JP2023064318A - Measuring jig - Google Patents

Abstract

To provide a measuring jig that makes it possible to easily measure a change in the height of a holding surface and a reference surface of a chuck table on a to-be-measured line by using a dial gauge without dropping a measuring element of the dial gauge in a groove formed in the chuck table.SOLUTION: There is provided a measuring jig provided with a main body portion capable of continuously connecting a holding surface and a reference surface of a chuck table. When a change in the height of a to-be-measured line of the holding surface and the reference surface of the chuck table is measured by a dial gauge, the measurement jig is disposed so that the to-be-measured line overlaps the main body portion. In other words, the holding surface and the reference surface are continuously connected to each other via an upper surface of the main body portion on the to-be-measured line.SELECTED DRAWING: Figure 1

Description

BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a measuring jig used when measuring height changes on a line to be measured on a chuck table using a dial gauge.

Semiconductor device chips such as ICs (Integrated Circuits) and LSIs (Large Scale Integration) are essential components in various electronic devices such as mobile phones and personal computers. Such chips are manufactured by, for example, forming a large number of devices on the surface of a workpiece such as a wafer made of semiconductor material, and then dividing the workpiece into regions each including individual devices.

Further, the workpiece is often thinned to a desired thickness before splitting for the purpose of reducing the size and weight of the chip and improving heat dissipation. Such thinning of the workpiece is performed, for example, by grinding the back side of the workpiece with a grinding device.

The grinding apparatus has a holding surface (upper surface) shaped to correspond to the side surface of a cone, and includes a chuck table rotatable about a straight line passing through the center of the holding surface as a rotation axis. Further, above the chuck table, a grinding unit having a spindle to which an annular grinding wheel can be attached is provided.

The grinding wheel includes an annular wheel base, and a plurality of grinding wheels each having a rectangular parallelepiped shape and arranged discretely along the circumferential direction of the wheel base. A pair of thickness gauges (for example, a pair of height gauges) are provided near the chuck table to measure the thickness of the workpiece being ground.

When thinning the workpiece in this grinding apparatus, first, the surface side of the workpiece is held on the holding surface of the chuck table. Then, one of the probes is brought into contact with the holding surface of the chuck table, and the other probe is brought into contact with the back surface of the workpiece so that the thickness of the workpiece can be calculated by the pair of thickness gauges. Let

Next, while rotating both the chuck table and the spindle with the grinding wheel attached to the tip, the grinding surface (lower surface) of each of the plurality of grinding wheels is brought into contact with the back surface (upper surface) of the workpiece. Then, the back side of the workpiece is ground until the thickness of the workpiece reaches a predetermined thickness.

However, when the workpiece is thinned by grinding in this way, the rigidity of the workpiece decreases, and there is a possibility that the workpiece will be damaged by the external force applied to the workpiece when the workpiece is transported. get higher Based on this point, it is proposed to form a work unit by integrating the workpiece and the ring frame via tape, and then grind and thin the workpiece contained in this work unit. (See Patent Document 1, for example).

In this case, since the workpiece can be transported while being supported by the ring frame, the possibility of damage to the workpiece can be reduced. A groove is formed in the holding surface of the chuck table of the grinding device used when grinding the workpiece included in the work unit. In this grinding apparatus, the workpiece is ground while the ring frame is positioned inside the groove so that the grinding of the workpiece is not hindered by the ring frame.

Further, in this grinding apparatus, the workpiece is ground while the entire holding surface of the chuck table is covered with the tape included in the work unit. Therefore, in order to accurately measure the thickness of the workpiece being ground using a pair of thickness gauges in this grinding machine, one of the probes must be placed on a surface (reference surface) located outside the groove. It is necessary to make contact and to bring the other probe into contact with the back surface of the workpiece.

