JP2023096520A - Annular adhesive sheet forming device and annular adhesive sheet forming method - Google Patents

Abstract

To provide an annular adhesive sheet forming device which prevents resources from being wasted as much as possible, and an annular adhesive sheet forming method.SOLUTION: In an annular adhesive sheet forming device EA, a sheet holding member 32 comprises: a first sheet holding surface 32A which is abutted to the side of one side end AS3 of an adhesive sheet AS in an extension direction SD and holds the adhesive sheet AS; and a second sheet holding surface 32B which is directly or indirectly continued to the first sheet holding surface 32A. Energy application means 40 is provided so as to make deformable by predetermined energy, and applies the predetermined energy to the adhesive sheet AS. Thus, the side of another side end AS4 of the adhesive sheet AS in the extension direction SD is bent so as to be closer to the second sheet holding surface 32B, thereby forming an annular adhesive sheet ASL comprising an adhesive surface AS5 which can be bonded to an adhered surface WK1 of an adhered body WK.SELECTED DRAWING: Figure 1

Description

TECHNICAL FIELD The present invention relates to an annular adhesive sheet forming apparatus and an annular adhesive sheet forming method.

An annular adhesive sheet forming apparatus for forming an annular adhesive sheet is known (see, for example, Patent Document 1).

JP 2015-162634 A

In the apparatus for applying a protective tape to a wafer (annular adhesive sheet forming apparatus) described in Patent Document 1, an unnecessary tape 106 having a smaller diameter than the peripheral end portion of the wafer W (adherend) is cut out from the band-shaped protective tape B. After that, the ring-shaped protective tape B (annular adhesive sheet) is formed by cutting into a circular shape having a diameter larger than the peripheral edge of the wafer W, so most of the strip-shaped protective tape B is discarded. As a result, resources are wasted.

SUMMARY OF THE INVENTION An object of the present invention is to provide an annular adhesive sheet forming apparatus and an annular adhesive sheet forming method that can prevent wasteful consumption of resources as much as possible.

The present invention employs the configurations described in the claims.

According to the present invention, the adhesive sheet extending in the extending direction from one of the leading end portion and the trailing end portion to the other is formed in a ring shape to form an annular adhesive sheet having a sticking surface that can be stuck to the adherend surface of the adherend. Therefore, wasteful consumption of resources can be prevented as much as possible.

(A) to (F) are explanatory diagrams of an annular adhesive sheet forming apparatus according to an embodiment of the present invention and explanatory diagrams of the operation of the same apparatus. (G) to (I) are explanatory diagrams of an adhesive sheet.

An embodiment of the present invention will be described below with reference to the drawings.
Note that the X-axis, Y-axis, and Z-axis in this embodiment are orthogonal to each other, and the X-axis and Y-axis are axes within a predetermined plane, and the Z-axis is an axis orthogonal to the predetermined plane. do. Furthermore, in the present embodiment, when viewed from the DR direction parallel to the Y-axis as a reference, if the direction is indicated without specifying the drawing, the direction of the arrow of the Z-axis is “up” and the opposite is “down”. In terms of direction, "left" is the arrow direction of the X axis and "right" is the opposite direction, and "front" is the front direction in FIG. 1 parallel to the Y axis and "back" is the opposite direction.

The annular adhesive sheet forming apparatus EA of the present invention is a supply means for carrying out a supply step of supplying an adhesive sheet AS extending in an extending direction SD from one of the front end portion ASF and the rear end portion ASR to the other from the front end portion ASF side. 10, leading end holding means 20 for carrying out a leading end holding step of holding the leading end ASF side of the adhesive sheet AS supplied by the supplying means 10, and a sheet holding member 32 capable of holding the adhesive sheet AS for holding the leading end. a sheet holding means 30 for carrying out a sheet holding step of moving together with the means 20 and holding the adhesive sheet AS in a ring shape (annular shape in this embodiment) with the adhesive surface AS1 of the adhesive sheet AS facing outward; By applying heat as a predetermined energy to the adhesive sheet AS, the other side end portion AS4 along the extending direction SD of the adhesive sheet AS is bent so as to approach the second sheet holding surface 32B. An energy applying means 40 for performing an energy applying step for forming an annular adhesive sheet ASL (see FIG. 1(D)) having a sticking surface AS5 that can be stuck to the adherend surface WK1 of the adherend WK, and an extension of the adhesive sheet AS. It is provided with length adjusting means 50 for cutting the extension direction SD length to a predetermined length, and width adjustment means 60 for cutting the adhesive sheet AS along the extension direction SD.
Note that the adhesive sheet AS of the present embodiment is provided so as to be deformable by heat as predetermined energy.

