JP2022506691A5 - - Google Patents

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Publication number
JP2022506691A5
JP2022506691A5 JP2021524231A JP2021524231A JP2022506691A5 JP 2022506691 A5 JP2022506691 A5 JP 2022506691A5 JP 2021524231 A JP2021524231 A JP 2021524231A JP 2021524231 A JP2021524231 A JP 2021524231A JP 2022506691 A5 JP2022506691 A5 JP 2022506691A5
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JP
Japan
Prior art keywords
detector
optical fiber
light
sensor
light beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2021524231A
Other languages
English (en)
Japanese (ja)
Other versions
JP2022506691A (ja
JP7532356B2 (ja
Filing date
Publication date
Application filed filed Critical
Priority claimed from PCT/EP2019/080107 external-priority patent/WO2020094572A1/en
Publication of JP2022506691A publication Critical patent/JP2022506691A/ja
Publication of JP2022506691A5 publication Critical patent/JP2022506691A5/ja
Application granted granted Critical
Publication of JP7532356B2 publication Critical patent/JP7532356B2/ja
Active legal-status Critical Current
Anticipated expiration legal-status Critical

Links

JP2021524231A 2018-11-05 2019-11-04 少なくとも1つの物体の位置を決定する検出器及び方法 Active JP7532356B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18204274 2018-11-05
EP18204274.7 2018-11-05
PCT/EP2019/080107 WO2020094572A1 (en) 2018-11-05 2019-11-04 Detector and method for determining a position of at least one object

Publications (3)

Publication Number Publication Date
JP2022506691A JP2022506691A (ja) 2022-01-17
JP2022506691A5 true JP2022506691A5 (enExample) 2022-11-14
JP7532356B2 JP7532356B2 (ja) 2024-08-13

Family

ID=64172339

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021524231A Active JP7532356B2 (ja) 2018-11-05 2019-11-04 少なくとも1つの物体の位置を決定する検出器及び方法

Country Status (6)

Country Link
US (1) US11892279B2 (enExample)
EP (1) EP3877725B1 (enExample)
JP (1) JP7532356B2 (enExample)
KR (1) KR20210088631A (enExample)
CN (1) CN112955710A (enExample)
WO (1) WO2020094572A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102562630B1 (ko) * 2021-04-13 2023-08-02 조선대학교산학협력단 기하 위상 렌즈를 기반으로 하는 색공초점 센서
CN114280774A (zh) * 2021-12-30 2022-04-05 深圳立仪科技有限公司 一种带光谱共焦测量功能的多功能装置

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654231B2 (ja) 1986-12-18 1994-07-20 株式会社ミツトヨ 非接触変位計
JPH0444285A (ja) 1990-06-08 1992-02-14 Omron Corp 半導体発光素子
JPH064611U (ja) * 1992-06-25 1994-01-21 株式会社キーエンス 光学式距離測定装置
US5790242A (en) 1995-07-31 1998-08-04 Robotic Vision Systems, Inc. Chromatic optical ranging sensor
DE102004022454B4 (de) * 2004-05-06 2014-06-05 Carl Mahr Holding Gmbh Messeinrichtung mit optischer Tastspitze
DE102008029459B4 (de) 2008-06-20 2011-07-14 MEL Mikroelektronik GmbH, 85386 Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
WO2014023344A1 (de) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Verbesserter chromatischer sensor und verfahren
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3222964B1 (en) 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
EP3542179B1 (en) 2016-11-17 2021-03-24 trinamiX GmbH Detector for optically detecting at least one object
JP6819376B2 (ja) 2017-03-14 2021-01-27 オムロン株式会社 変位計測装置
US11719818B2 (en) * 2017-03-16 2023-08-08 Trinamix Gmbh Detector for optically detecting at least one object

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