JP2022155317A - Method for manufacturing joining tool, joining tool, and joining device - Google Patents

Abstract

To provide a method for manufacturing a joining tool suppressing change in characteristics of ultrasonic vibration due to displacement of a mounting position for a heater part.SOLUTION: A method for manufacturing a joining tool comprises: passing a stick-like jig into a fixation hole (S101); inserting the jig into a hollow part until the tip end part of the jig is engaged with a recessed part formed in the hollow part and having a center axis of the hollow part as a center (S102); making the center axis of the fixation hole and the center axis of the hollow part coincident with each other after inserting the jig into the hollow part (S103); fixing a fixation block to the base part (S104); detaching the jig from the fixation hole and the hollow part after fixing the fixation block (S105); passing a heater part into the fixation hole (S106); and fixing the heater part into the hollow part (S108) while inserting the heater part into the hollow part (S107).SELECTED DRAWING: Figure 5

Description

The present invention relates to a method for manufacturing a welding tool for manufacturing a bonded body by bonding an object to be welded to an object to be welded, the welding tool, and a welding apparatus having the welding tool.

2. Description of the Related Art Conventionally, a bonding apparatus that uses ultrasonic vibration or the like to bond an object to be bonded such as an electronic component to an object to be bonded such as a substrate includes a bonding tool (bonding tool) for bonding the object to be bonded to the object to be bonded. provided (see, for example, Patent Literature 1).

The bonding tool disclosed in Patent Document 1 includes an ultrasonic vibrator, a horn that transmits the ultrasonic vibration from the ultrasonic vibrator, and a bonding action part (nozzle part) and a heater that heats the bonding action part.

According to this, the electronic component can be ultrasonically bonded to the substrate or the like while being heated by the bonding tool.

Japanese Patent Application Laid-Open No. 2005-347507

The heater disclosed in Patent Document 1 is inserted into a mounting hole provided in the horn. Here, the inner diameter of the mounting hole is set slightly larger than the outer diameter of the heater so that the heater does not come into contact with the mounting hole. Therefore, if the mounting position of the heater is slightly misaligned, the heater may come into contact with the mounting hole, which may change the characteristics of the ultrasonic vibration applied to the electronic component.

SUMMARY OF THE INVENTION The present invention provides a method for manufacturing a welding tool, etc., capable of suppressing changes in the characteristics of ultrasonic vibration due to displacement of the attachment position of the heater section.

A method for manufacturing a welding tool according to an aspect of the present invention includes an ultrasonic transducer that generates ultrasonic vibration, the ultrasonic transducer is attached to one end, and a hollow portion is formed at the other end opposite to the one end. a formed horn, a nozzle portion provided between the one end and the other end to hold an object to be welded, a base portion to which the horn is attached, a fixing block having a fixing hole formed therein, and the nozzle and a heater unit for heating a portion of the bonding tool for bonding the object to be bonded and the object to be bonded, wherein a rod-shaped jig is passed through the fixing hole and formed in the hollow portion. The jig is inserted into the cavity until the tip of the jig is engaged with a recess centered on the central axis of the cavity, and after inserting the jig into the cavity, the The fixing block is fixed to the base portion by aligning the central axis of the fixing hole with the central axis of the hollow portion, and after fixing the fixing block, the jig is removed from the fixing hole and the hollow portion. It is removed, and the heater section is passed through the fixing hole and fixed in a state of being inserted into the hollow section.

In addition, a welding tool according to an aspect of the present invention includes an ultrasonic vibrator that generates ultrasonic vibrations, a horn to which the ultrasonic vibrator is attached at one end, the one end of the horn, and the one end opposite to the one end. a base portion to which the horn is attached; a fixing block formed with a fixing hole and fixed to the base portion; and the nozzle portion. the other end of the horn is formed with a hollow portion extending in the longitudinal direction of the horn and into which the heater portion is inserted; The heater portion is fixed to the horn while passing through the fixing hole and in a non-contact state.

Further, a welding apparatus according to an aspect of the present invention includes the welding tool described above, a holding section that holds the article to be welded, and the article to be welded held by the holding section by moving up and down the welding tool. and an elevating mechanism that joins the object to be joined held by the joining tool.

In addition, these comprehensive or specific aspects may be realized by a system, method, integrated circuit, computer program, or a recording medium such as a computer-readable CD-ROM. and any combination of recording media.

Advantageous Effects of Invention According to the present invention, it is possible to provide a method for manufacturing a welding tool, etc., capable of suppressing changes in the characteristics of ultrasonic vibration due to displacement of the attachment position of the heater section.

FIG. 1 is a schematic side view showing a joining device according to an embodiment. FIG. 2 is a perspective view showing the joining tool according to the embodiment. FIG. 3 is a perspective view showing the bonding tool according to the embodiment with the ultrasonic vibrator and the heater section removed. FIG. 4 is a cross-sectional view of a bonding tool according to an embodiment taken along line IV-IV of FIG. 3; FIG. 5 is a flow chart showing a method for manufacturing a welding tool according to the embodiment. FIG. 6 is a cross-sectional view showing a state in which a jig is inserted into the horn according to the embodiment. FIG. 7 is a cross-sectional view showing a state in which the heater section is inserted into the horn according to the embodiment. FIG. 8 is a diagram showing a specific example of temperature characteristics of a conventional welding tool. FIG. 9 is a diagram showing a specific example of vibration characteristics of a conventional welding tool.

Hereinafter, a method for manufacturing a welding tool according to an embodiment of the present invention, etc. will be described in detail with reference to the drawings. It should be noted that each of the embodiments described below is a specific example of the present invention. Therefore, the numerical values, shapes, materials, components, arrangement and connection of components, steps and order of steps, etc. shown in the following embodiments are examples and are not intended to limit the present invention. Therefore, among the constituent elements in the following embodiments, constituent elements that are not described in independent claims representing the highest level concept of the present invention will be described as optional constituent elements.

