JP2023029969A - Nozzle management machine - Google Patents

Abstract

PROBLEM TO BE SOLVED: To provide a nozzle management machine that has higher practical usefulness.

SOLUTION: A nozzle management machine 80 is a machine for managing a suction nozzle used for holding an electric component in an electric component mounting device, and comprises: a nozzle housing device 100 capable of housing a plurality of suction nozzles; and a nozzle inspection device 106 that executes an inspection for the suction nozzle that is housed in the nozzle housing device or the suction nozzle which will be housed. The nozzle management machine is constructed so as to execute both of (a) a tip part state inspection that is the inspection regarding to a state of a tip part of the suction nozzle, and (b) a retreat required inspection that is the inspection regarding to a force required for retreating the tip part of the suction nozzle when the tip part of the suction nozzle can be retreated against an energization force.

SELECTED DRAWING: Figure 5

COPYRIGHT: (C)2023,JPO&INPIT

Description

TECHNICAL FIELD The present invention relates to a nozzle manager for managing suction nozzles used to hold electrical components in an electrical component mounting machine.

In many electronic component mounting machines, when mounting an electrical component on a circuit board, the electrical component is held by a suction nozzle. It is important to use an appropriate suction nozzle in such an electrical component mounting machine in order to maintain high mounting accuracy of electrical components. So far, for example, there are technologies described in Patent Document 1 below for cleaning suction nozzles, and technologies described in Patent Documents 2 and 3 below for inspection of suction nozzles. there is

JP 2012-114237 A JP 2012-4306 A JP 2010-258185 A

As can be seen from the fact that the above patent documents exist, it is necessary to properly manage the suction nozzles in order to use them properly. Therefore, there is a demand for a nozzle management machine capable of appropriately managing suction nozzles, particularly a highly practical nozzle management machine. The present invention has been made in view of such circumstances, and an object of the present invention is to provide a highly practical nozzle management machine.

In order to solve the above problems, a nozzle management machine of the present invention is a nozzle management machine for managing a suction nozzle used for holding an electrical component in an electrical component mounting machine, wherein the electrical component mounting machine includes: is configured such that one or more suction nozzles used in the electrical component mounting machine are mounted on a nozzle tray detachably arranged in the electrical component mounting machine, and the nozzle management machine is configured to a plurality of pallets on which a plurality of suction nozzles can be placed, a cleaning device for cleaning the plurality of suction nozzles placed on the pallets, and a nozzle holder for holding the transferred suction nozzles and a transfer head to which a camera for reading a 2D code attached to a suction nozzle on the pallet is attached, and a transfer head and a transfer device for moving the transfer head. The transfer device is configured to transfer the suction nozzles accommodated in the pallet to the nozzle tray positioned at the set position by the holding chuck, and to place the suction nozzles on the nozzle tray positioned at the set position. and transferring the placed suction nozzle to the pallet by the holding chuck, and moving the camera to read the 2D code of the suction nozzle on the pallet. be.

According to the present invention, the transfer device moves the suction nozzles accommodated in the pallet to the nozzle tray positioned at the set position by the holding chuck, and places them on the nozzle tray positioned at the set position. A nozzle management machine is realized that performs at least one of transferring the sucking nozzles that have been attached to the pallet by a holding chuck, and moving the camera to read the 2D code of the sucking nozzles on the pallet. The nozzle management machine becomes highly practical.

Inventions that are recognized as claimable in the present application (hereinafter referred to as "claimable inventions")
) will be exemplified and explained. Each aspect is described in the same way as the claims, divided into claims, each claim is numbered, and the numbers of other claims are referred to as necessary. This is only for the purpose of facilitating the understanding of the claimable inventions, and is not intended to limit the combinations of constituent elements constituting those inventions to those described in each of the following claims. In other words, the claimable invention should be interpreted in consideration of the descriptions accompanying each of the following claims, the description of the embodiment, etc., and as long as the interpretation is followed, other constituent elements are added to the aspects of each claim. An aspect of the claimed invention, or an aspect in which some components are deleted from the aspects of each claim, can be one aspect of the claimable invention. Some aspects of the claimable invention can be the claimed invention.

≪Basic configuration≫
(1) A nozzle management machine for managing a suction nozzle used to hold an electrical component in an electrical component mounting machine,
A nozzle management machine equipped with a nozzle housing device capable of housing a plurality of suction nozzles.

This aspect relates to the basic configuration of a nozzle management machine (hereinafter sometimes simply referred to as a "management machine"). Devising the above-mentioned nozzle accommodation device (hereinafter sometimes simply referred to as "accommodating device") itself, and various measures for the suction nozzle (hereinafter sometimes simply referred to as "nozzle") accommodated in the accommodating device A highly practical nozzle management machine is realized by providing a means for performing the above.

<<Structure of Nozzle Storage Device>>
Some of the following aspects are aspects related to the structure of the nozzle accommodation device. By the way, some of these aspects are not aspects in which the management machine is the category, but even if they are changed to aspects in which the storage device is the category, that is, the storage device is independent of the other components of the management machine. However, that aspect can still be an aspect of a claimable invention.

(11) The nozzle management machine according to item (1), wherein the nozzle accommodation device includes a plurality of pallets on which a plurality of suction nozzles can be placed.

The “pallet” in this aspect can be called a nozzle mounting device or a container (container), and in this aspect, a plurality of nozzles are accommodated per pallet. It is possible to realize a highly convenient management machine by allowing pallets to be taken in and out of the storage device and to treat nozzles on a pallet basis.

(12) The nozzle management machine according to item (11), wherein each of the plurality of pallets has a plurality of mounting portions on which one suction nozzle is mounted.

By providing the mounting portion on the pallet, it becomes possible to firmly hold the nozzles in the pallet. Conversely speaking, it is desirable that the placement section has a structure capable of preventing the nozzle from shifting.

(13) The nozzle management machine according to item (11) or item (12), wherein one or more of the plurality of pallets are configured to be capable of mounting a plurality of types of suction nozzles.

If only one type of nozzle can be mounted on one pallet, the pallet must be enriched in types according to the nozzle types, and such enrichment is troublesome in a certain sense. If a pallet on which a plurality of types of nozzles can be placed is used, the number of pallet types can be reduced, and the troublesomeness can be avoided or reduced. That is, in this aspect, versatility of the palette is realized. In addition, considering the entire storage device, if a plurality of types of pallets that can only mount one type of nozzle are prepared, the total number of pallets is limited, so the number of pallets for each type of nozzle must be reduced. It will be. On the other hand, by adopting a pallet on which a plurality of types of nozzles can be placed, it is possible to operate the storage device easily without being influenced by the types of nozzles. From the standpoint of avoiding the above-mentioned troublesomeness and simplifying the operation of the storage device, it is desirable to adopt a pallet on which all types of nozzles to be handled by the managing machine can be placed.

Generally, the nozzle has a flange, which will be described later, and has a circular shape when viewed from above. When such circular nozzles are arranged side by side on a pallet, nozzles with relatively large outer diameters are inefficiently arranged. That is, the area occupied by the nozzles, and more particularly by their flanges, is relatively small compared to the area of the pallet. In view of this, by arranging nozzles with a relatively large outer diameter and nozzles with a relatively small outer diameter in a mixed manner, that is, by arranging them alternately, the number of nozzles that can be mounted can be increased. It becomes possible to In extreme terms, placement efficiency can be greatly improved by arranging a nozzle with a small outer diameter in the gap between nozzles with a large outer diameter. From this point of view, it is preferable that a plurality of types of nozzles having different sizes, particularly a plurality of types of nozzles having different outer diameters of flanges, be mounted.

(14) Each of the plurality of pallets has a plurality of mounting portions on which one suction nozzle is mounted, and the plurality of mounting portions possessed by one or more of the plurality of pallets. (13), at least part of which is configured to be capable of mounting a plurality of different types of suction nozzles.

In the pallet of this aspect, simply speaking, a plurality of types of nozzles can be mounted on one mounting portion. Assuming that the mounting portion can only mount one type of nozzle, when mounting a plurality of types of nozzles on one pallet, the pallet must be provided with many types of mounting portions. In that case, a situation may occur in which the nozzles are not mounted on many mounting portions. In other words, the possibility that there are many empty placement sections increases. As in this aspect, if a mounting portion shared by a plurality of types of nozzles is provided, it is possible to generalize the pallet and efficiently mount the nozzles on the pallet. If a plurality of types of nozzles having different sizes can be mounted on one mounting portion, the nozzles can be mounted on the pallet more efficiently.

(15) the suction nozzle has a flange, and each of the plurality of mounting portions is configured to restrict radial displacement of the suction nozzle at an outer periphery of the flange;
The nozzle managing machine according to item (14), wherein the at least some of the plurality of mounting portions are configured to be capable of mounting a plurality of types of suction nozzles that differ from each other in the outer diameter of the flange.

Simply put, this aspect is an aspect in which a plurality of types of nozzles having different sizes can be mounted on one mounting portion. In general, the flange is the part with the largest outer diameter of the nozzle, and if the displacement of the nozzle in the radial direction, that is, the misalignment of the nozzle is restricted on the outer circumference of the flange, effective restriction becomes possible.

(16) Each of the at least a portion of the plurality of mounting portions has a hole in which the flange of the suction nozzle fits and regulates the outer periphery of the flange in the inner peripheral wall, and the inner peripheral wall of the hole has a depth. The nozzle manager according to item (15), wherein flanges of a plurality of types of suction nozzles having different inner dimensions in different directions and different outer diameters of the flanges are fitted into the holes at different depth positions.

This aspect relates to the structure of a mounting portion on which a plurality of types of nozzles having different outer diameters of flanges can be mounted while regulating the outer circumference of the flanges. Specifically, the hole of the mounting portion may be, for example, a stepped hole having a plurality of steps whose inner dimensions of the inner peripheral wall are different from each other. A tapered hole may be used. With such a mounting portion, it is possible to mount each of a plurality of types of nozzles having different sizes on the pallet while firmly restricting their radial displacement.

(17) The nozzle management machine according to any one of items (11) to (16), wherein the nozzle storage device includes a pallet moving device that moves the plurality of pallets within the nozzle storage device.

According to this aspect, since the pallet is movable in the storage device, it is possible to carry out the pallet from the storage device at a specific position and carry it into the storage device. The pallet moving device in this aspect may be configured to move each of the plurality of pallets independently, or may be configured to move the plurality of pallets simultaneously, that is, together.

(18) The nozzle manager according to item (17), wherein the pallet moving device is a pallet circulation device that circulates and moves the plurality of pallets simultaneously.

In the pallet moving device of this aspect, it is possible to move a plurality of pallets together along the same route while making the structure of the device relatively simple, depending on the structure.

(19) each of the plurality of pallets is arranged with a surface on which the suction nozzle is placed facing upward;
The nozzle manager according to item (18), wherein the pallet circulation device is configured to circulate the plurality of pallets along one vertical plane while each pallet maintains its posture.

Since the pallet moving device in this aspect can circulate a plurality of pallets in a relatively small space, according to this aspect, it is possible to realize a relatively compact storage device. The pallet circulation device in this aspect can also be considered as a device having a structure like a tower-type multi-storey parking lot, for example.

<<Anti-nozzle treatment execution device, Nozzle transfer device>>
Some of the following aspects relate to anti-nozzle treatment execution devices and nozzle transfer devices.

(21) The nozzle management machine
19. The apparatus according to any one of items (1) to (19), further comprising a nozzle treatment executing device for executing some treatment on the suction nozzles accommodated in or about to be accommodated in the nozzle accommodation device. Nozzle management machine.

The “nozzle treatment execution device” in this aspect is a device that executes some kind of treatment for nozzles, and specifically includes, for example, a nozzle transfer device, a nozzle inspection device, a nozzle cleaning device, etc., which will be described later. be By providing a nozzle treatment execution device (hereinafter sometimes simply referred to as a "treatment execution device"), the nozzle management machine can have various functions according to the treatment execution device provided, in addition to the function of accommodating the nozzles. It is possible to

(22) The nozzle managing machine
The nozzle management machine according to item (21), further comprising a nozzle transfer device for transferring one or more suction nozzles from the nozzle accommodation device to the anti-nozzle treatment execution device.

The "nozzle transfer device" in this aspect is a device having a function of carrying out one or more nozzles (hereinafter sometimes referred to as "nozzle groups") from the storage device and carrying the nozzle group into the treatment execution device. can think. This nozzle transfer device (hereinafter sometimes simply referred to as "transfer device") enables cooperation between the accommodation device and the treatment execution device.

(23) The nozzle management machine according to item (22), wherein the nozzle transfer device is configured to transfer one or more suction nozzles from the anti-nozzle treatment execution device to the nozzle storage device.

The transfer device in this aspect carries out the nozzle groups from the processing execution device and carries the nozzle groups into the storage device, in addition to carrying out the nozzle groups from the accommodation device and carrying in the nozzle groups into the treatment execution device. It also has functions. In other words, it can be considered that the transfer device in this aspect has a function of returning the nozzle group.

(24) The nozzle housing device includes a plurality of pallets on which a plurality of suction nozzles can be placed,
The nozzle transfer device is
Item (22) or (23), wherein the pallet transport device transports a plurality of suction nozzles by transporting one of the plurality of pallets from the nozzle storage device to the anti-nozzle treatment execution device. Nozzle management machine described.

(25) The nozzle management machine according to item (24), wherein the pallet transfer device is configured to transfer one of the plurality of pallets from the anti-nozzle treatment execution device to the nozzle storage device.

The above two aspects are effective when the nozzles are placed on pallets and stored in the storage device, and the transfer device transfers a nozzle group consisting of a plurality of nozzles for each pallet. It is a constructed aspect. These two aspects allow relatively easy transportation of the nozzle group between the receiving device and the treatment performing device. It should be noted that the pallet transfer device in the above two modes (hereinafter sometimes simply referred to as "transfer device") is configured to transfer any pallet regardless of its position in the storage device. It may also be configured to transport only pallets located at specific locations, as will be explained later. The former configuration is effective when the storage device does not have a pallet moving device.

(26) The nozzle storage device includes a pallet moving device that moves each of the plurality of pallets within the nozzle storage device,
Item (24) or (25), wherein the pallet transfer device is configured to transfer one of the plurality of pallets moved to the set position by the pallet transfer device to the anti-nozzle treatment execution device. Nozzle management machine described in paragraph.

(27) The nozzle manager according to item (26), wherein the pallet transfer device is configured to transfer one of the plurality of pallets from the anti-nozzle treatment execution device to the set position.

In the above two aspects, the transfer device has a function of transferring one pallet located at a specific position among the plurality of pallets possessed by the storage device. It has the function of returning the pallet to the location. In other words, in the above two modes, when the pallet is moved to a specific station by the pallet moving device within the storage device, the pallet is transferred between that station and the treatment execution device. According to the above two aspects, it is possible to simplify the structure of the transfer device because the pallet can be transferred between a specific position in the accommodation device and the treatment execution device.

≪Multiple anti-nozzle treatment execution devices≫
Some aspects below are aspects when a plurality of the treatment execution devices described above are provided.

(31) The nozzle management machine
The nozzle manager according to any one of items (21) to (27), comprising a plurality of nozzle treatment execution devices each functioning as the nozzle treatment execution device.

This aspect includes an aspect in which a plurality of devices that perform the same treatment are provided as the plurality of treatment execution devices, and an aspect in which a plurality of devices that perform different treatments are included. According to the former aspect, it is possible to realize a management machine with a high ability to execute the treatment, and according to the latter aspect, it is possible to realize a multi-functional management machine.

(32) The nozzle management machine according to item (31), wherein the nozzle management machine is configured such that the operation of each of the plurality of nozzle treatment execution devices is performed independently of the operation of the others. .

When the management machine is provided with a plurality of treatment execution devices that perform different treatments, for example, a nozzle sequentially passes through the plurality of treatment execution devices, and treatment by each of the plurality of treatment execution devices is performed on the nozzle. It can also be configured to run. Unlike such a configuration, this aspect can be considered as an aspect in which, for example, a plurality of treatment execution devices are configured to be able to perform treatment on different nozzles in parallel. According to this aspect, even a managing machine capable of performing a plurality of treatments can perform the plurality of treatments for one nozzle in a relatively short period of time.

(33) The nozzle managing machine
As nozzle transfer devices provided corresponding to the plurality of nozzle treatment execution devices, each transferring one or more suction nozzles from the nozzle housing device to a corresponding one of the plurality of nozzle treatment execution devices A nozzle manager according to paragraph (31) or (32) comprising a plurality of functioning nozzle transfer devices.

Simply put, this aspect can be considered as an aspect in which a transfer device is provided for each treatment execution device. It is particularly effective in the mode in which the plurality of treatment execution devices described above can operate independently of each other.

(34) The nozzle housing device comprises a plurality of pallets each capable of mounting a plurality of suction nozzles, and a pallet moving device for moving the plurality of pallets within the nozzle housing device,
each of the plurality of nozzle transfer devices,
A pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle storage device to the nozzle treatment execution device,
The nozzle management machine
each of the plurality of pallet transfer devices moves one of the plurality of pallets moved by the pallet moving device to a set position set corresponding to each of the plurality of anti-nozzle treatment execution devices; (33) Nozzle manager according to paragraph (33) configured to transfer to a corresponding one of

This aspect is an aspect configured to transfer the nozzles together with the pallet in the previous aspect. Specifically, in this aspect, it can be considered that multiple stations are provided within the containment device, and that pallets located at particular stations are transferred to particular treatment performing devices.

≪Nozzle transfer device≫
In an electrical component mounting machine, when mounting several electrical components on a circuit board, the nozzle used may be changed according to the size of the electrical component. The nozzles are placed on a nozzle tray (hereinafter sometimes simply referred to as "tray") and placed in a nozzle station provided in the electrical component mounting machine. The following several aspects are aspects related to this tray, more specifically, the nozzle-to-nozzle treatment execution device that transfers the nozzles to and from the tray.

(41) The electrical component mounting machine is configured such that one or more suction nozzles used in the electrical component mounting machine are mounted on a nozzle tray detachably arranged in the electrical component mounting machine. ,
The nozzle management machine, as the anti-nozzle treatment execution device,
a setting transfer for transferring the suction nozzle housed in the nozzle housing device to a nozzle tray positioned at a set position;
a nozzle transfer device that performs at least one of: transferring the suction nozzles placed on the nozzle tray positioned at the set position to the nozzle storage device; The nozzle manager according to any one of items (21) to (34).