The supply means 10 has a cylindrical shape with an outer peripheral surface 13A supported by a rotary motor 12 as a torque-adjustable driving device supported by a base member 11 and an output shaft 12A for supporting the adhesive sheet AS. A sheet supply member 13 and a trailing edge holding means 14 for holding the trailing edge ASR side of the adhesive sheet AS are provided.
The trailing end holding means 14 is supported by a direct-acting motor 14A as a driving device supported by the sheet feeding member 13 and its output shaft 14B, and is supported by the outer peripheral surface 13A of the sheet feeding member 13 to hold the trailing end of the adhesive sheet AS. and a rear end portion holding member 14C (holding means) for holding the portion ASR.

The leading end holding means 20 is supported by a direct-acting motor 21 as a driving device supported by a sheet holding member 32 and its output shaft 21A, and holds the leading end ASF side of the adhesive sheet AS together with the sheet holding member 32. and a distal end holding member 22 for holding.

The sheet holding means 30 includes a rotating motor 31 as a drive device supported by the base member 11, a sheet holding member 32 supported by the output shaft 31A, and a holding state of the adhesive sheet AS held by the sheet holding member 32. and an intermediate holding means 33 for maintaining the
The sheet holding member 32 has a first sheet holding surface 32A that abuts on one side end portion AS3 of the adhesive sheet AS along the extending direction SD to hold the adhesive sheet AS, and a first sheet holding surface 32A that holds the adhesive sheet AS. and a second sheet holding surface 32B directly connected to 32A.
The sheet holding member 32 is formed with a concave portion 32</b>C in which the leading end portion holding member 22 enters and holds the leading end portion ASF side of the adhesive sheet AS together with the leading end portion holding member 22 . A recessed groove 32D into which the cutting blade 62 is inserted is formed in the second sheet holding surface 32B.
The intermediate holding means 33 includes a linear motion motor 33A as a driving device supported in a recess 32E of the sheet holding member 32, a linear motion motor 33C as a driving device supported by its output shaft 33B, and its output shaft 33D. and an intermediate holding member 33E (holding means) that holds the adhesive sheet AS together with the first sheet holding surface 32A.

The energy imparting means 40 includes a direct-acting motor 41 as a driving device, and a heating device 42 such as a coil heater or a heating side of a heat pipe supported by its output shaft 41A.

The length adjusting means 50 includes an air cylinder 51 as a driving device, a cutting blade 52 as cutting means supported by an output shaft 51A of the cylinder, and a receiving blade 53 .

The width adjusting means 60 includes a direct-acting motor 61 as a driving device and a cutting blade 62 as cutting means supported by its output shaft 61A.

The operation of the annular adhesive sheet forming apparatus EA will be described.
First, the user of the annular adhesive sheet forming apparatus EA (hereinafter simply referred to as the "user") is directed to the annular adhesive sheet forming apparatus EA in which each member is arranged at the initial position indicated by the solid line in FIG. 1(A). A signal for starting automatic operation is input via an operation means (not shown) such as an operation panel or a personal computer. Next, when a user or a conveying means (not shown) such as an articulated robot or a belt conveyor supplies the adhesive sheet AS as indicated by the solid line in FIG. As indicated by the chain double-dashed line in the figure, the trailing end portion ASR of the adhesive sheet AS is held by the trailing end holding member 14C and the outer peripheral surface 13A of the sheet feeding member 13 . After that, the tip holding means 20 drives the linear motion motor 21, and as shown by the two-dot chain line in FIGS. The holding member 22 and the sheet holding member 32 hold the leading end ASF side of the adhesive sheet AS.