Also, each drawing is a schematic diagram, and the scale, dimensions, etc. are not necessarily strictly illustrated. Moreover, in each figure, the same code|symbol is attached|subjected about the same component.

In addition, in this specification and drawings, the X-axis, Y-axis, and Z-axis represent three axes of a three-dimensional orthogonal coordinate system. The X-axis and the Y-axis are orthogonal to each other and both orthogonal to the Z-axis. Moreover, in the following embodiments, the Z-axis positive direction may be described as upward and the Z-axis negative direction may be described as downward.

Further, in the following embodiments, the case where the joining device is viewed from a direction orthogonal to the Z-axis direction may be described as a side view.

Also, in the following description, expressions indicating states such as "match" and expressions indicating shapes such as rectangular parallelepipeds are used. For example, "matches" not only means to match completely, but also means to substantially match, that is, to include a difference of several percent. Further, for example, "rectangular parallelepiped" means not only a complete rectangular parallelepiped but also a substantially rectangular parallelepiped, that is, a shape such as a rectangular parallelepiped with rounded corners. The same applies to expressions indicating other states and shapes.

(Embodiment)
[Joining equipment]
A joining apparatus according to an embodiment will be described with reference to FIG.

FIG. 1 is a schematic side view showing a joining device 200 according to an embodiment.

The bonding apparatus 200 is a component mounting system for producing a display panel or the like. It is an apparatus for manufacturing a joined body 300 by joining 310 . Specifically, the welding apparatus 200 includes a welding tool 100 that vibrates ultrasonically. The joined body 300 is manufactured by mounting the object 310 on the joined surface 321 (specifically, the upper surface) of the joined object 320 .

Examples of the bonding target 310 include flexible substrates such as TCP (Tape Carrier Package) and FPC (Flexible Printed Circuits).

The object to be bonded 320 is, for example, a substrate such as a display panel.

The assembly 300 is, for example, a display panel on which electronic components are mounted.

Note that the object to be welded 310, the object to be welded 320, and the welded body 300 are not limited to the above examples.

The bonding apparatus 200 includes an elevating mechanism 10, a holding unit 30, a positioning table 40, a vacuum suction source 50, a suction pipe line 51, a vibrator driving unit 60, a fluid supply source 70, a computer 80, and a bonding a tool 100; The welding tool 100 includes a horn 110 , an ultrasonic transducer 120 , a nozzle section 130 , a heater section 140 , a base section 20 and a fixing block 170 . The horn 110 has a cooling section 150 .

The elevating mechanism 10 is a device for elevating the welding tool 100 . Specifically, the elevating mechanism 10 is a device that is movable in the vertical direction (the Z-axis direction in this embodiment), and is connected to a base portion 20 to which the welding tool 100 is attached. By moving 20 up and down, the welding tool 100 is moved up and down. The elevating mechanism 10 raises and lowers the welding tool 100 to join the object to be welded 320 held by the holding part 30 and the object to be welded 310 held by the welding tool 100 to the welding tool 100 . The lifting mechanism 10 is, for example, a cylinder.

The holding part 30 is a table that holds the object 320 to be welded. The holding unit 30 has, for example, a suction port (not shown) for vacuum suction, and holds the workpiece 320 by vacuum suction via the suction port.

Note that the holding part 30 may be a table that holds the article 320 by simply placing the article 320 thereon.

The positioning table 40 is a table on which the holding part 30 is placed. The positioning table 40 is configured to be movable, and by moving, moves the holding portion 30 positioned on the upper surface. The positioning table 40 is, for example, a multistage moving table, and moves the workpiece 320 held by the holding section 30 in the horizontal plane (in the XY plane in this embodiment) and in the vertical direction. Above the positioning table 40, the holding part 30 fixed to the positioning table 40, the welding tool 100, the base part 20 connected to the welding tool 100, and the lifting mechanism 10 to which the base part 20 is connected are arranged in this order. To position.

The vacuum suction source 50 is a device that vacuums air. A suction line 51 is connected to the vacuum suction source 50 .

The suction pipe line 51 is a pipe that connects the vacuum suction source 50 and the nozzle section 130 . The suction pipe line 51 is connected to the nozzle section 130 via the inside of the horn 110, for example. The vacuum suction source 50 vacuum-sucks the air in the suction pipe 51 to vacuum-suck the object 310 to be joined to the nozzle section 130 .

The transducer drive section 60 is a power supply section for vibrating the ultrasonic transducer 120 . For example, the transducer driving unit 60 is a power circuit electrically connected to the ultrasonic transducer 120, converts power from an external power source (not shown), etc., and supplies the ultrasonic transducer 120 with an ultrasonic wave. The vibrator 120 is vibrated.

Fluid supply source 70 is a device that supplies fluid for cooling to cooling portion 150 provided in horn 110 . The fluid is not particularly limited as long as it can cool the cooling unit 150, and may be liquid, gas, or the like. In the present embodiment, the fluid is air (more specifically, compressed air), and fluid supply source 70 is a gas supply source for supplying air to cooling section 150 .

A groove portion 160 including one or more grooves is provided in the cooling portion 150 . The fluid supply source 70 supplies air to one or more grooves included in the groove portion 160 to cool the cooling portion 150 .

The computer 80 is a control device (computer) for controlling the operation of the joining device 200 . The computer 80 can wirelessly communicate with the elevating mechanism 10, the positioning table 40, the vacuum suction source 50, the vibrator driving section 60, the fluid supply source 70, and the welding tool 100, or can communicate with the welding tool 100 using a control line or the like. It is connected and controls each device. The computer 80 includes a communication interface for communicating with each device, a nonvolatile memory storing a program, a volatile memory as a temporary storage area for executing the program, and an input/output port for transmitting and receiving signals. , a processor or the like that executes a program.

When the object to be welded 310 is to be welded to the surface to be welded 321 of the object to be welded 320, the computer 80 holds the object to be welded 320 in the holding section 30 and holds the object to be welded 310 by controlling the positioning table 40. The surface to be joined 321 is positioned below the nozzle portion 130 . Solder is applied in advance to a portion of the surface 321 to be joined where the object to be joined 310 is to be joined.