The above-mentioned "setting transfer" is, for example, a transfer for setting a nozzle to be used in an electric component mounting machine to a tray, and by setting transfer, one of the plurality of nozzles accommodated in the accommodation device Several are placed in the nozzle tray. On the other hand, the above-mentioned "accommodation transfer" is, for example, a transfer for accommodating a nozzle used in an electrical component mounting machine into a storage device. At least some of the nozzles are removed from the tray. According to this aspect, it is possible to realize a managing machine capable of effectively assisting preparation, cleanup, etc. of nozzles in an electrical component mounting machine.

Incidentally, in the setting transfer according to this aspect, a nozzle transfer device (hereinafter sometimes simply referred to as a "transfer device") transfers the nozzles accommodated in the accommodation device directly from the accommodation device to the tray. For example, the concept includes transferring nozzles carried out from a storage device to a tray by a transfer device to be described later. Similarly, the accommodation transfer according to this aspect does not only mean that the nozzles placed on the tray are directly accommodated in the accommodation device. is a concept that also includes the transfer from the tray.

(42) The nozzle management machine according to item (41), wherein the nozzle transfer device is configured to perform both the setting transfer and the storage transfer.

According to this aspect, since both the setting transfer and the accommodation transfer are possible, a more practical management machine is realized.

(43) The nozzle management machine includes a nozzle transfer device that transfers one or more suction nozzles from the nozzle storage device to the nozzle treatment execution device,
The nozzle transfer device is
The nozzle management machine according to item (41) or (42), configured to perform transfer of the suction nozzle transferred by the nozzle transfer device during the setting transfer.

(44) The nozzle storage device includes a plurality of pallets on which a plurality of suction nozzles can be placed, and the nozzle transfer device transfers one of the plurality of pallets to the nozzle storage device. A pallet transfer device configured to transfer a plurality of suction nozzles by transferring from the device to the nozzle treatment execution device,
The nozzle transfer device is
At the time of the setting transfer, the suction nozzle placed on one of the plurality of pallets transferred by the pallet transfer device to a position where the nozzle transfer device can transfer is transferred. (43) Nozzle management machine according to paragraph (43) configured to perform loading.

(45) The nozzle management machine includes a nozzle transfer device for transferring one or more suction nozzles from the anti-nozzle treatment execution device to the nozzle accommodation device,
The nozzle transfer device is
Any one of items (41) to (44) configured to perform transfer for accommodation in the nozzle storage device via the nozzle transfer device when the storage transfer is performed. Nozzle management machine described.

(46) The nozzle storage device includes a plurality of pallets on which a plurality of suction nozzles can be placed, and the nozzle transfer device transfers one of the plurality of pallets to the counter nozzle. A pallet transfer device configured to transfer a plurality of suction nozzles by transferring them from a treatment execution device to the nozzle accommodation device,
The nozzle transfer device is
At the time of the storage transfer, transfer to one of the plurality of pallets transferred by the pallet transfer device from the nozzle storage device to a position where transfer by the nozzle transfer device is possible. A nozzle manager according to paragraph (45) configured to execute.

The above four aspects are aspects related to the above-described transfer device, and in these four aspects, the transfer of the nozzles transferred from the storage device by the transfer device to the tray, and the transfer of the nozzles transferred from the tray At least one of receiving in a receiving device by a transfer device. In two of the four modes, the transfer device is a pallet transfer device that transfers the nozzles by transferring the pallet, and the transfer is performed between the tray and the pallet.

(47) Each suction nozzle is assigned an identifier for recognizing unique information of the suction nozzle,
The nozzle management machine according to any one of items (41) to (46), wherein the nozzle transfer device has an identifier reader for reading the identifier.

The "unique information" in this embodiment typically includes an ID, and also broadly includes quality information, information about the level of capability, and the like. The ID is very useful information in grasping the housing positions of the plurality of nozzles housed in the housing device, that is, in grasping which nozzle is housed in which position. According to this aspect including the ID, since the unique information can be read, it is possible to sufficiently manage the contained nozzles using the unique information. In that sense, the reading of the identifier is desirably performed at the time of the storage transfer described above. By the way, the "identifier" can be a barcode, 2D code (two-dimensional code such as QR code (registered trademark)), etc., and the "identifier reader" is a barcode reader, an imaging device such as a camera, etc. It is possible to adopt.

(48) According to any one of items (41) to (47), the nozzle transfer device has a nozzle holder that holds the suction nozzle and a holder moving device that moves the nozzle holder. Nozzle management machine.

This aspect relates to a specific structure of the nozzle transfer device. As the "nozzle holder", it is possible to adopt a chuck, a clamp, or the like that holds the nozzle in a detachable manner. Further, the "holding tool moving device" can employ a wide variety of moving devices such as a so-called XYZ type robot, an articulated robot, and the like.

(49) Each suction nozzle is assigned an identifier for recognizing unique information of the suction nozzle,
Item (48), wherein the nozzle transfer device has an identifier reader for reading the identifier, and the identifier reader is moved together with the nozzle holder by the holder moving device. Nozzle management machine.

According to this aspect, when the nozzle is transferred, the identifier attached to the nozzle can be easily read, and a management machine with excellent convenience is realized.

≪Tray storage device≫
The following aspects are aspects related to housing the nozzle tray described above.

(51) The nozzle management machine
a tray housing device capable of housing a plurality of nozzle trays, each of which is the nozzle tray;
The nozzle management machine according to any one of items (41) to (49), further comprising a tray transfer device for transferring one nozzle tray between the set position and the tray accommodation device.

The managing machine of this aspect can be a managing machine capable of managing trays as well, by being provided with the tray storage device and the tray transfer device. For example, in relation to the placement of the nozzles by the placement device described above, the tray transfer device carries the tray into and out of the tray storage device, thereby realizing a convenient management machine. Become. More specifically, after the storage transfer described above, the placed tray from which the nozzle has been removed is stored in the tray storage device, or the tray stored in the tray storage device is set and transferred. is possible. Further, for example, when a defect is found in a tray on which nozzles are placed, the tray can be replaced with a tray that does not have the defect by using both the storage transfer and the setting transfer. is also possible.

(52) The nozzle management machine according to item (51), wherein the tray accommodation device is configured to accommodate a nozzle tray on which one or more suction nozzles are placed.

According to this aspect, since the tray with the nozzles set in advance can be accommodated in the tray accommodating device, the tray with the nozzles set can be quickly placed in the electrical component mounting machine when necessary. machine can be supplied.

≪Nozzle inspection device≫
Some of the following aspects are aspects related to a nozzle-to-nozzle treatment execution device that inspects nozzles. It should be noted that some of the aspects below are not aspects in which the management machine is the category, but even if the aspect is changed to an aspect in which the inspection device is simply the category, that is, aspects of the inspection device that are independent of the other components of the management machine. can be an aspect of a claimable invention.

(61) The nozzle management machine according to any one of items (21) to (52), wherein the nozzle management machine includes a nozzle inspection device for inspecting suction nozzles as the nozzle treatment execution device.

According to this aspect, for example, the nozzles housed in or to be housed in the housing device can be inspected, so that a convenient management machine is realized. In this embodiment, the inspection items performed by the nozzle inspection apparatus (hereinafter, sometimes simply referred to as "inspection apparatus") are not particularly limited. can be performed by the inspection device.

(62) The nozzle inspection device
(a) Passing flow rate test, which is a test related to the flow rate of air passing through the suction nozzle, and (b) Reading of an identifier attached to the suction nozzle for recognizing the unique information of the suction nozzle. (c) Tip state inspection, which is an inspection regarding the state of the tip of the suction nozzle; (d) When the tip of the suction nozzle can be retracted against the biasing force The nozzle manager according to item (61), configured to perform at least one required retraction force inspection, which is an inspection relating to the force required to retract the tip of the suction nozzle.

The four inspection items listed in this embodiment are basic inspection items for nozzles. Specifically, the "passing flow rate inspection" is an inspection to check how much the flow rate of the air passing through the nozzles is ensured, and is mainly an inspection to check for clogging of the nozzles. For example, the flow rate of air is measured in a state in which compressed air is continuously blown from the base end side into a nozzle whose tip is open, and when the measured flow rate is smaller than a set threshold flow rate, the nozzle It should be judged that there is clogging in the Further, instead of such a method, for example, in a state in which compressed air is continuously blown from the base end side into a nozzle whose tip is open, the pressure of the blown air is measured, and the pressure is set to a threshold value. If it is higher than the pressure, it may be determined that the nozzle is clogged and a sufficient air flow rate is not ensured.

The "identifier reading inspection" is, for example, an inspection for confirming whether the identifier provided on the nozzle described above, more specifically, the identifier provided on the upper surface of the flange can be read sufficiently. For example, if the identifier is actually imaged by an imaging device such as a camera, and the unique information to be indicated by the identifier cannot be sufficiently acquired from the imaged result, the identifier may be determined to be defective.

In a nutshell, the "tip condition inspection" is, for example, checking for the presence or absence of shape defects such as bending, chipping, and crushing of the tip of the nozzle, and checking for the presence or absence of foreign matter or dirt adhering to the tip. In this inspection, for example, the tip is imaged from the tip side by an imaging device such as a camera, and based on the image data obtained by the imaging, bending, chipping, crushing, adhesion of foreign matter, etc. The presence or absence of etc. should be determined.

The "retraction required force test" is a test related to the operation of the nozzle. In general, the nozzle has a distal end portion where the electrical component is sucked and a base end portion held by the nozzle holding device in order to reduce the impact applied to the electrical component when the electrical component is placed on the circuit board. is configured to retract That is, the tip of the nozzle is retracted against the biasing force of a spring or the like. The required retraction force inspection is, for example, the force required to retract the tip (hereinafter referred to as the "necessary retraction force").
is an inspection for confirming whether or not the required backward force is excessive. Simply put, it can be thought of as an inspection to confirm that the nozzle retracts smoothly. In this inspection, for example, the tip of a nozzle whose base end is supported is pushed toward the base end, and the force required for pushing when the nozzle starts to retreat is measured with a load sensor such as a load cell. , and if the force exceeds a set threshold force, it may be determined that there is an abnormality in the operation of the nozzle.

As will be described later, only one inspection device may be provided in the managing machine, or a plurality of inspection devices may be provided. When a plurality of inspection devices are provided, the plurality of inspection devices may have the same inspection items or may have different inspection items. Further referring to the above four inspection items, the inspection device may be configured to perform only one of the four inspection items. Also, it may be configured to perform two or more of the four inspection items. If configured to perform inspections for two or more inspection items, the number of inspection devices to be provided in the managing machine can be reduced.

(63) The nozzle management machine according to item (62), wherein the nozzle inspection device is configured to perform at least both the passing flow inspection and the identifier reading inspection.

As previously explained, both the throughflow test and the identifier reading test are performed proximally of the nozzle. In other words, the two inspections are performed from the same direction, and both inspections are located in the space in which the main components for inspection reside on the proximal side of the nozzle. Therefore, the inspection apparatus in this aspect can inspect the above two inspection items with a relatively simple configuration. Specifically, for example, by moving the two main components respectively corresponding to the two inspections by one moving device, the configuration can be simplified.

(64) The nozzle management machine according to item (62) or (63), wherein the nozzle inspection device is configured to perform at least both the tip state inspection and the required retraction force inspection.

Unlike the previous embodiment, the tip condition inspection and retract force requirement inspection are performed on the tip side of the nozzle. In other words, the two inspections are performed from the same direction, and in both inspections the main components for performing the inspection are placed in the space present on the tip side of the nozzle. Therefore, the inspection apparatus in this aspect can inspect the above two inspection items with a relatively simple configuration. Specifically, for example, by moving the two main components respectively corresponding to the two inspections by one moving device, the configuration can be simplified.

(65) The nozzle accommodation device includes a plurality of pallets on which a plurality of suction nozzles can be placed,
The nozzle management machine
a pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle storage device to the nozzle inspection device;
Items (61) through 61, wherein the nozzle inspection device is configured to inspect a plurality of suction nozzles mounted on one of the plurality of pallets while being mounted on the one pallet. (64) The nozzle manager according to any one of items.

According to this aspect, the inspection by the inspection device is performed while the nozzles are placed on the pallet. Ultimately, the nozzles are inspected in the same condition as they are housed in the housing. Therefore, it is possible to easily inspect the nozzles housed in the housing device.

(66) The nozzle management machine
The nozzle managing machine according to any one of items (61) to (65), comprising a plurality of nozzle inspection devices each functioning as the nozzle inspection device and having different inspection items.

According to this aspect, a management machine capable of executing inspections for many inspection items, that is, a management machine capable of executing sufficient inspections is realized.

≪Reference object in inspection≫
Some of the following embodiments are embodiments to which limitations on inspection methods, more specifically, limitations on inspection criteria are added.

(71) The nozzle management machine according to any one of items (61) to (65), wherein a reference object is provided for reference in inspection by the nozzle inspection device.

According to this aspect, since the inspection can be performed with reference to the reference object, the inspection can be optimized. Reference to the reference object may be performed, for example, each time an inspection is performed, or may be performed periodically. When performed each time an inspection is performed, it may be performed before or after the actual nozzle inspection. Alternatively, it may be performed only when some condition changes. Furthermore, it may be performed only when it is determined that the nozzle is defective (hereinafter, sometimes referred to as "defective nozzle") in the actual nozzle inspection. In other words, the reference timing can be appropriately set according to the purpose of use of the reference object. In addition, in this aspect, the arrangement location of the reference object is not limited either. As will be described later, it may be attached to a pallet, or may be fixedly or detachably attached to the frame of the management machine or the like within the area of the inspection device.

(72) The nozzle management machine according to item (71), wherein the reference object is used for at least one of setting a reference for inspection by the nozzle inspection device and calibrating or testing the nozzle inspection device. .

This aspect is an aspect in which the purpose of use of the reference object is limited. The "setting of criteria for inspection by the nozzle inspection apparatus" includes, for example, setting criteria for determining whether or not the nozzle to be inspected is defective. Specifically, for example, the pressure of the compressed air sent in the passing flow rate inspection described above, that is, the output pressure of the compressor (hereinafter sometimes referred to as "source pressure"), the flow rate of air to be measured (the base end of the nozzle If the pressure on the side is measured, the pressure) changes. In order to determine whether the nozzle is defective or not depending on the change in the original pressure, the threshold flow rate for the measured air flow rate (when measuring the pressure at the base end of the nozzle, the It is desirable to set a threshold pressure for the pressure. For example, the setting of this threshold flow rate (threshold pressure) corresponds to the setting of the inspection criteria. The "calibration of the nozzle inspection device" includes, for example, optimization of inspection conditions for inspection by the inspection device, operation of the inspection device, and the like. Specifically, for example, an imaging device such as a camera is used in the above-described identifier reading inspection, tip portion condition inspection, or the like. It is possible to perform the focus adjustment of this imaging device on a reference object, and perform the actual imaging of the nozzle after the focus adjustment. The focus adjustment corresponds to calibration of the nozzle inspection device. The above-mentioned "verification of the nozzle inspection device" includes, for example, confirming whether the inspection device itself is appropriate. Specifically, for example, in the necessary backward force inspection described above, a reference object for which an appropriate force should be measured is inspected by an inspection device, and if the measured force is not an appropriate force, the inspection device It is possible to determine that there is a problem in itself. This judgment corresponds to the certification of the inspection device.

(73) The nozzle manager according to item (71) or (72), wherein the reference object is configured so that good inspection results are usually obtained when the reference object is inspected by the nozzle inspection device.

According to this aspect, the reference object can be suitably used for setting the reference for inspection by the nozzle inspection device, calibrating the nozzle inspection device, and testing the nozzle inspection device.

(74) The nozzle management machine according to any one of items (71) to (73), wherein the reference object is a simulated object imitating a part of the suction nozzle.

Specifically, the above-mentioned "simulator" in this embodiment is created by simulating only the tip of the nozzle, only the tip and the mechanism for retracting the tip, only the identifier attached to the flange, etc. and so on. As a reference object, a simulant of an appropriate portion may be created according to the inspection item, and the simulant can be created relatively easily.

(75) The nozzle manager according to any one of items (71) to (73), wherein the reference object is an actual suction nozzle.

This aspect is, simply put, an aspect in which the reference nozzle is used as a reference object. According to this aspect, it is possible to easily provide a reference object without creating any separate reference object.

(76) The nozzle accommodation device includes a plurality of pallets on which a plurality of suction nozzles can be placed,
The nozzle management machine
a pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle storage device to the nozzle inspection device;
The nozzle inspection device is configured to inspect a plurality of suction nozzles mounted on one of the plurality of pallets while being mounted on the one pallet, and
The nozzle management machine according to any one of items (71) to (75), wherein at least one of the plurality of pallets is provided with the reference object.

In this aspect, the reference object may be placed on a pallet or may be attached to the pallet. The former is particularly effective when the reference object is the actual nozzle, and the latter is effective when the reference object is the simulated object. According to this aspect, since the reference object is provided near the nozzle to be inspected, it is possible to fully utilize the reference object.

<<Treatment for defective nozzles>>
The following aspects are aspects related to measures for defective nozzles that are determined to be defective as a result of inspection by the inspection device.

(81) The nozzle management machine
Nozzle management according to any one of items (61) to (76), further comprising a defective nozzle retainer that retains a defective nozzle that is a suction nozzle determined to be defective based on the inspection result of the nozzle inspection device. machine.

If the nozzle is determined to be defective by the inspection, it is desirable that the defective nozzle be removed from the managing machine for disposal, repair, or the like. In this aspect, the defective nozzle is retained in the defective nozzle detainer (hereinafter sometimes simply referred to as "detainer"). Therefore, according to this aspect, it is possible to reliably distinguish a defective nozzle from other good nozzles, so that it can be removed from the managing machine without fail. Considering the convenience of taking out the indwelling device, it is desirable to place it in a place where it is easy to take out. It should be possible.

(82) The defective nozzle detainer
The nozzle management machine according to item (81), each having a plurality of placement units for placing defective nozzles different from each other in inspection items determined to be defective.

According to this aspect, the defective nozzles are sorted according to the defected inspection items by the plurality of storage units, so that the operator of the managing machine can easily recognize the defect factors of the defective nozzles, and can repair the defective nozzles later. It leads to the improvement of the convenience of

(83) The nozzle management machine
The nozzle management machine according to item (81) or (82), which has a defective nozzle conveying device that conveys the defective nozzle to the defective nozzle retainer.