Japanese Unexamined Patent Application Publication No. 2011-42003

In the grinding apparatus described above, the holding surface and the reference surface of the chuck table are ground (self-grinding) so that the holding surface has a shape corresponding to the side surface of the cone. After the self-grinding, the change in height of the holding surface and the reference surface on the line to be measured is measured in order to confirm the shape of the holding surface and the reference surface of the chuck table. The line to be measured is, for example, a curvilinear region that overlaps with the rotational trajectories of a plurality of grinding wheels for self-grinding the chuck table.

This measurement is performed by moving the probe of the dial gauge along the line to be measured while keeping the probe of the dial gauge in contact with the line to be measured on the holding surface and the reference surface. For example, this measurement is performed by rotating the spindle with a dial gauge mounted thereon so that the trajectory of the stylus when the spindle is rotated overlaps with the rotational trajectories of the plurality of grinding wheels.

However, in the chuck table of the grinding apparatus described above, a groove is formed between the holding surface and the reference surface. If the contact point of the dial gauge falls into this groove, the contact point may come into contact with the bottom surface or the side surface of the groove and be damaged. Therefore, when performing this measurement, it is necessary for the operator to rotate the spindle while appropriately supporting the dial gauge by hand so that the probe does not fall into the groove. However, such measurements are complicated.

In view of this point, an object of the present invention is to easily measure the height of the holding surface and the reference surface of the chuck table on the line to be measured by using the dial gauge without dropping the probe of the dial gauge into the groove formed in the chuck table. Another object of the present invention is to provide a measuring jig that enables measurement of changes in thickness.

According to one aspect of the present invention, a workpiece of a work unit obtained by attaching and integrating a tape to a ring frame and a workpiece positioned at an opening of the ring frame is attached to the tape. a holding surface for holding the workpiece through the tape, a reference surface positioned outside the ring frame when the workpiece is held on the holding surface through the tape, and downward from the outer edge of the holding surface an extending inner surface, an outer surface extending downward from the inner edge of the reference surface, and a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface; a groove in which the ring frame is positioned when the workpiece is held; and a dial gauge for measuring a height change in a line to be measured between the holding surface and the reference surface of the chuck table. A measuring jig used, comprising: a first engaging portion for engaging the outer edge of the holding surface and the upper end of the inner surface; a second engaging portion for engagement; and a body portion connecting the first engaging portion and the second engaging portion, wherein the first engaging portion extends from the outer edge of the holding surface and When the upper end portion of the inner surface is engaged and the second engaging portion is engaged with the inner edge portion of the reference surface and the upper end portion of the outer surface, the body portion engages the holding surface and the reference surface. A measuring jig is provided that continuously connects the .

According to another aspect of the present invention, a workpiece of a work unit obtained by integrating a ring frame and a workpiece positioned at an opening of the ring frame by sticking a tape to the workpiece is a holding surface for holding via a tape, a reference surface positioned outside the ring frame when the workpiece is held on the holding surface via the tape, and a lower portion from the outer edge of the holding surface an inner surface extending downwardly from the reference surface, an outer surface extending downward from the inner edge of the reference surface, and a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface; and a groove in which the ring frame is positioned when the workpiece is held by the dial gauge. comprising a first bridge portion, a second bridge portion, and a connection portion that connects the first bridge portion and the second bridge portion, the first bridge portion and a first engaging portion for engaging the outer edge of the holding surface and the upper end of the inner surface, and the inner edge of the reference surface and the upper end of the outer surface. a second engaging portion for engagement; and a body portion connecting the first engaging portion and the second engaging portion; The first engaging portion engages the outer edge of the holding surface and the upper end of the inner surface, and the second engaging portion engages the inner edge of the reference surface and the upper end of the outer surface. When the body portion of each of the first bridge portion and the second bridge portion continuously connects the holding surface and the reference surface, and the connecting portion is positioned inside the groove. Equipment is provided.

