JP2022536382A - 構造最適化シリコン粒子を用いたメチルクロロシランの調製方法 - Google Patents
構造最適化シリコン粒子を用いたメチルクロロシランの調製方法 Download PDFInfo
- Publication number
- JP2022536382A JP2022536382A JP2021573959A JP2021573959A JP2022536382A JP 2022536382 A JP2022536382 A JP 2022536382A JP 2021573959 A JP2021573959 A JP 2021573959A JP 2021573959 A JP2021573959 A JP 2021573959A JP 2022536382 A JP2022536382 A JP 2022536382A
- Authority
- JP
- Japan
- Prior art keywords
- silicon
- particles
- granules
- fluidized bed
- value
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000000034 method Methods 0.000 title claims abstract description 32
- YGZSVWMBUCGDCV-UHFFFAOYSA-N chloro(methyl)silane Chemical compound C[SiH2]Cl YGZSVWMBUCGDCV-UHFFFAOYSA-N 0.000 title claims abstract description 19
- 239000011856 silicon-based particle Substances 0.000 title description 14
- 239000002245 particle Substances 0.000 claims abstract description 70
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims abstract description 52
- 229910052710 silicon Inorganic materials 0.000 claims abstract description 52
- 239000010703 silicon Substances 0.000 claims abstract description 50
- 239000008187 granular material Substances 0.000 claims abstract description 45
- 239000000203 mixture Substances 0.000 claims abstract description 30
- 239000003795 chemical substances by application Substances 0.000 claims abstract description 23
- 239000003054 catalyst Substances 0.000 claims abstract description 19
- NEHMKBQYUWJMIP-UHFFFAOYSA-N chloromethane Chemical compound ClC NEHMKBQYUWJMIP-UHFFFAOYSA-N 0.000 claims abstract description 17
- 229910052802 copper Inorganic materials 0.000 claims abstract description 14
- 239000010949 copper Substances 0.000 claims abstract description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 12
- 239000012495 reaction gas Substances 0.000 claims abstract description 11
- 239000007787 solid Substances 0.000 claims abstract description 9
- 108010046685 Rho Factor Proteins 0.000 claims abstract description 3
- 238000005469 granulation Methods 0.000 claims description 20
- 230000003179 granulation Effects 0.000 claims description 20
- 238000004519 manufacturing process Methods 0.000 claims description 15
- 230000008569 process Effects 0.000 claims description 15
- LIKFHECYJZWXFJ-UHFFFAOYSA-N dimethyldichlorosilane Chemical compound C[Si](C)(Cl)Cl LIKFHECYJZWXFJ-UHFFFAOYSA-N 0.000 claims description 6
- 229910021591 Copper(I) chloride Inorganic materials 0.000 claims description 3
- OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical group [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 3
- 238000006243 chemical reaction Methods 0.000 description 19
- 230000000694 effects Effects 0.000 description 14
- 238000009826 distribution Methods 0.000 description 12
- 230000015572 biosynthetic process Effects 0.000 description 11
- 238000002474 experimental method Methods 0.000 description 10
- 239000007789 gas Substances 0.000 description 10
- 150000001367 organochlorosilanes Chemical class 0.000 description 10
- -1 polysiloxanes Polymers 0.000 description 10
- 239000000047 product Substances 0.000 description 7
- 238000003786 synthesis reaction Methods 0.000 description 7
- 239000012535 impurity Substances 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 239000005046 Chlorosilane Substances 0.000 description 5
- 239000006227 byproduct Substances 0.000 description 5
- KOPOQZFJUQMUML-UHFFFAOYSA-N chlorosilane Chemical compound Cl[SiH3] KOPOQZFJUQMUML-UHFFFAOYSA-N 0.000 description 5
- 239000000460 chlorine Substances 0.000 description 4
- 239000000428 dust Substances 0.000 description 4
- 229920001296 polysiloxane Polymers 0.000 description 4
- 238000005054 agglomeration Methods 0.000 description 3
- 230000002776 aggregation Effects 0.000 description 3
- 238000004458 analytical method Methods 0.000 description 3
