|
US4249244A
(en)
*
|
1978-05-03 |
1981-02-03 |
Ppm, Inc. |
Electro-optical system and method and apparatus for providing automatically-compensating, traceable calibration and zeroing for light scattering devices
|
|
US4226533A
(en)
*
|
1978-09-11 |
1980-10-07 |
General Electric Company |
Optical particle detector
|
|
US4362387A
(en)
*
|
1980-08-22 |
1982-12-07 |
Rockwell International Corporation |
Method and apparatus for measuring visibility from the polarization properties of the daylight sky
|
|
US4854705A
(en)
*
|
1988-04-05 |
1989-08-08 |
Aerometrics, Inc. |
Method and apparatus to determine the size and velocity of particles using light scatter detection from confocal beams
|
|
JP2722362B2
(ja)
*
|
1992-03-27 |
1998-03-04 |
三井金属鉱業株式会社 |
粒子または欠陥の大きさ情報の測定方法および装置
|
|
US5741298A
(en)
|
1995-04-28 |
1998-04-21 |
Macleod; Cathel |
Method and devices for video-assisted surgical techniques
|
|
US6091494A
(en)
*
|
1999-05-25 |
2000-07-18 |
Venturedyne, Ltd. |
Particle sensor with cooled light trap and related method
|
|
US6326608B1
(en)
|
1999-07-09 |
2001-12-04 |
Chung-Shan Institute Of Science And Technology |
Polarization-type laser detection system
|
|
US6633831B2
(en)
*
|
2000-09-20 |
2003-10-14 |
Kla Tencor Technologies |
Methods and systems for determining a critical dimension and a thin film characteristic of a specimen
|
|
US6825437B2
(en)
*
|
2001-01-17 |
2004-11-30 |
Hitachi, Ltd. |
Apparatus enabling particle detection utilizing wide view lens
|
|
US8072584B2
(en)
|
2002-08-02 |
2011-12-06 |
Ophir Corporation |
Optical air data systems and methods
|
|
JP3720799B2
(ja)
*
|
2002-10-02 |
2005-11-30 |
神栄株式会社 |
花粉センサ
|
|
JP2004233078A
(ja)
*
|
2003-01-28 |
2004-08-19 |
Japan Atom Energy Res Inst |
大気中に浮遊する微粒子等の個数、粒径分布等を遠隔において計測するリモートパーティクルカウンター装置
|
|
KR100576364B1
(ko)
|
2003-11-21 |
2006-05-03 |
삼성전자주식회사 |
시편 검사장치의 기준값설정장치 및 이를 이용한 기준값설정방법
|
|
US7623234B2
(en)
*
|
2004-03-22 |
2009-11-24 |
Quantaspec, Inc. |
System and method for detecting and identifying an analyte
|
|
CA2883638C
(en)
*
|
2004-11-12 |
2017-06-20 |
Xtralis Technologies Ltd |
Particle detector, system and method
|
|
KR100684903B1
(ko)
*
|
2005-07-15 |
2007-02-20 |
삼성전자주식회사 |
반도체 제조 장치 및 파티클 모니터링 방법
|
|
CA2993208C
(en)
*
|
2007-11-15 |
2021-01-26 |
Garrett Thermal Systems Limited |
Particle detection
|
|
EP2252871A2
(en)
*
|
2008-02-01 |
2010-11-24 |
Cambridge Consultants Limited |
Device and method for measuring scattering of radiation
|
|
WO2010124347A1
(en)
*
|
2009-05-01 |
2010-11-04 |
Xtralis Technologies Ltd |
Improvements to particle detectors
|
|
US8351035B2
(en)
*
|
2009-05-12 |
2013-01-08 |
Thermo Fisher Scientific Inc. |
Particulate detection and calibration of sensors
|
|
US8988673B2
(en)
*
|
2010-03-23 |
2015-03-24 |
Ophir-Spiricon, Llc |
Beam scattering laser monitor
|
|
JP2012137350A
(ja)
*
|
2010-12-27 |
2012-07-19 |
Hitachi High-Technologies Corp |
欠陥検査方法および欠陥検査装置
|
|
US8960909B2
(en)
*
|
2012-01-20 |
2015-02-24 |
Canon Kabushiki Kaisha |
Control apparatus and control method
|
|
WO2017060164A1
(en)
*
|
2015-10-08 |
2017-04-13 |
Koninklijke Philips N.V. |
Optical sensor for particle detection
|
|
JP6862255B2
(ja)
|
2017-04-12 |
2021-04-21 |
キヤノン株式会社 |
撮像装置、撮像方法および撮像プログラム
|