Next, the supply means 10 drives the rotary motor 12 to rotate the sheet supply member 13 in the clockwise direction R1, thereby eliminating the slack in the adhesive sheet AS positioned between the sheet supply member 13 and the sheet holding member 32. A certain amount of tension is applied to the adhesive sheet AS. At this time, as indicated by the two-dot chain line in FIG. 1(B), the adhesive sheet AS is in contact with the first sheet holding surface 32A at one side end AS3 and the first sheet holding surface 32A at the other side end AS4. It protrudes from the sheet holding surface 32A. Then, the energy imparting means 40 drives the direct-acting motor 41 to dispose the heating device 42 above the outer edge of the second sheet holding surface 32B as indicated by the chain double-dashed line in FIG. Drive the heating device 42 .

Next, the sheet holding means 30 drives the rotary motor 31 to rotate the sheet holding member 32 in the counterclockwise direction R2, and one side end AS3 is wound around the first sheet holding surface 32A. At this time, the supply means 10 also drives the rotation motor 12 to apply tension to the adhesive sheet AS to such an extent that the adhesive sheet AS positioned between the sheet supply member 13 and the sheet holding member 32 is not slackened. do. The adhesive sheet AS wound around the sheet holding member 32 in this manner is heated by the heating device 42 when passing under the heating device 42, and is deformed by the heating, resulting in two points in FIG. As indicated by the chain line, the other side end AS4 is bent so as to approach the second sheet holding surface 32B, and the bent adhesive surface AS1 of the other side end AS4 is the adherend surface of the adherend WK. It becomes a sticking surface AS5 that can be stuck to WK1.

After that, when the adhesive sheet AS wound around the sheet holding member 32 passes above the intermediate holding member 33E, the sheet holding means 30 drives the direct-acting motors 33A and 33C, which is indicated by the chain double-dashed line in FIG. 1(C). , the intermediate holding member 33E and the sheet holding member 32 hold the adhesive sheet AS, thereby suppressing the movement of the adhesive sheet AS toward the second sheet holding surface 32B. Next, when the anti-adhesion surface AS2 on the rear end ASR side of the adhesive sheet AS adheres to the adhesion surface AS1 on the front end ASF side to form an annular adhesion surface AS5, the sheet holding means 30 rotates. After stopping the driving of the motor 31, the energy applying means 40 stops driving the heating device 42 and drives the direct-acting motor 41 to return the heating device 42 to the initial position. Then, when the length adjusting means 50 drives the air cylinder 51 to move the cutting blade 52 forward and backward to cut the adhesive sheet AS with the receiving blade 53 to a predetermined length, as shown in FIG. An annular adhesive sheet ASL is formed having a sticking surface AS5 that can be stuck to the adherend surface WK1 of the body WK.

Next, as shown in FIG. 1(E), a user or a conveying means (not shown) places the adherend WK on the second sheet holding surface 32B so that the adherend surface WK1 contacts the sticking surface AS5. When placed, the width adjusting means 60 drives the direct-acting motor 61 to insert the cutting blade 62 into the concave groove 32D as shown in FIG. 1(F). After that, the sheet holding means 30 drives the rotation motor 31 to rotate the sheet holding member 32 in the counterclockwise direction R2 by one or more rotations to cut the adhesive sheet AS along the extension direction SD, thereby cutting the adherend WK. The other side end portion AS4 side of the adhesive sheet AS is attached to the outer edge of the adhesive sheet AS to form an integrated object UP. Next, when a user or a transport means (not shown) transports the integrated object UP to the next process, each means drives its respective driving device, and after returning each member to the initial position, the user or the driving device (not shown) A post-processing means such as the above removes the remaining portion of the adhesive sheet AS left on the sheet supply member 13 and the sheet holding member 32, and the same operation as described above is repeated thereafter.