- 238000009835 boiling Methods 0.000 description 3
- 230000003197 catalytic effect Effects 0.000 description 3
- 150000001875 compounds Chemical class 0.000 description 3
- 238000001816 cooling Methods 0.000 description 3
- 235000013870 dimethyl polysiloxane Nutrition 0.000 description 3
- 238000004817 gas chromatography Methods 0.000 description 3
- 238000010191 image analysis Methods 0.000 description 3
- 229910000765 intermetallic Inorganic materials 0.000 description 3
- 238000003801 milling Methods 0.000 description 3
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 description 3
- 238000007873 sieving Methods 0.000 description 3
- XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 description 2
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 description 2
- BLRPTPMANUNPDV-UHFFFAOYSA-N Silane Chemical compound [SiH4] BLRPTPMANUNPDV-UHFFFAOYSA-N 0.000 description 2
- 229910045601 alloy Inorganic materials 0.000 description 2
- 239000000956 alloy Substances 0.000 description 2
- 229910052782 aluminium Inorganic materials 0.000 description 2
- 230000008901 benefit Effects 0.000 description 2
- 229910052791 calcium Inorganic materials 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 229910052801 chlorine Inorganic materials 0.000 description 2
- 230000008021 deposition Effects 0.000 description 2
- 239000006185 dispersion Substances 0.000 description 2
- 238000000227 grinding Methods 0.000 description 2
- 238000010438 heat treatment Methods 0.000 description 2
- 229930195733 hydrocarbon Natural products 0.000 description 2
- 150000002430 hydrocarbons Chemical class 0.000 description 2
- 238000009776 industrial production Methods 0.000 description 2
- 229910052742 iron Inorganic materials 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 238000002156 mixing Methods 0.000 description 2
- 229910052760 oxygen Inorganic materials 0.000 description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 2
- 239000000376 reactant Substances 0.000 description 2
- 229910000077 silane Inorganic materials 0.000 description 2
- 150000004756 silanes Chemical class 0.000 description 2
- 229920002050 silicone resin Polymers 0.000 description 2
- 229910052718 tin Inorganic materials 0.000 description 2
- 229910052719 titanium Inorganic materials 0.000 description 2
- 229910052725 zinc Inorganic materials 0.000 description 2
- 239000011701 zinc Substances 0.000 description 2
- JIAARYAFYJHUJI-UHFFFAOYSA-L zinc dichloride Chemical compound [Cl-].[Cl-].[Zn+2] JIAARYAFYJHUJI-UHFFFAOYSA-L 0.000 description 2
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 1
- ZAMOUSCENKQFHK-UHFFFAOYSA-N Chlorine atom Chemical compound [Cl] ZAMOUSCENKQFHK-UHFFFAOYSA-N 0.000 description 1
- 229910021592 Copper(II) chloride Inorganic materials 0.000 description 1
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 1
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- 238000004566 IR spectroscopy Methods 0.000 description 1
- 238000001069 Raman spectroscopy Methods 0.000 description 1
- 238000005299 abrasion Methods 0.000 description 1
- 239000000654 additive Substances 0.000 description 1
- 230000002411 adverse Effects 0.000 description 1
- 150000001350 alkyl halides Chemical class 0.000 description 1
- 229910052787 antimony Inorganic materials 0.000 description 1
- 229910052786 argon Inorganic materials 0.000 description 1
- 229910052785 arsenic Inorganic materials 0.000 description 1
- 238000001479 atomic absorption spectroscopy Methods 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000000889 atomisation Methods 0.000 description 1
- 229910052788 barium Inorganic materials 0.000 description 1
- 230000002902 bimodal effect Effects 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 229910052796 boron Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 238000004364 calculation method Methods 0.000 description 1