According to yet another aspect of the present invention, the workpiece of the work unit obtained by integrating the ring frame and the workpiece positioned at the opening of the ring frame by sticking a tape to the workpiece, a holding surface for holding via the tape; a reference surface positioned outside the ring frame when the workpiece is held on the holding surface via the tape; a downwardly extending inner surface, an outer surface extending downwardly from the inner edge of the reference surface, and a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface; a groove in which the ring frame is positioned when the workpiece is held through the dial gauge, and a dial gauge measures a change in height in a line to be measured between the holding surface of the chuck table and the reference surface. A measuring jig used in the measurement, the connecting portion connecting the first bridge portion, the second bridge portion, and the first bridge portion and the second bridge portion and having a scale formed thereon. and, each of the first bridge portion and the second bridge portion includes a first engaging portion for engaging the outer edge portion of the holding surface and the upper end portion of the inner surface, and the reference surface The first bridge, comprising: a second engaging portion for engaging with an inner edge portion and an upper end portion of the outer surface; and a body portion connecting the first engaging portion and the second engaging portion. and the second bridge portion engage the outer edge of the holding surface and the upper end of the inner surface, and the second engaging portion engages the inner edge of the reference surface. and when engaged with the upper end portion of the outer surface, the main body portion of each of the first bridge portion and the second bridge portion continuously connects the holding surface and the reference surface, and the measured A measuring fixture is provided in which the joint is positioned such that the scale is displayed along a line.

The measuring jig of the present invention is provided with a body portion capable of continuously connecting the holding surface of the chuck table and the reference surface. When the dial gauge measures the change in the height of the line to be measured on the holding surface and the reference surface of the chuck table, the measuring jig is arranged so that the line to be measured overlaps the main body.

That is, the holding surface and the reference surface are continuously connected via the upper surface of the main body on the line to be measured. Therefore, by using the measuring jig of the present invention, the holding surface and the reference surface of the chuck table can be easily measured by the dial gauge without dropping the probe of the dial gauge into the groove formed in the chuck table. It is possible to measure height variations in the line.

FIG. 1 is a perspective view schematically showing an example of a measuring jig. FIG. 2A is a perspective view schematically showing a usage example of an example of a measuring jig, and FIG. 2B is a top view schematically showing a usage example of an example of a measuring jig. Each of FIGS. 3A and 3B is a perspective view schematically showing another example of the measuring jig. 4A is a perspective view schematically showing a usage example of the measuring jig shown in FIG. 3A, and FIG. 4B is a perspective view of the measuring jig shown in FIG. 3A. It is a top view which shows the example of use typically. 5A is a perspective view schematically showing a usage example of the measuring jig shown in FIG. 3B, and FIG. 5B is a perspective view of the measuring jig shown in FIG. 3B. It is a top view which shows the example of use typically.

Embodiments of the present invention will be described with reference to the accompanying drawings. FIG. 1 is a perspective view schematically showing an example of a measuring jig. The measuring jig 2 shown in FIG. 1 has a rectangular parallelepiped body portion 4 . The body portion 4 includes a rectangular upper surface 4a and a lower surface, rectangular left and right side surfaces 4b between the long side of the upper surface 4a and the long side of the lower surface, short sides of the upper surface 4a and short sides of the lower surface. It has a rectangular front surface 4c and a rear surface that exist between the sides. The long sides of the upper surface 4a and the long sides of the lower surface of the main body 4 are designed to be substantially equal in width to grooves 14c formed in the chuck table 14, which will be described later.

Further, L-shaped first engaging portions 6 and 8 are provided at the front end portions of the left side surface and the right side surface 4b of the body portion 4, respectively. The first engaging portions 6 and 8 are rectangular parallelepiped standing portions 6a and 8a having a lower portion fixed to the main body portion 4 and an upper portion positioned above the upper surface 4a, and the standing portions 6a and 8a. rectangular parallelepiped horizontal portions 6b and 8b extending forward from the upper portion of the . The lower surfaces of the horizontal portions 6b and 8b are located at substantially the same height as the upper surface 4a of the main body portion 4. As shown in FIG.

