JP2023124546A5/ja
Pending legal-status Critical Current

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JP2022028362A 2022-02-25 2022-02-25 研磨装置および研磨装置における研磨終点検出方法 Pending JP2023124546A (ja)

Priority Applications (3)

Application Number Priority Date Filing Date Title
JP2022028362A JP2023124546A (ja) 2022-02-25 2022-02-25 研磨装置および研磨装置における研磨終点検出方法
PCT/JP2023/000030 WO2023162478A1 (ja) 2022-02-25 2023-01-05 研磨装置および研磨装置における研磨終点検出方法
US18/840,195 US20250178152A1 (en) 2022-02-25 2023-01-05 Polishing device and method for detecting polishing end point in polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2022028362A JP2023124546A (ja) 2022-02-25 2022-02-25 研磨装置および研磨装置における研磨終点検出方法

Publications (2)

Publication Number Publication Date
JP2023124546A JP2023124546A (ja) 2023-09-06
JP2023124546A5 true JP2023124546A5 (https=) 2025-01-10

Family

ID=87765342

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022028362A Pending JP2023124546A (ja) 2022-02-25 2022-02-25 研磨装置および研磨装置における研磨終点検出方法

Country Status (3)

Country Link
US (1) US20250178152A1 (https=)
JP (1) JP2023124546A (https=)
WO (1) WO2023162478A1 (https=)

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9308618B2 (en) * 2012-04-26 2016-04-12 Applied Materials, Inc. Linear prediction for filtering of data during in-situ monitoring of polishing
JP6357260B2 (ja) * 2016-09-30 2018-07-11 株式会社荏原製作所 研磨装置、及び研磨方法
JP7403213B2 (ja) * 2017-10-31 2023-12-22 株式会社荏原製作所 研磨装置、及び研磨方法
WO2019177842A1 (en) * 2018-03-12 2019-09-19 Applied Materials, Inc. Filtering during in-situ monitoring of polishing

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