The computer 80 controls the positioning table 40 to position the surface 321 to be welded below the object 310 to be welded, and then controls the elevating mechanism 10 to lower the base portion 20 (that is, the welding tool 100). , the object to be welded 310 is pressed against the surface 321 to be welded.

Further, the computer 80 controls the vibrator drive section 60 , the fluid supply source 70 , and the heater section 140 so that the nozzle section 130 is heated by the heater section 140 and the compressed air from the fluid supply source 70 is supplied. While cooling the cooling part 150 by to prevent the heat from the heater part 140 from being transmitted to the ultrasonic oscillator 120, the ultrasonic oscillator 120 is operated to apply ultrasonic vibrations from the ultrasonic oscillator 120 to the horn 110. Give. As a result, the nozzle part 130 vibrates in the longitudinal direction of the horn 110 while sucking the welding object 310 in a heated state. Therefore, while the heat is transferred from the nozzle portion 130 to the object 310 to be welded, the pressing force against the surface 321 to be welded and the ultrasonic vibration act on the object 310 at the same time. Therefore, the object to be joined 310 is efficiently joined to the joint surface 321 by solder.

[Joining tool]
Next, the welding tool 100 will be described in detail.

FIG. 2 is a perspective view showing the welding tool 100 according to the embodiment. FIG. 3 is a perspective view showing the welding tool 100 according to the embodiment with the ultrasonic transducer 120 and the heater section 140 removed. FIG. 4 is a cross-sectional view of the bonding tool 100 according to an embodiment taken along line IV-IV of FIG.

4, a part of the cross section of the welding tool 100 taken along line IV-IV of FIG. 3 is shown in an enlarged manner, and illustration of the heater section 140 is omitted.

The welding tool 100 is a welding tool for welding an object 320 to be welded and an object 310 to be welded. Specifically, the welding tool 100 is a tool for ultrasonically welding the object 310 to be welded to the object 320 to be welded. The welding tool 100 includes a horn 110 , an ultrasonic transducer 120 , a nozzle section 130 , a heater section 140 , a base section 20 and a fixing block 170 .

The horn 110 is an ultrasonic horn for transmitting ultrasonic vibrations generated by the ultrasonic vibrator 120 to the nozzle part 130 . The horn 110 has an elongated shape (in other words, a bar shape). In the present embodiment, horn 110 has a rectangular parallelepiped shape and extends in the X-axis direction.

Note that the shape of the horn 110 is not particularly limited, and may be cylindrical or the like, and may be other than a rectangular parallelepiped shape.

The horn 110 is made of, for example, an elastic material such as metal. The horn 110 is connected to the base portion 20 and maintained in a horizontally extending posture.

Four connecting portions 113 projecting laterally from both side surfaces of horn 110 are provided at an intermediate portion in the longitudinal direction (X-axis direction in this embodiment) of horn 110 . Each of the four connecting portions 113 is provided with a bolt hole penetrating vertically. A connection bolt (not shown) is inserted into the bolt hole from below. The connecting bolt is screwed into a screw hole opened on the lower surface of the base portion 20 . The horn 110 is thereby attached to the base portion 20 .

Both ends of the horn 110 are free ends. The ultrasonic transducer 120 is attached to one of the two free ends of the horn 110 (in this embodiment, the end located in the positive direction of the X axis), and the heater section 140 generates ultrasonic waves. It is attached to the other end side opposite to vibrator 120 (the end portion located in the negative direction of the X-axis in the present embodiment). In other words, the one end side is the side on which the ultrasonic transducer 120 is arranged in the longitudinal direction of the horn 110 , and the other end side is the side on which the heater section 140 is arranged in the longitudinal direction of the horn 110 . Nozzle portion 130 is arranged in the central portion of horn 110 in the longitudinal direction. A cooling portion 150 is provided in a portion of the horn 110 positioned between the nozzle portion 130 and the ultrasonic transducer 120 .

The cooling unit 150 is provided in the horn 110 and is a cooling mechanism for suppressing the transmission of heat from the heater unit 140 to the ultrasonic transducer 120 . The cooling section 150 has a groove section 160 .

The groove portion 160 is a groove portion including one or more grooves (slits) formed in the horn 110 (more specifically, the cooling portion 150). A fluid such as compressed air is supplied from the fluid supply source 70 to the groove 160 . Accordingly, the cooling portion 150 is cooled by the fluid flowing into the groove portion 160 .

The one or more grooves included in the groove portion 160 may be one or plural. Further, each of the one or more grooves may be a through hole or a non-through hole (that is, a recess with a bottom).

An ultrasonic vibrator 120 is attached to one end of the horn 110 in the longitudinal direction (in this embodiment, the end on the X-axis positive direction side), and the other end opposite to the one end (in this embodiment, , the end on the negative side of the X axis), a hollow portion 111 is formed, a heater portion 140 is provided, and a nozzle portion 130 is provided between the one end and the other end.

The ultrasonic transducer 120 is an ultrasonic transducer that generates ultrasonic vibrations. Specifically, the ultrasonic transducer 120 is provided on one end side of the horn 110 in the longitudinal direction of the horn 110 and imparts vibration to the horn 110 . For example, the ultrasonic vibrator 120 operates by being supplied with power from the vibrator driving section 60 and imparts ultrasonic vibrations to the horn 110 .

The ultrasonic vibrator 120 applies ultrasonic vibration to the horn 110 to vibrate the horn 110 in the longitudinal direction (longitudinal vibration) of the horn 110 and generate a standing wave in the horn 110 .

Since both ends of the horn 110 are free ends, they become antinodes of standing waves generated in the horn 110 . The horn 110 has a fundamental vibration having one standing wave node between two antinodes (that is, two free ends), or , produces a harmonic mode of vibration with multiple (eg, two) nodes between the two antinodes. For example, the ultrasonic vibration applied to the horn 110 from the ultrasonic transducer 120 generates a standing wave in the vibration mode of the fundamental vibration in the horn 110 .