Similarly, L-shaped second engaging portions 10 and 12 are provided at the respective rear end portions of the left side surface and the right side surface 4b of the body portion 4, respectively. The second engaging portions 10 and 12 are rectangular parallelepiped standing portions 10a and 12a having a lower portion fixed to the main body portion 4 and an upper portion positioned above the upper surface 4a, and the standing portions 10a and 12a. rectangular parallelepiped horizontal portions 10b and 12b extending rearward from the upper portion of the . The lower surfaces of the horizontal portions 6b and 8b are located at substantially the same height as the upper surface 4a of the main body portion 4. As shown in FIG.

The first engaging portions 6 and 8 and the second engaging portions 10 and 12 are connected by the body portion 4 . The measuring jig 2 may be configured by combining the body portion 4, the first engaging portions 6 and 8, and the second engaging portions 10 and 12, which are structures independent of each other. A single structure in which the first engaging portions 6, 8 and the second engaging portions 10, 12 are integrated may be used. For example, the measuring jig 2 is a single structure manufactured by supplying a thermoplastic resin softened by heating to a predetermined mold and cooling it.

FIG. 2A is a perspective view schematically showing a usage example of the measuring jig 2, and FIG. 2B is a top view schematically showing a usage example of the measuring jig 2. FIG. The measuring jig 2 is used by being placed on a self-grinded chuck table 14, for example. The chuck table 14 has a disk-shaped frame 16 made of, for example, ceramics.

The frame 16 has a disk-shaped bottom plate 16a. A cylindrical side wall 16b extending upward is provided on the outer edge of the upper surface of the bottom plate 16a. A columnar holding portion 16c extending upward is provided in the central portion of the upper surface of the bottom plate 16a. Further, a disc-shaped concave portion is formed on the upper surface side of the holding portion 16c, and a disc-shaped porous plate 18 made of ceramics or the like is fixed to the concave portion.

This chuck table 14 is used, for example, when grinding a workpiece of a work unit obtained by attaching a tape to a ring frame and a workpiece positioned at an opening of the ring frame to integrate the workpiece. used. Specifically, when the workpiece is ground in this way, the upper surface of the holding portion 16c becomes the holding surface 14a of the chuck table that holds the workpiece through the tape, and the upper surface of the side wall 16b serves as the holding surface 14a. This serves as a reference surface 14b with which one probe of the pair of dial gauges contacts in order to measure the thickness of the workpiece.

Further, when grinding the workpiece in this way, the space defined by the bottom plate 16a, the side wall 16b and the holding portion 16c and having an open top becomes the groove 14c in which the ring frame is arranged. That is, this grinding includes an inner surface extending downward from the outer edge of the upper surface (holding surface 14a) of the holding portion 16c, an outer surface extending downward from the inner edge of the upper surface (reference surface 14b) of the side wall 16b, and A ring frame is placed inside a groove 14c having a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface.

The measuring jig 2 is used to measure the change in height of the holding surface 14a and the reference surface 14b of the chuck table 14 along the measured line 20 (see FIG. 2B) using a dial gauge. The line 20 to be measured is a curved region that overlaps with the rotational trajectories of a plurality of grinding wheels for self-grinding the chuck table 14 .

When performing this measurement, first, the first engaging portions 6 and 8 are engaged with the outer edge portion of the holding surface 14a of the chuck table 14 and the upper end portion of the inner side surface of the groove 14c, and the second engaging portion The measuring jig 2 is arranged so that the portions 10 and 12 are engaged with the inner edge of the reference surface 14b of the chuck table 14 and the upper end of the outer surface of the groove 14c. Also, at this time, the measuring jig 2 is arranged so that the line 20 to be measured overlaps the main body portion 4 .

As a result, the holding surface 14 a and the reference surface 14 b are continuously connected via the upper surface 4 a of the main body 4 along the line 20 to be measured. Therefore, by using the measuring jig 2, the holding surface 14a and the reference surface 14b of the chuck table 14 can be easily measured by the dial gauge without dropping the probe of the dial gauge into the groove 14c formed in the chuck table 14. height change in the measured line 20 can be measured.