(84) The electrical component mounting machine is configured such that one or more suction nozzles used in the electrical component mounting machine are mounted on a nozzle tray detachably arranged in the electrical component mounting machine. ,
The nozzle management machine, as the anti-nozzle treatment execution device,
a nozzle transfer device that performs setting transfer for transferring the suction nozzles accommodated in the nozzle accommodation device to a nozzle tray positioned at a set position;
Item (83), wherein the nozzle transfer device functions as the defective nozzle transport device by being configured to transport the defective nozzle housed in the nozzle housing device to the defective nozzle retainer. Nozzle management machine described.

The above two aspects are aspects related to the device for conveying defective nozzles. The latter mode is a mode in which the defective nozzle is transported to the indwelling device using the transfer device described above. According to the latter aspect, it is possible to temporarily store the defective nozzle in the storage device and transport the stored defective nozzle to the indwelling device regardless of the operation of the inspection device. In addition, if the defective nozzle is transported to the indwelling device at the same time as the setting transfer by the transfer device, it is not necessary to set a working time for the transport of the defective nozzle for the managing machine. Gone. It should be noted that when the transfer device is to carry the defective nozzle, it is desirable that the retainer be arranged within the range of operation of the transfer device.

≪Nozzle cleaning device, nozzle drying device≫
Some aspects below are aspects related to the nozzle cleaning device (hereinafter sometimes simply referred to as "cleaning device"). It should be noted that some of the following embodiments are not embodiments in which the management machine is the category, but even if the cleaning apparatus is simply changed into the category, that is, the washing apparatus is independent of other components of the management machine. can be an aspect of a claimable invention.

(91) The nozzle management machine according to any one of items (21) to (84), wherein the nozzle management machine includes a nozzle cleaning device that cleans the suction nozzles as the nozzle treatment execution device.

It is desirable to wash the nozzles for the purpose of eliminating clogging, removing dirt, and the like. According to this aspect, it is possible to even wash the nozzles, so that a highly practical maintenance machine is realized. In this aspect, the cleaning method of the cleaning device is not particularly limited, and various known cleaning methods can be adopted.

(92) The nozzle according to item (91), wherein the nozzle cleaning device is configured to inject water toward the suction nozzle from both the tip end side and the base end side of the suction nozzle to clean the nozzle. Management machine.

With respect to nozzles used in electrical component placement machines, most conventional cleaning devices have been accomplished by immersing the nozzle, or a portion thereof, in water. According to this aspect, the cleaning device performs cleaning by jetting water instead of immersing the nozzle in water, and the cleaning device sprays water on most of the main parts of the nozzle. Since it is configured to inject, the nozzle can be sufficiently cleaned.

(93) The nozzle manager according to item (91) or (92), wherein the nozzle cleaning device is configured to perform cleaning by injecting high-pressure water toward the suction nozzles.

A conventional nozzle cleaning apparatus using a water jetting method is configured to jet water using a so-called two-fluid nozzle. In other words, it was configured to finely atomize the water by the force of the compressed air and jet it out. In the cleaning device of this aspect, since water is directly applied to the nozzle, according to this aspect, a cleaning device with high cleaning performance is realized. The cleaning device of this aspect may be configured, for example, to directly pressurize water by a pump or the like and to jet the pressurized water toward the nozzle.

(94) The nozzle accommodation device includes a plurality of pallets on which a plurality of suction nozzles can be placed,
The nozzle management machine
a pallet transfer device for transferring a plurality of suction nozzles by transferring one of the plurality of pallets from the nozzle storage device to the nozzle cleaning device;
Items (91) to (91), wherein the nozzle cleaning device is configured to clean a plurality of suction nozzles mounted on one of the plurality of pallets while being mounted on the one pallet. (93) A nozzle manager according to any one of items.

(95) The nozzle manager according to any one of items (91) to (94), further comprising a nozzle drying device for drying the suction nozzles cleaned by the nozzle cleaning device.

According to this aspect, the nozzles cleaned by the cleaning device are dried by the nozzle drying device (hereinafter sometimes simply referred to as "drying device"). Even so, the nozzle can be accommodated in a sufficiently dry state to some extent. Also, after washing, it is possible to use it in a short period of time. The drying means employed by the drying apparatus in this embodiment is not particularly limited, and various known drying means can be employed.

(96) The nozzle manager according to item (95), wherein the nozzle drying device is configured to dry the suction nozzles by air blow.

As in this aspect, if the drying device employs an air blow as drying means, the water adhering to the nozzle can be blown off by the pressure of the air, so the nozzle can be dried in a considerably short time. . The air to be blown may be cold air or warm air, but from the viewpoint of shortening the drying time, it is desirable that the air has a relatively high temperature.

(97) The nozzle management machine
a nozzle transfer device that transfers one or more suction nozzles from the nozzle storage device to the nozzle cleaning device and transfers the one or more suction nozzles transferred to the nozzle cleaning device to the nozzle storage device;
Item (95) or (96), wherein the nozzle drying device is configured to dry one or more suction nozzles that are being transferred from the nozzle cleaning device to the nozzle housing device by the nozzle transfer device. Nozzle management machine described in .

According to this aspect, the nozzles that have been cleaned by the cleaning device and returned to the storage device are dried. Therefore, a sufficiently dried nozzle is accommodated in the accommodation device at an early point after cleaning by the cleaning device. Since drying can be performed during the transfer time, the time loss of the tending machine can be reduced. In addition, the drying device in this aspect is not limited to the one that dries the nozzle only during transfer by the transfer device. For example, it may be a drying device that performs drying after cleaning inside the cleaning device and also performs drying outside the cleaning device during transfer by the transfer device.

≪Control by control device≫
Some aspects below are aspects related to the control of the managing machine. In other words, it is an aspect related to the operation method of the managing machine.

(101) Items (1) to (97) in which the nozzle management machine is equipped with a control device for controlling itself
A nozzle manager according to any one of the clauses.

This aspect is a basic aspect relating to control, and the control device is a component that proactively executes the operation of the management machine. The control device may, for example, be configured with a computer as a main component.

(102) The control device
(101) The nozzle according to item (101), further comprising a nozzle information storage unit in which the unique information of each of the plurality of suction nozzles housed in the nozzle housing device is stored in association with the housing position in the nozzle housing device. Management machine.

According to this aspect, since it is possible to grasp what kind of nozzle is accommodated in which accommodation position in the accommodation device, it is possible to appropriately manage the accommodated nozzles. The unique information includes ID information as described above, and by storing the ID information of the nozzles, it is possible to sufficiently manage individual nozzles.

(103) Each suction nozzle is assigned an identifier for recognizing unique information of the suction nozzle;
The nozzle manager has an identifier reader for reading the identifier,
(102) The nozzle management machine according to item (102), wherein the nozzle information storage unit is configured to store unique information of the suction nozzle acquired by reading by the identifier reader.

As explained above, the identifier reader makes it possible to easily obtain the unique information of individual nozzles. Therefore, according to this aspect, it is possible to easily manage the accommodated nozzles based on the acquired unique information. Note that the identifier reader may be provided in the transfer device as described above. In that case, when executing at least one of the above-described setting transfer and accommodation transfer, it is possible to acquire the unique information of the nozzle to be transferred.

(104) The nozzle accommodating device includes a plurality of pallets on which a plurality of suction nozzles can be placed, and each of the plurality of pallets has a plurality of placements on which one suction nozzle is placed. has a part
Item (102) or (103), wherein the nozzle information storage unit is configured to handle which of the plurality of placement portions of which one of the plurality of pallets is placed on which of the plurality of placement portions, as the accommodation position. Nozzle management machine described in paragraph.

This aspect is a preferred aspect when the storage device has the above-described pallet. According to this aspect, it is possible to grasp what kind of nozzle is accommodated in which position of which pallet, and it is possible to manage the accommodated nozzles more appropriately.

(105) The electrical component mounting machine is configured such that one or more suction nozzles used in the electrical component mounting machine are mounted on a nozzle tray detachably arranged in the electrical component mounting machine. ,
The nozzle management machine
a nozzle transfer device that transfers the suction nozzles placed on the nozzle tray positioned at the set position to the nozzle storage device to store and transfer the suction nozzles from the nozzle tray;
The control device
By controlling the nozzle transfer device, the suction nozzle placed on the nozzle tray positioned at the set position is transferred from the nozzle tray, and the transferred suction nozzle is stored in the nozzle information storage unit. The nozzle managing machine according to any one of items (102) to (104), which has a nozzle accommodation control unit that stores the unique information of the nozzle in association with the accommodation position of the suction nozzle.

According to this aspect, when the nozzle is transferred from the tray and stored in the storage device, the specific information of the nozzle is transferred to the storage position of the nozzle in the storage device. stored in association with each other. Therefore, according to this aspect, it is possible to appropriately manage the nozzles accommodated in the accommodation device.

(106) The electrical component mounting machine is configured such that one or more suction nozzles used in the electrical component mounting machine are mounted on a nozzle tray detachably arranged in the electrical component mounting machine. ,
The nozzle management machine
a nozzle transfer device that performs setting transfer for transferring the suction nozzles accommodated in the nozzle accommodation device to a nozzle tray positioned at a set position;
The control device
By controlling the nozzle transfer device, based on the unique information of the plurality of suction nozzles stored in the nozzle information storage unit, the nozzle tray positioned at the set position is placed on the nozzle tray. The nozzle management machine according to any one of items (102) to (105), which has a nozzle setting control section for transferring the suction nozzle.

According to this aspect, at the time of the setting transfer described above, that is, when setting the nozzle accommodated in the accommodation device to the tray, the stored unique information is used to arrange the nozzle on the tray. . Therefore, according to this aspect, based on the information about the nozzles to be placed on the tray, it is possible to reliably arrange the proper nozzles on the tray.

(107) The nozzle transfer device
In order to store the suction nozzles placed on the nozzle tray positioned at the set position in the nozzle storage device, a storage transfer for transferring the suction nozzles from the nozzle tray, and a suction nozzle stored in the nozzle storage device. is configured to perform a setting transfer that transfers to the nozzle tray located at the set position,
The control device
By controlling the nozzle transfer device, the suction nozzles placed on the nozzle tray positioned at the set position are transferred from the nozzle tray, and the plurality of suction nozzles stored in the nozzle information storage unit are transferred. A nozzle resetting control unit for transferring, based on the unique information of the nozzle, the suction nozzle housed in the nozzle housing device of the same type as the transferred suction nozzle to the nozzle tray positioned at the set position. The nozzle manager according to any one of items (102) to (106).

Simply put, this mode is a mode in which it is possible to perform the accommodation transfer and the setting transfer using the unique information. In this aspect, the tray on which the nozzle is placed in the storage transfer and the tray on which the nozzle is placed in the setting transfer may be the same or may be of the same type. good. Further, the nozzles transferred in the storage transfer and the nozzles transferred in the setting transfer may be of the same type or may be of the same type. For example, an aspect in which another nozzle is mounted on the same tray is suitable for exchanging nozzles. Based on the specific information, the nozzles placed on the tray can be automatically replaced with nozzles of the same type simply by positioning the tray on which the nozzles are placed at the set position. It becomes possible. Also, for example, in a mode in which the same nozzles are mounted on different trays, it is suitable for exchange of trays. Then, based on the unique information of the tray, simply by positioning the tray on which the nozzles are placed at the set position, the placed nozzles are automatically transferred to another tray of the same type as the tray. It is possible to place it again. The latter aspect is particularly suitable for the management machine with the tray storage device and the tray transfer device described above.

(108) The nozzle resetting control unit
(107) The nozzle management machine according to item (107), configured to transfer another suction nozzle instead of the transferred suction nozzle to the nozzle tray positioned at the set position.

This mode is a mode suitable for exchanging the nozzles described above. As described above, by performing storage transfer and setting transfer on the same tray, only the nozzles are replaced.

(109) The nozzle management machine
a tray housing device capable of housing a plurality of nozzle trays, each of which is the nozzle tray;
a tray transfer device for transferring one nozzle tray between a set position and the tray accommodation device,
The control device
a tray replacement control unit that, when it is determined that the nozzle tray is defective, replaces the nozzle tray with the nozzle tray accommodated in the tray accommodation device by controlling the tray transfer device; The nozzle manager according to any one of items (105) to (108).

The tray is provided with, for example, a detachment prevention mechanism called a shutter mechanism in order to prevent the nozzles from detaching from the tray. Further, in order to manage trays individually, trays may be provided with identifiers for recognizing unique information. If a certain tray has a malfunction related to the operation of the detachment prevention mechanism, or if it is difficult to read the identifier, the tray is recognized as a defective tray. This aspect is suitable for replacing the defective tray with a good tray. By combining this mode with the storage transfer and the setting transfer by the transfer device described above, the tray on which the nozzle is placed can be transferred to another tray on which the same or a different nozzle is placed. It is possible to change.

(110) The nozzle management machine
A nozzle inspection device that inspects suction nozzles, a defective nozzle retainer that retains defective nozzles that are suction nozzles determined to be defective based on the inspection results of the nozzle inspection device, and defective nozzles in the defective nozzle retainer. and a defective nozzle conveying device for conveying to
each of the defective nozzle placement devices has a plurality of placement units for placing defective nozzles different from each other in inspection items determined to be defective;
The control device
a defective nozzle transport control unit that controls the defective nozzle transport device to transport the defective nozzle to one of the plurality of storage units corresponding to the inspection item determined to be defective for the defective nozzle; The nozzle manager according to any one of items (101) to (109).

According to this aspect, as described above, it is possible to cause the managing machine to perform an operation for placing a defective nozzle at a different location for each inspection item determined to be defective.

(111) The nozzle management machine is provided with a nozzle inspection device for inspecting suction nozzles, and the nozzle management machine is referred to in the inspection by the nozzle inspection device, and usually good inspection results are obtained. A structured reference object is provided,
The control device
A reference object reference defective nozzle judging unit for judging the sucking nozzle as a defective nozzle on condition that the inspection result of the suction nozzle by the nozzle inspection device is defective and the inspection result of the reference object is good ( A nozzle manager according to any one of items 101) to (110).

This aspect is one aspect related to the control for executing the examination using the reference object described above. In this aspect, it may be considered that the inspection apparatus described above is tested. In other words, in this aspect, when the inspection of the reference object is satisfactory, it is recognized that there is no problem with the function of the inspection device, and on the premise of this recognition, the nozzle is inspected or the result of the nozzle inspection performed is adopted. be. Therefore, according to this aspect, the reliability of the inspection by the inspection apparatus is high. For example, in this aspect, when the inspection result for a certain nozzle is not good, the inspection of the reference object is performed, and when a good result is obtained in the inspection of the reference object, the inspection device is operating satisfactorily. and based on the recognition, the nozzle may be determined to be a defective nozzle. In this aspect, when a good result is not obtained in the inspection of the reference object, it is determined that there is an abnormality in the inspection device itself, and the inspection result for that nozzle is not adopted, or the subsequent nozzle inspection is executed. It is also possible not to do so.

(112) the nozzle management machine includes a nozzle inspection device that inspects the suction nozzles, and the nozzle management machine is provided with a reference object to be referred to in inspection by the nozzle inspection device;
The control device
Reference object-dependent inspection preparation processing for performing at least one of setting a reference for inspection by the nozzle inspection device and calibrating the nozzle inspection device as preparatory processing prior to inspection of the suction nozzle, using the reference object. The nozzle manager according to any one of items (101) to (111), which has a part.

This aspect is another aspect relating to the control for executing the examination using the reference object described above. According to this aspect, highly reliable inspection is performed by the inspection apparatus.

1 is a perspective view showing an electrical component mounting machine using a suction nozzle to be managed by a nozzle management machine of an embodiment; FIG. FIG. 4 is a perspective view showing a typical suction nozzle; It is a figure which shows the nozzle tray in which a suction nozzle is mounted in an electrical component mounting machine. It is a perspective view which shows the external appearance of the nozzle management machine of an Example. It is a perspective view which shows the internal structure of a nozzle management machine. It is a perspective view which shows the internal structure of a nozzle management machine from another viewpoint. It is a perspective view for demonstrating the nozzle transfer device with which a nozzle management machine is provided. It is a perspective view for explaining a first nozzle inspection device provided in the nozzle management machine. FIG. 4 is a perspective view for explaining a second nozzle inspection device provided in the nozzle management machine; It is a perspective view for explaining a nozzle cleaning device and a nozzle drying device provided in the nozzle management machine. FIG. 11 is a perspective view showing the nozzle cleaning device and the nozzle drying device shown in FIG. 10 with the housing removed; FIG. 4 is a diagram showing a nozzle pallet on which suction nozzles are placed in the nozzle accommodation device provided in the nozzle management machine; FIG. 4 is a diagram showing several suction nozzles managed by a nozzle management machine; FIG. 10 is a partial cross-sectional view of a nozzle pallet showing a state in which a suction nozzle is mounted in a mounting hole and another adoptable mounting hole; FIG. 4 is a schematic diagram for explaining tip portion state inspection by a first nozzle inspection device provided in the nozzle management machine; It is a schematic diagram for demonstrating the backward required force test|inspection by the 1st nozzle test|inspection apparatus with which a nozzle management machine is provided. FIG. 5 is a schematic diagram for explaining a passing flow rate inspection and an identifier reading inspection by a second nozzle inspection device provided in the nozzle management machine; FIG. 4 is a schematic diagram for explaining cleaning and drying of suction nozzles by a nozzle cleaning device and a nozzle drying device provided in the nozzle management machine; 4 is a table schematically showing accommodated nozzle information stored in a control device of a nozzle management machine; 4 is a table schematically showing storage tray information stored by a control device of a nozzle managing machine; 4 is a table schematically showing nozzle setting information used by a control device of a nozzle management machine when setting suction nozzles on a nozzle tray; 4 is a flow chart showing a nozzle accommodation program executed by a nozzle management machine to perform a nozzle accommodation operation; 4 is a flow chart showing a nozzle setting program executed by a nozzle management machine to perform nozzle setting operations; 4 is a flow chart showing the first half of a nozzle resetting program executed by a nozzle manager to perform a nozzle resetting operation; 4 is a flow chart showing the second half of a nozzle resetting program executed by a nozzle manager to perform a nozzle resetting operation; 5 is a flow chart showing a nozzle cleaning program executed by the nozzle management machine to perform nozzle cleaning operation; 4 is a flow chart showing a first nozzle inspection program executed by a nozzle management machine to perform a first nozzle inspection operation; 5 is a flow chart showing a second nozzle inspection program executed by the nozzle management machine to perform a second nozzle inspection operation; It is a block diagram which shows the functional structure of the control apparatus with which a nozzle management machine is provided.