According to the embodiment as described above, the adhesive sheet AS extending in the extending direction SD from one of the front end portion ASF and the rear end portion ASR to the other is annular and can be adhered to the adherend surface WK1 of the adherend WK. Since the annular adhesive sheet ASL having the sticking surface AS5 is formed, wasteful consumption of resources can be prevented as much as possible.

The means and steps in the present invention are not limited in any way as long as they can perform the operations, functions or steps described for those means and steps. The process is not limited at all. For example, the leading edge holding means may be of any kind as long as it can hold the leading edge of the adhesive sheet supplied by the supplying means, and is within the technical scope in light of the common general knowledge at the time of filing. It is not limited in any way (other means and steps are the same).

The supply unit 10 may include a peeling unit that peels off the release sheet from the raw sheet to which the release sheet is temporarily attached to the adhesive surface AS1 of the adhesive sheet AS and supplies the adhesive sheet AS, or a strip-shaped release sheet. Adopting a strip-shaped adhesive sheet raw fabric to which a strip-shaped adhesive sheet base material is temporarily attached to, and cutting a closed loop shape or a notch in the entire short width direction in the adhesive sheet base material while feeding the strip-shaped adhesive sheet raw fabric. The adhesive sheet AS may be supplied by peeling off the release sheet from the original sheet formed by a cutting blade as a means, and the adhesive sheet AS being formed in a predetermined region partitioned by the cut, or the adhesive sheet AS may be supplied. When winding around the first sheet holding surface 32A, the supply means 10 drives the rotation motor 12, detects the torque applied from the adhesive sheet AS via the sheet supply member 13, and keeps the torque always at a predetermined value. Alternatively, the adhesive sheet AS may be supplied to the sheet holding member 32, or a rotating motor 12 whose torque cannot be adjusted may be employed, or may have a truncated cone shape, a truncated pyramid shape, a cylindrical shape, an elliptical cylindrical shape, or a triangular shape. The sheet supply member 13 may have a polygonal columnar shape such as a rectangular shape, a flat plate shape, a spherical shape, a hemispherical shape, or other shapes. , size and weight, atmospheric conditions, and other factors, the magnitude and direction of the predetermined tension applied to the attachment sheet AS can be arbitrarily changed. Without being supported, for example, it may be supported by an articulated robot as a driving device or by another support member, for example, at least one of the sheet holding member 32 and the sheet feeding member 13 may be moved away from the other, A predetermined tension may be applied to the adhesive sheet AS positioned between the adhesive sheet AS and the sheet holding member 32 by slidably gripping the adhesive sheet AS.
The trailing end holding means 14 may be configured to be supported by a drive device such as a rotation motor and move together with the sheet supply member 13 without being supported by the sheet supply member 13, or may be configured such that the user operates a switch or the like. may be pressed to drive the direct-acting motor 14A to hold the rear end ASR side, or the rear end may be configured by imaging means such as a camera or a projector, various sensors such as an optical sensor or an ultrasonic sensor, or the like. A rear end detection means may be provided to drive the direct-acting motor 14A based on the detection result of the rear end detection means to hold the rear end ASR. The rear end ASR side may be sucked and held by decompression means such as a decompression pump or a vacuum ejector, or the rear end ASR side may be held by gripping means such as a clip or a screw member.

For example, the leading end holding means 20 may be supported by an output portion of a drive device such as a rotation motor, and move together with the sheet holding member 32, without being supported by the sheet holding member 32. A configuration in which a switch or the like is pressed to drive the direct-acting motor 21 to hold the ASF side of the distal end portion may be employed, or the distal end is configured by imaging means such as a camera or a projector, or various sensors such as an optical sensor or an ultrasonic sensor. A configuration may also be adopted in which a leading edge detection means is provided and the linear motion motor 21 is driven by the detection result of the leading edge detection means to hold the leading edge ASF side, or suction holes are formed in the first sheet holding surface 32A to The tip ASF side may be sucked and held by decompression means such as a decompression pump or a vacuum ejector through a suction hole, or the tip ASF side may be gripped by a gripping means such as a clip or a screwing member.

