JP2022520343A - ダイシングテープ用粘着組成物およびこれを含むダイシングテープ - Google Patents
ダイシングテープ用粘着組成物およびこれを含むダイシングテープ Download PDFInfo
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Abstract
Description
本発明の効果は上述した効果に限定されるものではなく、言及されていない効果は本明細書および添付した図面から当業者に明確に理解されるであろう。
(1)ダイボンディングフィルムの製造
高分子量アクリル樹脂(Tg20℃、重量平均分子量85万)90gとエポキシ樹脂(ノボラック型エポキシ樹脂、軟化点94℃)30g、エポキシ樹脂の硬化剤としてフェノール樹脂(フェノールノボラック樹脂、軟化点94℃)20g、中温開始硬化促進剤(2-メチルイミダゾール)0.1g、高温開始硬化促進剤(2-フェニル-4-メチル-イミダゾール)0.5g、充填剤としてシリカ(平均粒径75nm)20gからなる組成物とメチルエチルケトンを撹拌混合した。
アクリル系ベース樹脂の主鎖にアクリレート官能基を側鎖として20wt%付加した高分子樹脂(Mw700,000)100gに、TDI系イソシアネート硬化剤約3g、光開始剤(Irgacure184)約6g、およびトリフェニルホスフィン(TCI社、>95%、Mw262.29g/mol)約3.5gを混合して、粘着剤組成物を製造した。
前記製造されたダイシングテープに、円形に切断されたダイボンディングフィルムを5kgf/cm2の条件で貼り合わせにより転写した後、ダイシングダイボンディングフィルムを製造した。
ダイシングテープの製造時、トリフェニルホスフィン6.9gを用いたことを除けば、実施例1と同様の方法でダイシングダイボンディングフィルムを製造した。
ダイシングテープの製造時、トリフェニルホスフィン13.8gを用いたことを除けば、実施例1と同様の方法でダイシングダイボンディングフィルムを製造した。
ダイシングテープの製造時、トリフェニルホスフィンを用いないことを除けば、実施例1と同様の方法でダイシングダイボンディングフィルムを製造した。
ダイシングテープの製造時、トリフェニルホスフィン0.35gを用いたことを除けば、実施例1と同様の方法でダイシングダイボンディングフィルムを製造した。
ダイシングテープの製造時、トリフェニルホスフィン20gを用いたことを除けば、実施例1と同様の方法でダイシングダイボンディングフィルムを製造した。
前記実施例および比較例のダイシングダイボンディングフィルムに対して下記の方法で物性を評価し、その結果を表1に示した。
前記実施例および比較例で製造されたダイシングダイボンディングフィルムを幅25mmとなるようにカッティングして粘着力測定サンプルを用意した。
前記実験例1で得られた初期粘着力と酸素曝露条件における粘着力を用いて粘着力が減少した比率を計算した後、その結果値を表1に示した。
前記実施例および比較例で製造されたダイシングダイボンディングフィルムの離型フィルムを剥がした後、ダイボンディングの面をミラーウエハ(8インチ、厚さ35μm)に温度70℃でマウンティングした後、チップの大きさが13.3mm×9.1mmとなるように下記の条件でダイシングを実施した。
機器:DFD-6361(DISCO)
ブレードタイプ:27HEBB(DISCO)
カッティングブレード高さ(cut depth):80μm
ダイシングスピード:15mm/s
ブレード回転数:45,000rpm
機器:SPA-400(SHINKAWA)
エキスパンディング高さ:3.5mm
ニードル数:20本
ニードル穿刺高さ(needle plunge up height):0.2mm
ニードル穿刺速度(needle plunge up speed):10mm/s
