CN112955710A - 用于确定至少一个对象的位置的探测器和方法 - Google Patents

用于确定至少一个对象的位置的探测器和方法 Download PDF

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Publication number
CN112955710A
CN112955710A CN201980072964.8A CN201980072964A CN112955710A CN 112955710 A CN112955710 A CN 112955710A CN 201980072964 A CN201980072964 A CN 201980072964A CN 112955710 A CN112955710 A CN 112955710A
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CN
China
Prior art keywords
detector
optical sensor
light beam
optical
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980072964.8A
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English (en)
Chinese (zh)
Inventor
S·瓦鲁施
C·M·奥古恩
R·森德
I·布鲁德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TrinamiX GmbH
Original Assignee
TrinamiX GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TrinamiX GmbH filed Critical TrinamiX GmbH
Publication of CN112955710A publication Critical patent/CN112955710A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/002—Measuring arrangements characterised by the use of optical techniques for measuring two or more coordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/03—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring coordinates of points
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B2210/00—Aspects not specifically covered by any group under G01B, e.g. of wheel alignment, caliper-like sensors
    • G01B2210/50—Using chromatic effects to achieve wavelength-dependent depth resolution
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/08—Optical fibres; light guides

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Length Measuring Devices By Optical Means (AREA)
CN201980072964.8A 2018-11-05 2019-11-04 用于确定至少一个对象的位置的探测器和方法 Pending CN112955710A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18204274 2018-11-05
EP18204274.7 2018-11-05
PCT/EP2019/080107 WO2020094572A1 (en) 2018-11-05 2019-11-04 Detector and method for determining a position of at least one object

Publications (1)

Publication Number Publication Date
CN112955710A true CN112955710A (zh) 2021-06-11

Family

ID=64172339

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980072964.8A Pending CN112955710A (zh) 2018-11-05 2019-11-04 用于确定至少一个对象的位置的探测器和方法

Country Status (6)

Country Link
US (1) US11892279B2 (enExample)
EP (1) EP3877725B1 (enExample)
JP (1) JP7532356B2 (enExample)
KR (1) KR20210088631A (enExample)
CN (1) CN112955710A (enExample)
WO (1) WO2020094572A1 (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023124023A1 (zh) * 2021-12-30 2023-07-06 深圳立仪科技有限公司 一种带光谱共焦测量功能的多功能装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102562630B1 (ko) * 2021-04-13 2023-08-02 조선대학교산학협력단 기하 위상 렌즈를 기반으로 하는 색공초점 센서

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5790242A (en) * 1995-07-31 1998-08-04 Robotic Vision Systems, Inc. Chromatic optical ranging sensor
DE102004022454A1 (de) * 2004-05-06 2005-12-01 Carl Mahr Holding Gmbh Messeinrichtung mit optischer Tastspitze
DE102008029459A1 (de) * 2008-06-20 2010-02-04 Mel Mikroelektronik Gmbh Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
CN104520669A (zh) * 2012-08-07 2015-04-15 卡尔蔡司工业测量技术有限公司 用于测量测量对象的测量装置、设备及方法

Family Cites Families (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0654231B2 (ja) 1986-12-18 1994-07-20 株式会社ミツトヨ 非接触変位計
JPH0444285A (ja) 1990-06-08 1992-02-14 Omron Corp 半導体発光素子
JPH064611U (ja) * 1992-06-25 1994-01-21 株式会社キーエンス 光学式距離測定装置
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3222964B1 (en) 2016-03-25 2020-01-15 Fogale Nanotech Chromatic confocal device and method for 2d/3d inspection of an object such as a wafer
EP3542179B1 (en) 2016-11-17 2021-03-24 trinamiX GmbH Detector for optically detecting at least one object
JP6819376B2 (ja) 2017-03-14 2021-01-27 オムロン株式会社 変位計測装置
US11719818B2 (en) * 2017-03-16 2023-08-08 Trinamix Gmbh Detector for optically detecting at least one object

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5790242A (en) * 1995-07-31 1998-08-04 Robotic Vision Systems, Inc. Chromatic optical ranging sensor
DE102004022454A1 (de) * 2004-05-06 2005-12-01 Carl Mahr Holding Gmbh Messeinrichtung mit optischer Tastspitze
CN1950670A (zh) * 2004-05-06 2007-04-18 卡尔·马尔控股有限公司 具有光学探针的测量设备
DE102008029459A1 (de) * 2008-06-20 2010-02-04 Mel Mikroelektronik Gmbh Verfahren und Vorrichtung zur berührungslosen Abstandsmessung
CN104520669A (zh) * 2012-08-07 2015-04-15 卡尔蔡司工业测量技术有限公司 用于测量测量对象的测量装置、设备及方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2023124023A1 (zh) * 2021-12-30 2023-07-06 深圳立仪科技有限公司 一种带光谱共焦测量功能的多功能装置

Also Published As

Publication number Publication date
EP3877725A1 (en) 2021-09-15
KR20210088631A (ko) 2021-07-14
WO2020094572A1 (en) 2020-05-14
US20220042785A1 (en) 2022-02-10
JP2022506691A (ja) 2022-01-17
US11892279B2 (en) 2024-02-06
EP3877725B1 (en) 2025-07-23
JP7532356B2 (ja) 2024-08-13

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