The sheet holding means 30 may move the supply means 10 without moving the sheet holding member 32 or while moving the sheet holding member 32 so that the sheet holding member 32 holds the adhesive sheet AS in a ring shape.
The sheet holding member 32 may have a truncated cone shape, a truncated pyramid shape, a cylindrical shape, an elliptical cylindrical shape, a polygonal prism shape such as a triangle or a square, a flat plate shape, a spherical shape, a hemispherical shape, or any other shape. The outer edge shape of the holding surface 32B may be, for example, a circle, an ellipse, a polygon such as a triangle or a square, or any other shape. The second sheet holding surface 32B may be indirectly connected to the first sheet holding surface 32A by having one or more other surfaces between them, or the second sheet holding surface 32B may be made of rubber. The second sheet holding surface 32B may be made of a material that can be elastically deformed, such as resin, or a material that is not elastically deformable, such as metal or glass. It may or may not be possible to suck and hold by a depressurizing means (holding means) (not shown) such as an ejector, or the concave portion 32C into which the tip portion holding member 22 enters may not be formed. , the concave groove 32D into which the cutting blade 62 enters may not be formed.
The intermediate holding means 33 may be configured not to be supported by the sheet holding member 32 but to be supported by, for example, an output portion of a drive device such as a rotating motor and move together with the sheet holding member 32. or the like to drive the direct-acting motors 33A and 33C to hold the adhesive sheet AS. A sheet detecting means may be provided, and the direct-acting motors 33A and 33C may be driven according to the detection result of the adhesive sheet detecting means to hold the adhesive sheet AS. The adhesive sheet AS may be sucked and held by a decompression means such as a decompression pump or a vacuum ejector through the suction hole, or may be gripped by a gripping means such as a clip or a screw member. It may or may not be provided in the annular adhesive sheet forming apparatus EA of the invention.

The energy imparting means 40 may be arranged inside the sheet holding member 32 or at other places, may not be supported by the driving device, and may emit ultraviolet rays, infrared rays, visible rays, and sound waves as predetermined energy. , X-rays, gamma rays, or other electromagnetic waves, or hot water, hot air, cold water, cold air, etc., may be used. Adhesive sheet AS that can be deformed can be arbitrarily selected, and characteristics, features, properties, materials, compositions, constitutions, shapes, dimensions and weights of adhesive sheet AS, atmospheric conditions, other factors, etc. Considering various conditions, the amount and strength of the predetermined energy to be applied to the receiving sheet AS can be arbitrarily changed, and the other side end portion AS4 side is brought into contact with the second sheet holding surface 32B. Alternatively, a predetermined energy may be applied to the sheet holding member 32 so that the other side end portion AS4 does not contact the second sheet holding surface 32B. Alternatively, after the adhesive sheet AS is wound around the sheet holding member 32, the heating device 42 is driven to apply a predetermined energy to the adhesive sheet AS all at once, so that the other side end portion AS4 is turned to the second side. 2 may be bent so as to approach the second sheet holding surface 32B.

The length adjusting means 50 may or may not cut the adhesive sheet AS to a predetermined length, and may or may not be provided in the annular adhesive sheet forming apparatus EA of the present invention.

For example, the width adjustment means 60 may cut the adhesive sheet AS along the extension direction SD by advancing and retreating a cutting blade as a cutting means from inside the sheet holding member 32, or may be an articulated robot as a driving device. or other member to support the cutting means and cut the adhesive sheet AS along the extending direction SD, or a disc-shaped, ring-shaped or linear cutting blade, or other shaped cutting means or along a predetermined track to cut the adhesive sheet AS along the extending direction SD. The adhesive sheet AS may be cut along the extending direction SD in the supported state), the adhesive sheet AS may be cut in the same shape as the outer edge of the adherend WK, or the adhesive sheet AS may be cut in the same shape as the outer edge of the adherend WK. The adhesive sheet AS may be cut to a large size, or the adhesive sheet AS may be cut smaller than the outer edge of the adherend WK. It doesn't have to be.

