JP2022130702A - 半導体装置 - Google Patents
半導体装置 Download PDFInfo
- Publication number
- JP2022130702A JP2022130702A JP2022108379A JP2022108379A JP2022130702A JP 2022130702 A JP2022130702 A JP 2022130702A JP 2022108379 A JP2022108379 A JP 2022108379A JP 2022108379 A JP2022108379 A JP 2022108379A JP 2022130702 A JP2022130702 A JP 2022130702A
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor element
- gate
- plating layer
- semiconductor device
- gate runner
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 153
- 230000000630 rising effect Effects 0.000 claims abstract description 79
- 238000007747 plating Methods 0.000 claims abstract description 59
- 229910052751 metal Inorganic materials 0.000 claims abstract description 50
- 239000002184 metal Substances 0.000 claims abstract description 50
- 229910000679 solder Inorganic materials 0.000 claims description 48
- 230000000149 penetrating effect Effects 0.000 claims 1
- 239000004020 conductor Substances 0.000 abstract description 5
- 239000000758 substrate Substances 0.000 description 16
- 238000010586 diagram Methods 0.000 description 13
- 238000001816 cooling Methods 0.000 description 8
- 239000011347 resin Substances 0.000 description 8
- 229920005989 resin Polymers 0.000 description 8
- 230000000052 comparative effect Effects 0.000 description 7
- 229920001721 polyimide Polymers 0.000 description 6
- 238000007789 sealing Methods 0.000 description 6
- 229910052782 aluminium Inorganic materials 0.000 description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 4
- 239000010949 copper Substances 0.000 description 4
- 230000007423 decrease Effects 0.000 description 4
- 229910052759 nickel Inorganic materials 0.000 description 3
- 239000004033 plastic Substances 0.000 description 3
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 3
- 229920005591 polysilicon Polymers 0.000 description 3
- 230000008569 process Effects 0.000 description 3
- 239000005380 borophosphosilicate glass Substances 0.000 description 2
- 229910052802 copper Inorganic materials 0.000 description 2
- 238000001514 detection method Methods 0.000 description 2
- 239000011810 insulating material Substances 0.000 description 2
- 238000009413 insulation Methods 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 229910000838 Al alloy Inorganic materials 0.000 description 1
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 229910000881 Cu alloy Inorganic materials 0.000 description 1
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 239000000919 ceramic Substances 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 230000017525 heat dissipation Effects 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 230000007480 spreading Effects 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 1
- 229910052721 tungsten Inorganic materials 0.000 description 1
- 239000010937 tungsten Substances 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/26—Layer connectors, e.g. plate connectors, solder or adhesive layers; Manufacturing methods related thereto
- H01L2224/31—Structure, shape, material or disposition of the layer connectors after the connecting process
- H01L2224/32—Structure, shape, material or disposition of the layer connectors after the connecting process of an individual layer connector
- H01L2224/321—Disposition
- H01L2224/32151—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/32221—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/32225—Disposition the layer connector connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/4005—Shape