Hereinafter, representative embodiments of the claimable invention will be described in detail as examples with reference to the drawings. In addition to the following examples, the claimable invention can be implemented in various modes with various modifications and improvements based on the knowledge of those skilled in the art, including the modes described in the section [Aspects of the invention]. can do. Further, it is also possible to construct modifications of the following embodiments by using the technical matters described in the descriptions of each item of [Aspects of the Invention].

The nozzle management machine of the embodiment manages a suction nozzle used in an electric component mounting machine. The suction nozzle is a component holder that sucks and holds an electrical component by means of a negative pressure supplied to itself when the electrical component is mounted on the circuit board. Before explaining the nozzle management machine of the embodiment, the electrical component mounting machine and the suction nozzle will be briefly explained, and then the overall structure of the nozzle management machine and the construction of the nozzle management machine will be described with respect to the nozzle management machine of the embodiment. Several operations performed by each device and nozzle management machine, and the functional configuration of the control device related to these operations will be described in sequence. In the following description, "nozzle management machine", "electrical component mounting machine", "suction nozzle", "circuit board", and "electrical component" are simply referred to as "management machine", "mounting machine", and "electric component", respectively. They may be referred to as "nozzle", "substrate", and "component".

[A] Electric Component Mounting Machine and Suction Nozzle FIG. 1 shows an example of an electronic component mounting machine using a suction nozzle to be managed by the management machine. In the figure, two mounters 10 having the same structure are arranged side by side on a base 12 (in the figure, the exterior panel of the one on the near side is removed). The mounting machine 10 includes a conveyor-type substrate transport device 14 that transports the substrate S and fixes it at a set position, a plurality of feeder-type component supply devices 16 that each supply components P, and the components supplied from these component supply devices 16 . A mounting head 18 for mounting a component P to be mounted on a fixed substrate S, and a head moving device 20 for moving the mounting head 18 between a component supply device 16 and the fixed substrate S. It is The mounting head 18 includes an operating shaft 22 having a suction nozzle N attached to its lower end, and an operating shaft elevating/rotating device (not shown) that elevates and rotates the operating shaft 22 . Incidentally, the mounting head 18 shown in the figure is an index type mounting head, and the operating shaft 22 is capable of mounting a plurality of nozzles N thereon. The component P supplied from the component supply device 16 is sucked and held at the tip (lower end) of the nozzle N, and the held component P is sucked by the nozzle N after the mounting head 18 is moved above the substrate S. It is mounted on the substrate S by releasing the holding. Incidentally, in order to mount the component P at a proper position on the board S in a proper posture, the component P is picked up from below by a component camera 22 provided in the mounting machine 10 while being sucked and held by the nozzle N. Data on the holding position and the holding posture obtained by imaging are used at the time of wearing.

The nozzle N is a management target of the management machine, and the nozzle N is as shown in FIG. FIG. 2(a) is a diagram of the nozzle N as seen obliquely from above, and FIG. 2(b) is a diagram of the nozzle N as seen from obliquely below. As can be seen from these figures, the nozzle N has a tubular body 30 functioning as the main body of the nozzle N, a suction tube 32 extending downward from the body tube 30, and and a flange 34 fixed to the unitary cylinder 30 so as to protrude. The upper end portion of the body tube 30 functions as the base end portion of the nozzle N, and is held by the operating shaft at the upper end portion. The adsorption tube 32 functions as the tip of the nozzle and is shaped like a relatively thin pipe. Two locking pins 36 are extended from the body tube 30 , and the nozzle N is attached to the operating shaft 22 using these locking pins 36 . Attachment of the nozzle N using the locking pin 36 is a common method, and the description thereof is omitted here and omitted in other drawings.

A positive pressure and a negative pressure are selectively supplied to the adsorption tube 32 from the mounting head 18 via the body tube 30 . The component P is sucked and held at the tip (lower end) of the suction tube 32 by the supply of negative pressure, and the sucked and held component P is separated from the suction tube 32 by the supply of positive pressure. Although the internal structure is omitted in the drawing, the suction tube 32 is movable forward and backward with respect to the body cylinder 30 . Specifically, the tip of the nozzle N is biased by a spring force in the direction of advancing from the body tube 30 in order to reduce the impact applied to the component P when the component P is mounted on the substrate S. When a force exceeding the urging force is applied, it is made retractable, that is, retractable with respect to the body tube 30. - 特許庁The flange 34 functions as a back surface forming member for clear imaging of the component P by the component camera 22 described above, and is a portion of the nozzle N having the largest outer diameter. there is A 2D code 38 is attached to the upper surface of the flange 34 as an identifier for recognizing unique information of the nozzle N. This 2D code 38 indicates the ID of the nozzle N as a kind of unique information, and the ID is used for individual management of the nozzle N. FIG.

Although only one type of nozzle N is shown in the figure, there are a plurality of types of nozzles N that differ in size and shape. 16, and in the mounter 10, these several types of nozzles can be automatically exchanged according to the component P to be sucked and held. Incidentally, the nozzle N to be used differs depending on the electric circuit to be manufactured (the one in which the component P is mounted on the substrate S). Further, the plurality of nozzles N used in the mounting machine 10 are arranged in a nozzle station 50 provided in the mounting machine 10 beside the component supply device 16 in a state of being mounted on the nozzle tray NT.

The nozzle tray (hereinafter sometimes simply referred to as "tray") NT functions as a nozzle mount for mounting the nozzles N, and as shown in FIG. there is Specifically, the tray NT includes a base plate 60 and a cover plate 62 covering the upper surface of the base plate 60. The cover plate 62 is slidable over the base plate 60 to some extent. there is 3(a) shows a state in which the cover plate 62 is displaced from the base plate 60, and FIG. 3(b) shows a state in which the cover plate 62 just overlaps the base plate 60. FIG. Cover plate 62 is slidable between positions in each of these two states.

3(c), which is a cross-sectional view, and FIG. 3(d), which is a partial cross-sectional view showing a state in which the nozzles N are placed, will be explained. Constituent twelve mounting holes 64 are provided. Specifically, two types of nozzles N having different sizes can be mounted on the tray NT. Four mounting holes 64 for mounting N are provided. The mounting hole 64 is a stepped hole whose inner peripheral wall dimensions are different in depth, and a stepped surface 66 is a surface on which the flange 34 of the nozzle N is mounted. The inner diameter of the mounting hole 64 on the upper surface of the base plate 60, that is, the maximum inner diameter, is slightly larger than the outer diameter of the flange 34, and the mounting hole 64 accommodates radial displacement (displacement) of the nozzle N. It is configured to be regulated at the outer circumference of the flange 34 . Further, the depth to the stepped surface is set so that the flange 34 of the nozzle N mounted in the mounting hole 64 does not interfere with the cover plate 62 . Incidentally, the nozzle N shown in the figure has a flange 34 that is thinner than the depth to the step surface. It does not protrude from the upper surface of the base plate 60 . As can be seen in FIG. 2, the flange 34 is provided with a notch 68 on its outer circumference which engages a short pin 69 standing in the stepped surface 66. As can be seen in FIG. The notches 68 and pins 69 allow the nozzle N to be mounted only in a specific orientation, and prevent the nozzle N from rotating while mounted on the tray NT.

On the other hand, the cover plate 62 is also provided with vent holes 70 corresponding to the mounting holes 64 of the base plate 60 . The vent hole 70 is composed of a circular hole portion 72 and a slot portion 74 extending from one side of the circular hole portion 72 . The inner diameter of each circular hole portion 72 is substantially equal to the maximum inner diameter of the corresponding mounting hole 64 . The width of the slot portion 74 is somewhat larger than the outer diameter of the body tube 30 of the nozzle N mounted in the corresponding mounting hole 64 . In the state shown in FIG. 3B, the center of each mounting hole 64 and the center of the circular hole portion 72 of the corresponding vent hole 70 are aligned, and the entire mounting hole 64 can be viewed from above. On the other hand, in the state shown in FIG. 3A, the center of each mounting hole 64 and the center of the arc present at the tip of the slot portion 74 of the corresponding vent hole 70 are substantially aligned, and the mounting hole 64 is , only part of it can be seen from above. Since the two states are such states, the state of FIG. 3B will be referred to as the "mounting hole open state" and the state of FIG. 3A will be referred to as the "mounting hole closed state". I will say.

In the mounting hole open state, the nozzle N can be mounted on the mounting hole 64 and removed from the mounting hole 64 . On the other hand, when the nozzle N is placed in the mounting hole 64, the mounting hole is closed, so that the body tube 30 of the nozzle N is inserted through the slot 74 of the hole 70 and the upper surface of the flange 34 is closed. is covered by the cover plate 62. As shown in FIG. In this state, the nozzle N is prevented from leaving the mounting hole 64 . As for the nozzle N detachment prevention, the tray NT is provided with a mechanism including the cover plate 62, that is, a nozzle detachment prevention mechanism called a shutter mechanism.

The cover plate 62 is biased by a spring (not shown) so as to close the mounting hole. state. This sliding is performed by a cover sliding mechanism disposed in the nozzle station 50 (not shown). The attachment of the nozzle N to the movement shaft of the mounting head 18, the removal of the nozzle N from the movement shaft, and the replacement of the mounted nozzle N with another nozzle N are controlled by the control device of the mounting machine 10 of the cover sliding mechanism. The mounting hole open state is realized and performed by

The tray NT is detachable from the nozzle station 50. For example, when starting the manufacture of a certain electric circuit, the tray NT on which the nozzles N are placed can be set in the nozzle station 50 in advance. For example, when finishing the manufacture of an electric circuit, the used nozzles N can be removed from the nozzle station 50 together with the tray NT. Therefore, the tray NT greatly contributes to speeding up the changeover of the mounter 10 and the like. In this tray NT, one corner of the base plate 60 is provided with a 2D code 76 as an identifier for recognizing unique information of the tray NT. This 2D code 76 indicates the ID of the tray NT as a kind of unique information, and the ID is used for individual management of the tray NT.

The suction nozzle N and the tray NT described above are used in the mounting machine 10 described above. The management machine of the embodiment shown below is intended not only for the nozzle N used in the mounting machine 10, but also for the nozzle N used in other mounting machines. The above tray NT is an example of the tray NT used in the mounting machine 10, and the mounting machine 10 can also use other trays NT that are different in type. Furthermore, the tray NT used differs depending on the mounting machine. As will be described later, the management machine of the embodiment also manages nozzles N placed or placed on other trays NT.

[B] Overall Configuration of Nozzle Managing Machine As shown in FIG. 4, the managing machine 80 of the embodiment has a generally rectangular parallelepiped shape and a relatively compact size. A drawer 82, which will be described later in detail, is provided on the front surface of the managing machine 80 (the left side in the figure). A controller 84 as a control device for the managing machine 80 is attached to the upper front portion. The controller 84 has a computer as a main component, and has input/output devices such as a display 86, operation keys 88, and switches 90. FIG. FIG. 5 shows the managing machine 80 with the exterior panel removed, and FIG. 6 shows the managing machine 80 viewed from the opposite direction. The internal structure of the managing machine 80 will be described below with reference to these figures. Incidentally, the left side in FIG. 5 is the front of the management machine 80, and the right side is the rear of the management machine 80.

The management machine 80 is configured by combining several devices. Specifically, on the rear side, a nozzle accommodation device 100 that accommodates the nozzles N while being placed on a nozzle pallet (hereinafter sometimes simply referred to as a “pallet”) is located in front of the nozzle accommodation device 100. Tray storage devices 102 that store trays NT are arranged on the left side. On the other hand, on the front side of the managing machine 80, there are paired nozzles for executing some sort of treatment (hereinafter sometimes referred to as "treatment for nozzles") with respect to the nozzles N respectively accommodated or accommodated in the nozzle accommodation device 102. As treatment execution devices, a nozzle transfer device 104, a first nozzle inspection device 106, a second nozzle inspection device 108, and a nozzle cleaning device 110 are arranged in this order from the top.

Although the description here will be brief, the nozzle transfer device 104 is a device that transfers the nozzles N between the tray NT and the pallet, and the first nozzle inspection device 106 inspects two inspection items. More specifically, an inspection of the state of the tip of the nozzle N (tip state inspection) and an inspection of the force required to retract the tip of the nozzle N (retraction required force inspection) are performed, and the second nozzle The inspection device 108 inspects two inspection items, specifically, an inspection of the flow rate of air passing through the nozzle N (passing flow inspection), and a 2D code 38 as an identifier attached to the flange 34 of the nozzle N. (identifier reading check). The nozzle cleaning device 110 is a device that cleans the nozzle N with high-pressure water. A nozzle drying device 112 that dries the nozzles N cleaned by the nozzle cleaning device 110 is arranged between the nozzle housing device 100 and the nozzle cleaning device 110 .

The transfer of the nozzles N between the respective nozzle treatment execution devices and the nozzle accommodating device 100 is performed by each nozzle transfer device corresponding to each nozzle treatment execution device. Since the nozzles N are transferred while being placed on the pallet described above, each nozzle transfer device is a pallet transfer device. Specifically, a first pallet transfer device 114 that transfers pallets between the nozzle transfer/mounting device 104 and the nozzle accommodation device 100 and a second pallet transfer device that transfers the pallets between the first nozzle inspection device 106 and the nozzle accommodation device 100 2 pallet transfer devices, a third pallet transfer device 118 for transferring pallets between the second nozzle inspection device 108 and the nozzle accommodation device 100, and a pallet transfer between the nozzle cleaning device 110 and the nozzle accommodation device 100 A fourth pallet transfer device 120 is provided respectively. On the other hand, a tray transfer device 122 is provided between the nozzle transfer device 104 and the tray storage device 102 to transfer the tray NT therebetween. A driving source unit 124 containing a power source, a driving circuit, an air compressor, a high-pressure pump, etc. for each of the devices described above is arranged in the lower front portion of the managing machine 10 .

In the following description, the nozzle storage device, tray storage device, nozzle transfer device, nozzle inspection device, nozzle cleaning device, nozzle drying device, pallet transfer device, and tray transfer device are simply referred to as "storage device,""Accommodationdevice","transferdevice","inspectiondevice","cleaningdevice","dryingdevice","transferdevice", and "transfer device" are sometimes referred to. 7 mainly showing the transfer device 104, FIG. 8 mainly showing the first inspection device 106, FIG. Reference will also be made to FIGS. 10 and 11, shown centrally.

[C] Nozzle Accommodating Device The nozzle accommodating device 100 includes a plurality of pallet carriers (hereinafter sometimes simply referred to as "carriers") 130 each accommodating the above-described pallets, and a carrier circulation mechanism for circulating the carriers 130. 132 (which may be simply referred to as a “circulation mechanism” hereinafter), and a pallet moving device (hereinafter referred to as , sometimes simply referred to as a "mobile device") 134 are configured. Below, the storage device 100 will be described separately for the pallet and the moving device 134 .

i) Nozzle Pallet The pallet NP functions as a nozzle placement device for placing the nozzles N, and as shown in FIG. It is configured including a cover report 142 that covers the. 12(a) shows a state in which the cover plate 142 is displaced from the base plate 140, and FIG. 12(b) shows a state in which the cover plate 142 just overlaps the base plate 140. FIG. The cover plate 142 is slidable between positions in those two states.

If the managing machine 80 treats the five types of nozzles N shown in FIG. It is said that The five types of nozzles N differ from each other in shape and can be classified into three types according to the outer diameter of the flange 34 . FIG. 13 is a view of these nozzles N viewed from above. Specifically, the small size nozzle Na shown in FIG. 13(a) and the intermediate size nozzle Na shown in FIGS. nozzles Nb and Nc, and large nozzles Nd and Ne shown in FIGS. 13D and 13E, respectively. The base plate 140 is provided with mounting holes 144 each constituting a mounting portion, similarly to the case of the tray NT. Specifically, 24 mounting holes 144a in which small-sized nozzles N are mounted and 15 mounting holes 144b in which large-sized nozzles N are mounted are provided. The nozzle Na is mounted in the mounting hole 114b, and the nozzles Nb, Nc, Nd and Ne are mounted in the mounting hole 114b.

The mounting hole 144a is the same as the mounting hole 64 of the tray NT described above, and has one stepped surface 146, so the description is omitted here. The mounting hole 144b will be described with reference to FIG. 14 showing the state in which the nozzle N is mounted. is a stepped hole having two stepped surfaces 146a and 146b. As shown in FIG. 14(a), the large-sized nozzles Nd and Ne are placed on the stepped surface 146a positioned above, while the intermediate-sized nozzles Nb and Nc are placed on the upper stepped surface 146a as shown in FIG. 14(b). is placed on the lower stepped surface 146b. That is, both the stepped surfaces 146a and 146b are surfaces on which the nozzle N is placed, and the inner peripheral wall of the mounting hole 144b has different inner dimensions in the depth direction and different outer diameters of the flanges 34 from each other. The flanges 34 of the nozzles N of a plurality of types are configured to be fitted at different depth positions. Further, the mounting hole 144b is configured to restrict the displacement (deviation) of the nozzle N in the radial direction on the outer periphery of the flange 34 for any of the nozzles N. Also, a pin 148 with which the notch 68 of the flange 34 engages is erected to prevent the nozzle N from rotating.

Instead of the mounting hole 144b having a plurality of stepped surfaces 146, the inner dimension of the inner peripheral wall gradually decreases in the axial direction, that is, in the depth direction, as shown in FIG. It is also possible to adopt such a tapered mounting hole 144c. Even with such a mounting hole 144c, the flanges 34 of a plurality of types of nozzles N with different outer diameters of the flanges 34 are fitted at different depths. Incidentally, the figure shows a state in which intermediate size nozzles Nb and Nc are mounted, and when large size nozzles Nd and Ne are mounted, they are mounted at a position above nozzles Nb and Nc. will be

On the other hand, like the tray NT, the cover plate 142 is provided with holes 154a and 154b corresponding to the mounting holes 144a and 144b of the base plate 140, respectively, and each having a circular hole 150 and a slot 152. there is In the state shown in FIG. 13(b), the center of each mounting hole 144 and the center of the circular hole portion 150 of the corresponding clearance hole 154 are aligned, and the previously described mounting hole open state is realized. In the state shown in 13(a), the center of each mounting hole 144 and the center of the arc existing at the tip of the slot portion 74 of the corresponding drain hole 154 are substantially aligned, and the mounting hole closed state is realized. be. Due to such a structure, the pallet NP is also provided with a mechanism including the cover plate 142 for preventing the nozzles N from coming off, that is, a nozzle separation prevention mechanism called a shutter mechanism. Incidentally, like the tray NT, the cover plate 142 is urged by a spring (not shown) so as to close the loading hole, and the force exceeding the urging force of the spring causes the cover plate 142 to slide. Thus, the mounting hole is opened.