The annular adhesive sheet forming apparatus EA may form, for example, the annular adhesive sheet ASL having a polygonal ring shape such as an elliptical ring shape, a triangular ring shape, or a square ring shape, or other annular shapes. The formed sheet holding member 32 is removed from the base member 11 and the rotary motor 12 and moved, or moved without being removed from them, so that the sticking surface AS5 of the annular adhesive sheet ASL becomes the adherend surface of the adherend WK. It may be attached to WK1, or another member such as a resin sheet or metal plate may be attached to the adhesive surface AS1 of the adhesive sheet AS cut larger than the outer edge of the adherend WK, or the annular adhesive sheet may be attached. The surface of each member constituting the forming apparatus EA, which is in contact with the adhesive surface AS1, may be subjected to anti-adhesion treatment with fluorine resin, silicone, or the like, or may not be subjected to anti-adhesion treatment.

The adhesive sheet AS may be of any type as long as it can be deformed by a predetermined energy. It may be a material that deforms without contraction or expansion due to a predetermined energy, or it may be exposed to electromagnetic waves such as ultraviolet rays, infrared rays, visible rays, sound waves, X-rays or gamma rays, or heat such as hot water, hot air, cold water, cold wind, etc. A step portion CU1 as shown in 1(G), an inclined portion CU2 as shown in FIG. 1(H), or an inclined portion CU2 as shown in FIG. In addition to the circular arc portion CU3, the outer shape may be formed by the front end portion ASF and the rear end portion ASR having other shaped portions such as a convex portion and a concave portion. A square, rectangular, rhombic, or trapezoidal shape may be formed by a straight line without a stepped portion CU1 or an inclined portion CU2. may have been
On at least one of the adherend surface WK1 and the opposite surface of the adherend WK, for example, another adhesive sheet, an adherend support member made of metal, glass, resin, or the like, or nothing is adhered. It does not have to be.

The materials, types, shapes, etc. of the adhesive sheet AS, another adhesive sheet, other members, and the adherend WK that can be deformed by a predetermined energy in the present invention are not particularly limited. For example, the adhesive sheet AS, another adhesive sheet, other members, and the adherend WK may be circular, elliptical, polygonal such as triangular or quadrangular, or other shapes. The adhesive sheet may be of adhesive type such as pressure-sensitive adhesive or heat-sensitive adhesive. In addition to the heating device 42, it may be bonded by an appropriate method such as providing a heating means such as a coil heater or a heating side of a heat pipe. Such adhesive sheet AS and other adhesive sheets may be, for example, a single-layer adhesive sheet, a two-layer laminate including a base material and an adhesive layer, or a base material and an adhesive layer. 3 layers or 3 layers or more with one or more intermediate layers laminated between them, 3 layers or 3 or more layers with one or more cover layers laminated on the upper surface of the substrate, substrate, intermediate A single-layer double-sided adhesive sheet consisting of only an adhesive layer, a double-sided adhesive sheet having adhesive layers laminated on both outermost surfaces of one or more intermediate layers, etc. It can be something like Other members and adherends WK include, for example, foods, resin containers, semiconductor wafers such as silicon semiconductor wafers and compound semiconductor wafers, circuit boards, information recording substrates such as optical discs, glass plates, steel plates, ceramics, and wooden boards. Alternatively, it may be a single substance such as a resin, or a composite formed by two or more of them, and members or articles of any shape can also be targeted. In addition, the adhesive sheet AS and other adhesive sheets can be read in terms of functionality and usage, such as information recording labels, decorative labels, protective sheets, dicing tapes, die attach films, die bonding tapes, and recording layer formation. Any sheet such as a resin sheet, a film, a tape, or the like may be used.