The size of the cooling part 150 is determined from the size of the horn 110, the desired resonance frequency, the shape of the cooling part 150, and the like, to ensure cooling performance that satisfies the temperature resistance of the ultrasonic transducer 120. FIG.

The ultrasonic transducer 120 is arranged to be fitted in a concave portion 161 provided in the cooling portion 150 .

The nozzle part 130 is a nozzle that is provided between one end side of the horn 110 and the other end side opposite to the one end side and holds the object 310 to be welded. Specifically, the nozzle part 130 sucks the object to be welded 310 and welds it to the object to be welded 320 . Further, in the present embodiment, the nozzle portion 130 is attached to the horn 110 at the central portion in the longitudinal direction of the horn 110 and below the horn 110 .

The nozzle section 130 is connected to the vacuum suction source 50 via a suction pipe line 51 . As a result, the vacuum suction source 50 is actuated, and the nozzle section 130 vacuum-sucks the bonding target 310 .

In addition, in the present embodiment, the shape of the nozzle portion 130 is a flat plate shape in which a grid-like suction port is formed in a plan view, but the shape is not particularly limited.

Further, the nozzle portion 130 may be provided between one end side of the horn 110 and the other end side opposite to the one end side. It may be provided or may be provided closer to the other end.

The heater section 140 is a heater for heating the nozzle section 130 . In the present embodiment, heater section 140 is arranged at the end of horn 110 (the other end described above), and heats nozzle section 130 via horn 110 . The heater section 140 is fixed while being inserted into the hollow section 111 . Further, the heater section 140 inserted into the hollow section 111 is fixed to the horn 110 in a non-contact state while passing through the fixing hole 171 . For example, the heater section 140 is fixed to the fixing block 170 using screws (not shown) or the like.

Note that the heater section 140 may be fixed to a member whose position is fixed, such as a bracket (not shown), instead of the fixed block 170 .

In addition to the heater for heating the nozzle section 130, the heater section 140 may include a thermometer such as a thermocouple for measuring temperature.

Further, the heater section 140 inserted into the hollow section 111 is fixed so as not to reach the concave section 112, for example. In other words, for example, the heater section 140 is not arranged in the recess 112 . That the heater section 140 does not reach the recess 112 means, for example, that the heater section 140 is not arranged in the space 401 shown in FIG. 4 formed by the recess 112 . Specifically, the heater section 140 is arranged in the space 400 shown in FIG. Fixed.

The base portion 20 is a connecting member that connects the lifting mechanism 10 and the welding tool 100 . Specifically, a horn 110 is attached to the base portion 20 . Also, the base portion 20 is attached to the lifting mechanism 10 with the horn 110 attached.

A fixed block 170 is attached to the base portion 20 .

The fixing block 170 is a member for fixing the heater section 140 at an appropriate position. The fixed block 170 is fixed to the base portion 20 after being aligned as described below.

A fixing hole 171 , a support hole 172 and an adjustment hole 173 are formed in the fixing block 170 .

The fixing hole 171 is a through hole through which the heater section 140 is passed (inserted). Fixing hole 171 extends in the longitudinal direction of horn 110 when fixing block 170 is fixed to base portion 20 .

The fixing hole 171 is, for example, cylindrical. The fixing block 170 is fixed to the base portion 20 so that the axial direction of the central axis of the cylinder is parallel to the longitudinal direction (extending direction) of the horn 110 . A cavity 111 formed in the horn 110 is positioned in the extending direction of the fixing hole 171 .

Cavity 111 is a hole formed at the other end of horn 110 (on the negative side of the X-axis in the present embodiment) and in which heater 140 is arranged. The hollow portion 111 is formed, for example, in a cylindrical shape. Cavity 111 is formed in horn 110 such that the axial direction of the central axis of the cylinder is parallel to the longitudinal direction of horn 110 . In other words, the extending direction of the hollow portion 111 may be the lateral direction of the horn 110, but is, for example, the longitudinal direction of the horn 110 as in the present embodiment. Thus, the other end of the horn 110 is formed with a hollow portion 111 extending in the longitudinal direction of the horn 110 and into which the heater portion 140 is inserted.

Further, as shown in FIG. 4 , the central axis of fixing hole 171 coincides with the central axis of hollow portion 111 . In other words, when viewed from the central axis direction, the center of the fixing hole 171 and the center of the hollow portion 111 are aligned.

When viewed from the central axis direction, the diameter of fixing hole 171 and the diameter of hollow portion 111 may be the same or different. In the present embodiment, the diameter of fixing hole 171 is larger than the diameter of hollow portion 111 when viewed from the central axis direction. In other words, when viewed from the central axis direction, for example, the hollow portion 111 is included in the fixing hole 171 .

Moreover, although the hollow portion 111 may be a through hole, it is a non-through hole in the present embodiment. That is, for example, cavity 111 does not penetrate horn 110 .

Further, the hollow portion 111 may reach the nozzle portion 130 , but from the viewpoint of vibration characteristics of the horn 110 , it is preferable that the hollow portion 111 does not reach the nozzle portion 130 .

A concave portion 112 is formed at the end portion of the hollow portion 111 on the positive side of the X axis.

The concave portion 112 is a groove formed in the hollow portion 111 and engaged with a jig 180 (see FIG. 6), which will be described later, when the welding tool 100 is manufactured. Specifically, recess 112 is formed on the surface (inner side surface 114 ) of cavity 111 of horn 110 on the positive X-axis side of cavity 111 .

The concave portion 112 is formed, for example, in a cylindrical shape. Specifically, recess 112 is formed in horn 110 such that the axial direction of the central axis of the cylinder is parallel to the longitudinal direction of horn 110 .