A 2D code 156 is attached to one corner of the base plate 140 of the pallet NP as an identifier for recognizing unique information of the pallet NP, like the tray NT. This 2D code 156 indicates the ID of the pallet NT as a kind of unique information, and the ID is used for individual management of the tray NT.

A reference nozzle 158 is fixed to one corner of the base plate 140 of the pallet NP, and a reference pipe 160 is fixed to the side of the reference nozzle 158 so as to pass through the base plate 140 . Reference nozzle 158 is the actual nozzle N, specifically nozzle Nb described above. On the other hand, the reference pipe 160 is a part of the nozzle N, more specifically, an imitation of the body tube 30 and the adsorption tube 32 . The reference nozzle 158 and the reference pipe 160 function as reference objects referred to in inspections by the first inspection device 106 and the second inspection device 108 described above, and set standards for inspection by the inspection devices 106 and 108 and It is used for at least one of calibration and verification of inspection devices 106 and 108 . Specific uses will be described in detail later, but the reference nozzle 158 is referenced in the required retraction force inspection by the first inspection device 106 and the identifier reading inspection by the second inspection device, while the reference pipe 160 is It is referred to in the tip state inspection by the first inspection device 106 and the flow rate inspection by the second inspection device 108 . Incidentally, both of the reference nozzle 158 and the reference pipe 160 are constructed so that good inspection results can usually be obtained in inspections referred to as reference objects. In this managing machine 80, the reference object is provided on the pallet NP. It may be provided in an apparatus or the like.

ii) Pallet Moving Device As described above, the pallet moving device 134 includes a plurality of pallet carriers 130 and a carrier circulation mechanism 132 . The carrier 130 is generally a channel-shaped member, that is, a member having a "U"-shaped cross section, and is arranged in a posture in which the opening of the channel shape faces downward. A pair of rails 170 are attached to the carrier 130 at its lower end, more specifically inside the lower ends of the two flanges in the channel shape, and the pallet NP described above can be It is held so that it can be pulled out toward the front and can be inserted from the front.

As can be seen from FIGS. 5 and 6, the carrier circulation mechanism 132 has a pair of sprocket shafts 172 arranged vertically. The sprocket shaft 172 is arranged to extend in the front-rear direction, and has sprockets 174 at each of its front and rear ends. A chain 176 is wound between the front sprocket 174 and the rear sprocket 174 of each of the pair of sprocket shafts 172 . Each of the front chain 176 and the rear chain 176 has a plurality of brackets 178 extending outward perpendicular to each of them. One carrier 130 is swingably supported by each corresponding tip of the bracket 178 on the rear side. One of the pair of sprocket shafts 172 is used as a drive shaft, and each bracket 178 is rotated by rotating one of them. Each carrier 130 supported by each bracket 178 is thereby rotated in unison. Incidentally, the pallet NP is held by the carrier 130 with the surface on which the nozzle N is placed facing upward, that is, with the cover plate 142 positioned upward, and the bracket 178 supports the carrier 130. is structured such that the pallet NP maintains its posture regardless of the winding position of the carrier 130 .

Since the carrier circulation mechanism 132 has the structure described above, the pallet moving device 134 moves the plurality of pallets NP in the storage device 100 along a certain route parallel to one vertical plane at the same time. That is, it is considered as a pallet circulating device that circulates and moves together. In the moving device 134, the stop positions of each pallet NP correspond to a plurality of setting positions corresponding to the above-described nozzle-to-nozzle treatment execution devices 104 to 108, that is, to the first to fourth pallet transfer devices 114 to 120. Multiple setting positions are set. This set position can be considered as a station in the circulation of the pallet NP. 4 transfer devices 114-120 are configured to be transferred to corresponding anti-nozzle treatment execution devices 104-108. Incidentally, when the carrier 130 not holding the pallet NP is positioned at a specific station, the first to fourth transfer devices 114 to 120 corresponding to the station move the corresponding nozzle treatment execution devices 104 to 104 to 120, respectively. 108 to its carrier 130 to transfer the pallet NP.

The transfer of the nozzle N between each of the above-mentioned paired nozzle treatment execution devices and the nozzle accommodating device 100 is performed by a nozzle transfer device corresponding to each paired nozzle treatment execution device. Since the nozzles N are transferred while being placed on the pallet NP, the nozzle transfer device is a pallet transfer device. A first pallet transfer device 114 for transferring pallets between, a second pallet transfer device for transferring pallets between the first nozzle inspection device 106 and the nozzle accommodation device 100, a second nozzle inspection device 108 and the nozzle accommodation device 100. A third pallet transfer device 118 for transferring pallets between them, and a fourth pallet transfer device 120 for transferring pallets between the nozzle cleaning device 110 and the nozzle housing device 100 are arranged respectively. The nozzle transfer device can be considered to have a function of transferring one or more nozzles N as one nozzle group. The 1-nozzle inspection device 106, the 2nd nozzle inspection device 108, and the nozzle cleaning device 110, as will be described in detail later, are designed to treat the nozzles N included in one nozzle group transferred by the nozzle transfer device. It is done.

[D] Tray Accommodating Device The tray accommodating device 102 is a device for accommodating the nozzle tray NT described above, and is a tray moving device similar to the pallet moving device 134 of the nozzle accommodating device 100 (hereinafter simply referred to as "moving device"). ) 190, which is configured as a main component of the mobile device 190. Similar to the pallet moving device 134, the moving device 190 includes a plurality of tray carriers (hereinafter sometimes simply referred to as "carriers") 192 each accommodating a tray NT, and a carrier circulation mechanism ( 194, which may be simply referred to as a “circulation mechanism” hereinafter.

Similar to the pallet carrier 130 described above, the carrier 192 is generally a channel-shaped member, that is, a member having a "U"-shaped cross section. are placed. Similar to the pallet carrier 130, the carrier 192 is provided with a pair of rails 196 at its lower end, specifically inside the lower ends of the two flanges in the channel shape, and the tray NT The rail 196 holds the nozzle N in such a manner that the surface on which the nozzle N is placed faces upward so that it can be extracted forward and can be inserted from the front.

The circulating mechanism 194, like the circulating mechanism 132 of the pallet moving device 134, has a pair of sprocket shafts each having two sprockets in the front and rear, a pair of chains, and an extension on each chain, as shown in FIGS. Each carrier 192 supported by each bracket is configured to orbit in unison. The tray moving device 190 having the circulating mechanism 194 having such a structure moves a plurality of pallets NP along a fixed path parallel to one vertical plane in the storage device 102, like the pallet moving device 134 described above. It is considered as a tray circulating device that circulates and moves along and simultaneously, that is, together. In the tray moving device 190, one set position corresponding to the nozzle transfer device 104 described above, that is, one set position corresponding to the tray transfer device 122 is set as the stop position of each tray NT. The set position, that is, the tray NT moved to the station and stopped is transferred to the transfer device 104 by the tray transfer device 122, and the carrier 192 not holding the tray NT is positioned at the station. If so, the tray transfer device 122 can transfer the tray NT from the transfer device 104 to its carrier 192 .

[E] Nozzle transfer device In the management machine 80, in order to set the nozzle N accommodated in the accommodation device 100 on the tray NT, the nozzle N is transferred from the pallet NP to the tray NT, and the nozzle N is stored. In order to accommodate the nozzles N in the apparatus 100, the nozzles N are transferred from the tray NT to the pallet NP. The former is called "setting transfer" and the latter is called "accommodation transfer". done by

As shown in FIG. 7, a drawer 82 (in the drawing, slightly pulled out) provided in the management machine 80 has a table 200, and the tray NT to be transferred is placed on the table 200. It is set on one of the provided fixed stage 202 and movable stage 204 . The fixed stage 202 is fixed to the table 200 , and the movable stage 204 is supported by the table 200 so as to be slidable in the front-rear direction by a stage slide mechanism 206 provided on the table 200 . Incidentally, in the drawing, the fixed stage 202 shows a state where the tray NT is set, and the movable stage 204 shows a state where the tray NT is not set. The drawing also shows a state in which the movable stage 204 is positioned at the set position, that is, the transfer position, which is the front end of the movement range. Further, the structures related to holding the trays NT of the respective stages 202 and 204 and the nozzles N mounted on the trays NT are not shown for simplification. A cover sliding mechanism (not shown) for sliding the cover plate 62 is provided on each of the fixed stage 202 and the movable stage 204 as a mechanism for opening the set tray NT into the mounting hole state described above. is provided.

With the drawer 82 pulled out, the operator can set the tray NT on both the fixed stage 202 and the movable stage 204 and remove the set tray NT. Furthermore, the tray NT can be transferred to and from the tray housing device 102 in a state where the movable stage 204 is positioned at the rear end position in the movement range. Specifically, the tray NT is transferred between the movable stage 204 and the carrier 192 located at the set position described above, that is, the transfer device corresponding station, in the accommodation device 102 . Incidentally, the description of the tray transfer mechanism, which is a mechanism for transferring the tray NT, is omitted. Including the movable stage 204, the stage slide mechanism 206, and the tray transfer mechanism, between the setting position on the table 2000 and the accommodation device 102, in short, between the transfer device 104 and the accommodation device 102 The above-mentioned tray transporting device 122 for transporting the tray NT is configured by the .

As can be seen from the above description, in the managing machine 80, not only can the tray NT brought in from the outside and set on the fixed stage 202 or the movable stage 204 be set and transferred, but also can be accommodated. Setting transfer to a tray NT housed in the device 102 is also possible. Furthermore, it is also possible to store in the storage device 102 the tray NT on which the nozzles N have been set and the tray NT brought in from the outside with the nozzles N placed thereon.

On the other hand, the pallet NP to be used for setting transfer and accommodation transfer is transferred from the carrier 130 positioned at the setting position corresponding to the transfer device 104 in the nozzle accommodation device 100, that is, at the transfer device correspondence station, By the first pallet transfer device 114 (the structure will be described later), the transfer device 104 transfers the nozzle N to a set position, that is, the transfer position. The position where the pallet NP is positioned in the figure is the transfer position. After the pallets NP to be transferred for setting transfer and storage transfer are completed, the first transfer device 114 moves the pallet NP to the carrier 130 positioned at the transfer device corresponding station in the storage device 100. will be transported until Incidentally, in the drawing, the nozzles N placed on the pallet NP are omitted for simplification. A pallet fixing mechanism (not shown) that fixes the pallet NP positioned at the transfer position at that position is provided in the first transfer device 114, and the pallet NP positioned at the transfer position is fixed to the position described above. A cover sliding mechanism (not shown) for sliding the cover plate 142 is provided on the table 200 as a mechanism for opening the mounting hole.

The transfer device 104 is arranged above the table 200, and moves the transfer head 210 in the left-right direction, the front-rear direction, and the up-down direction (hereinafter referred to as "X direction" and "Y direction", respectively). , and a head moving device 212 having three head moving mechanisms for moving the head in the Z direction. 5 and 6 in addition to FIG. 7, these figures show an X-direction moving mechanism for moving the transfer head 210 in the X direction and a Y-direction moving mechanism for moving the transfer head 210 in the Y direction. are omitted, and only the Z-direction moving mechanism 214 is shown. Incidentally, the X-direction moving mechanism and the Y-direction moving mechanism constitute an XY type moving device which is installed on the upper part of the frame of the managing machine 80 and moves the slide 216 along a plane perpendicular to the Z direction. , and the Z-direction movement mechanism 214 is installed on the slide 216 thereof.

At the bottom of the transfer head 210, there are a holding chuck 218 as a nozzle holder for holding the nozzle N to be transferred, and 2D codes 38 and 76 attached to the nozzle N, tray NT, and pallet NP, respectively. , 156, and a camera 220 as an identifier reader. The transfer head 210 also has a chuck rotation mechanism that rotates the holding chuck 218 about its axis. Incidentally, the head moving device 212 functions as a holder moving device for moving a holding chuck 218, which is a nozzle holder.

Briefly describing the basic operation of the transfer device 104, when at least one of the above-described setting transfer and accommodation transfer is performed, the transfer head 210 is moved by the head moving device 212, and the camera 220 is moved. At least one of the 2D code 76 attached to the tray NT and the 2D code 156 attached to the pallet NP is imaged. Then, the transfer head 210 is moved by the head moving device 212 above the pallet NP or the tray NT as the transfer source, and the 2D code 38 of the nozzle N to be transferred is imaged by the camera 220. The nozzle N is held by the holding chuck 218, and then the transfer head 210 is moved by the head moving device 212 above the tray NT or pallet NP, which is the transfer destination, and the held nozzle N is held by the holding chuck 218. , and placed in specific or arbitrary placement holes 64, 144 of the tray NT or pallet NP.

On the table 200, a mounting plate 220 like the base plate 140 of the pallet NP, more specifically, a mounting plate 222 having several mounting holes is installed. For example, it is used for temporary placement of the nozzles N when the nozzles N are set on the tray NT or accommodated in the accommodation device 100 . Also, on the table 200, a defective nozzle N determined to be defective based on the inspection results of the various inspection items described above, that is, a defective nozzle retainer for detaining the defective nozzle, is detachably installed as a defective nozzle retainer 224. ing. As can be seen from the figure, the defective box 224 is partitioned into four spaces 226, and each of these four spaces 226 is used as a retention section for discriminating and retaining defective nozzles. The use of the defect box 224 will be described in detail later, but the transportation of the defective nozzles to the defect box 224 is carried out in conjunction with the setting of the nozzles N on the tray NT, or regardless of the setting. 104. Therefore, the transfer device 104 functions as a defective nozzle transfer device.

[F] First Nozzle Inspection Device The first nozzle inspection device 106 is located below the nozzle transfer device 104, and as described above, inspects two inspection items, specifically, the tip state inspection. and a device that performs a required reverse force test. Referring to FIG. 8, the pallet NP positioned at the set position in the storage device 100 described above, that is, at the station corresponding to the first inspection device, moves to the second pallet transfer device 116 (structurally, (to be described later)), the nozzles N placed on the pallet NP are inspected for the state of the tip portion and the required retraction force inspection from below the nozzles N by the first inspection device 106. will be The position of the pallet NP shown in the drawing is the inspection position, and the second transfer device 116 is provided with a pallet fixing mechanism (not shown) that fixes the pallet NP at the inspection position. Incidentally, in the figure, the nozzles N placed on the pallet NP are omitted for simplification.

The first inspection device 106 includes an inspection unit 235 including a base 230, a camera device 232 and a load measuring device 234 fixed on the base 230, and a unit moving device for moving the inspection unit 235. 236, and the inspection unit 235 moves in the space below the pallet NP positioned at the inspection position. The camera device 232 includes a camera body 238, a lens 239, and a ring light 240 that surrounds the lens 239 as a light source. It is constructed as an element. The unit moving device 236 includes a movable beam 246 supported by a pair of beams 244 forming part of the frame of the managing machine 80, and a belt-driven Y direction moving mechanism 248 for moving the movable beam 246 in the Y direction. and an X-direction moving mechanism 252 that moves the slide 250 supported by the movable beam 246 in the X direction, and an inspection unit 235 that is fixed to the slide 250 and supported on the base 230 and moves the inspection unit 235 in the Z direction. Z-direction movement mechanism 254 is included. In summary, according to the first inspection device 106, both the tip portion state inspection and the required retraction force inspection are performed on the tip portion side of the nozzle N, and are the main components for performing each inspection. The camera device 232 and the load measuring device 234 are arranged in a space existing on the tip side of the nozzle N, and are configured to be moved by a unit moving device 236, which is one moving device.

15A, the inspection unit 235 is moved by the unit moving device 236 to a position directly below the nozzle N to be inspected by the lens 239 of the camera device 232. be moved to Specifically, the position of the suction tube 32 of the nozzle N in the Z direction can be recognized from the unique information of the nozzle N, and the inspection unit 235 is positioned at a position where the lens 239 is separated from the tip of the suction tube 32 by a set distance. Let me. In this state, the tip of the nozzle N, that is, the suction tube 32 is imaged by the camera device 232 .

The nozzle N shown in FIG. 15(a) is a nozzle N whose suction tube 32 has a normal shape. becomes. On the other hand, FIGS. 15(c) to 15(e) respectively show nozzles N with “bent”, “chipped tip”, and “collapsed tip” of the adsorption tube 32, and the adsorption of these nozzles N is shown. Photographed images of the tube 32 are as shown in FIGS. 5(f) to 5(g). In the inspection of the state of the tip portion, it is confirmed whether or not the tip portion shape abnormalities such as "bending", "chipped tip", and "collapsed tip" have occurred in the nozzle N based on image data of the nozzle N obtained by the camera device 232. Also, although not shown, "adhesion of foreign matter" and "adhesion of dirt" to the tip portion are also confirmed. A nozzle N with an abnormal tip shape and a nozzle N with foreign matter or dirt adhering to the tip are determined to be defective nozzles. As will be described later in detail, the tip of the reference pipe 160 fixed to the pallet NP is detected by the camera device 232 each time any nozzle N is found to have an abnormality in the tip. Based on the imaging data of the tip of the reference pipe 160, it is confirmed that there is no abnormality in the tip. Nozzle N, which is found to be defective, is identified as a defective nozzle. In other words, the reference pipe 160 as a reference object is used for verification of the first inspection device 106, more specifically, for post verification.

On the other hand, in the required retraction force inspection by the first inspection device 106, as shown in FIG. is moved to a position where At that position, inspection unit 235 is raised a set distance based on that nozzle N's unique information. Specifically, the load measuring device 234 is raised to a position where the suction tube 32 of the nozzle N retreats from the body tube 30 by a certain distance.