- H01L2224/4009—Loop shape
- H01L2224/40095—Kinked
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/34—Strap connectors, e.g. copper straps for grounding power devices; Manufacturing methods related thereto
- H01L2224/39—Structure, shape, material or disposition of the strap connectors after the connecting process
- H01L2224/40—Structure, shape, material or disposition of the strap connectors after the connecting process of an individual strap connector
- H01L2224/401—Disposition
- H01L2224/40151—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive
- H01L2224/40221—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked
- H01L2224/40225—Connecting between a semiconductor or solid-state body and an item not being a semiconductor or solid-state body, e.g. chip-to-substrate, chip-to-passive the body and the item being stacked the item being non-metallic, e.g. insulating substrate with or without metallisation
Landscapes
- Electrodes Of Semiconductors (AREA)
Abstract
Description
特許文献1 特開2003-115512号公報
立上り部は、接合部の第1端部に接続してよい。立上り部は、半導体素子の上面と離れる方向に延伸してよい。半導体素子の上面と平行な面内において、立上り部とゲートランナーとは重ならなくてよい。
Claims (10)
- 半導体素子と、
前記半導体素子の上面に設けられた上面電極と、
前記上面電極の上面に設けられためっき層と、
前記半導体素子の上面と前記上面電極との間に配置された第1絶縁膜と、
前記半導体素子の上面と平行な面内において、前記半導体素子と前記第1絶縁膜との間に設けられたゲート導電部と、前記半導体素子と前記第1絶縁膜との間に設けられ前記ゲート導電部から離間しつつ前記ゲート導電部を挟むように配置された2つの第1配線と、前記ゲート導電部および前記2つの第1配線の上方を覆うように配置され、平面視で前記めっき層に挟まれた第3絶縁膜と、を有するゲートランナーと、
前記上面電極と電気的に接続され、前記ゲートランナーを覆うように前記めっき層の上方に配置された接合部と、前記接合部の第1端部に接続し、かつ前記ゲートランナー全体と離間し、前記半導体素子の上面と離れる方向に延伸し、前記めっき層の上方に配置された立上り部と、を有する金属配線板と、
を備える半導体装置。 - 前記ゲートランナーの前記第3絶縁膜の上面は、前記めっき層の上面よりも前記金属配線板の前記接合部に近い請求項1に記載の半導体装置。
- 前記立上り部は、前記半導体素子の上面と垂直な方向に延伸している請求項1または2に記載の半導体装置。
- 前記半導体素子の状態を検出するセンス領域を有し、
前記ゲートランナーは、さらに、前記ゲート導電部の上に前記第1絶縁膜を介して配置され、前記上面電極から電気的に分離され、前記センス領域に接続されたセンサ用の配線を有する請求項1または2に記載の半導体装置。 - 前記ゲートランナーは、さらに、第2絶縁膜を介して前記センサ用の配線を挟むように前記上面電極と同電位の第2配線と、
前記第1絶縁膜を貫通して前記第1配線および前記第2配線を電気的に接続するプラグと、
を有する請求項4に記載の半導体装置。 - 前記半導体素子の上面と平行な面内において、平面視で前記上面の短辺と平行に配置されたゲートトレンチ部を更に備える
請求項1または2に記載の半導体装置。 - はんだ部が、前記ゲートランナー上に設けられ、前記めっき層と前記金属配線板の前記接合部を接続している請求項1または2に記載の半導体装置。
- 前記半導体素子上の前記上面電極の上面と平行な面内において、前記めっき層の外側に設けられたガードリングを備える請求項1または2に記載の半導体装置。
- 前記ゲートランナーと前記立上り部との第1距離L1は、前記立上り部と前記ガードリングとの第2距離L2より大きい請求項8に記載の半導体装置。
- 前記第1距離L1は、前記第2距離L2の1.5倍以上である請求項9に記載の半導体装置。
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2022108379A JP7302715B2 (ja) | 2020-12-03 | 2022-07-05 | 半導体装置 |
Applications Claiming Priority (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP2020201361A JP7160079B2 (ja) | 2020-12-03 | 2020-12-03 | 半導体装置 |
JP2022108379A JP7302715B2 (ja) | 2020-12-03 | 2022-07-05 | 半導体装置 |
Related Parent Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2020201361A Division JP7160079B2 (ja) | 2020-12-03 | 2020-12-03 | 半導体装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JP2022130702A true JP2022130702A (ja) | 2022-09-06 |
JP7302715B2 JP7302715B2 (ja) | 2023-07-04 |
Family
ID=86996529
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP2022108379A Active JP7302715B2 (ja) | 2020-12-03 | 2022-07-05 | 半導体装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP7302715B2 (ja) |
Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005116962A (ja) * | 2003-10-10 | 2005-04-28 | Denso Corp | パッケージ型半導体装置 |
JP2006210519A (ja) * | 2005-01-26 | 2006-08-10 | Fuji Electric Holdings Co Ltd | 半導体装置およびその製造方法 |
JP2007142138A (ja) * | 2005-11-18 | 2007-06-07 | Mitsubishi Electric Corp | 半導体装置 |