The drive device in the above embodiment includes a rotating motor, a linear motor, a linear motor, a single-axis robot, an electric device such as a multi-joint robot having two or more joints, an air cylinder, a hydraulic cylinder, and a rodless robot. Actuators such as cylinders and rotary cylinders can be used, and combinations thereof directly or indirectly can also be used.
In the above embodiments, when a rotating member such as a roller is employed, a drive device for rotating the rotating member may be provided, or the surface of the rotating member or the rotating member itself may be made of deformable material such as rubber or resin. It may be composed of a member, the surface of the rotating member or the rotating member itself may be composed of a member that does not deform, or other members such as a shaft or a blade that rotates or does not rotate instead of the roller. Alternatively, if a peeling means such as a peeling plate or a peeling roller or a peeling member that peels off an object to be peeled is adopted, a plate-like member or a round bar can be used instead of or in combination with the above examples. , a member such as a roller may be employed, the part to be peeled may be made of a deformable member such as rubber or resin, or may be made of a non-deformable member, and supporting (holding) means When a device that supports (holds) a supported member (held member) such as a support (held) member is adopted, gripping means such as a mechanical chuck or chuck cylinder, Coulomb force, adhesive (adhesive sheet, adhesive tape), adhesive (adhesive sheet, adhesive tape), magnetic force, Bernoulli adsorption, suction adsorption, drive equipment, etc. may be used to support (hold) the supported member, and cutting means, cutting members, etc. When cutting the member to be cut or forming a cut or a cutting line in the member to be cut is adopted, instead of or in combination with the above examples, a cutter blade, a laser cutter, an ion beam, a thermal power , It is also possible to adopt a device that cuts by spraying heat, water pressure, heating wire, gas or liquid, etc., or to move and cut with a combination of appropriate driving devices. .

EA Annular adhesive sheet forming apparatus 10 Supply means 20 Leading edge holding means 30 Sheet holding means 32 Sheet holding member 32A First sheet holding surface 32B Second sheet holding surface 33 Intermediate holding means 40 Energy imparting means AS Adhesive sheet ASF Front end ASL Circular adhesive sheet ASR Rear end AS1 Adhesive surface AS3 One side end AS4 Other side end AS5 Application surface SD Extension direction WK Substrate WK1: Adhering surface

Claims (3)

supply means for supplying an adhesive sheet extending in an extending direction from one of the front end portion and the rear end portion to the other from the front end portion side;
a leading end holding means for holding the leading end side of the adhesive sheet supplied by the supplying means;
sheet holding means for moving a sheet holding member capable of holding the adhesive sheet together with the tip holding means, and holding the adhesive sheet in a ring shape with the adhesive surface of the adhesive sheet facing outward;
The sheet holding member has a first sheet holding surface that abuts on one side end portion of the adhesive sheet along the extending direction to hold the adhesive sheet, and directly or directly on the first sheet holding surface. a second sheet holding surface that is indirectly connected,
The adhesive sheet is provided so as to be deformable by a predetermined energy,
By applying the predetermined energy to the adhesive sheet, the other side end portion of the adhesive sheet along the extending direction is bent so as to approach the second sheet holding surface, thereby An apparatus for forming an annular adhesive sheet, further comprising energy imparting means for forming an annular adhesive sheet having a sticking surface that can be stuck to an adherend surface. 2. The annular adhesive sheet forming apparatus according to claim 1, wherein said sheet holding means comprises intermediate holding means for maintaining a holding state of said adhesive sheet held by said sheet holding member. a supplying step of supplying an adhesive sheet extending in an extending direction from one of the leading end portion and the trailing end portion to the other from the leading end portion side;
a leading end holding step of holding a leading end portion side of the adhesive sheet supplied in the supplying step with a leading end holding means;
a sheet holding step of moving a sheet holding member capable of holding the adhesive sheet together with the tip portion holding means to hold the adhesive sheet in a ring shape with the adhesive surface of the adhesive sheet facing outward;
The sheet holding member has a first sheet holding surface that abuts on one side end portion of the adhesive sheet along the extending direction to hold the adhesive sheet, and directly or directly on the first sheet holding surface. a second sheet holding surface that is indirectly connected,
The adhesive sheet is provided so as to be deformable by a predetermined energy,
By applying the predetermined energy to the adhesive sheet, the other side end portion of the adhesive sheet along the extending direction is bent so as to approach the second sheet holding surface, thereby A method for forming an annular adhesive sheet, further comprising the step of applying energy to form an annular adhesive sheet having a sticking surface that can be stuck to a surface to be adhered.

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