As described above, the adsorption tube 32 is urged by a spring in a direction to advance from the body tube 30, and when the load measuring device 234 is lifted, the tip of the adsorption tube 32 touches the upper surface of the load cell 242. In this state, the load cell 242 will receive a load corresponding to the biasing force of the spring. A load cell 242 measures the load. The urging force of the spring can be recognized from the unique information of the nozzle N, and if the load cell 242 detects a load exceeding the urging force, the force required to retract the suction tube 32 will be too large. . For example, it becomes difficult for the suction tube 32 to be pulled into the body tube 30 due to foreign matter entering the nozzle N, breakage of the body tube 30, etc. In this case, the force required to move backward becomes excessive. When the required retraction force exceeds the threshold force set based on the unique information, the required retraction force is determined to be excessive, and the nozzle N is determined to be a defective nozzle. When performing the required retraction force inspection for the nozzles N placed on one pallet NP, prior to the inspection, the load for the reference nozzle 158 is measured, and based on the measured load, , calibration of the load cell 242, i.e., an adjustment is made so that the value of the load measured by the load cell 242 is equal to the actual value. In other words, the reference nozzle 158 as a reference object is used for calibrating the load measuring device 234 performed as a preparatory process for the required backward force inspection by the first inspection device 106, in other words, for calibrating the first inspection device 106. .

Note that the inspection of the state of the tip portion and the inspection of the required retraction force by the first inspection device 106 may be performed for all the nozzles N placed on one pallet NP, or for some of the nozzles N. You can just go to Also, both of these two inspections may be performed, or only one of them may be performed. After the inspection of the mounted nozzles N is completed, the pallet NP positioned at the inspection position is moved to the first inspection device corresponding station in the storage device 100 by the second transfer device 116. is transferred to the carrier 130 .

[G] Second Nozzle Inspection Device The second nozzle inspection device 108 is located below the first nozzle inspection device 106, and as described above, inspects two inspection items, specifically, a passing flow rate inspection. and a device for performing identifier reading checks. Referring to FIG. 9, the pallet NP positioned at the set position in the storage device 100 described above, that is, at the station corresponding to the second inspection device, moves to the third pallet transfer device 118 (structurally, (to be described later)), a passing flow rate inspection and an identifier reading inspection for the nozzles N placed on the pallet NP are both performed from above the nozzles N by the second inspection device 108 . The position of the pallet NP shown in the drawing is the inspection position, and the third transfer device 118 is provided with a pallet fixing mechanism (not shown) that fixes the pallet NP at the inspection position. Incidentally, in the figure, the nozzles N placed on the pallet NP are omitted for simplification.

The second inspection device 108 includes an inspection head 270 and a head moving device 272 that moves the inspection head 270 above the pallet NP along a plane parallel to the upper surface of the pallet NP. The inspection head 270 is provided with an air feeder 274 and a camera 276 as an identifier reader. The air supply device 274 has an air joint 278 connected to the upper end of the body tube 30 which is the base end of the nozzle N, and the compressed air is supplied to the nozzle N from the air joint 278 . Above the air joint 278, an air pressure sensor 280 is arranged integrally with the air joint 278 to measure the air pressure in the compressed air supply path. The air supply device 274 also has a joint elevating mechanism 282 for elevating the air joint 278 , and the air joint 278 is elevated relative to the inspection head 270 by the joint elevating mechanism 282 . The head moving device 272 includes a movable beam 284 supported by the pair of beams 244 described in relation to the first inspection device 106, and a belt-driven Y direction moving mechanism 286 for moving the movable beam 284 in the Y direction. and an X-direction movement mechanism 290 for moving the slide 288 supported by the movable beam 284 in the X-direction. In summary, according to the second inspection device 108, both the passing flow rate inspection and the identifier reading inspection are performed on the base end side of the nozzle N, and the air feeder, which is the main component for performing each inspection, is performed. The feeding device 274 and the camera 276 are arranged in a space existing on the base end side of the nozzle N, and are configured to be moved by a head moving device 272, which is one moving device.

In the passing flow rate inspection by the second inspection device 108, the inspection head 270 is moved by the head moving device 272 to a position where the air joint 278 is located right above the nozzle to be inspected. In this state, the air joint 278 is lowered by the joint lifting mechanism 282 so as to be connected to the nozzle N. As shown in FIG. As shown in FIG. 17A, the air supply device 274 supplies compressed air to the nozzle N while the air joint 278 is connected to the nozzle N. As shown in FIG. A normal nozzle N allows passage of air with little resistance, ensuring a sufficient flow rate, and the air pressure measured by the air pressure sensor 280 is a relatively low value. On the other hand, for example, when the nozzle N is "clogged", the passage resistance to the air passing through the nozzle N increases, and a sufficient flow rate cannot be secured. In this situation, the air pressure measured by air pressure sensor 280 has a relatively high value. Considering this, in the passing flow rate test, when the air pressure measured by the air pressure sensor 280 becomes higher than the threshold pressure, it is recognized that the nozzle N is "clogged", and the nozzle N is It is judged to be a defective nozzle. In other words, in this passing flow rate inspection, the "clogging" of the nozzle N is recognized by measuring the pressure on the base end side of the nozzle N instead of directly measuring the air flow rate. A flow meter (flow rate sensor) may be provided in place of the air pressure sensor 280 to directly measure the flow rate of passing air, and the presence or absence of "clogging" may be determined based on the measurement result.

The compressed air supplied to the nozzle N is supplied to the air supply device 274 from a compressor (not shown) disposed in the drive source unit 124 described above. Depending on the pressure, the air pressure measured by the air pressure sensor 280 changes. That is, the environmental conditions associated with the second inspection device 108 will cause its air pressure to vary. Considering this, it is desirable to set the threshold pressure according to the environmental conditions. In this managing machine 80, prior to inspection of the passing flow rate of the nozzle N, compressed air is supplied by the air supply device 274 to the reference pipe 160 fixed to the pallet NP, and at that time, the air pressure sensor 280 measures the air pressure. The threshold pressure is set based on the air pressure. In other words, the reference pipe 160 as a reference object is used to set the reference for the inspection performed as a preparatory process for the inspection of the passing flow rate by the second inspection device 108 .

In the identifier reading inspection by the second inspection device 108, the inspection head 270 is moved by the head moving device 272 to a position where the camera 276 is located directly above the 2D code 38, which is the identifier attached to the flange 34 of the nozzle N to be inspected. be moved. In that state, the 2D code 38 is imaged by the camera 276 . Incidentally, an image obtained by imaging is as shown in FIG. 17(b). In the identifier reading inspection, the ID of the nozzle N is recognized based on the image data obtained by the imaging, and if the ID cannot be recognized, the nozzle N is determined to be a defective nozzle. Since the ID may not be recognized due to malfunction of the camera 276 or the like, the managing machine 80, prior to reading the 2D code 38 of the nozzle N, attaches it to the flange 34 of the reference nozzle 158 fixed to the pallet NP. The 2D code 38 is imaged by the camera 276, and based on the image data obtained by the imaging, it is confirmed that the identifier reading function of the second inspection device 108 is sufficient, and that the function is sufficient. , the identifier reading inspection of the nozzle N is performed. In other words, the reference nozzle 158, which is the reference object, is used for verification of the second inspection device 108, that is, for pre-verification.

The passing flow rate inspection and the identifier reading inspection by the second inspection device 108 may be performed for all the nozzles N placed on one pallet NP, or only for some of the nozzles N. you can go Also, both of these two inspections may be performed, or only one of them may be performed. After the inspection of the mounted nozzles N is completed, the pallet NP positioned at the inspection position is moved to the second inspection device corresponding station in the accommodation device 100 by the second transfer device 116. is transferred to the carrier 130 .

[H] Nozzle Cleaning Device and Nozzle Drying Device The nozzle cleaning device 110 is located below the second nozzle inspection device 108, and the nozzle drying device 112 is located between the cleaning device 110 and the accommodation device 100 described above. are doing. The managing machine 80 is provided with a housing 300 associated with the cleaning device 110 and the drying device 112 . FIG. 10 shows the washing apparatus 110 and the drying apparatus 112 with the housing 300 present, and FIG. 11 shows the washing apparatus 110 and the drying apparatus 112 with the housing 300 removed. With reference to these figures, the pallet NP positioned at the set position in the storage device 100, that is, at the station corresponding to the cleaning device, moves to the above-mentioned fourth pallet transfer device 120 (the structure will be described later). After being transported to the cleaning position by the cleaning apparatus 110, the cleaning device 110 cleans the nozzles N placed on the pallet NP at that position. After cleaning, while the pallet NP is transferred to the cleaning device corresponding station by the fourth pallet transfer device 120, the nozzles N placed on the pallet NP and having been cleaned are dried by the drying device 112. drying is performed. The position of the pallet NP shown in the drawing is the washing position, and the fourth transfer device 120 is provided with a pallet fixing mechanism (not shown) that fixes the pallet NP at the inspection position. Incidentally, in the figure, the nozzles N placed on the pallet NP are omitted for simplification.

The cleaning device 110 includes an upper cleaning unit 302 for cleaning the nozzle N from above and a lower cleaning unit 304 for cleaning the nozzle N from below, which have substantially the same structure. It is said that Each of the units 302 and 304 includes a support frame 306 attached to the housing 300, an injection nozzle 308 supported by the support frame 306, and a Y-direction moving mechanism 310 for moving the injection nozzle 308 in the Y direction. is composed of The injection nozzle 308 is an elongated rectangular parallelepiped arranged to extend in the X direction over the entire width of the pallet NP, and has a large number of injection holes 312 on the surface facing the pallet NP. The Y-direction moving mechanism 310 is configured to move the injection nozzle 308 in the Y-direction over the entire length of the pallet NP. High-pressure water pressurized by a high-pressure pump (not shown) installed in the drive source unit 124 is supplied to the injection nozzle 308, and the high-pressure water is placed on the pallet NP from the injection hole 312. It is injected toward the nozzle N placed.

Drying device 112 includes a plurality of air ducts 314 arranged in the upper and lower portions of housing 300 . Warm air (hot air) is sent to the air ducts 314 from a blower (not shown) via a heater (not shown) provided in the drive source unit 124 . Each of the plurality of blower pipes 314 is provided with a plurality of discharge holes, and hot air is discharged from these discharge holes toward the nozzles N placed on the pallet NP. The nozzle N is dried by the discharged warm air.

The housing 300 described above is installed to prevent the high-pressure water jetted by the cleaning device 110 and the hot air discharged by the drying device 112 from adversely affecting other devices. The housing 300 is provided with a transparent window 316 for viewing the inside on the front side, and a shielding plate 318 and the shielding plate 318 on the pallet N on the rear side.
A shield plate opening/closing mechanism 320 is provided for opening only when P passes.

As shown in FIG. 18, cleaning by the cleaning device 110 is performed on the nozzles N placed on the pallet NP fixed at the cleaning position described above. Specifically, the upper cleaning unit 302 jets high-pressure water from above the nozzle N, that is, from the base end side of the nozzle N, and mainly cleans the upper surfaces of the body cylinder 30 and the flange 34 . On the other hand, the lower cleaning unit 304 jets high-pressure water from below the nozzle N, that is, from the tip side of the nozzle N, and mainly cleans the adsorption tube 32 and the like. In order to obtain a high cleaning effect, the direction of the injection hole 312 is adjusted so that the injection nozzle 308 injects high-pressure water in various directions, not just straight down or straight up. The injection nozzle 308 has a relatively narrow width and can inject high-pressure water only to a part of the nozzle rows arranged in the X direction on the pallet NP. 310 moves the pallet NP over its entire length in the Y direction. By the way, the injection nozzle 308 is not a two-fluid type nozzle, that is, a nozzle that sprays water dispersed by compressed air, but the water pressurized by a pump is directly injected from the injection hole 312 by the pressure of the water. a nozzle configured to Therefore, the cleaning device 110 is designed to have a high cleaning ability.

The drying device 112 blows air using warm air when the fourth transfer device 120 transfers the pallet NP at the inspection position after cleaning the nozzles N to the cleaning device support station 130 . Therefore, the pallet NP can be returned to the storage device 100 during at least part of the time required for drying, and the time loss in a series of operations such as washing and drying is small. The hot air has a relatively high speed, and the pressure of the hot air blows away water droplets adhering to the nozzle N, and the temperature of the hot air dries the moisture remaining on the nozzle N. Let me.

[I] Pallet transfer device The first to fourth pallet transfer devices 114 to 120, each of which is a nozzle transfer device, are arranged between the storage device 100 and the corresponding nozzle treatment execution device as described above. It is a device for transporting NP. The first, second and third transfer devices 114, 116, 118 are of substantially identical construction and the fourth transfer device 120 is slightly different from the first, second and third transfer devices 114, 116. , 118 have a different structure.

5 to 7, each of the first, second, and third transfer devices 114, 116, 118 is a pair disposed to extend forward from the storage device 100. , and the pallet NP is supported on the pair of rails 330 so as to straddle them and slides on the pair of rails 330 . Also, each of the first, second and third transfer devices 114, 116 and 118 moves the pallet NP between the carrier 130 of the storage device 100 and the pair of rails 330 and on the pair of rails 330. A moving mechanism 332 is provided to allow the movement. The moving mechanism 332 includes a guide 334 arranged on the right side of the managing machine 80 so as to extend back and forth, and a transport unit 336 supported by the guide 334 . The conveying unit 336 has a structure in which it is self-propelled along the guide 334 while being supported by the guide 334 . Although illustration is omitted, the transport unit 336 has an extension portion extending to the middle of the pair of rails 330 below the pair of rails 330. At the tip of the extension portion, a downward A clamp is provided for gripping the trailing end of the pallet NP.

When one carrier 130 of the storage device 100 is positioned at the aforementioned set position, that is, the station corresponding to the anti-nozzle treatment execution device, the pair of rails 330 and the pair of rails 170 of the carrier 13 are Consistent with each other, the transport unit 336 can be moved to the rear end of the guide 334 with its extension passing under its carrier 130 . With the conveying unit 336 positioned at the rear end, the rear end of the pallet NP accommodated in the carrier 130 is gripped by the above-described clamp, and the conveying unit 336 moves to the front end of the guide 334 in the gripped state. By doing so, the pallet NP is transported to the set position described above. After transfer, the gripping by the clamp is released. When transferring the pallet NP located at the set position to the carrier 130, the reverse operation of the above operation is performed. Incidentally, the set position means the transfer position, the inspection position, and the cleaning position described above. As described above, each of the first, second and third transfer devices 114, 116 and 118 has the pallet fixing mechanism for fixing the pallet NP located at the set position to the pair of rails. have.

The fourth transfer device 120 differs from the first, second and third transfer devices 114, 116, 118 in the structure of the guides and transport units. Although detailed description is omitted, the fourth transport device 120 transports the pallet NP within the housing 300 as described above, so the guide 338 and transport unit 340 having a structure suitable for the transport are employed. . The structure and operation of other parts of the fourth transfer device 120 are the same as those of the first, second and third transfer devices 114, 116 and 118, and the description thereof will be omitted. 5, each of the first, second, and third transfer devices 114, 116, 118 is depicted as having two transport units 336, but the transport units 336 are the front ends of the guides. It is for the sake of convenience to show both the state of being located at the rear end and the state of being located at the rear end, and in reality, only one transport unit 336 is provided.

[J] Operations Performed by Nozzle Management Machine The management machine 80 configured as described above performs various operations under the control of the controller 84, which is a control device. Specifically, the controller 84 executes various programs to perform operations in accordance with the executed programs. These operations are also performed based on management information, that is, information about the nozzles N and trays NT that is created or obtained in managing the contained nozzles N and trays NT. After the management information is illustrated and described below, several operations performed by the management machine 80 are illustrated and described in order.

i) Management Information The controller 84 stores "accommodated nozzle information" as management information about the nozzles N that are accommodated. The accommodated nozzle information can be schematically represented as an accommodated nozzle information table in FIG. It is information indicating whether the is accommodated. In other words, the unique information of the accommodated nozzles N is information in a manner associated with the accommodation position in the accommodation device 100 . In the following description, it is assumed that the stored nozzle information is stored in the above table format, and the stored nozzle information will be specifically described based on the table.

In the accommodated nozzle information table shown in the figure, one line corresponds to one mounting hole 144 of one pallet NP, that is, each nozzle N accommodated. Also, each column of the table corresponds to various information about the nozzle N. FIG. Specifically, [Carrier No.] is the number of the carrier 130 in which the pallets NP on which the nozzles N are placed are housed. Numbers up to the number of carriers 130 possessed by the accommodation device 100 are stored. [Pallet ID] is the ID of the pallet NP on which the nozzle N is placed, which is unique information of the pallet NP. [Mounting Hole No.] is the number of the mounting hole 144 as the mounting portion in which the nozzle N is mounted, and corresponds to the small mounting hole 144a shown in FIG. The numbers "B01" to "B15" are stored corresponding to the mounting holes 144b having the large number ". By the way, [Carrier No.]
, [Palette ID] indicates that the same contents as those in the upper row are stored for the sake of convenience.

[Nozzle ID] and the column to the right of it are the unique information of the nozzle N. To explain one by one, [nozzle ID] is the ID of nozzle N. If [nozzle ID] is "-", it means that the ID of nozzle N cannot be recognized, and if it is "?", it means that the ID of nozzle N is not recognized. means. [Nozzle model] represents the model of the nozzle N, that is, the type. Specifically, the model type of each of the nozzles Na to Ne shown in FIG. 13 is stored. "(...)" means that the nozzle type was estimated. [Washing] indicates whether or not the nozzle N has been washed by the washing device 110. "◎" means that it has been washed, and "●" means that it has not yet been washed. , respectively.

[Defect factor] indicates the cause of the defect when the nozzle N is determined to be a defective nozzle, that is, in which of the above four items of inspection the nozzle is determined to be a defective nozzle. If it is determined to be a defective nozzle in any of the four items of inspection, it is a defective nozzle among the four columns of [identifier reading], [passing flow rate], [tip state], and [necessary retraction force]. "X" is stored in the column corresponding to the item determined to be present. "O" means that the nozzle was not determined to be defective in the inspection of each item, and if neither "O" nor "X" is stored in each column, it means that the inspection has not yet been performed. means

It should be noted that rows with no description in the columns [nozzle ID] to [cleaning] correspond to the mounting hole 144 corresponding to the row, that is, the mounting hole 144 of the pallet NP accommodated in a certain carrier 130. It shows that the nozzle N is not placed in the hole 144 .

