JP2022551815A5 - - Google Patents

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Publication number
JP2022551815A5
JP2022551815A5 JP2022516755A JP2022516755A JP2022551815A5 JP 2022551815 A5 JP2022551815 A5 JP 2022551815A5 JP 2022516755 A JP2022516755 A JP 2022516755A JP 2022516755 A JP2022516755 A JP 2022516755A JP 2022551815 A5 JP2022551815 A5 JP 2022551815A5
Authority
JP
Japan
Prior art keywords
transport
interchangeable
cassette
chamber
lock chamber
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2022516755A
Other languages
English (en)
Japanese (ja)
Other versions
JP7792897B2 (ja
JP2022551815A (ja
Filing date
Publication date
Priority claimed from US16/899,151 external-priority patent/US20200395232A1/en
Application filed filed Critical
Publication of JP2022551815A publication Critical patent/JP2022551815A/ja
Publication of JP2022551815A5 publication Critical patent/JP2022551815A5/ja
Application granted granted Critical
Publication of JP7792897B2 publication Critical patent/JP7792897B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

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JP2022516755A 2019-06-14 2020-06-15 基板処理装置 Active JP7792897B2 (ja)

Applications Claiming Priority (5)

Application Number Priority Date Filing Date Title
US201962861543P 2019-06-14 2019-06-14
US62/861,543 2019-06-14
US16/899,151 US20200395232A1 (en) 2019-06-14 2020-06-11 Substrate process apparatus
US16/899,151 2020-06-11
PCT/US2020/037788 WO2020252476A2 (en) 2019-06-14 2020-06-15 Substrate process apparatus

Publications (3)

Publication Number Publication Date
JP2022551815A JP2022551815A (ja) 2022-12-14
JP2022551815A5 true JP2022551815A5 (https=) 2023-02-10
JP7792897B2 JP7792897B2 (ja) 2025-12-26

Family

ID=73745656

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2022516755A Active JP7792897B2 (ja) 2019-06-14 2020-06-15 基板処理装置

Country Status (5)

Country Link
US (1) US20200395232A1 (https=)
EP (1) EP3984061A4 (https=)
JP (1) JP7792897B2 (https=)
TW (1) TWI881983B (https=)
WO (1) WO2020252476A2 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2024511280A (ja) 2021-02-22 2024-03-13 エヴァテック・アーゲー 真空処理装置および真空処理された基板を製造する方法
KR102305139B1 (ko) * 2021-02-24 2021-09-28 피에스케이 주식회사 로드락 챔버 및 기판 처리 장치
US11794314B2 (en) 2021-08-30 2023-10-24 Kla Corporation Quick swap chuck with vacuum holding interchangeable top plate
TWI814434B (zh) * 2022-04-01 2023-09-01 友達光電股份有限公司 發光二極體陣列基板
CN114823426B (zh) * 2022-05-26 2023-04-14 北京北方华创微电子装备有限公司 半导体工艺设备
TWI909307B (zh) * 2024-01-11 2025-12-21 大陸商江蘇智芯達科技有限公司 基板蒸鍍系統
CN120727607A (zh) * 2024-03-29 2025-09-30 盛美半导体设备(上海)股份有限公司 装载腔及半导体设备

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JP2001093956A (ja) * 1999-09-20 2001-04-06 Hitachi Ltd 試料搬送装置
US6949143B1 (en) * 1999-12-15 2005-09-27 Applied Materials, Inc. Dual substrate loadlock process equipment
JP3676983B2 (ja) * 2000-03-29 2005-07-27 株式会社日立国際電気 半導体製造方法、基板処理方法、及び半導体製造装置
US6719517B2 (en) * 2001-12-04 2004-04-13 Brooks Automation Substrate processing apparatus with independently configurable integral load locks
US7959395B2 (en) * 2002-07-22 2011-06-14 Brooks Automation, Inc. Substrate processing apparatus
JP2005093807A (ja) * 2003-09-18 2005-04-07 Hitachi Kokusai Electric Inc 半導体製造装置
US7458763B2 (en) * 2003-11-10 2008-12-02 Blueshift Technologies, Inc. Mid-entry load lock for semiconductor handling system
KR20070044310A (ko) * 2005-10-24 2007-04-27 삼성전자주식회사 반도체 소자 제조 설비
KR100702844B1 (ko) * 2005-11-14 2007-04-03 삼성전자주식회사 로드락 챔버 및 그를 이용한 반도체 제조설비
US8398355B2 (en) * 2006-05-26 2013-03-19 Brooks Automation, Inc. Linearly distributed semiconductor workpiece processing tool
US20080276867A1 (en) * 2007-05-09 2008-11-13 Jason Schaller Transfer chamber with vacuum extension for shutter disks
JP5543336B2 (ja) * 2007-05-18 2014-07-09 ブルックス オートメーション インコーポレイテッド 高速スワップロボット付コンパクト基板搬送システム
US8272825B2 (en) * 2007-05-18 2012-09-25 Brooks Automation, Inc. Load lock fast pump vent
JP5650935B2 (ja) * 2009-08-07 2015-01-07 東京エレクトロン株式会社 基板処理装置及び位置決め方法並びにフォーカスリング配置方法
JP6003011B2 (ja) * 2011-03-31 2016-10-05 東京エレクトロン株式会社 基板処理装置
WO2013033289A1 (en) * 2011-09-02 2013-03-07 Brooks Automation, Inc. Time-optimal trajectories for robotic transfer devices
TWI623994B (zh) * 2013-07-08 2018-05-11 布魯克斯自動機械公司 具有即時基板定心的處理裝置
JP2015076458A (ja) * 2013-10-08 2015-04-20 株式会社日立ハイテクノロジーズ 真空処理装置
JP6454201B2 (ja) * 2015-03-26 2019-01-16 東京エレクトロン株式会社 基板搬送方法及び基板処理装置
JP6582676B2 (ja) * 2015-07-24 2019-10-02 東京エレクトロン株式会社 ロードロック装置、及び基板処理システム
US9881820B2 (en) * 2015-10-22 2018-01-30 Lam Research Corporation Front opening ring pod
US11020852B2 (en) * 2017-10-05 2021-06-01 Brooks Automation, Inc. Substrate transport apparatus with independent accessory feedthrough

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