JP7532356B2 - 少なくとも１つの物体の位置を決定する検出器及び方法 - Google Patents

少なくとも１つの物体の位置を決定する検出器及び方法 Download PDF

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JP7532356B2
JP7532356B2 JP2021524231A JP2021524231A JP7532356B2 JP 7532356 B2 JP7532356 B2 JP 7532356B2 JP 2021524231 A JP2021524231 A JP 2021524231A JP 2021524231 A JP2021524231 A JP 2021524231A JP 7532356 B2 JP7532356 B2 JP 7532356B2
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detector
light
sensor
light beam
optical
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Japanese (ja)
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JP2022506691A (ja
JP2022506691A5 (enExample
Inventor
ファローフ，ゼバスティアン
モハン オーゲン，セラル
ゼント，ロベルト
ブルーダー，イングマル
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トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
JP2021524231A 2018-11-05 2019-11-04 少なくとも１つの物体の位置を決定する検出器及び方法 Active JP7532356B2 (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18204274 2018-11-05
EP18204274.7 2018-11-05
PCT/EP2019/080107 WO2020094572A1 (en) 2018-11-05 2019-11-04 Detector and method for determining a position of at least one object

Publications (3)

Publication Number Publication Date
JP2022506691A JP2022506691A (ja) 2022-01-17
JP2022506691A5 JP2022506691A5 (enExample) 2022-11-14
JP7532356B2 true JP7532356B2 (ja) 2024-08-13

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JP2021524231A Active JP7532356B2 (ja) 2018-11-05 2019-11-04 少なくとも１つの物体の位置を決定する検出器及び方法

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US (1) US11892279B2 (enExample)
EP (1) EP3877725B1 (enExample)
JP (1) JP7532356B2 (enExample)
KR (1) KR20210088631A (enExample)
CN (1) CN112955710A (enExample)
WO (1) WO2020094572A1 (enExample)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102562630B1 (ko) * 2021-04-13 2023-08-02 조선대학교산학협력단 기하 위상 렌즈를 기반으로 하는 색공초점 센서
CN114280774A (zh) * 2021-12-30 2022-04-05 深圳立仪科技有限公司 一种带光谱共焦测量功能的多功能装置

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007536535A (ja) 2004-05-06 2007-12-13 カール マール ホールディング ゲーエムベーハー 光プローブチップを有する測定装置
WO2018167215A1 (en) 2017-03-16 2018-09-20 Trinamix Gmbh Detector for optically detecting at least one object
JP2018151282A (ja) 2017-03-14 2018-09-27 オムロン株式会社 変位計測装置

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654231B2 (ja) 1986-12-18 1994-07-20 株式会社ミツトヨ 非接触変位計
JPH0444285A (ja) 1990-06-08 1992-02-14 Omron Corp 半導体発光素子
JPH064611U (ja) * 1992-06-25 1994-01-21 株式会社キーエンス 光学式距離測定装置
US5790242A (en) 1995-07-31 1998-08-04 Robotic Vision Systems, Inc. Chromatic optical ranging sensor
DE102008029459B4 (de) 2008-06-20 2011-07-14 MEL Mikroelektronik GmbH, 85386 Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
WO2014023344A1 (de) * 2012-08-07 2014-02-13 Carl Zeiss Industrielle Messtechnik Gmbh Verbesserter chromatischer sensor und verfahren
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3222964B1 (en) 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
EP3542179B1 (en) 2016-11-17 2021-03-24 trinamiX GmbH Detector for optically detecting at least one object

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007536535A (ja) 2004-05-06 2007-12-13 カール マール ホールディング ゲーエムベーハー 光プローブチップを有する測定装置
JP2018151282A (ja) 2017-03-14 2018-09-27 オムロン株式会社 変位計測装置
WO2018167215A1 (en) 2017-03-16 2018-09-20 Trinamix Gmbh Detector for optically detecting at least one object

Also Published As

Publication number Publication date
EP3877725A1 (en) 2021-09-15
KR20210088631A (ko) 2021-07-14
WO2020094572A1 (en) 2020-05-14
US20220042785A1 (en) 2022-02-10
JP2022506691A (ja) 2022-01-17
US11892279B2 (en) 2024-02-06
EP3877725B1 (en) 2025-07-23
CN112955710A (zh) 2021-06-11

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