Also, the center of the concave portion 112 coincides with the center of the hollow portion 111 . Specifically, when the concave portion 112 is viewed from the central axis direction of the hollow portion 111 , the center of the concave portion 112 coincides with the center of the hollow portion 111 .

When viewed from the central axis direction, for example, the diameter of the recess 112 is smaller than the diameter of the cavity 111 . In other words, when viewed from the central axis direction, for example, the recessed portion 112 is included in the hollow portion 111 .

In this manner, the central axis of fixing hole 171, the central axis of cavity 111, and the central axis of recess 112 are arranged to match.

In the present embodiment, fixing hole 171, hollow portion 111, and recessed portion 112 are each circular when viewed from the central axis direction, but they may be oval, rectangular, or any other shape. In this way, when the fixing hole 171, the cavity 111 and the recess 112 are not circular, for example, the central axis is the axis extending in the direction in which the fixing hole 171, the cavity 111 and the recess 112 extend. is the axis passing through the center of the ellipse, rectangle, etc.

When viewed from the central axis direction, the fixing hole 171, the hollow portion 111, and the recess 112 only need to have the same center position (that is, the centers may overlap), and the fixing hole 171, The shapes of the cavity 111 and the recess 112 may be the same or different.

Moreover, when viewed from the central axis direction, the diameter of the recessed portion 112 and the diameter of the hollow portion 111 may be the same.

The support hole 172 is a through hole for supporting (fixing) the fixing block 170 to the base portion 20 . After the fixing block 170 is placed at an appropriate position as described later, a screw or the like (not shown) is passed through the support hole 172 . The screw is, for example, further engaged (for example, screwed) in an engaging groove formed in the base portion 20 . Thereby, the fixed block 170 is fixed to the base portion 20 .

In addition, the inner surface of the support hole 172 may be formed with a screw groove to be screwed with a screw or the like. In this embodiment, the fixed block 170 is formed with two support holes 172, but the number of the support holes 172 formed in the fixed block 170 may be one or more. Not limited.

The adjustment hole 173 is a through hole for fixing the heater section 140 passed through the fixing hole 171 at an appropriate position. The adjustment hole 173 extends, for example, in a direction intersecting the extending direction of the fixing hole 171 and communicates with the fixing hole 171 . For example, two adjustment holes 173 are formed in the fixing block 170 so as to face each other and extend in parallel directions. A screw or the like (not shown) is passed through each of the two adjustment holes 173 . The screws are fixed so as to sandwich the heater section 140, for example. Thereby, the heater section 140 is fixed at an appropriate position by, for example, a fixing block 170 (more specifically, a screw passed through the adjustment hole 173).

The inner surface of the adjustment hole 173 may be formed with a thread groove that engages with a screw or the like. In this embodiment, fixed block 170 has two adjustment holes 173. However, the number of adjustment holes 173 formed in fixed block 170 may be one or more. Not limited.

The material used for the base portion 20 and the fixed block 170 may be the same material as the horn 110 or a different material, and is not particularly limited.

The joining apparatus 200 including the joining tool 100 configured as described above manufactures the joined body 300 according to the following procedure, for example, by controlling each device with the computer 80 .

First, the object to be bonded 320 is held by the holding portion 30 . For example, the holding unit 30 holds the object to be bonded 320 placed on the holding unit 30 by vacuum suction using a transfer arm or the like (not shown).

Next, the object to be welded 310 is held by the nozzle portion 130 . The lifting mechanism 10 is fixed to, for example, a stage that can move in the XY plane. The computer 80 controls the stage, the elevating mechanism 10 and the vacuum suction source 50 to cause the nozzle section 130 to vacuum-suck the bonding target 310 .

Next, ultrasonic vibration is applied to the object to be joined 310 by the ultrasonic vibrator 120 . More specifically, by ultrasonically vibrating the horn 110 in the longitudinal direction of the horn 110 using the ultrasonic vibrator 120 , the workpiece 310 held by the nozzle portion 130 connected to the horn 110 is moved by the horn 110 . ultrasonically vibrate in the longitudinal direction.

Further, the heater section 140 heats the nozzle section 130 . More specifically, the object to be welded 310 held by the nozzle section 130 is heated by the heater section 140 via the horn 110 and the nozzle section 130 .

Next, the bonded object 300 is manufactured by ultrasonically bonding the bonding target 310 to the bonding target 320 . More specifically, the object to be welded 310 is ultrasonically vibrated in the longitudinal direction of the horn 110 while the object to be welded 310 is pressed against the surface 321 to be welded. As a result, the pressing force to the surface to be welded 321 and the ultrasonic vibration act on the object to be welded 310 at the same time, and the object to be welded 310 is welded to the surface to be welded 321 . As a result, the bonded body 300 can be manufactured.

[Manufacturing method of joining tool]
Next, a method for manufacturing the welding tool 100 according to the embodiment will be described.

FIG. 5 is a flow chart showing a method for manufacturing the welding tool 100 according to the embodiment.

First, the horn 110 provided with the nozzle portion 130 in the center portion is attached to the base portion 20, the fixing block 170 which is not yet fixed to the base portion 20 is prepared, and the fixing hole 171 formed in the fixing block 170 is fixed. The tool 180 is inserted (S101).

Next, the jig 180 inserted through the fixing hole 171 is further inserted into the hollow portion 111 until the distal end portion 181 of the jig 180 engages with the concave portion 112 (S102).

FIG. 6 is a cross-sectional view showing a state in which jig 180 is inserted into horn 110 according to the embodiment.

By executing steps S101 and S102 shown in FIG. 5, the jig 180 is arranged as shown in FIG.

The jig 180 is a bar-shaped jig for positioning the fixed block 170 and the horn 110 . Specifically, the jig 180 is a jig for aligning (matching) the central axis of the fixing hole 171 formed in the fixing block 170 and the central axis of the cavity 111 formed in the horn 110 . The jig 180 has, for example, a shape in which the tip 181 engages with the recess 112 . Moreover, the jig 180 has a shape that engages with the fixing hole 171 when the tip portion 181 is engaged with the recess 112 .