Further, the controller 84 stores “accommodated tray information” as management information about the accommodated tray NT. The accommodation tray information can be schematically represented as an accommodation tray information table in FIG. 20, and is simply information indicating which tray N is accommodated in which carrier 192 . In other words, similar to the stored nozzle information, the unique information of the stored tray NT is information in a form associated with the storage position in the storage device 102 . In the following description, it is assumed that the storage tray information is stored in the table format as well as the storage nozzle information, and the storage tray information will be specifically described based on the table.

In the accommodation tray information table shown in the figure, one row and one row correspond to one carrier 192 of the accommodation device 102, that is, each of the accommodated trays NT. Each column of the table corresponds to various information regarding the tray NT. Specifically, [Carrier No.] is the number of the carrier 192 in which the tray NT is stored, and the number of the carriers 192 that the storage device 102 has is such as "#1", "#2", and so on. Numbers up to number are stored. [Tray ID] is the ID of the tray NT as one of the unique information of the tray NT. [Tray model] represents the model of the tray NT, that is, the type. [Defective] indicates whether or not the tray NT is defective, and "x" means that the tray is defective. [SET] indicates whether or not the nozzle N is set on the accommodated tray NT, "◎" indicates that the nozzle N is set on the tray NT, and blank indicates an empty tray. It shows that it is NT. Incidentally, a row with no description in the [tray ID] and [tray model] columns indicates that the carrier 192 corresponding to that row does not contain the tray NT.

Furthermore, the controller 84 uses "nozzle setting information" as management information regarding the setting of the nozzles N on the tray NT. Nozzle setting information is shown in FIG.
can be schematically represented as a nozzle setting information table, and, simply put, is information indicating what nozzle N is mounted in which mounting hole 64 of which tray NT. [Mounting Hole No.] is the number of the mounting hole 64 as the mounting portion in which the nozzle N is mounted, and the figure shows, as an example, information about the tray NT shown in FIG. Specifically, the numbers "a1" to "a8" correspond to the relatively small mounting holes 64 shown in FIG. ” number is attached.

The setting of the nozzles N on the pallet NT is started based on the nozzle setting information in which [tray ID] and [nozzle ID] are not described, that is, only [tray type] and [nozzle type] are indicated. , [tray ID] and [nozzle ID] are assigned when the setting is completed.

The management information described above is updated, reset, etc. during several operations by the management machine 80, which will be described below. In the following explanation, these operations will be explained based on the flowchart of the program related to the operation. It will be done in the description of each step.

ii) Nozzle storage operation The nozzle storage operation is an operation for storing the nozzles N placed on the tray NT in the storage device 100 for the purpose of cleaning, inspection, storage, etc. of the nozzles N used in the mounting machine. Yes, and its operation is performed by the controller 84 executing a nozzle accommodation program whose flow chart is shown in FIG. After the operator of the managing machine 80 opens the drawer 82 and sets the tray NT on which the nozzles N are placed on the fixed stage 204 or the movable stage 204, the operator issues a command to start the operation. The operation is started by inputting with the operation keys 88 of the controller 84 . Note that when the tray NT is set on the fixed stage 202, the operation ends with the tray NT left after the nozzle N is accommodated. On the other hand, when the tray NT is set on the movable stage 204, whether or not to store the tray NT in the storage device 102 after the nozzle N is stored is selected based on the operator's input operation using the operation keys 88. The operation is terminated according to the selection.

In the process according to the nozzle accommodation program, in step 1 (hereinafter, the step is abbreviated as "S"), the stage where the tray NT is fixed and the mounting hole opening state is realized, that is, the tray NT is set. It is specified whether the stage is the fixed stage 202 or the movable stage 204 . Next, in S2, the transfer head 210 is moved above the specified stage, the 2D code 76 attached to the tray NT is imaged by the camera 220, and the ID of the tray NT is obtained. In subsequent S3, the model of the tray NT is specified based on the acquired ID of the tray NT. Incidentally, the ID information includes information on the model of the tray NT. The controller 84 stores data in which specifications such as the number and positions of the mounting holes 64 of the tray NT are associated with the model of the tray (hereinafter sometimes referred to as "tray specification data"). , in S4, the 2D code 38 of each nozzle N placed on the tray NT is imaged by the camera 220 according to the specifications of the tray NT grasped based on the model, and the ID of each nozzle N is determined. is obtained. In subsequent S5, the model of each nozzle N is specified based on the acquired ID. As with the tray NT, the ID information of the nozzle N includes information of the nozzle N model. If the ID of the nozzle NT cannot be acquired due to contamination of the 2D mark 38 or the like, the previously created nozzle setting information, that is, the nozzle setting information when the nozzle N is set on the tray NT with that ID is used, and based on that information, the type of nozzle N whose ID cannot be obtained is estimated.

Next, in S6, one pallet NP on which the nozzles N are placed when the nozzles N are accommodated in the accommodation device 100 is divided into a plurality of pallets NP possessed by the accommodation device 100 based on the accommodation nozzle information described above. is selected from Although detailed description of the algorithm for this selection is omitted, in S6, although the conditions such as the existence of an empty mounting hole 144 and the fact that the cleaned nozzle N is not mounted are satisfied, Among them, one palette NP is selected based on the viewpoint that some operations by the management machine 80 concerned can be performed as efficiently as possible. In subsequent S7, the pallet moving device 134 and the first pallet transporting device 114 are operated to fix the selected pallet NP at the above-described transfer position, thereby realizing the mounting hole opening state. That is, the palette NP is set.

After the pallet NP is set and before the nozzles N are placed on the pallet NP from the tray NT, the defective nozzles are treated. Specifically, in S8, based on the stored nozzle information, it is confirmed whether or not there is a defective nozzle in the set pallet NP. If there is a defective nozzle, in S9, based on the stored nozzle information, The above-described defect factors are identified for one defective nozzle, and the defective nozzle is transported to the defective box 224 by the transfer device 104 in S10. As described above, the defect box 224 is provided with four partitioned spaces 226 corresponding to four defect factors. It is placed in one space 226 corresponding to the factor. Then, when the transportation is completed, the information about the defective nozzle is deleted from the stored nozzle information. It is conceivable that two or more defect factors exist for one defective nozzle. In that case, the defective nozzle corresponds to the defect factor in the leftmost column in the table shown in FIG. Detained in space 226 . The processing of S8 to S10 is repeatedly executed until there is no defective nozzle in the set pallet NP. S11 is executed.

In S11, one nozzle N that can be transferred to the set pallet NP is selected from among the nozzles N placed on the set tray NT according to a set rule. 104, the selected nozzle N is transferred to one of the empty placement holes 144 in the set pallet NP. That is, the above-described storage transfer is performed. Which mounting hole 144 is to be mounted is determined according to a set rule, based on the above-described accommodation nozzle information, the size of the nozzle N to be mounted, and the like. When one nozzle N is accommodated and transferred, the ID of the nozzle N acquired in S4 and the model of the nozzle specified in S5 are stored as accommodated nozzle information. That is, the stored nozzle information is updated. Specifically, one of the rows of the table shown in FIG. 19, that is, the row corresponding to the mounting hole 144 in which the nozzle N is mounted, contains the above ID, the above model, and indicates that the nozzle N has not been washed. It is written along with the fact that

After storing and transferring one nozzle N, in S13, it is determined whether or not the storing and transferring of all the nozzles N placed on the set tray NT is completed. If all the nozzles N have not been stored and transferred, it is determined in S14 whether or not to continue the transfer of the nozzles N to the set pallet NP. If it is possible to continue the transfer of the nozzle N to the pallet NP, the process returns to S11 to transfer the next nozzle N to the pallet NP. For example, if it is determined in S14 that the transfer to the pallet NP cannot be continued because there is no empty placement hole 144, the pallet NP is moved by the first transfer device 114 in S15. , is returned to the storage device 100, and the process returns to S6 to select the next pallet NP. After the pallet NP is set and the faulty nozzles placed on the pallet NP are treated, the storage and transfer of the nozzles N to the pallet NP is started. When it is determined in S13 that all the nozzles N placed on the set tray NT have been transferred and stored, the set pallet NP is transferred by the first transfer device 114 in S16. , is returned to the storage device 100 .

After all the nozzles N have been accommodated and transferred and the pallet NP has been returned, it is determined in S17 whether or not the empty tray NT is to be accommodated in the tray accommodating device 102 . This determination is made based on whether the tray NT is set on the fixed stage 202 or the movable stage 204, as described above. When it is determined that the tray NT is to be accommodated in the accommodation device 102, in S18, the set empty tray NT is accommodated in the accommodation device 102 by the tray transfer device 122, and the nozzle accommodation operation ends. do. On the other hand, when it is determined in S17 that the empty tray NT is not accommodated in the accommodation device 102, the setting of the tray NT is canceled and the nozzle accommodation operation ends. Prior to the storage and transfer of the nozzle NT, the 2D code 76 attached to the tray NT is imaged by the camera 22 provided in the transfer device 104, and the ID of the tray NT is acquired. When the NT is accommodated in the accommodating device 102, the ID of the tray NT and the type of the tray NT specified based on the ID are associated with the carrier 192 to be accommodated, and the above-described accommodation tray is stored. added to the information.

iii) Nozzle setting operation The nozzle setting operation is an operation for setting the necessary nozzles N on the tray NT for the purpose of preparing for use of the nozzles N in the mounting machine. This is done by the controller 84 executing a nozzle setting program. In the nozzle setting operation, the stage for setting the nozzle N is set to either the fixed stage 202 or the movable stage 204. It is possible to select whether or not to use the tray NT and whether or not to store the set tray NT in the storage device 102. These selections are made by the operator pressing the operation keys 88 of the controller 84. based on the operation used.

In the process according to the nozzle setting program, first, in S21, based on the nozzle setting information transmitted or input to the management machine 80 or already stored nozzle setting information, the tray NT to be set is selected. The type and type of each nozzle N are specified. This nozzle setting information can be considered as information in which [tray ID] and [nozzle ID] are not written in the table shown in FIG.

Next, in S22, it is specified whether the stage to be set is the fixed stage 202 or the movable stage 204, and if it is determined in S23 that the specified stage is the movable stage 204, in S24 , whether or not the tray NT accommodated in the accommodation device 102 is to be used. When it is determined that the tray NT accommodated in the accommodation device 102 is to be used, one tray NT is selected in S25 based on the nozzle setting information and the accommodation tray information, and the selection is made in S26. The loaded tray NT is transferred to the mounting position by the tray transfer device 122 and set at the transfer position. On the other hand, if it is determined in S23 that the tray NT set by the operator is to be used, or if it is determined in S22 that setting is to be performed on the movable stage 202, the tray NT has already been set by the operator. , tray NT is not selected and set.

Next, in S27, it is determined whether or not the set tray NT is in good condition. The 2D code 76 attached to the set tray NT is imaged by the camera 220 provided in the transfer device 104, and the ID of the tray NT is acquired. If so, it is determined that the tray NT is defective. In addition, the above-described cover sliding mechanism is driven so as to realize the loading hole open state for the set tray NT. It is judged that there is a problem with the NT.

In the process according to the nozzle setting program, when the set tray NT is defective, the process of replacing the tray NT with a good tray NT is performed. In this tray exchange process, first, if it is determined in S27 that the set tray NT has a problem, in S28 it is determined on which of the fixed stage 202 or the movable stage 24 the tray NT is set. be judged. If it is determined that the tray NT is set on the fixed stage 202, the stage is changed in S29 while the tray NT remains on the fixed stage 202 in order to prohibit the use of the tray NT. In other words, the process of changing the stage used for setting the nozzle N from the fixed stage 202 to the movable stage 204 is performed. On the other hand, if it is determined that the tray NT is set on the movable stage 204, the tray NT is returned by the transfer device 122 and accommodated in the accommodation device 102 in S30. At this time, the ID and model of the tray NT, together with the fact that the tray NT is defective, are related to the carrier 192 in which the tray NT is accommodated, and are added to the accommodation tray information described above, or Tray information is updated. After changing the stage or accommodating the tray NT, returning to S25, another tray NT is selected based on the nozzle setting information and the accommodated tray information. is set. If it is determined in S27 that the set tray NT is good, the obtained ID of the tray NT is added to the nozzle setting information.

In a state in which a good tray NT is set on the stage, in S31, based on the setting information and the above-mentioned stored nozzle information, one pallet NP to be used for setting transfer is transferred to the nozzle setting information and the stored nozzle information. Based on this, one of the plurality of pallets NP possessed by the storage device 100 is selected. Although a detailed description of the algorithm for this selection is omitted, in S31, it is necessary to confirm that one or more nozzles N to be set and transferred are mounted, and to inspect all items for all nozzles N that are mounted. One pallet NP is selected from among the pallets NP that satisfy the conditions such as completion, based on the viewpoint that the setting of the nozzles N can be performed as efficiently as possible. Then, in subsequent S32, the selected pallet NP is transferred by the first transfer device 114 and set at the transfer position described above.

After the pallet NP is set and before the nozzles N are placed on the tray NT from the pallet NP, the faulty nozzles are treated in steps S33 to S35 in the same manner as the nozzle accommodation operation described above. Since the details of this measure have already been described, the description is omitted here. If there is no defective nozzle after S34 and S35 have been executed, or if there is no defective nozzle in the palette since the palette NP was set, the next step S36 is executed.

In S36, one nozzle that can be placed on the set tray NT is selected from among the nozzles N placed on the set pallet NP based on the stored nozzle information and the nozzle setting information. At S37, the selected nozzle N is transferred to the specific mounting hole 64 of the set tray NT based on the nozzle setting information.
That is, the setting transfer described above is performed. At the time of this setting transfer, the information about the transferred nozzle N is deleted from the accommodated nozzle information, and the ID of the nozzle N is added to the nozzle setting information. In this setting transfer, the camera 220 provided in the transfer device 104 acquires the ID of the nozzle N to be transferred, and there is a difference between the acquired ID and the ID stored as the stored nozzle information. Alternatively, the acquired ID may be added to the nozzle setting information without performing the confirmation process.

After the setting transfer for one nozzle N, it is determined in S38 whether or not the setting transfer for all scheduled nozzles N has been completed. If the setting transfer of all the nozzles N has not been completed, it is determined in S39 whether or not to continue the transfer of the nozzles N from the set pallet NP. If it is possible to continue the transfer of the nozzle N from the pallet NP, the process returns to S36 to transfer the next nozzle N from the pallet NP to the next tray NT. For example, if it is determined in S39 that the transfer from the pallet NP cannot be continued because there is no nozzle N that can be transferred in the pallet NP, in S40 the pallet NP is transferred to the first nozzle. The transfer device 114 returns the pallet NP to the storage device 100, and the process returns to S31 to select the next pallet NP. After the pallet NP is set and the faulty nozzle placed on the pallet NP is treated, setting transfer of the nozzle N from the pallet NP is started. If it is determined in S39 that the setting transfer of all nozzles N has been completed, in S41 the set pallet NP is returned to the accommodation device 100 by the first transfer device 114. be.

After the setting transfer of all the nozzles N is completed and the pallet NP is returned, it is determined in S42 whether or not the tray NT on which the nozzles N are set is to be accommodated in the tray accommodating device 102. If it is determined that the tray NT is to be accommodated in the accommodation device 102, the set tray NT is accommodated in the accommodation device 102 by the tray transfer device 122 in S43, and the nozzle accommodation operation ends. On the other hand, when it is determined in S42 that the tray NT is not accommodated in the accommodation device 102, the set of the tray NT is released, and the tray NT is left on the fixed stage 102 or the movable stage 204. The nozzle containment operation ends. Prior to the setting transfer of the nozzle NT, the 2D code 76 attached to the tray NT is imaged by the camera 22 provided in the transfer device 104, and the ID of the tray NT is obtained. When the NT is accommodated in the accommodation device 102, the ID of the tray NT is related to the carrier 192 to be accommodated, together with the fact that the tray NT is the tray NT for which the nozzles N have been set. Added to storage tray information. On the other hand, when the operation ends while the tray NT that has been set remains on the movable stage 204, the information about the tray NT included in the accommodation tray information is deleted.

iv) Nozzle resetting operation In the nozzle resetting operation, by setting a tray NT on which nozzles N have already been set, another nozzle of the same type as those nozzles N can be replaced in place of those nozzles N. This is an operation to place N. In other words, this is an operation of creating nozzle setting information based on the set tray NT and exchanging nozzles based on that information. Nozzle setting operations are performed by controller 84 executing a nozzle resetting program flow charted in FIGS. In the nozzle setting operation, it is selected whether the stage for setting the nozzle N is the fixed stage 202 or the movable stage 204, and whether or not the tray NT whose resetting is completed is stored in the storage device 102. These selections are made based on the operation using the operation keys 88 of the controller 84 by the operator.

In the nozzle resetting operation, simply speaking, the nozzle accommodation operation is performed in the first half. Specifically, the nozzles N placed on the set tray NT are accommodated in the accommodation device 100 by the processing according to the first half of the nozzle resetting program shown in the flowchart of FIG. The processes performed in S51 to S66 of the program are substantially the same as the processes performed in S1 to S16 of the nozzle accommodation program described above, so the description of those processes is omitted. Based on the model of tray NT and the model of nozzle N, nozzle setting information is created. It should be noted that in this nozzle resetting operation as well, measures for defective nozzles are executed in S58-S60.

After the nozzles NT placed on the tray NT are housed in the housing device 100, another nozzle housed in the housing device 100 is processed according to the second half of the nozzle resetting program shown in the flow chart in FIG. N are, in principle, set on the tray NT on which the nozzles N have been placed. The processing performed in the flow starting from S67 to S85 of the program is substantially the same as the processing performed in the flow starting from S27 to S43 of the nozzle setting program. omitted. It should be noted that in this nozzle resetting operation, measures for defective nozzles are also executed in S75-S77, and the above-described process for exchanging the tray NT is executed in this operation as well, in S67-S72.

v) Nozzle Washing Operation The nozzle washing operation is an operation of washing and drying the nozzles N mounted on one pallet NP in the accommodation device 100 together with the pallet NP. Since the details of cleaning and drying the nozzles N have been previously described, the flow of this operation will be mainly described here. Incidentally, this operation and the first and second inspection operations described later are all executed independently of any of the other operations described in this embodiment. In other words, regardless of whether or not another operation is being executed, the set conditions are satisfied for nozzles N placed on pallets NP other than the pallet NP that is the target of another operation. So long as any of the three operations can be performed.