- 239000012159 carrier gas Substances 0.000 description 1
- 150000001805 chlorine compounds Chemical class 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000009833 condensation Methods 0.000 description 1
- 230000005494 condensation Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 238000010924 continuous production Methods 0.000 description 1
- ORTQZVOHEJQUHG-UHFFFAOYSA-L copper(II) chloride Chemical compound Cl[Cu]Cl ORTQZVOHEJQUHG-UHFFFAOYSA-L 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 125000004122 cyclic group Chemical group 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 238000004821 distillation Methods 0.000 description 1
- 239000010419 fine particle Substances 0.000 description 1
- 238000005243 fluidization Methods 0.000 description 1
- 229910052732 germanium Inorganic materials 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 150000004820 halides Chemical class 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 230000007062 hydrolysis Effects 0.000 description 1
- 238000006460 hydrolysis reaction Methods 0.000 description 1
- 238000011078 in-house production Methods 0.000 description 1
- 238000011065 in-situ storage Methods 0.000 description 1
- 238000001095 inductively coupled plasma mass spectrometry Methods 0.000 description 1
- 238000002354 inductively-coupled plasma atomic emission spectroscopy Methods 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 229910052745 lead Inorganic materials 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 229910052749 magnesium Inorganic materials 0.000 description 1
- 229910052748 manganese Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 229910001510 metal chloride Inorganic materials 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 229910052750 molybdenum Inorganic materials 0.000 description 1
- 229910052759 nickel Inorganic materials 0.000 description 1
- 229910052757 nitrogen Inorganic materials 0.000 description 1
- 229910052756 noble gas Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 229910052698 phosphorus Inorganic materials 0.000 description 1
- 229920000548 poly(silane) polymer Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 150000003839 salts Chemical class 0.000 description 1
- 229910052711 selenium Inorganic materials 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000004760 silicates Chemical class 0.000 description 1
- 229920002545 silicone oil Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000007711 solidification Methods 0.000 description 1
- 230000008023 solidification Effects 0.000 description 1
- 239000012798 spherical particle Substances 0.000 description 1
- 239000007858 starting material Substances 0.000 description 1
- 229910052712 strontium Inorganic materials 0.000 description 1
- 229910052714 tellurium Inorganic materials 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 229910052720 vanadium Inorganic materials 0.000 description 1
- 238000004876 x-ray fluorescence Methods 0.000 description 1
- 229910052727 yttrium Inorganic materials 0.000 description 1
- 235000005074 zinc chloride Nutrition 0.000 description 1
- 239000011592 zinc chloride Substances 0.000 description 1
- 229910052726 zirconium Inorganic materials 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C07—ORGANIC CHEMISTRY
- C07F—ACYCLIC, CARBOCYCLIC OR HETEROCYCLIC COMPOUNDS CONTAINING ELEMENTS OTHER THAN CARBON, HYDROGEN, HALOGEN, OXYGEN, NITROGEN, SULFUR, SELENIUM OR TELLURIUM
- C07F7/00—Compounds containing elements of Groups 4 or 14 of the Periodic Table
- C07F7/02—Silicon compounds
- C07F7/08—Compounds having one or more C—Si linkages
- C07F7/12—Organo silicon halides
- C07F7/16—Preparation thereof from silicon and halogenated hydrocarbons direct synthesis