As a result, when the jig 180 is inserted through the fixing block 170 and further inserted into the hollow portion 111 and engaged with the concave portion 112 , the fixing block 170 and the horn 110 are aligned according to the jig 180 . will be Specifically, when the jig 180 is inserted through the fixing block 170 , further inserted into the hollow portion 111 and engaged with the concave portion 112 , the jig 180 aligns the center axis of the fixing hole 171 with the hollow portion 111 . can coincide with the central axis of As a result, the center of the heater section 140 inserted into the hollow section 111 through the fixing hole 171 coincides with the center of the hollow section 111, as will be described later. Therefore, the heater portion 140 can be attached to the horn 110 in a non-contact state.

The jig 180 may have the same diameter as the heater section 140, or may have a different diameter. That is, the jig 180 may have the same shape as the heater section 140, or may have a different shape.

Further, the jig 180 may be engaged with the concave portion 112, and may be a bar shape having a constant diameter in the longitudinal direction of the jig 180. As in the present embodiment, the jig 180 may be a portion that engages with the concave portion 112, Even if the diameter is different between the portion where the jig 180 is inserted through the fixing hole 171 when the jig 180 is engaged with the recess 112 and the portion located on the opposite side of the tip portion 181 in the longitudinal direction of the jig 180. good.

As long as the center of the recess 112 at the tip of the hollow portion 111 is concentric with the hollow portion 111 , the jig 180 may be used. In other words, the jig 180 only needs to have its center axis aligned with the center axes of the cavity 111 and the recess 112 when it is inserted into the horn 110 .

Moreover, the jig 180 may have any shape as long as it engages with the concave portion 112, and may have a columnar shape, a rectangular parallelepiped shape, or the like.

Further, as shown in FIG. 6, the tip 181 of the jig 180 reaches the recess 112 (more specifically, the space 401 formed by the recess 112), but the bottom surface of the recess 112 (this embodiment , it may or may not contact the surface of the concave portion 112 on the positive side of the X-axis. Also, in the present embodiment, the bottom surface of the recess 112 has a conical shape, but it may have a planar shape or an arbitrary shape.

Referring to FIG. 5 again, after step S102, that is, after inserting the jig 180 into the hollow portion 111, the central axis of the fixing hole 171 and the hollow portion 111 are aligned with the jig 180 inserted into the hollow portion 111. The fixing hole 171 and the hollow portion 111 are aligned so that they are aligned with the central axis (S103). For example, the jig 180 has a smaller diameter than the fixing hole 171, and the positioning is performed by moving the fixing block 170. FIG.

In addition, the jig 180 has the tip portion 181 engaged with the recess 112 and the tip portion 181 is engaged with the recess 112 , and the diameter of the portion located in the fixing hole 171 is the same as the diameter of the fixing hole 171 . It may be formed so as to be According to this, step S103 can be executed by executing step S102.

Next, the fixed block 170 is fixed to the base portion 20 (S104). For example, the fixing block 170 is fixed to the base portion 20 by screwing a screw (not shown) into the support hole 172 and the engagement groove 21 .

Next, the jig 180 is removed from the recess 112, the cavity 111 and the fixing hole 171 (S105).

Next, the heater portion 140 is inserted through the fixing hole 171 (S106).

Next, the heater section 140 is inserted into the hollow section 111 (S107).

FIG. 7 is a cross-sectional view showing a state in which heater section 140 is inserted into horn 110 according to the embodiment.

In steps S106 and S107 shown in FIG. 5, for example, as shown in FIG. 7, the heater section 140 is arranged in the fixing hole 171 and the hollow section 111 so that the heater section 140 does not come into contact with the fixing block 170 and the horn 110. do. Also, the heater section 140 is arranged so as not to reach the recess 112 . For example, the end portion 141 of the heater portion 140 is arranged so as not to be positioned in the space 401 and to be positioned in the space 400 by the recess 112 .

Referring to FIG. 5 again, after step S107, the heater section 140 is fixed to the fixed block 170 so as not to move relative to the fixed block 170 and the horn 110 (S108). For example, a screw (not shown) is passed through each of the two adjustment holes 173, and the heater section 140 is fixed so as to be sandwiched between the screws. Thereby, the heater section 140 is fixed to the fixing block 170 .

A side surface of the heater section 140 may be formed with a recess such as a recess into which a screw passed through the adjustment hole 173 is engaged. Also, the heater section 140 may be fixed to a member different from the welding tool 100 so that the relative positional relationship between the heater section 140 and the fixed block 170 and the horn 110 is not deviated. For example, the heater section 140 may be fixed to a member whose position is fixed, such as a bracket (not shown), instead of the fixed block 170 .

Thereby, the bonding tool 100 can be manufactured.

Although the welding tool 100 further includes an ultrasonic transducer 120 attached to the horn 110, the timing of attaching the ultrasonic transducer 120 may be arbitrary. For example, the ultrasonic transducer 120 may be attached to the horn 110 before executing step S101, the ultrasonic transducer 120 may be attached to the horn 110 after step S108, or steps S106 and S107 may be performed. An ultrasonic transducer 120 may be attached to the horn 110 during operation.

[Effects, etc.]
As described above, the method for manufacturing the welding tool 100 according to the embodiment includes the ultrasonic transducer 120 that generates ultrasonic vibration, the ultrasonic transducer 120 attached to one end, and the other end opposite to the one end. A horn 110 having a hollow portion 111 formed at one end thereof, a nozzle portion 130 provided between the one end and the other end thereof and holding an object to be welded 310, a base portion 20 to which the horn 110 is attached, and a fixing hole. 171 formed thereon, and a heater section 140 for heating a nozzle section 130, and a method for manufacturing a welding tool 100 for joining an object 310 to be welded and an article 320 to be welded. In the manufacturing method of the welding tool 100 according to the embodiment, the rod-shaped jig 180 is passed through the fixing hole 171 (S101), and the jig is inserted into the concave portion 112 formed in the hollow portion 111 and centered on the central axis of the hollow portion 111. The jig 180 is inserted into the cavity 111 until the tip of the tool 180 is engaged (S102). (S103), the fixing block 170 is fixed to the base portion 20 (S104), and after fixing the fixing block 170, the jig 180 is removed from the fixing hole 171 and the hollow portion 111 (S105), and the heater portion 140 is passed through the fixing hole 171 (S106), inserted into the cavity 111 (S107) and fixed (S108).