The nozzle cleaning operation is performed by executing a nozzle cleaning program whose flow chart is shown in FIG. In the processing according to this program, first, in S101, a palette NP to be subjected to the operation is specified. Specifically, one of the pallets NP that satisfies the condition that a set number or more of nozzles N that have not been cleaned is mounted is selected as the target pallet, taking into account the efficiency of this operation and other operations. It is determined. In subsequent S102, the pallet NP is transported by the fourth pallet transport device 118 to the cleaning position described above. Then, in S103, the nozzles N placed on the pallet NP are cleaned by the nozzle cleaning device 110 together with the pallet NP in that position.

After the cleaning by the cleaning device 110 is completed, the speed of returning the pallet NP by the fourth pallet transfer device 118 is determined in S104. As described above, while the pallet NP is being returned by the fourth transfer device 118, the nozzles N placed on the pallet NP are dried. Therefore, in S104, the return speed is determined based on the environmental temperature, the temperature of the hot air, etc., in order to secure the time required for sufficient drying. After the determination, in S105, while the pallet NP is being returned at the determined return speed, the nozzles N placed on the pallet NP are dried together with the pallet NP by the nozzle drying device 112. . Note that after the drying is completed, the above-described accommodated nozzle information is updated for the nozzles N that have been cleaned. Specifically, in the table shown in FIG. 19, all the nozzles N placed on the pallet NP are marked with a symbol "⊚" indicating that they have been cleaned, and all the nozzles N have been inspected. An update is made to treat it as an unfinished state.

vi) First nozzle inspection operation In the first nozzle inspection operation, the first inspection device 106 inspects the state of the tip portion and the required retraction force inspection for the nozzles N placed on one pallet NP in the storage device 100 . is performed by executing the first nozzle inspection program whose flow chart is shown in FIG. Since the details of the tip state inspection and the required retraction force inspection have already been described, the flow of these operations will be mainly described here.

In the process according to the first nozzle inspection program, first, in S111, the pallet NP to be subjected to the operation is specified. Specifically, one of the pallets NP that satisfies a condition such as completion of washing of all the nozzles N placed is selected as the target pallet in consideration of the efficiency of the operation and other operations. is determined as After the target pallet is determined, the pallet NP is transferred to the inspection position by the second pallet transfer device 116 in S112.

For each of the nozzles N placed on the pallet NP that has been transferred to the inspection position, the tip state inspection is performed with priority over the required retraction force inspection. The tip state inspection is sequentially performed for each nozzle N1. First, in S113, a tip portion condition inspection for one nozzle N is executed. Specifically, as described above, the lens 239 of the camera device 232 is moved by the unit moving device 236 to a position directly below one nozzle N to be inspected, and the tip of the nozzle N is aligned with the camera. An image is taken by the device 232, and whether or not the state of the distal end portion is abnormal is confirmed based on the imaging data obtained by the imaging. Specifically, it is confirmed whether or not the nozzle N has an abnormal tip shape such as "bent", "chipped tip", or "collapsed tip" or "attachment of foreign matter or dirt". Based on the result of the confirmation, determination is made in S114, and if it is recognized that the state of the tip portion is abnormal, in S115, the tip portion state of the reference pipe 160 fixed to the pallet NP is inspected. is executed. Specifically, the tip of the reference pipe 160 is imaged by the camera device 232, and whether or not there is an abnormality in the state of the tip of the reference pipe 160 is determined based on the imaging data of the tip obtained by the imaging. It is confirmed. As a result of the confirmation, determination is made in S116, and if the state of the tip portion of the reference pipe 160 is normal, the nozzle N is determined to be a defective nozzle in S117. On the other hand, when the state of the tip of the reference pipe 160 is abnormal, in S118, it is recognized that there is an abnormality in the function related to the inspection of the first inspection device 106, and a message to that effect is displayed on the display 86. No determination is made regarding the abnormal tip condition for that nozzle N, and subsequent tip condition inspections for other nozzles N are skipped. If it is confirmed in S114 that the state of the tip portion is normal, or if it is determined that the nozzle is defective in S117, all the nozzles N placed on the pallet NP are processed in S119. The processes after S113 are repeated until the tip condition inspection is completed.

As a result of the series of processes described above, when it is determined that the nozzle N is normal in the state of the tip portion, a "○" is displayed in the column of [tip portion state] of the nozzle N in the accommodated nozzle information shown in FIG. , and when it is determined that the nozzle is defective in terms of the state of the tip portion, an "X" is attached to that row. When it is recognized that there is an abnormality in the function related to the inspection of the first inspection device 106, the [tip state] columns of all the nozzles N placed on the pallet P are blanked. That is, the nozzles N placed on the pallet NP are treated as if none of the tip end state inspections has been performed.

After the inspection of the state of the tip portion, the necessary retraction force inspection is sequentially performed for each nozzle N placed on the pallet NP. In the process according to the program, prior to inspection of the required retraction force for each nozzle N, the required retraction force for the reference nozzle 158 fixed to the pallet NP is measured in S120. That is, when the suction tube 32 of the reference nozzle 158 is retracted, the load received by the load cell 242 of the load measuring device 234 is measured. Next, in S121, based on the measurement result, the load measuring device 234 is adjusted (for example, the load by the unit moving device 236 is adjusted so that the load value measured by the load cell 242 becomes equal to the actual value). setting of the ascending distance of the measuring device 234, etc.) are performed.

After the above adjustment of the load measuring device 234, first, in S122, a necessary retraction force inspection for one nozzle N is performed. Specifically, after the load cell 242 is positioned below the nozzle N to be measured, the load measuring device 234 is raised by a set distance, and the load received by the load cell 242 at that time is measured. Then, when the load exceeds the threshold force set for the nozzle N, it is determined that the force required to retract the nozzle N is excessive. Based on the identification result, a determination is made in S123, and if the required retraction force is excessive, the nozzle N is determined to be a defective nozzle in S124. Then, by the processing of S125, the processing from S122 onward is repeated until the necessary retraction force inspection for all the nozzles N placed on the pallet NP is completed.

As a result of the series of processes described above, when it is determined that the required retraction force of the nozzle N is normal, a "○" is placed in the [necessary retraction force] column for that nozzle N in the accommodated nozzle information shown in FIG. If the nozzle is determined to be defective with respect to the necessary retraction force, an "X" is added to that column. After the required retraction force inspection of all the nozzles N placed on the pallet NP is completed, the pallet NP is returned to the storage device 100 by the second transfer device 116 in S126.

vii) Second nozzle inspection operation In the second nozzle inspection operation, the identifier reading inspection and passing flow inspection are performed by the second inspection device 108 on the nozzles N placed on one pallet NP inside the storage device 100 . This operation is performed by executing the second nozzle inspection program whose flow chart is shown in FIG. Since the details of the identifier reading inspection and the passing flow rate inspection have been previously described, the flow of the relevant operations will be mainly described here.

In the process according to the second nozzle inspection program, first, in S131, the pallet NP to be subjected to the operation is specified. Specifically, one of the pallets NP that satisfies a condition such as completion of washing of all the nozzles N placed is selected as the target pallet in consideration of the efficiency of the operation and other operations. is determined as After the target pallet is determined, the pallet NP is transferred to the inspection position by the third pallet transfer device 118 in S132.

For each of the nozzles N placed on the pallet NP transferred to the inspection position, the identifier reading inspection is performed with priority over the passing flow rate inspection. The identifier reading inspection is sequentially performed for each nozzle N by the camera 276 provided in the second inspection device 108. Prior to inspection of each nozzle N, in S133, first, the reference nozzle fixed to the pallet NP is inspected. The 2D code 38 attached to the flange 34 of 158 is imaged by the camera 276, and based on the image data obtained by the imaging, it is confirmed that the function related to the identifier reading inspection of the second inspection device 100 is sufficient. be done. Then, based on the confirmation result, determination is made in S134, and on the condition that the function is sufficient, the identifier reading inspection for each nozzle N is executed in S135 and subsequent steps. Incidentally, when it is confirmed in the judgment of S134 that the function related to the identifier reading inspection is insufficient, this fact is displayed on the display 86, and the identifier reading for each of the nozzles N placed on the pallet NP is performed. No checks are performed.

In the identifier reading inspection of one nozzle N in S135, first, the inspection head 270 is moved by the head moving device 272 to a position where the camera 276 is located directly above the 2D code 38 attached to the flange 34 of the nozzle N. The 2D code 38 is imaged by the camera 276 in that state. Then, based on the image data obtained by the imaging, it is confirmed whether or not the ID of the nozzle N can be sufficiently recognized. Based on the confirmation result, determination is made in S136, and if the ID cannot be read sufficiently from the imaged 2D code 38, that is, if it is difficult to read the 2D code 38, in S137 Nozzle N is determined to be a defective nozzle. Then, by the processing of S138, the processing after S135 is repeated until the identifier reading inspection for all the nozzles N placed on the pallet NP is completed.

As a result of the above series of processes, if the 2D code 38 can be read sufficiently, that is, if the nozzle N is normal with respect to identifier reading, the [identifier reading] of that nozzle N in the accommodated nozzle information shown in FIG. If the column is marked with "O" and it is determined that the nozzle is defective in terms of identifier reading, then the column is marked with "X". If the function of the second inspection device 108 related to the inspection is recognized as insufficient and the identifier reading inspection for each nozzle N is not performed, the pallet P is placed on the pallet P so that this fact is reflected in the stored nozzle information. The [identifier reading] columns of all nozzles N placed are blanked. In addition, since the 2D code 38 could not be read during the accommodation transfer of the nozzle N, "?" is added to the [nozzle ID] column, and "(...)" is added to the [nozzle type] column. If it is determined that the ID of the nozzle N that is being read is sufficiently recognizable by the identifier reading test, the ID read in that test is written in the [nozzle ID] column, and based on that ID The specified nozzle type is written in the [nozzle type] column.

After the identifier reading inspection, the passing flow rate inspection is sequentially performed for each of the nozzles N placed on the pallet NP. First, in S139, compressed air is supplied by the air supply device 274 to the reference pipe 160 fixed to the pallet NP, and the air pressure is measured by the air pressure sensor 280 in this state. Next, in S140, the threshold pressure referred to when inspecting the passing flow rate of the nozzle N is set based on the measured air pressure.

After setting the threshold pressure, first, in S141, a passing flow rate inspection for one nozzle N is executed. More specifically, compressed air is supplied by the air supply device 274 to the nozzle N to be inspected, and the air pressure is measured by the air pressure sensor 280 in this state. Then, when the measured air pressure is higher than the threshold value set above, it is determined that the flow rate of the air passing through the nozzle N is insufficient. Based on the identification result, determination is made in S142, and if the passing flow rate is insufficient, the nozzle N is determined to be a defective nozzle in S143. Then, by the processing of S144, the processing after S141 is repeated until the passing flow rate inspection for all the nozzles N placed on the pallet NP is completed.

As a result of the series of processes described above, when it is determined that the passing flow rate of the nozzle N is normal, the column of [passing flow rate] for that nozzle N in the accommodated nozzle information shown in FIG. If it is determined that the nozzle is defective with respect to , an "X" is added to that column. After the passing flow rate inspection of all the nozzles N placed on the pallet NP is completed, the pallet NP is returned to the storage device 100 by the third transfer device 118 in S145.

[K] Functional configuration of control device As described above, the controller 84, which is a control device, controls the management machine 80 of the embodiment. Specifically, as shown in FIG. 29, each operation of the nozzle accommodation device 100 to the tray transfer device 122 is controlled by a controller 84 while exchanging signals and information therebetween. Under the control of the controller 84, the management machine 80 performs various operations described above. In view of its operation, the controller 84 can be considered to have a plurality of functional units as shown in FIG. 29, that is, a plurality of functional units implemented by executing various programs.

To explain each of the plurality of functional units in detail, the controller 84 functions as a functional unit for storing the above-described accommodated nozzle information, nozzle setting information, and accommodated tray information, which are management information related to the nozzles N. It has a part 400 . Specifically, a storage medium such as a hard disk included in a computer, which is a main component of the controller 84, serves as the nozzle information storage unit 400. FIG. Then, the management machine 80 performs the above operation based on the stored management information.

Also, the controller 84 has six functional units for controlling the operations described above. Specifically, a nozzle accommodation control unit 402 for controlling the nozzle accommodation operation, a nozzle setting control unit 404 for controlling the nozzle setting operation, a nozzle resetting control unit 406 for controlling the nozzle resetting operation, and a nozzle cleaning operation. It has a nozzle cleaning control unit 408 for control, a first nozzle test control unit 410 for controlling the first nozzle test operation, and a second nozzle test control unit 412 for controlling the second nozzle test operation. These control units 402 to 412 are functional units implemented by executing the above-described nozzle accommodation program, nozzle setting program, nozzle resetting program, nozzle cleaning program, first nozzle inspection program, and second nozzle inspection program, respectively. is.

Further, the nozzle accommodation control unit 402, the nozzle setting control unit 404, and the nozzle resetting control unit 406 will be explained in detail. A functional unit that controls the treatment, that is, the treatment of transporting the defective nozzle in order to place the defective nozzle in the corresponding space 226 partitioned in the defective box 224 according to the inspection item for which the defective nozzle is determined to be defective. , a defective nozzle transport control unit 414 is provided. The defective nozzle transport control section 414 is a functional section implemented by executing any one of S8 to S10, S33 to S35, S58 to S60, and S75 to S77. In addition, each of the nozzle setting control unit 404 and the nozzle resetting control unit 406 controls the tray transfer device 122 when it is determined that the tray NT has a problem, so that the tray NT is stored in the tray. A tray exchange control unit 416 is provided as a functional unit for exchanging the tray NT accommodated in the apparatus 102 . The tray exchange control section 416 is a functional section realized by executing any of S27 to S30 and subsequent S25 to S26, and S67 to S72.

Further, if the first nozzle test control section 410 and the second nozzle test control section 412 will be explained in detail, the control sections 410 and 412 will cause the test result of the nozzle N by the nozzle test devices 106 and 108 to be defective, and A reference target reference defective nozzle determination unit 418 is provided as a functional unit that determines the nozzle N as a defective nozzle on condition that the inspection result of the reference nozzle 158 or the reference pipe 160 as a reference target is good. The reference target reference defective nozzle determination unit 418 is a functional unit realized by executing any one of S114 to S117 and S134 to S138. Prior to the inspection of the nozzle N, each of the control units 410 and 412 uses the reference nozzle 158 or the reference pipe 160, which is the reference object, to set the reference for the inspection by the nozzle inspection devices 106 and 108, or , a reference object-dependent inspection preparation processing unit 420 is provided as a functional unit that performs calibration of the nozzle inspection devices 106 and 108 as preparation processing. This reference object dependent examination preparation processing unit 420 is a functional unit realized by executing any one of S120 and S121, S139 and S140.

10: Electric component mounting machine 18: Mounting head N: Suction nozzle 30: Body cylinder [rear end] 32: Suction tube [front end] 34: Flange 36: Locking pin 38: 2D code [identifier] 50: Nozzle station NT: nozzle tray 60: base plate 62: cover plate 64: mounting hole [mounting part] 66: step surface
76: 2D code [identifier] 80: Nozzle management device 84: Controller [control device] 100: Nozzle storage device 102: Tray storage device 104: Nozzle transfer device [Device for executing counter-nozzle treatment] [Defective nozzle transport device] 106: 1st nozzle inspection device [treatment execution device for nozzle] 108: Second nozzle inspection device [treatment execution device for nozzle] 110: Nozzle washing device [treatment execution device for nozzle] 112: Nozzle drying device 114: First pallet transfer device [Nozzle transfer device] 116: Second pallet transfer device [nozzle transfer device] 118: Third pallet transfer device [nozzle transfer device] 120: Fourth pallet transfer device [nozzle transfer device] 122: Tray transfer device 134: Pallet transfer Device [Pallet circulation device] NP: Nozzle pallet 140: Base plate 142: Cover plate 144: Mounting hole [Mounting part] 146: Step surface 156: 2D code [Identifier] 158: Reference nozzle [Reference target] 160: Reference pipe [Reference object] [Simulated object] 190: Tray moving device [Tray circulating device] 202: Fixed stage 204: Movable stage 210: Transfer head 212: Head moving device [Holding device moving device] 218: Holding chuck [Nozzle holding device ] 220: Camera [Identifier Reader] 224: Defective Box [Defective Nozzle Detention Device] 226: Space [Detention Unit]
232: Camera device 234: Load measuring device 235: Inspection unit 236: Unit moving device 270: Inspection head 272: Head moving device 274: Air feeding device 276: Camera 302: Upper cleaning unit 304: Lower cleaning unit 310: Y direction Moving Mechanism 312 : Injection Hole 314 : Air Pipe 330 : Rail 332 : Moving Mechanism 334 : Guide 336 : Transport Unit 338 : Guide 340 : Transport Unit 400 : Nozzle Information Storage Unit 402 : Nozzle Accommodation Control Unit 404 : Nozzle Setting Control Unit 406 : Nozzle resetting controller
408: Nozzle cleaning control unit 410: First nozzle inspection control unit 412: Second nozzle inspection control unit 414: Defective nozzle transportation control unit 416: Tray replacement control unit 418: Reference target reference defective nozzle determination unit 420: Reference target dependent preparation processing unit

Claims (1)

A nozzle management machine for managing a suction nozzle used to hold an electrical component in an electrical component mounting machine,
The electrical component mounting machine is configured such that one or more suction nozzles used in the electrical component mounting machine are mounted on a nozzle tray detachably arranged in the electrical component mounting machine,
The nozzle management machine
a plurality of pallets on which a plurality of suction nozzles can be placed;
a cleaning device that cleans the plurality of suction nozzles placed on the pallet;
a transfer head to which a holding chuck as a nozzle holder for holding the suction nozzle to be transferred and a camera for reading a 2D code attached to the suction nozzle on the pallet are attached;
A transfer device including the transfer head and a moving device for moving the transfer head,
The transfer device is configured to transfer the suction nozzles accommodated in the pallet to the nozzle tray positioned at the set position by the holding chuck, and to place the suction nozzles on the nozzle tray positioned at the set position. A nozzle management machine that performs at least one of transferring the suction nozzle to the pallet by the holding chuck, and moving the camera to read the 2D code of the suction nozzle on the pallet.

Images