前記実施例および比較例で製造されたダイシングダイボンディングフィルムのオンセット温度(On Set Temperature)およびピーク温度(Peak Temperature)を示差走査熱計量法(Differnetial Scanning Analysis、DSC)で測定した。具体的には、前記実施例および比較例で製造されたダイシングダイボンディングフィルムをオーブンを用いて60℃で3時間エージングさせた後、ダイシングテープを剥がした。そして、ダイシングダイボンディングフィルム層に対して約5mgの試料を分け取った。以後、前記試料に対して、DSC(Differential Scanning Calorimeter、DSCQ2000、TA Instrument社)を用いて、約5mgの試料を-40℃~300℃の温度範囲にて加熱速度10℃に昇温して、ピークの形成される温度とピーク温度との間の変曲点での傾きがX軸と接する温度であるオンセット温度およびピークの最大値での温度であるピーク温度を測定した。前記測定されたオンセット温度(On Set Temperature)およびピーク温度(Peak Temperature)は下記表1にまとめた。
Claims (11)
- 粘着バインダー、還元剤、および光開始剤を含む、
ダイシングテープ用粘着組成物。 - 前記粘着バインダーは、-28℃~-58℃のガラス転移温度を有する(メタ)アクリレート系樹脂を含む、
請求項1に記載のダイシングテープ用粘着組成物。 - 前記(メタ)アクリレート系樹脂は、(メタ)アクリル酸エステル系単量体および架橋性官能基含有単量体の共重合体を含む、
請求項2に記載のダイシングテープ用粘着組成物。 - 前記還元剤は、
リン系還元剤、硫黄系還元剤、ホウ素系還元剤、およびこれらの組み合わせからなる群より選択された1つである、
請求項1から3のいずれか一項に記載のダイシングテープ用粘着組成物。 - 前記還元剤は、
トリフェニルホスフィン、トリフェニルホスファイト、トリオクチルホスフィン、3,9-ビス(オクタデシルオキシ)-2,4,8,10-テトラオキサ-3,9-ジホスファスピロ[5,5]ウンデカン(BOTDBU)、エチレンスルファイト(ETS)、ジメチルアミン-ボラン(Me2NH・BH3)、およびこれらの組み合わせからなる群より選択された1つである、
請求項4に記載のダイシングテープ用粘着組成物。 - 前記還元剤の含有量は、前記粘着バインダー100重量部に対して、0.5重量部以上15.0重量部以下である、
請求項1から5のいずれか一項に記載のダイシングテープ用粘着組成物。 - 前記光開始剤は、ベンゾインとそのアルキルエーテル類、アセトフェノン類、アントラキノン類、チオキサントン類、ケタール類、ベンゾフェノン類、α-アミノアセトフェノン類、アシルホスフィンオキシド類、オキシムエステル類、およびこれらの組み合わせからなる群より選択された1つである、
請求項1から6のいずれか一項に記載のダイシングテープ用粘着組成物。 - 前記粘着組成物は、硬化剤、溶媒、およびこれらの混合物から選択された1つをさらに含む、
請求項1から7のいずれか一項に記載のダイシングテープ用粘着組成物。 - 基材フィルムと、前記基材フィルムの少なくとも一面上に備えられた粘着層とを含み、
前記粘着層は、請求項1~8のいずれか1項に記載のダイシングテープ用粘着組成物を含む、
ダイシングテープ。 - 前記粘着層の初期粘着力に対する、酸素曝露条件の紫外線(UV)照射後の粘着力の減少率は、20%以上80%以下である、
請求項9に記載のダイシングテープ。 - 前記基材フィルムは、ポリオレフィンフィルム、ポリエステルフィルム、ポリカーボネートフィルム、ポリ塩化ビニルフィルム、ポリテトラフルオロエチレンフィルム、ポリブテンフィルム、ポリブタジエンフィルム、塩化ビニル共重合体フィルム、エチレン-酢酸ビニル共重合体フィルム、エチレン-プロピレン共重合体フィルム、およびエチレン-アルキルアクリレート共重合体フィルムからなる群より選択された1つの高分子フィルムである、
請求項9または10に記載のダイシングテープ。
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