According to this, the jig 180 can easily align the central axis of the fixing hole 171 and the central axis of the hollow portion 111 . Therefore, the heater section 140 can be easily arranged at an appropriate position in the hollow section 111 only by fixing the heater section 140 through the fixing hole 171 .

FIG. 8 is a diagram showing a specific example of temperature characteristics of a conventional welding tool. In addition, the conventional welding tool does not include the fixing block 170 in the welding tool 100, and the heater section 140 is fixed by members other than the components provided in the welding tool 100. FIG.

FIG. 8 shows the temperature of the nozzle portion when the temperature of the heater portion is set to 250° C. for Sample 1, Sample 2 and Sample 3, which are conventional welding tools manufactured in the same manner.

As shown in FIG. 8, the temperature of sample 1 is 196°C, the temperature of sample 2 is 201°C, and the temperature of sample 3 is 188°C. In this way, even if they are manufactured in the same manner, there is an individual temperature difference of 10°C to 15°C in the nozzle portion.

FIG. 9 is a diagram showing a specific example of vibration characteristics of a conventional welding tool. 9 indicates a conventional welding tool with the heater portion 140 removed, and "with a heater portion" indicates a conventional welding tool with the heater portion 140 attached. be.

As shown in FIG. 9, the conventional welding tool without a heater has a vibration characteristic (impedance) of 7.5Ω. On the other hand, a conventional welding tool with a heater section has a vibration characteristic of 15Ω. As described above, there is a large difference in the vibration characteristics of the welding tool depending on whether or not the heater is attached. This change in vibration characteristics is considered to be caused by the heater contacting the horn when the heater is attached to the horn. Also, the difference in the temperature characteristics between the samples shown in FIG. 8 is considered to be due to the difference in the positional relationship between the horn and the heater, such as whether or not the heater is in contact with the horn.

As described above, in the conventional welding tool, the heater portion cannot be fixed at an appropriate position, so the characteristics of each welding tool may differ (change) due to manufacturing errors. There is only a gap (clearance) of, for example, about 50 μm between the heater section and the horn. need to match.

Therefore, according to the manufacturing method of the welding tool 100 according to the embodiment, the fixing block 170 and the horn 110 for fixing the heater section 140 at an appropriate position are precisely aligned by the jig 180 . Since the heater section 140 is passed through the fixing hole 171 provided in the fixing block 170 that is precisely aligned in this manner and the position is fixed, the mounting position of the heater section 140 is suppressed from being displaced from an appropriate position. can be used to manufacture the bonding tool 100. Therefore, it is possible to manufacture the welding tool 100 in which changes in ultrasonic vibration characteristics (vibration characteristics) due to displacement of the attachment position of the heater section 140 are suppressed. Further, for example, when a plurality of welding tools 100 are manufactured using the manufacturing method of the welding tool 100 according to the embodiment, variations in vibration characteristics among the plurality of welding tools 100 can be suppressed.

Also, for example, the extending direction of the hollow portion 111 is the longitudinal direction of the horn 110 . In this case, for example, cavity 111 does not penetrate horn 110 . That is, in this case, for example, the cavity 111 is a recess formed in the horn 110 .

Since the extending direction of the hollow portion 111 is the same as the longitudinal direction of the horn 110, the hollow portion 111 can be formed broadly in a straight line. Therefore, since the hollow portion 111 is wide and straight, the heater portion 140 can be easily arranged in the hollow portion 111 and the size of the heater portion 140 can be increased according to the size of the hollow portion 111 . According to this, the amount of heat generated by the heater section 140 can be easily increased. Therefore, according to this, the welding tool 100 in which the heater portion 140 generates a large amount of heat can be easily manufactured.

Further, for example, the ultrasonic transducer 120 is arranged on one end side of the horn 110 in the longitudinal direction, and the heater section 140 is arranged on the other end side. This makes it difficult for the heat of the heater section 140 to reach the nozzle section 130 and reach the ultrasonic transducer 120 . Therefore, according to such an arrangement, deterioration of the ultrasonic transducer 120 due to the heat of the heater section 140 can be suppressed. Such an arrangement also causes the horn 110 to vibrate longitudinally. Therefore, the hollow portion 111 is formed widely in the horn 110 without providing a portion dividing the horn 110 in the lateral direction. As a result, deterioration of the vibration characteristics of the horn 110 due to the hollow portion 111 can be suppressed, and the bonding tool 100 having the wide hollow portion 111 can be manufactured.

Also, for example, the heater section 140 inserted into the cavity 111 does not reach the recess 112 .

In this way, by arranging the heater part 140 so as not to reach the recessed part 112 , that is, so as not to contact the recessed part 112 , the heater part 140 contacts the recessed part 112 (that is, the horn 110 ). Deterioration of vibration characteristics can be suppressed compared to the case where Therefore, by arranging the heater part 140 so as not to reach the recessed part 112, it is possible to manufacture the welding tool 100 in which deterioration of vibration characteristics is suppressed.

Also, the welding tool 100 according to the embodiment includes an ultrasonic transducer 120 that generates ultrasonic vibration, a horn 110 to which the ultrasonic transducer 120 is attached at one end, one end of the horn 110, and an opposite end of the horn 110. A nozzle portion 130 provided between the other end of the side and holding an object 310 to be welded, a base portion 20 to which the horn 110 is attached, and a fixing block 170 fixed to the base portion 20 in which a fixing hole 171 is formed. and a heater section 140 that heats the nozzle section 130 . The other end of the horn 110 is formed with a hollow portion 111 extending in the longitudinal direction of the horn 110 and into which the heater portion 140 is inserted. It is fixed to the horn 110 in a non-contact state.

