JP2023051785A - フィラメントレス電子源 - Google Patents

フィラメントレス電子源 Download PDF

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Publication number
JP2023051785A
JP2023051785A JP2022146148A JP2022146148A JP2023051785A JP 2023051785 A JP2023051785 A JP 2023051785A JP 2022146148 A JP2022146148 A JP 2022146148A JP 2022146148 A JP2022146148 A JP 2022146148A JP 2023051785 A JP2023051785 A JP 2023051785A
Authority
JP
Japan
Prior art keywords
electron source
crystal
foil
supports
electron
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2022146148A
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English (en)
Japanese (ja)
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JP2023051785A5 (https=
Inventor
スティラー ジョン
Stiller John
トロク アーロン
Torok Aaron
カガリス ケヴィン
Kagarice Kevin
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
FEI Co
Original Assignee
FEI Co
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by FEI Co filed Critical FEI Co
Publication of JP2023051785A publication Critical patent/JP2023051785A/ja
Publication of JP2023051785A5 publication Critical patent/JP2023051785A5/ja
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/075—Electron guns using thermionic emission from cathodes heated by particle bombardment or by irradiation, e.g. by laser
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/04—Arrangements of electrodes and associated parts for generating or controlling the discharge, e.g. electron-optical arrangement or ion-optical arrangement
    • H01J37/06—Electron sources; Electron guns
    • H01J37/073—Electron guns using field emission, photo emission, or secondary emission electron sources
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/02—Details
    • H01J37/21—Means for adjusting the focus
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/061—Construction
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00—Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/06—Sources
    • H01J2237/063—Electron sources
    • H01J2237/06308—Thermionic sources
    • H01J2237/06316—Schottky emission

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  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Electron Sources, Ion Sources (AREA)
JP2022146148A 2021-09-30 2022-09-14 フィラメントレス電子源 Pending JP2023051785A (ja)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US17/491,039 2021-09-30
US17/491,039 US11887805B2 (en) 2021-09-30 2021-09-30 Filament-less electron source

Publications (2)

Publication Number Publication Date
JP2023051785A true JP2023051785A (ja) 2023-04-11
JP2023051785A5 JP2023051785A5 (https=) 2025-08-22

Family

ID=85721656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022146148A Pending JP2023051785A (ja) 2021-09-30 2022-09-14 フィラメントレス電子源

Country Status (2)

Country Link
US (1) US11887805B2 (https=)
JP (1) JP2023051785A (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024204383A1 (ja) 2023-03-28 2024-10-03 富士フイルム株式会社 非水電解液二次電池用正極シート及び非水電解液二次電池

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US12609276B2 (en) * 2023-12-21 2026-04-21 Fei Company Mixed-gas species plasma source system

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0676730A (ja) * 1992-08-24 1994-03-18 Denki Kagaku Kogyo Kk 熱電子放射陰極
JP2004512639A (ja) * 2000-10-17 2004-04-22 フェイ　カンパニ 低入力電力ショットキーエミッタ
JP2017157368A (ja) * 2016-03-01 2017-09-07 株式会社日立ハイテクノロジーズ 電界放出電子源、その製造方法および電子線装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3817592A (en) 1972-09-29 1974-06-18 Linfield Res Inst Method for reproducibly fabricating and using stable thermal-field emission cathodes

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0676730A (ja) * 1992-08-24 1994-03-18 Denki Kagaku Kogyo Kk 熱電子放射陰極
JP2004512639A (ja) * 2000-10-17 2004-04-22 フェイ　カンパニ 低入力電力ショットキーエミッタ
JP2017157368A (ja) * 2016-03-01 2017-09-07 株式会社日立ハイテクノロジーズ 電界放出電子源、その製造方法および電子線装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2024204383A1 (ja) 2023-03-28 2024-10-03 富士フイルム株式会社 非水電解液二次電池用正極シート及び非水電解液二次電池
EP4693431A1 (en) 2023-03-28 2026-02-11 FUJIFILM Corporation Positive electrode sheet for nonaqueous electrolyte secondary battery and nonaqueous electrolyte secondary battery

Also Published As

Publication number Publication date
US20230101787A1 (en) 2023-03-30
US11887805B2 (en) 2024-01-30

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