In addition, the measuring jig of the present invention is not limited to the measuring jig 2 described above. Each of FIGS. 3A and 3B is a perspective view schematically showing another example of the measuring jig of the present invention. Also, FIG. 3B shows an enlarged top view of a part of the measuring jig.

The measuring jig 22 shown in FIG. 3A has a first bridge portion 24 , a second bridge portion 26 , and a connecting portion 28 connecting the first bridge portion 24 and the second bridge portion 26 . Here, the structure of each of the first bridge portion 24 and the second bridge portion 26 is the same as that of the measuring jig 2 shown in FIGS. 1 and 2(A) and 2(B). Therefore, the description of the structure of each of the first bridge portion 24 and the second bridge portion 26 is omitted here.

The connecting portion 28 is a plate-like structure curved in an arc, and the upper surface side of one end portion thereof is fixed to the lower surface side of the main body portion 24a of the first bridge portion 24, and the upper surface side of the other end portion is the second connecting portion. It is fixed to the lower surface side of the body portion 26 a of the bridge portion 26 . The curvature of the connecting portion 28 is designed to be approximately equal to the curvature of the groove 14c formed in the chuck table 14 described above.

The measuring jig 22 may be configured by combining the first bridge portion 24, the second bridge portion 26, and the connecting portion 28, which are structures independent of each other. 26 and connecting portion 28 may be a single integrated structure. For example, the measuring jig 22 is a single structure manufactured by supplying heated and softened thermoplastic resin to a predetermined mold and cooling it.

4A is a perspective view schematically showing a usage example of the measuring jig 22, and FIG. 4B is a top view schematically showing a usage example of the measuring jig 22. FIG. The measuring jig 22 is used, for example, arranged on the self-grinding chuck table 14 described above.

Specifically, the measuring jig 22 is used when measuring a change in height of the holding surface 14a and the reference surface 14b of the chuck table 14 along the line 30 to be measured using a dial gauge. The line 30 to be measured is a curved region that overlaps with the rotational trajectories of a plurality of grinding wheels for self-grinding the chuck table 14 .

When performing this measurement, first, each of the first bridge portion 24 and the second bridge portion 26 is placed on the chuck table 14 in the same manner as when the measuring jig 2 is placed on the chuck table 14 . At this time, the connecting portion 28 of the measuring jig 22 is positioned inside the groove 14 c formed in the chuck table 14 .

By using the measuring jig 22 in this way, the holding surface 14a of the chuck table 14 and the reference surface can be easily measured by the dial gauge without dropping the probe of the dial gauge into the groove 14c formed in the chuck table 14. It becomes possible to measure the change in height in the line 30 to be measured 14b. Since the connecting portion 28 is positioned inside the groove 14c, it does not interfere with this measurement.

The measuring jig 32 shown in FIG. 3B has a first bridge portion 34 , a second bridge portion 36 , and a connecting portion 38 connecting the first bridge portion 34 and the second bridge portion 36 . Here, the structure of each of the first bridge portion 34 and the second bridge portion 36 is the same as that of the measuring jig 2 shown in FIGS. 1 and 2(A) and 2(B). Therefore, description of the structures of the first bridge portion 34 and the second bridge portion 36 is omitted here.

The connecting portion 38 is a plate-shaped structure curved in an arc, and the end face side of one end portion thereof is fixed to the front face side of the first engaging portion 34a of the first bridge portion 34, and the end face of the other end portion is fixed. side is fixed to the front side of the first engaging portion 36 a of the second bridge portion 36 . The curvature of the connecting portion 38 is designed to be approximately equal to the curvature of the line 30 to be measured. In addition, the lower surface of the connecting portion 38 is positioned at approximately the same height as the lower surfaces of the first engaging portions 34a and 36a.

In addition, unevenness 40 that functions as a scale is formed on the upper surface of the connecting portion 38 . The unevenness includes a plurality of linear grooves 40a substantially parallel to each other. Each of the plurality of linear grooves 40a is formed so as to be positioned on the center side of the holding surface 14a of the chuck table 14 when the measuring jig 32 is arranged on the chuck table 14. As shown in FIG.

Further, the plurality of linear grooves 40a are classified into two types according to their length. Specifically, among the plurality of linear grooves 40a, a groove whose distance from the center of the connecting portion 38 is approximately 2.5×n (n is a natural number excluding a multiple of 5) mm is larger than the other grooves. is also short. In addition, grooves 40b having shapes corresponding to numbers indicating distances from the center of the connecting portion 38 are formed in the vicinity of the plurality of linear grooves 40a. These grooves 40a and 40b are formed, for example, by applying laser marking to the upper surface side of the connecting portion 38 of the measuring jig 32. As shown in FIG.

The measuring jig 32 may be configured by combining the first bridge portion 34, the second bridge portion 36, and the connecting portion 38, which are structures independent of each other. 36 and connecting portion 38 may be a single integrated structure. For example, the measuring jig 32 is manufactured by supplying a thermoplastic resin softened by heating to a predetermined mold, cooling it, and then forming the unevenness 40 on the upper surface of the connecting portion 38 by laser marking. It is a structure of

FIG. 5A is a perspective view schematically showing a usage example of the measuring jig 32, and FIG. 5B is a top view schematically showing a usage example of the measuring jig 22. FIG. The measuring jig 32 is used, for example, arranged on the self-grinding chuck table 14 described above. Specifically, the measuring jig 32 is used when measuring a change in height of the holding surface 14a and the reference surface 14b of the chuck table 14 on the line 30 to be measured using a dial gauge.

When performing this measurement, first, each of the first bridge portion 34 and the second bridge portion 36 is placed on the chuck table 14 in the same manner as when the measuring jig 2 is placed on the chuck table 14 . At this time, the connecting portion 38 of the measuring jig 32 is arranged so that the unevenness 40 is displayed along the line 30 to be measured.

By using the measuring jig 32 in this way, the holding surface 14a of the chuck table 14 and the reference surface can be easily measured by the dial gauge without dropping the probe of the dial gauge into the groove 14c formed in the chuck table 14. It becomes possible to measure the change in height in the line 30 to be measured 14b. Furthermore, in this case, by referring to the unevenness 40, it becomes easier to grasp the relationship between the distance from the center of the holding surface 14a and the height.

In the measurement jig 32, if the upper surface of the connecting portion 38 can function as a scale, the linear grooves 40a and the grooves 40b having shapes corresponding to the numbers may not be formed. For example, in the measuring jig 32, the upper surface of the connecting portion 38 may be provided with linear projections and projections having shapes corresponding to numbers to function as scales. Further, in the measuring jig 32, the line-segment-shaped area on the upper surface of the connecting portion 38 and the area having a shape corresponding to the numbers may be colored to function as a scale.

In addition, the structure, method, and the like according to the above-described embodiments can be modified as appropriate without departing from the scope of the present invention.

2: Measuring jig 4: Main body (4a: top surface, 4b: right side surface, 4c: front surface)
6, 8: first engaging portion (6a, 8a: standing portion; 6b, 8b: horizontal portion)
10, 12: second engaging portions (10a, 12a: standing portions; 10b, 12b: horizontal portions)
16: chuck table (16a: bottom plate, 16b: side wall, 16c: holding part)
18: Porous plate 20: Line to be measured 22: Measuring jig 24: First bridge portion (24a: main body portion)
26: Second bridge section (26a: body section)
28: Connecting portion 30: Line to be measured 32: Measuring jig 34: First bridge portion (34a: first engaging portion)
36: second bridge portion (36a: first engagement portion)
38: connecting portion 40: unevenness (40a: linear groove, 40b: groove having a shape corresponding to a number)

Claims (3)

A holding surface for holding, via the tape, the workpiece of the work unit obtained by bonding and integrating the ring frame and the workpiece positioned at the opening of the ring frame with the tape. and,
a reference surface positioned outside the ring frame when the workpiece is held on the holding surface via the tape;
an inner surface extending downwardly from the outer edge of the holding surface, an outer surface extending downwardly from the inner edge of the reference surface, and a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface; a groove within which the ring frame is positioned when the workpiece is held via the tape on a holding surface;
A measuring jig used when measuring a change in height in a line to be measured between the holding surface of the chuck table and the reference surface with a dial gauge,
a first engaging portion for engaging the outer edge of the holding surface and the upper end of the inner surface;
a second engaging portion for engaging the inner edge of the reference surface and the upper end of the outer surface;
a body portion that connects the first engaging portion and the second engaging portion;
The first engaging portion engages the outer edge of the holding surface and the upper end of the inner surface, and the second engaging portion engages the inner edge of the reference surface and the upper end of the outer surface. A measuring jig characterized in that the main body continuously connects the holding surface and the reference surface when the holding surface and the reference surface are connected. A holding surface for holding, via the tape, the workpiece of the work unit obtained by bonding and integrating the ring frame and the workpiece positioned at the opening of the ring frame with the tape. and,
a reference surface positioned outside the ring frame when the workpiece is held on the holding surface via the tape;
an inner surface extending downwardly from the outer edge of the holding surface, an outer surface extending downwardly from the inner edge of the reference surface, and a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface; a groove within which the ring frame is positioned when the workpiece is held via the tape on a holding surface;
A measuring jig used when measuring a change in height in a line to be measured between the holding surface of the chuck table and the reference surface with a dial gauge,
a first bridge section, a second bridge section, and a connection section that connects the first bridge section and the second bridge section;
Each of the first bridge section and the second bridge section,
a first engaging portion for engaging the outer edge of the holding surface and the upper end of the inner surface;
a second engaging portion for engaging the inner edge of the reference surface and the upper end of the outer surface;
a body portion that connects the first engaging portion and the second engaging portion;
The first engagement portion of each of the first bridge portion and the second bridge portion engages the outer edge portion of the holding surface and the upper end portion of the inner surface, and the second engagement portion engages the reference. the body portions of the first bridge portion and the second bridge portion continuously connect the holding surface and the reference surface when engaged with the inner edge portion of the surface and the upper end portion of the outer surface; , a measuring jig, wherein the connecting portion is positioned inside the groove. A holding surface for holding, via the tape, the workpiece of the work unit obtained by bonding and integrating the ring frame and the workpiece positioned at the opening of the ring frame with the tape. and,
a reference surface positioned outside the ring frame when the workpiece is held on the holding surface via the tape;
an inner surface extending downwardly from the outer edge of the holding surface, an outer surface extending downwardly from the inner edge of the reference surface, and a bottom surface extending from the lower end of the inner surface to the lower end of the outer surface; a groove within which the ring frame is positioned when the workpiece is held via the tape on a holding surface;
A measuring jig used when measuring a change in height in a line to be measured between the holding surface of the chuck table and the reference surface with a dial gauge,
a first bridge portion, a second bridge portion, and a connection portion that connects the first bridge portion and the second bridge portion and has a scale,
Each of the first bridge section and the second bridge section,
a first engaging portion for engaging the outer edge of the holding surface and the upper end of the inner surface;
a second engaging portion for engaging the inner edge of the reference surface and the upper end of the outer surface;
a body portion that connects the first engaging portion and the second engaging portion;
The first engagement portion of each of the first bridge portion and the second bridge portion engages the outer edge portion of the holding surface and the upper end portion of the inner surface, and the second engagement portion engages the reference. the body portions of the first bridge portion and the second bridge portion continuously connect the holding surface and the reference surface when engaged with the inner edge portion of the surface and the upper end portion of the outer surface; , a measuring jig, wherein the connecting portion is positioned such that the scale is displayed along the line to be measured.

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