According to this, since the heater section 140 is attached at an appropriate position, the welding tool 100 is prevented from changing vibration characteristics due to displacement of the attachment position of the heater section 140 .

Moreover, the welding apparatus 200 according to the embodiment includes the welding tool 100, the holding section 30 that holds the article to be welded 320, and the article to be welded 320 held by the holding section 30 by raising and lowering the welding tool 100. and an elevating mechanism 10 that joins the object to be joined 310 held by the joining tool 100 .

According to this, since the welding tool 100 suppresses a change in the vibration characteristics due to the displacement of the mounting position of the heater section 140, even if the plurality of bonded bodies 300 are manufactured by the bonding apparatus 200, the plurality of bonded bodies 300 can be manufactured. quality variation can be suppressed.

(Other embodiments)
Although the manufacturing method and the like of the welding tool according to the present embodiment have been described above based on the above embodiment, the present invention is not limited to the above embodiment.

For example, in the above-described embodiment, the shape of the slit groove of the groove portion 160 is rectangular in the XY plane, but it is not limited to this. For example, the shape of the slit groove may be a quadrangle such as a square, a parallelogram, or a trapezoid, or fan-like in the XY plane.

Moreover, in the above-described embodiment, the slit grooves of the groove portion 160 each have a constant width in the Z-axis direction, but the present invention is not limited to this. The slit grooves may have different widths in the Z-axis direction.

Further, for example, in the above-described embodiment, the slit grooves of the groove portion 160 are formed in parallel within the XY plane, but the present invention is not limited to this. The slit groove may be formed in a plane intersecting the XY plane.

Further, for example, in the above embodiment, all or part of the components of the computer 80 may be configured with dedicated hardware, or implemented by executing a software program suitable for each component. may Each component may be implemented by a program execution unit such as a CPU (Central Processing Unit) or processor reading and executing a software program recorded in a recording medium such as a HDD (Hard Disk Drive) or a semiconductor memory. good.

Also, the components of computer 80 may consist of one or more electronic circuits. Each of the one or more electronic circuits may be a general-purpose circuit or a dedicated circuit.

One or more electronic circuits may include, for example, a semiconductor device, an IC (Integrated Circuit), or an LSI (Large Scale Integration). An IC or LSI may be integrated on one chip or may be integrated on a plurality of chips. Although they are called ICs or LSIs here, they may be called system LSIs, VLSIs (Very Large Scale Integration), or ULSIs (Ultra Large Scale Integration) depending on the degree of integration. An FPGA (Field Programmable Gate Array) that is programmed after the LSI is manufactured can also be used for the same purpose.

In addition, it can be realized by applying various modifications to each embodiment that a person skilled in the art can think of, or by arbitrarily combining the constituent elements and functions of each embodiment without departing from the spirit of the present invention. Forms are also included in the present invention.

INDUSTRIAL APPLICABILITY The method for manufacturing a bonding tool according to the present invention can be used for manufacturing a bonding tool included in a bonding apparatus for ultrasonically bonding components to a substrate, which is included in a component mounting apparatus for producing display panels.

REFERENCE SIGNS LIST 10 lift mechanism 20 base 21 engagement groove 30 holding portion 40 table 50 vacuum suction source 51 suction pipe line 60 vibrator driving portion 70 fluid supply source 80 computer 100 joining tool 110 horn 111 cavity 112, 161 recess 113 connecting portion 114 Inner surface 120 Ultrasonic vibrator 130 Nozzle part 140 Heater part 141 End part 150 Cooling part 160 Groove part 170 Fixing block 171 Fixing hole 172 Supporting hole 173 Adjustment hole 180 Jig 181 Tip part 200 Joining device 300 Joining body 310 Object to be joined 320 Object to be bonded 321 Surface to be bonded 400, 401 Space

Claims (5)

an ultrasonic transducer that generates ultrasonic vibrations;
a horn having one end to which the ultrasonic vibrator is attached and a cavity formed at the other end opposite to the one end;
a nozzle portion provided between the one end and the other end for holding an object to be welded;
a base portion to which the horn is attached;
a fixing block having a fixing hole;
A method for manufacturing a welding tool for bonding the object to be welded and the object to be welded, the method comprising: a heater part for heating the nozzle part,
Passing a rod-shaped jig through the fixing hole,
inserting the jig into the cavity until the tip of the jig engages a recess formed in the cavity and centered on the central axis of the cavity;
After inserting the jig into the cavity, aligning the center axis of the fixing hole with the center axis of the cavity,
fixing the fixed block to the base;
After fixing the fixing block, removing the jig from the fixing hole and the cavity,
The heater section is passed through the fixing hole and fixed in a state of being inserted into the hollow section.
A method for manufacturing a joining tool. the extending direction of the hollow portion is the longitudinal direction of the horn;
the cavity does not penetrate the horn;
A method for manufacturing a joining tool according to claim 1. the heater unit inserted into the hollow portion does not reach the recess;
3. A method for manufacturing a joining tool according to claim 1 or 2. an ultrasonic transducer that generates ultrasonic vibrations;
a horn to which the ultrasonic transducer is attached at one end;
a nozzle portion provided between the one end of the horn and the other end opposite to the one end and holding an object to be welded;
a base portion to which the horn is attached;
a fixing block having a fixing hole and fixed to the base;
and a heater unit that heats the nozzle unit,
A hollow portion extending in the longitudinal direction of the horn and into which the heater portion is inserted is formed at the other end of the horn,
The heater unit inserted into the hollow portion is fixed in a state of being passed through the fixing hole and in a non-contact state with the horn,
splicing tool. a joining tool according to claim 4;
a holding part for holding an object to be joined;
an elevating mechanism that joins the object to be welded held by the holding unit and the object to be welded held by the welding tool by elevating the welding tool.

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