JP2007227416A (ja) * | 2006-02-21 | 2007-09-06 | Renesas Technology Corp | 半導体装置の製造方法および半導体装置 |
JP2010135677A (ja) * | 2008-12-08 | 2010-06-17 | Denso Corp | 半導体装置 |
JP2011066371A (ja) * | 2009-08-18 | 2011-03-31 | Denso Corp | 半導体装置およびその製造方法 |
JP2012134198A (ja) * | 2010-12-20 | 2012-07-12 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2014003095A (ja) * | 2012-06-15 | 2014-01-09 | Denso Corp | 半導体装置 |
JP2016029710A (ja) * | 2014-07-14 | 2016-03-03 | 株式会社デンソー | 半導体装置 |
-
2022
- 2022-07-05 JP JP2022108379A patent/JP7302715B2/ja active Active
Patent Citations (9)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005116962A (ja) * | 2003-10-10 | 2005-04-28 | Denso Corp | パッケージ型半導体装置 |
JP2006210519A (ja) * | 2005-01-26 | 2006-08-10 | Fuji Electric Holdings Co Ltd | 半導体装置およびその製造方法 |
JP2007142138A (ja) * | 2005-11-18 | 2007-06-07 | Mitsubishi Electric Corp | 半導体装置 |
JP2007227416A (ja) * | 2006-02-21 | 2007-09-06 | Renesas Technology Corp | 半導体装置の製造方法および半導体装置 |
JP2010135677A (ja) * | 2008-12-08 | 2010-06-17 | Denso Corp | 半導体装置 |
JP2011066371A (ja) * | 2009-08-18 | 2011-03-31 | Denso Corp | 半導体装置およびその製造方法 |
JP2012134198A (ja) * | 2010-12-20 | 2012-07-12 | Mitsubishi Electric Corp | 半導体装置およびその製造方法 |
JP2014003095A (ja) * | 2012-06-15 | 2014-01-09 | Denso Corp | 半導体装置 |
JP2016029710A (ja) * | 2014-07-14 | 2016-03-03 | 株式会社デンソー | 半導体装置 |
Also Published As
Publication number | Publication date |
---|---|
JP7302715B2 (ja) | 2023-07-04 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP6805776B2 (ja) | 半導体装置 | |
US9171774B2 (en) | Power semiconductor module and method of manufacturing the same | |
US10763240B2 (en) | Semiconductor device comprising signal terminals extending from encapsulant | |
JP6834436B2 (ja) | 半導体装置 | |
JP2012191012A (ja) | 半導体装置 | |
US20170194296A1 (en) | Semiconductor module | |
KR101734712B1 (ko) | 파워모듈 | |
JP7195208B2 (ja) | 半導体装置および半導体装置の製造方法 | |
KR102586458B1 (ko) | 반도체 서브 어셈블리 및 반도체 파워 모듈 | |
JP2015115471A (ja) | 電力用半導体装置 | |
JP7302715B2 (ja) | 半導体装置 | |
JP7160079B2 (ja) | 半導体装置 | |
EP2178117A1 (en) | Power semiconductor module with double side cooling | |
US11274972B2 (en) | Semiconductor device | |
US8796837B2 (en) | Lead and lead frame for power package | |
US20220302074A1 (en) | Semiconductor device | |
JP2013113638A (ja) | 半導体装置 | |
KR101626534B1 (ko) | 반도체 패키지 및 그 제조 방법 | |
US20200098673A1 (en) | Semiconductor device | |
JPWO2021029150A1 (ja) | 半導体装置 | |
EP2802007A1 (en) | Power semiconductor module | |
US11545460B2 (en) | Semiconductor device and method for manufacturing semiconductor device having first and second wires in different diameter | |
CN109994445B (zh) | 半导体元件和半导体装置 | |
JP7334655B2 (ja) | 半導体装置 | |
JP7247681B2 (ja) | 半導体組立体 |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
A621 | Written request for application examination |
Free format text: JAPANESE INTERMEDIATE CODE: A621 Effective date: 20220705 |
|
A977 | Report on retrieval |
Free format text: JAPANESE INTERMEDIATE CODE: A971007 Effective date: 20230501 |
|
TRDD | Decision of grant or rejection written | ||
A01 | Written decision to grant a patent or to grant a registration (utility model) |
Free format text: JAPANESE INTERMEDIATE CODE: A01 Effective date: 20230523 |
|
A61 | First payment of annual fees (during grant procedure) |
Free format text: JAPANESE INTERMEDIATE CODE: A61 Effective date: 20230605 |
|
R150 | Certificate of patent or registration of utility model |
Ref document number: 7302715 Country of ref document: JP Free format text: JAPANESE INTERMEDIATE CODE: R150 |