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B01—PHYSICAL OR CHEMICAL PROCESSES OR APPARATUS IN GENERAL
- B01J—CHEMICAL OR PHYSICAL PROCESSES, e.g. CATALYSIS OR COLLOID CHEMISTRY; THEIR RELEVANT APPARATUS
- B01J23/00—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00
- B01J23/70—Catalysts comprising metals or metal oxides or hydroxides, not provided for in group B01J21/00 of the iron group metals or copper
- B01J23/72—Copper
Landscapes
- Chemical & Material Sciences (AREA)
- Organic Chemistry (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Silicon Compounds (AREA)
Abstract
Description
→ (CH3)nHmSiCl4-n-m+副生成物(n=1~3、m=0、1)
b)切断面上で、細長い形状を有する金属間化合物の析出面積を合計して、
面積数Aを形成する。
c)切断面上で、円形の金属間化合物の析出面積を合計して、
面積数Bを形成する。
d)面積数Aと面積数Bとから構造指標QFとして記述される商が形成される。
・d50の値が50~1500μmである粒径分布
・0.1~10μmの細孔径で0.2ml/g以下の多孔質微細構造
・流動性が少なくとも8であること
(CH3)nHmSiCl4-n-m (1)
[式(1)中、nは1~3の値を表し、mは0又は1の値を表す。]
を製造する方法を提供する。ここで、クロロメタンを含む反応ガスを、シリコンを含む粒子状接触剤と、銅触媒の存在下で反応させ、ここで運転造粒物、すなわち流動床反応器に導入された造粒物又は造粒混合物が、構造パラメータSによって記述されたシリコン含有粒子Sを少なくとも1質量%含み、ここでSは、少なくとも0の値を有し、以下のように計算される:
φSは、対称加重真球度因子(symmetry-weighted sphericity factor)であり、
ρSDは、かさ密度(poured density)[g/cm3]であり、
ρFは、平均粒子固形分密度[g/cm3]である。
・高いボイラーの形成が減少
・シリコン利用の向上(粉塵の排出による損失の低下)
・粒径分布に関してより均質な接触剤が得られ、
その結果、流動床の流体力学的特性が改善される
・微粉粒子又はダストフラクション(粒径70μm未満の粒子)の凝集による
プラント部品の詰まり及び/又は閉塞の減少
・粒子混合物の搬送性の向上
・構造最適化粒子による摩耗の低減
・反応器の運転時間の延長
Claims (9)
- 流動床反応器内において、一般式1のメチルクロロシラン
(CH3)nHmSiCl4-n-m (1)
[式(1)中、nは1~3の値を表し、mは0又は1の値を表す。]
を製造する方法であって、
クロロメタンを含む反応ガスを、シリコンを含む粒子状接触剤と、銅触媒の存在下で反応させ、
運転造粒物、すなわち前記流動床反応器に導入された造粒物又は造粒混合物は、構造パラメータSによって記述されたシリコン含有粒子Sを少なくとも1質量%含み、Sは、少なくとも0の値を有し、以下のように計算される、前記方法。
φSは、対称加重真球度因子であり、
ρSDは、かさ密度[g/cm3]であり、
ρFは、平均粒子固形分密度[g/cm3]である。] - 前記粒子Sの対称加重真球度因子φSが0.70~1であり、ここで前記粒子Sの真球度は、粒子像の表面積とその外周との比を表す、請求項1に記載の方法。
- 構造パラメータS≧0を有する前記粒子Sの平均粒子固形分密度ρFが、2.20~2.70g/cm3であり、DIN 66137-2:2019-03に準拠して測定される、請求項1又は2に記載の方法。
- 前記運転造粒物が、70~1000μmの粒径パラメータd50を有し、前記粒径パラメータが、DIN ISO 9276-2に準拠して決定される、請求項1~3のいずれか一項に記載の方法。
- 前記シリコンが、シリコン質量基準で98%~99.5%の純度を有する冶金用シリコン(Simg)である、請求項1~4のいずれか一項に記載の方法。
- 前記銅触媒が、CuCl、CuCl2、CuO及びそれらの混合物から選択される、請求項1~5のいずれか一項に記載の方法。
- 温度が220℃~380℃である、請求項1~6のいずれか一項に記載の方法。
- 前記反応ガスが、前記反応器に入る前に少なくとも50体積%のMeClを含む、請求項1~7のいずれか一項に記載の方法。
- 製造された一般式1の前記メチルクロロシランが、ジメチルジクロロシラン(DMDCS)である、請求項1~8のいずれか一項に記載の方法。
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
PCT/EP2019/065735 WO2020249237A1 (de) | 2019-06-14 | 2019-06-14 | Verfahren zur herstellung von methylchlorsilanen mit strukturoptimierten silicium-partikeln |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022536382A true JP2022536382A (ja) | 2022-08-15 |
JP7374228B2 JP7374228B2 (ja) | 2023-11-06 |
Family
ID=66867155
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2021573959A Active JP7374228B2 (ja) | 2019-06-14 | 2019-06-14 | 構造最適化シリコン粒子を用いたメチルクロロシランの調製方法 |
Country Status (6)
Country | Link |
---|---|
US (1) | US20220119422A1 (ja) |
EP (1) | EP3880686B1 (ja) |
JP (1) | JP7374228B2 (ja) |
KR (1) | KR102662929B1 (ja) |
CN (1) | CN113286800A (ja) |
WO (1) | WO2020249237A1 (ja) |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1059983A (ja) * | 1996-05-30 | 1998-03-03 | Wacker Chemie Gmbh | メチルクロロシランの直接合成法 |
Family Cites Families (18)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2552438B1 (fr) * | 1983-09-28 | 1985-11-08 | Rhone Poulenc Spec Chim | Procede et catalyseur avec un alcalin comme additif pour la synthese directe du dimethyldichlorosilane |
NO166032C (no) * | 1988-12-08 | 1991-05-22 | Elkem As | Fremgangsmaate ved fremstilling av triklormonosilan. |
DE4303766A1 (de) * | 1993-02-09 | 1994-08-11 | Wacker Chemie Gmbh | Verfahren zur Herstellung von Methylchlorsilanen |
JP3159029B2 (ja) * | 1996-01-12 | 2001-04-23 | 信越化学工業株式会社 | シラン類の製造方法 |
EP1055675B1 (en) * | 1999-05-27 | 2003-05-21 | General Electric Company | Method for making alkylhalosilanes |
JP3379513B2 (ja) * | 2000-05-24 | 2003-02-24 | 信越化学工業株式会社 | オルガノハロシランの製造方法 |
US7153991B2 (en) * | 2000-12-01 | 2006-12-26 | General Electric Company | Rochow-Müller direct synthesis using nanosized copper catalyst precursors |
JP3812642B2 (ja) * | 2001-02-14 | 2006-08-23 | 信越化学工業株式会社 | オルガノハロシランの製造方法 |
FR2887551B1 (fr) * | 2005-06-22 | 2008-02-15 | Rhodia Chimie Sa | Procede de synthese directe d'alkylhalogenosilanes |
CN102099363A (zh) * | 2008-06-04 | 2011-06-15 | 陶氏康宁公司 | 制备有机基卤代硅烷和卤代硅烷的改进 |
WO2013093234A1 (fr) * | 2011-12-19 | 2013-06-27 | Bluestar Silicones France | Procede de synthese directe d'alkylhalogenosilanes |
DE102012206439A1 (de) * | 2012-04-19 | 2013-10-24 | Wacker Chemie Ag | Polykristallines Siliciumgranulat und seine Herstellung |
DE102012207505A1 (de) * | 2012-05-07 | 2013-11-07 | Wacker Chemie Ag | Polykristallines Siliciumgranulat und seine Herstellung |
DE102013209604A1 (de) * | 2013-05-23 | 2014-11-27 | Wacker Chemie Ag | Verfahren zur Herstellung von Methylchlorsilanen |
WO2016018650A1 (en) * | 2014-08-01 | 2016-02-04 | Scm Metal Products, Inc. | Method for making alkylhalosilanes |
DE102014225460A1 (de) | 2014-12-10 | 2016-06-16 | Wacker Chemie Ag | Verfahren zur Direktsynthese von Methylchlorsilanen in Wirbelschichtreaktoren |
JP6766176B2 (ja) * | 2016-04-15 | 2020-10-07 | ワッカー ケミー アクチエンゲゼルシャフトWacker Chemie AG | 流動床プロセスにおけるオルガノクロロシランの製造方法 |
JP6874218B2 (ja) | 2017-10-05 | 2021-05-19 | ワッカー ケミー アクチエンゲゼルシャフトWacker Chemie AG | クロロシラン類の製造方法 |
-
2019
- 2019-06-14 EP EP19730778.8A patent/EP3880686B1/de active Active
- 2019-06-14 CN CN201980087279.2A patent/CN113286800A/zh active Pending
- 2019-06-14 KR KR1020217017036A patent/KR102662929B1/ko active IP Right Grant
- 2019-06-14 JP JP2021573959A patent/JP7374228B2/ja active Active
- 2019-06-14 US US17/429,652 patent/US20220119422A1/en active Pending
- 2019-06-14 WO PCT/EP2019/065735 patent/WO2020249237A1/de unknown
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH1059983A (ja) * | 1996-05-30 | 1998-03-03 | Wacker Chemie Gmbh | メチルクロロシランの直接合成法 |
Also Published As
Publication number | Publication date |
---|---|
CN113286800A (zh) | 2021-08-20 |
JP7374228B2 (ja) | 2023-11-06 |
KR20210089208A (ko) | 2021-07-15 |
WO2020249237A1 (de) | 2020-12-17 |
EP3880686B1 (de) | 2022-07-06 |
EP3880686A1 (de) | 2021-09-22 |
KR102662929B1 (ko) | 2024-05-03 |
US20220119422A1 (en) | 2022-04-21 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
US4500724A (en) | Method for making alkylhalosilanes | |
KR102407612B1 (ko) | 클로로실란의 제조 방법 | |
KR20110015653A (ko) | 유기할로실란과 할로실란을 제조하는 개선 방법 | |
USRE33452E (en) | Method for making alkylhalosilanes | |
JP7374228B2 (ja) | 構造最適化シリコン粒子を用いたメチルクロロシランの調製方法 | |
TWI723687B (zh) | 製備氯矽烷的方法 | |
TWI744873B (zh) | 用結構最適化的矽粒子製備氯矽烷的方法 | |
KR102676116B1 (ko) | 구조-최적화된 실리콘 입자로 트리클로로실란을 생성하는 방법 | |
KR102609337B1 (ko) | 클로로실란을 제조하는 방법 | |
JP7381605B2 (ja) | 構造が最適化されたシリコン粒子を有するトリクロロシランの製造方法 | |
CN111971253B (zh) | 制备氯硅烷的方法 | |
US11767335B2 (en) | Method for preparing organochlorosilanes |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20211213 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20221216 |
|
A131 | Notification of reasons for refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A131 Effective date: 20221223 |
|
A02 | Decision of refusal |
Free format text: JAPANESE INTERMEDIATE CODE: A02 Effective date: 20230428 |
|
A521 | Request for written amendment filed |
Free format text: JAPANESE INTERMEDIATE CODE: A523 Effective date: 20230823 |
|
A911 | Transfer to examiner for re-examination before appeal (zenchi) |
Free format text: JAPANESE INTERMEDIATE CODE: A911 Effective date: 20230901 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230929 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20231024 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7374228 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |