JP2022126489A - Measurement device - Google Patents

Abstract

To provide a measurement device that can more accurately measure flatness even when an object to be measured has a relatively thin shape.SOLUTION: A measurement device 20 for measuring a disc 10 includes an A surface measurement section that measures a surface of the disc 10 and a first conveyance section 24 that conveys the disc 10, the A surface measurement section has a measurement reference surface 61a that is inclined at an inclination angle θ from a vertical direction, the first conveyance section 24 has a holding section 81 that holds the disc 10 so that the disc 10 is parallel to the measurement reference surface 61a, and the holding section 81 holds the disc 10 and moves it in the vertical direction while keeping the disc 10 in a posture of being inclined at the inclination angle θ and mounts and removes the disc 10 to and from the A surface measurement section 23.SELECTED DRAWING: Figure 3

Description

The present invention relates to a measuring device for measuring a plate-shaped object to be measured.

As a measuring device of this type, as shown in FIGS. A device including a base 2 and a sensor 3 is disclosed (see Patent Document 1). This measuring apparatus is configured to measure the flatness of the surface of the object D to be measured by moving the sensor parallel to and without contact with the surface of the object D held on the measuring table 2 .

JP-A-11-183115

However, in the measuring apparatus described in Patent Document 1, the object D to be measured is held horizontally on the measuring table 2, so gravity acts in a direction to bend the object D to be measured. That is, the object D to be measured bends due to its own weight. If the object D to be measured is relatively thick and has little deflection due to its own weight, it can be measured satisfactorily. Therefore, there is a problem that the flatness cannot be measured accurately.

SUMMARY OF THE INVENTION It is an object of the present invention to provide a measuring apparatus capable of more accurately measuring flatness even when an object to be measured has a relatively thin shape. Make it an issue.

(1) A measuring apparatus according to the present invention is a measuring apparatus for measuring an object to be measured, comprising measuring means for measuring the shape of at least one of the surface and the back surface of the object to be measured, and transporting the object to be measured. and transporting means, wherein the measuring means has a measurement reference plane inclined by a predetermined angle from the vertical direction, and the transporting means is arranged such that the object to be measured is parallel to the measurement reference plane. A holding part for holding the object to be measured is provided, and the holding part attaches and removes the object to be measured to and from the measuring means while maintaining a posture in which the object to be measured is inclined by the predetermined angle. characterized by performing

(2) The measuring apparatus according to the present invention is the measuring apparatus according to (1), wherein the conveying means includes an attachment holding portion for attaching the object to be measured to the measuring means and a holding portion for attaching the object to be measured to the measuring means. and a removal retainer for removal from the means.

(3) A measuring apparatus according to the present invention is the measuring apparatus according to (1) or (2), wherein the conveying means conveys the object to be measured facing the measuring means. The object to be measured is conveyed parallel to the measurement reference plane.

(4) A measuring apparatus according to the present invention is the measuring apparatus according to (1), wherein the measuring means has a first measuring means and a second measuring means arranged facing each other. do.

(5) The measuring device according to the present invention is the measuring device according to (4), wherein the transporting means transports the object to be measured facing the first measuring means; a second conveying means for conveying the object to be measured facing the second measuring means, wherein the conveying direction of the first conveying means and the conveying direction of the second conveying means are opposite to each other; characterized by

(6) The measuring apparatus according to the present invention is the measuring apparatus according to any one of (1) to (5), wherein the vertical posture in which the object to be measured is positioned along the vertical direction and the measurement object It is characterized by comprising a delivery part for converting between the vertical posture and the tilted posture in which the object is tilted by a predetermined angle from the vertical direction.

(7) The measuring apparatus according to the present invention is the measuring apparatus according to (1), further comprising driving means for driving the conveying means, wherein the driving means is vertically lower than the measuring means. It is characterized by being arranged.

(8) The measuring apparatus according to the present invention is the measuring apparatus according to (1), wherein the conveying means is configured to reciprocate in a horizontal direction and in a direction perpendicular to the measurement reference plane. The object is conveyed from the entry side to the exit side of the measuring apparatus by the conveying means while maintaining the orientation of the main surface on the measurement reference surface side.

(9) The measuring device according to the present invention is the measuring device according to (1), in which the object to be measured has a through hole passing through in the plate thickness direction, and the holding portion is an inner wall of the through hole. It is characterized by holding a part.

(10) The measuring apparatus according to the present invention is the measuring apparatus according to (1), wherein the measurement reference plane includes a support supporting the object to be measured and the object to be measured supported by the support. It is characterized by having a steady rest that abuts on an object.

According to the measuring apparatus according to the present invention described in (1) above, it comprises measuring means for measuring the shape of at least one of the front surface and the back surface of the object to be measured, and transport means for transporting the object to be measured, wherein the measuring means , a measurement reference plane inclined by a predetermined angle from the vertical direction, and the conveying means has a holding portion that holds the object to be measured so that the object to be measured is parallel to the measurement reference plane. . Further, the holding part attaches and detaches the object to be measured from the measuring means while maintaining the posture of the object to be measured tilted by a predetermined angle.

With this configuration, it is possible to effectively suppress the problem of the conventional measuring apparatus, that is, the bending of the object to be measured due to the object being horizontally held on the measuring table, and to improve the flatness measurement accuracy of thin objects. This solves the problem of a decrease in According to this configuration, since the object to be measured is held in a posture inclined by a predetermined angle and the shape of at least one of the front surface and the back surface thereof is measured, the object to be measured is prevented from bending due to its own weight, Shapes can be measured more accurately.

Further, the holding portion is configured to attach and detach the object to be measured from the measuring means while maintaining the tilted attitude of the object to be measured at a predetermined angle. With this configuration, the inclined posture can be maintained with high accuracy, and the object to be measured can be smoothly attached to and removed from the measuring means. Furthermore, the influence of deflection due to the weight of the object to be measured can be suppressed, and the posture of the object to be measured when placed on the measuring apparatus can be stabilized.

According to the measuring apparatus according to the present invention described in (2) above, the object to be measured is attached to the measuring means by the attachment transporting part, and is removed from the measuring means by the detachment transporting part. With this configuration, the object to be measured can be quickly transported, the object to be measured can be smoothly attached to and removed from the measuring means, and the object to be measured can be efficiently transported.

According to the measuring apparatus according to the present invention described in (3) above, when the conveying means conveys the object to be measured facing the measuring means, the object to be measured is conveyed parallel to the measurement reference plane. . With this configuration, a large number of objects to be measured can be efficiently transported without generating excessive stress on the objects to be measured, and a large number of objects to be measured can be measured quickly.

According to the measuring device according to the present invention described in (4) above, since the measuring device has the first measuring device and the second measuring device arranged facing each other, the arrangement space for the components of the measuring device is As a result, the measuring device can be made compact.

According to the measuring apparatus according to the present invention described in (5) above, the conveying means includes the first conveying means for conveying the object to be measured facing the first measuring means and the object to be measured facing the second measuring means. and a second conveying means for conveying the object to be measured, the conveying direction of the first conveying means and the conveying direction of the second conveying means being opposite to each other. With this configuration, the space for arranging the first conveying means and the first measuring means and the second conveying means and the second measuring means is reduced, and the measuring apparatus can be made compact.

According to the measuring apparatus according to the present invention described in (6) above, the vertical posture in which the object to be measured is positioned along the vertical direction and the inclined posture in which the object to be measured is positioned at a predetermined angle from the vertical direction. Between them, there is a delivery section that converts between a vertical posture and an inclined posture. With this configuration, the conveyed object in the vertical posture can be smoothly converted to the inclined posture in the transfer section, and the conveying device can smoothly convert the measured object conveyed in the inclined posture to the vertical posture in the delivery section. This eliminates the need for the process of converting to an inclined posture at the part, suppresses the occurrence of unnecessary stress on the object to be measured during transportation, and stabilizes the posture of the object to be measured when placed on the measuring apparatus.

According to the measuring apparatus according to the present invention described in (7) above, the measuring apparatus has the driving means for driving the conveying means, and the driving means is arranged vertically below the measuring means. With this configuration, fine dust particles generated from the drive means are less likely to adhere to constituent elements, such as the substrate, that constitute the measuring means, and the risk of contamination of the constituent elements, such as the substrate, is reduced.

According to the measuring apparatus according to the present invention described in (8) above, the conveying means is configured to reciprocate horizontally and vertically with respect to the measurement reference plane. goods are transported. In addition, since the object to be measured is conveyed from the entry side to the exit side of the measuring apparatus by the conveying means while maintaining the orientation of the main surface on the side of the measurement reference surface, a large number of objects to be measured can be quickly measured without waste. be transported.

According to the measuring device according to the present invention described in (9) above, the object to be measured has a through hole penetrating in the plate thickness direction, and the holding portion holds the inner wall portion of the through hole. The object to be measured is stably held without generating excessive stress on the object to be measured.

According to the measuring apparatus according to the present invention described in (10) above, the measurement reference plane has a support for supporting the object to be measured and a vibration stop, so that vibration of the object to be measured is suppressed, By maintaining and stabilizing the posture of the object to be measured, the flatness measurement accuracy can be improved.

According to the present invention, it is possible to provide a measuring apparatus capable of more accurately measuring flatness even if the object to be measured has a relatively thin shape.

BRIEF DESCRIPTION OF THE DRAWINGS FIG. 1 is a diagram of a disk measured by a measuring device according to first to third embodiments of the present invention, FIG. 1(a) is a perspective view of the disk, and FIG. 1(b) is a cross section of the disk; Figure shows. FIG. 4 is a process drawing showing the manufacturing process of the disc according to the first to third embodiments of the present invention; BRIEF DESCRIPTION OF THE DRAWINGS The schematic diagram which showed typically the structure of the measuring device which concerns on 1st Embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS The schematic diagram which showed typically the front of the measuring device which concerns on 1st Embodiment of this invention. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram of the measuring apparatus based on 1st Embodiment of this invention, Fig.5 (a) shows the front of an enlarged measuring apparatus, FIG.5(b) shows the side surface of an enlarged measuring apparatus. BRIEF DESCRIPTION OF THE DRAWINGS It is a schematic diagram of the measuring apparatus based on 1st Embodiment of this invention, Fig.6 (a) shows the front of the disk holding part and disk of a robot conveyance part, FIG.6(b) shows the disk of a robot conveyance part 6(c) shows the support provided on the side of the measurement reference plane of the A-surface measurement section, the anti-vibration of the disc, and the front of the disc, and FIG. FIG. 6(e) shows a side surface of a support and a disk provided on the measurement reference surface side of the A-surface measurement part, and FIG. (f) shows a side view of the holder and the disk of the attachment transport mechanism or the removal transport mechanism. 7A and 7B are schematic diagrams showing the operation of the measuring device according to the first embodiment of the present invention, FIG. 7(3) shows a state in which the holding portion is being lifted, and FIG. 7(4) shows a state in which the holding portion holds the disc. FIG. 8A is a schematic diagram showing the operation of the measuring apparatus according to the first embodiment of the present invention, FIG. b) shows a state in which the entry-side delivery section delivers the disc to the mounting transport mechanism of the first transport section, and FIG. Indicates status. FIG. 9A is a schematic diagram showing the operation of the measuring device according to the first embodiment of the present invention, and FIG. 9A shows a state in which the attachment transport mechanism of the first transport unit is separated from the A-surface measurement unit; FIG. 9(b) shows a state in which the mounting transport mechanism of the first transport section has attached the disc to the disc holding section of the A-side measuring section in proximity to the A-side measuring section. FIG. 10(a) is a schematic diagram showing the operation of the measuring device according to the first embodiment of the present invention, and FIG. 10(a) shows that the sensor of the A-side measurement unit moves toward the entrance-side transfer unit and measures the A-side of the disc. FIG. 10(b) shows a state in which the removal transfer mechanism of the first transfer section delivers the disc to the delivery side transfer section, and FIG. Shows the state of passing the disc to the disc holder. The schematic diagram which showed typically the structure of the measuring device which concerns on 2nd Embodiment of this invention. The schematic diagram which showed typically the structure of the measuring device which concerns on 3rd Embodiment of this invention. It is a figure of the conventional measuring device, Fig.13 (a) shows the perspective view of a measuring device, FIG.13(b) shows the top view of a measuring device.

Measuring apparatuses 20, 20A, and 20B according to a first embodiment, a second embodiment, and a third embodiment to which the measuring apparatus according to the present invention is applied will be described with reference to the drawings.

First, the disc 10 as an object to be measured by the measuring devices 20, 20A, and 20B according to the first, second, and third embodiments will be described. As shown in FIGS. 1(a) and 1(b), the disk 10 has a disk shape with a thickness of th, an outer diameter of D, and an inner diameter of a central through hole h of d. Note that the disk 10 is not limited to a circular disk, and may have a shape other than a circular disk, such as a square or an elliptical shape. The disk 10 is a hard disk in the present embodiment, the second embodiment, and the third embodiment, but may be a disk used for other purposes.

The thickness th of the disc 10 is about 0.3 mm to 2 mm, the outer diameter D is about 30 mm to 270 mm, and the inner diameter d is about 10 mm to 70 mm. Specifically, thickness th is 1.75 mm, 1.6 mm, 1.27 mm, 1.0 mm, 0.8 mm, 0.635 mm, 0.6 mm, 0.5 mm, 0.38 mm, 0.3 mm, outer diameter The size of D is 3.5 inches, 2.8 inches, or 2.5 inches, and the inner diameter d has a disk shape selected from 20 mm and 25 mm.

The disk 10 is made of an aluminum base material made of aluminum or an aluminum alloy plate. The disk 10 has smoothness and surface hardness, and also has rigidity and impact resistance that can suppress the occurrence of vibration due to high-speed rotation. Further, the disc 10 has such a rigidity that it can maintain its posture when it is vertically supported by a support member inserted into the through hole h. The disk 10 is made of a hard material in order to have these characteristics, and may be a glass substrate made of a glass plate material.

Next, an example of the manufacturing process of the disc 10 will be briefly described with reference to FIG.
First, lathe processing including chamfering is performed on an aluminum blank as a base material (step S1) to form a disc-shaped disk. Annealing is applied to the formed disk (step S2).

Next, the disk is subjected to the first stage of grinding (step S3) and the second stage of grinding (step S4) in this order to grind the front and back surfaces of the disk, and anneal the disk (step S5). After annealing, the front and back surfaces of the disk are subjected to pretreatment and electroless nickel-phosphorus plating (NiP), a coating of nickel-phosphorus plating is formed on the disk (step S6), and the disk is annealed ( step S7).

Next, the first polishing step (step S8) and the second polishing step (step S9) are sequentially performed on the disk by the polishing pad to precisely polish the front and back surfaces of the disk. After final polishing, the disk is subjected to final cleaning, and after cleaning, the disk is dried to complete the disk 10 (step S10). Final cleaning includes, for example, ultrasonic precision cleaning using detergents.

After the final cleaning, flatness is measured for all discs 10 by the measuring device 20 according to the first embodiment. The flatness is a ratio representing the degree of flatness of the front surface and the back surface of the disc 10, and may be the same degree as the flatness defined in the JIS standard (JIS B 0621-1984), for example.

After measuring the total flatness, the surface of the disk 10 is inspected by a surface inspection machine (step S11). Discs 10 determined to be defective in the surface inspection (step S11) are subjected to defective processing, and discs 10 determined to be non-defective are subjected to vacuum packing (step S12) and cardboard box packing (step S13), it is shipped to a predetermined destination.

On the other hand, depending on the specifications of the disc 10, the disc 10 determined as non-defective in the surface inspection is subjected to shipping inspection (step S14). Discs 10 determined to be defective in the shipping inspection are processed for defects, and discs 10 determined to be non-defective are shipped in a predetermined packing form to a predetermined destination.

Next, a measuring device 20 according to this embodiment will be described with reference to the drawings.
As shown in FIGS. 3, 4, 5(a) and 5(b), the measuring device 20 includes a first robot transport section 21, a first transfer section 22, an A-surface measuring section 23, and a It has a 1 conveying section 24 and a first driving section 25 .

In addition, the measuring device 20 includes a third conveying section 36, a second delivery section 32, a second conveying section 34, a second driving section 35, a B surface measuring section 33, a second robot conveying section 31, and a control unit (not shown) that controls the operation of each component.

The measuring device 20 loads the disc 10 from a predetermined location by the first robot transport section 21 and measures the shape of the surface of the disc 10, that is, the flatness of the A plane by the A-plane measuring section 23 . Then, the disk 10 is conveyed from the A-surface measuring section 23 to the B-surface measuring section 33, and the B-surface measuring section 33 measures the shape of the back surface of the disk 10, that is, the flatness of the B-surface. The disk 10 after measurement is transported to a predetermined location by the second robot transport section 31. FIG. The measuring device 20 can carry in the disk 10 from a predetermined place, measure the flatness of the A side and the B side, and carry it out to a predetermined place in a fully automatic manner.

In addition, the first transport section 24 and the second transport section 34 of the measuring apparatus 20 according to the present embodiment correspond to the first transport means and the second transport means constituting the transport means of the transport apparatus according to the present invention. The first transfer section 22 and the second transfer section 32 correspond to the transfer section of the conveying apparatus according to the present invention, and the A-surface measuring section 23 and the B-surface measuring section 33 constitute measuring means of the conveying apparatus according to the present invention. The first driving section 25 and the second driving section 35 correspond to the driving means of the conveying apparatus according to the present invention.

The first robot transport section 21 has arms 41 and 42 and a disk holding section 43, as shown in FIG. The first robot transport section 21 is configured to transport the disk 10 from a predetermined location and deliver it to the entry-side transfer section 51 .

The first robot transport unit 21 is configured by a small articulated robot. The articulated robot may be, for example, a vertical articulated robot that can take various postures and can move in a wide range in the direction of gravity, or a horizontal articulated robot whose arm moves in the horizontal direction. good.

As shown in FIGS. 6(a) and 6(b), the disc holding section 43 of the first robot transport section 21 has an upper disc receiver 43a and a grooved hook 43b, and holds the disc 10 vertically. It has a configuration for holding along a direction, ie vertically. The disk holding portion 43 has a grooved hook 43b that moves up and down, and holds the disk 10 between the upper disk receiver 43a and the grooved hook 43b.

The first delivery section 22 has an entry-side delivery section 51 and an exit-side delivery section 52, as shown in FIG. The entry-side transfer section 51 is arranged on the entry side of the first drive section 25, receives the disc 10 from the disc holding section 43 of the first robot transport section 21, moves along the X direction, and moves to the first transport section. It has a configuration for passing the disc 10 to the mounting transport mechanism 71 of the unit 24 .

When receiving and holding the disc 10 from the disc holding unit 43, the entry-side delivery unit 51 changes the vertical posture of the disc 10 vertically held by the disc holding unit 43 as shown in FIGS. 5(b) and 6(c). As shown in FIG. 6(f), it has a configuration in which it is held after being converted into an inclined posture inclined at an inclination angle θ from the vertical direction. That is, when the disk 10 held in the vertical posture is delivered by the disk holding portion 43, the entry-side delivery portion 51 tilts from the vertical posture and holds it in the tilted posture at the tilt angle θ. Note that the tilt angle θ according to the present embodiment corresponds to a predetermined angle according to the measuring device of the present invention, and the tilt angle θ is, for example, a range larger than 0° and smaller than 15°, preferably 5°. It is set at an angle of about 10°.

The output-side transfer section 52 is arranged on the output side of the first drive section 25, receives the disc 10 from the first transfer section 24, and moves in the X direction while maintaining the tilted posture at the tilt angle θ. Then, after converting the orientation of the disk 10 tilted at the inclination angle θ to the vertical orientation, the disk is transferred to the third transfer unit 36 .

The entry-side transfer section 51 and the exit-side transfer section 52 have a function of converting the orientation of the disc 10 between a vertical orientation and an inclined orientation, separately from the transfer mechanism described later. Therefore, it is possible to suppress the generation of unnecessary stress on the disc 10 when it is transported by the transport mechanism, and it is possible to stabilize the attitude including the angle of the disc when the disc 10 is placed on the measuring device 20. It is also possible to improve the measurement accuracy of degrees.

For example, in the case of a thin disk that is rigid enough to stand on its own in a vertical position but bend under its own weight in a horizontal position, stress acts on the disk 10 when the disk position is changed from the vertical position to the inclined position. , the posture of the disk 10 may become unstable. In contrast, in the present embodiment, the orientation of the disc 10 is changed in advance in the entry-side transfer section 51 and the exit-side transfer section 52, and the disc is transferred to the A-surface measurement section 23 and the B-surface measurement section 33 while maintaining the same orientation. handing over. Therefore, the influence of deflection due to its own weight can be suppressed, the posture of the object to be measured when attached to the A-surface measuring section 23 or the B-surface measuring section 33 can be stabilized, and more accurate measurement can be performed.

In addition, in the present embodiment, the entry-side transfer part 51 and the exit-side transfer part 52 are configured to move in the X direction, but the entry-side transfer part 51 and the exit-side transfer part 52 do not move in the X direction. Only the configuration having the function of converting the posture of the disk 10 between the vertical posture and the tilted posture may be used. By transferring the disk 10 in the X direction by the drive section of the delivery section, the working efficiency of the transfer work is improved especially when the distance from the first robot transfer section 21 and the second robot transfer section 31 to the transfer mechanism is long. can be made

As shown in FIGS. 5A and 5B, the A-surface measurement unit 23 includes a measurement unit main body 61, a support 62, a sensor 63, a steady rest 64, and a sensor moving mechanism (not shown). have. The A-side measurement unit 23 holds the disc 10 on the measurement reference surface 61a of the measurement unit main body 61, and moves the sensor 63 arranged to face the measurement reference surface 61a along the measurement reference surface 61a. It is configured to measure the flatness of the surface A, which is the surface of No. 10.

The measurement unit body 61 is provided with a sensor movement mechanism that supports the sensor 63 and moves it along the measurement reference plane 61a. The measurement reference surface 61a is a reference surface for measuring the flatness of the surface of the disc 10 by the A-surface measuring unit 23, and the flatness of the measurement reference surface 61a has a value that is infinitely close to zero. . The disk 10 is supported by the support 62 so that the B surface faces the measurement reference surface 61a and the A surface is exposed.

The support 62 is inserted into the through-hole h of the disk 10, hooks the disk 10, and supports the disk 10 in a suspended state facing the measurement reference surface 61a. It is As shown in FIGS. 6(c) and 6(d), the support 62 has a chamfered portion at the upper corner in the vertical direction. part of the through-hole except for the main surface of the ) are in contact with each other. That is, the disk 10 is hung on the chamfered portion of the support 62 .

When the disc 10 is supported on the measurement reference surface 61a by the support member 62, the anti-vibration 64 stops the vibration of the disc 10 and supports it at a preset inclination angle θ. is provided. As shown in FIGS. 6(c) and 6(d), the steady rest 64 has a chamfered portion at the upper corner in the vertical direction. part of the outer peripheral end face) abut against each other. As shown in FIG. 6(c), the steady rests 64 are provided in pairs so as to be in contact with the left and right sides of the disc lower portion. The steady rest 64 can maintain and stabilize the posture of the disk 10 when the disk 10 is supported by the support 62 , and has the function of increasing the flatness measurement accuracy of the sensor 63 . The distance between the pair of steady rests 64 is such that the lower disk receivers 81b of the holding parts 80 of the mounting transport mechanism 71 and the removal transport mechanism 72, which will be described later, can pass vertically between the pair of steady rests 64. is set.

The sensor 63 is a known sensor that can measure the flatness of the A surface of the disk 10 . The sensor 63 is moved in parallel along the measurement reference plane 61a of the measurement unit main body 61 by the sensor movement mechanism, and at that time, is hung on the support 62 and is held on the measurement reference plane 61a. Measure the flatness.

As the sensor, for example, a laser displacement sensor capable of measuring the flatness with high accuracy by detecting the amount of displacement in the height direction of the A surface of the disk 10 while moving the sensor in a non-contact manner, or a non-contact sensor. There is an eddy current displacement sensor that can measure the flatness with high precision by detecting the intensity of the induced current flowing through the coil by electromagnetic induction while moving by contact.

The sensor moving mechanism has a known drive mechanism, for example, a linear motor (not shown) that emits power in a linear direction. In addition, the drive mechanism is not limited to one that generates power in a linear direction, and a rotating electric machine such as a motor, and a conversion mechanism such as a timing pulley, a timing belt, and a ball screw that convert the rotary motion of the rotating electric machine into linear motion. Also included is a movement mechanism having

The first transport section 24 has a configuration in which the disc 10 is transported parallel to the measurement reference plane 61 a when the disc 10 is transported to face the A-surface measurement section 23 . As shown in FIGS. 3 and 4, the first transfer section 24 has a configuration capable of shuttle-conveying the disc 10 by reciprocating along the X direction between the entry-side transfer section 51 and the exit-side transfer section 52 . is doing. An attachment transport mechanism 71 and a removal transport mechanism 72 are attached to the first transport section 24 . The attachment transport mechanism 71 and the removal transport mechanism 72 each have a holding portion 81 that holds the disc 10 . The mounting transport mechanism 71 receives the disc 10 from the entry-side delivery portion 51 and sets it on the measurement reference surface 61 a of the measuring portion main body 61 . is removed and transferred to the delivery side transfer section 52. The attaching transport mechanism 71 and the removing transport mechanism 72 are oriented so that the A surface of the disc 10 is exposed on the side away from the measuring unit main body 61, and the B surface of the disc 10 faces the measuring unit main body 61 on the side approaching it. The disc 10 is held and transported so that it is oriented.

As shown in FIGS. 5(a), 6(e) and 6(f), the holding portion 81 has a hook portion 81a, a lower disk receiver 81b, an upper disk receiver 81c, and a frame 81d. ing. The hook portion 81a is configured to be inserted into the through hole h of the disc 10 to hook the inner wall portion of the through hole h, and the lower disc receiver 81b is configured to hold the lower portion of the disc 10 thereon. The upper disc receiver 81c is fixed to the frame 81d, and is configured to abut on the upper portion of the disc 10 to restrict the upward movement of the disc 10. As shown in FIG. The hook portion 81a and the lower disk receiver 81b are provided so as to be movable integrally with respect to the frame 81d. to hold and release the disc 10.

The attachment transport mechanism 71 and the removal transport mechanism 72 are integrally fixed to the first transport portion 24 of the first drive portion 25 , and the first transport portion 24 is moved by the horizontal movement portion 91 of the first drive portion 25 . As a result, it reciprocates in the horizontal direction, that is, along the X direction shown in FIG. In addition, the first driving section 25 has a width direction moving section 92 between the first conveying section 24 and the horizontal moving section 91 , and the width direction moving section 92 moves the first conveying section 24 . Thus, the attachment transport mechanism 71 and the removal transport mechanism 72 can be reciprocated in the vertical direction toward or away from the measurement reference surface 61a, that is, in the Y direction shown in FIG. 5(b). there is

The attachment transport mechanism 71 can arrange the holding portion 81 at a position facing the entry-side transfer portion 51 by the horizontal movement portion 91 of the first drive portion 25 (see FIG. 7(1)). Then, the holding portion 81 is moved in the Y direction by the width direction moving portion 92 of the first driving portion 25, the hook portion 81a is inserted into the through hole h of the disc 10, and the lower disc receiver 81b is arranged below the disc 10. Then, the upper disk receiver 81c can be arranged to face the upper part of the disk 10 (see FIG. 7(2)). Then, the hook portion 81a and the lower disk receiver 81b are lifted along the Z direction (see FIG. 7(3)), and the disk 10 is sandwiched between the upper disk receiver 81c and lifted, whereby the entry side transfer portion 51 is lifted. , and can be held in the holding portion 81 (see FIG. 7(4)).

Then, the mounting transport mechanism 71 is moved in the X direction by the horizontal movement part 91 of the first driving part 25, and the holding part 81 is arranged at a position facing the measurement reference plane 61a, and the holding part 81 is moved along the Y direction. to move it closer to the measurement reference surface 61a of the measurement unit main body 61. As shown in FIG. Thereby, the support 62 of the measurement unit body 61 can be inserted into the through hole h of the disk 10 . Then, the hook portion 81a and the lower disk receiver 81b are lowered along the Z direction to release the disk 10 held by the holding portion 81. As shown in FIG. As a result, the disk 10 is held on the measurement reference plane 61a by hooking the support 62 on the through hole h and bringing the steady rest 64 into contact with the lower part of the disk 10 (see FIGS. 6C and 6D). reference).

When the disk 10 held by the holding portion 81 is held on the measurement reference surface 61 a of the measuring portion main body 61 , the mounting conveying mechanism 71 moves the first conveying portion 24 out by the horizontal movement portion 91 of the first driving portion 25 . The holding portion 81 is moved from the side transfer portion 52 toward the entry side transfer portion 51 and arranged at a position facing the entry side transfer portion 51 . At the timing when the first conveying section 24 moves from the delivery side transfer section 52 toward the entry side delivery section 51, the sensor 63 moves from the entry side delivery section 51 side toward the delivery side delivery section 52 side, or toward the delivery side delivery section 52 side. The flatness of the A surface of the disk 10 that is moved from the output side transfer section 52 side toward the entry side transfer section 51 side and held on the measurement reference surface 61a is measured.

The removal transport mechanism 72 has a holding portion 81 like the attachment transport mechanism 71 . When the removal transport mechanism 72 is moved in the X direction by the horizontal movement part 91 of the first drive part 25 and the holding part 81 of the attachment transport mechanism 71 is arranged at a position facing the entry side transfer part 51, the removal transport mechanism 72 is moved. The holding portion 81 of the transport mechanism 72 for external use is arranged at a position facing the measurement reference surface 61a.

The removal transport mechanism 72 moves the holding portion 81 in the Y direction by the width direction moving portion 92 of the first driving portion 25 while the holding portion 81 is arranged at a position facing the measurement reference surface 61a. Then, the hook portion 81a is inserted into the through hole h of the disc 10 held on the measurement reference surface 61a, the lower disc receiver 81b is arranged below the disc 10, and the upper disc receiver 81c faces the upper portion of the disc 10. placed. Then, the hook portion 81a and the lower disk receiver 81b are raised along the Z direction, and the disk 10 is held between the upper disk receiver 81c and lifted to remove it from the measurement reference surface 61a and to be held by the holding portion 81.

Then, the removal transport mechanism 72 is moved in the X direction by the horizontal movement part 91 of the first drive part 25 , and arranges the holding part 81 at a position facing the delivery side transfer part 52 . Then, the hook portion 81a and the lower disc receiver 81b are lowered along the Z direction to release the disc 10 from being gripped by the holding portion 81 cooperating with the upper disc receiver 81c. As a result, the disc 10 is held by the delivery side transfer section 52 .

The first drive section 25 has a horizontal movement section 91 and a width direction movement section 92, as shown in FIG. The horizontal movement unit 91 has a known drive mechanism, for example, a linear motor (not shown) that generates power in a linear direction. In addition, the drive mechanism is not limited to one that generates power in a linear direction, and a rotating electric machine such as a motor, and a conversion mechanism such as a timing pulley, a timing belt, and a ball screw that convert the rotary motion of the rotating electric machine into linear motion. and may have.

The horizontal movement section 91 is configured to reciprocate the first transport section 24 in the X direction. The width-direction moving portion 92 is configured to reciprocate the holding portion 81 in the direction perpendicular to the measurement reference plane 61a, that is, in the Y direction shown in FIG.

As shown in FIG. 3, the disc 10 is transferred from the delivery side transfer section 52 to the third transfer section 36, is transferred to the opposing second transfer section 32, and is transferred to the entry side transfer section 51 of the second transfer section 32. passed to.

The second transfer section 32 has an entry-side transfer section 51 and an exit-side transfer section 52 like the first transfer section 22 . , delivery side delivery section 52 to deliver to the second robot transfer section 31 .

As shown in FIG. 3 , the B-surface measuring section 33 is arranged to face the A-surface measuring section 23 . The B-surface measurement unit 33, like the A-surface measurement unit 23, has a measurement unit main body 61, a support 62, a sensor 63, a steady rest 64, and a sensor movement mechanism (not shown). The B-side measurement unit 33 holds the disc 10 on the measurement reference surface 61a of the measurement unit main body 61, and moves the sensor 63 arranged to face the measurement reference surface 61a along the measurement reference surface 61a. The flatness of the B surface, which is the back surface of 10, is measured.

The second conveying section 34 is configured such that the disc 10 is conveyed parallel to the measurement reference surface 61 a when the disc 10 is conveyed to face the B-side measuring section 33 . The second conveying portion 34, like the first conveying portion 24, is configured to shuttle-convey the disc 10 by reciprocating in the X direction between the entry-side transfer portion 51 and the exit-side transfer portion 52. A transport mechanism 71 and a removal transport mechanism 72 are attached.

The attachment transport mechanism 71 and the removal transport mechanism 72 are integrally fixed to the second transport portion 34 of the second drive portion 35 , and the second transport portion 34 is moved by the horizontal movement portion 91 of the second drive portion 35 . is reciprocated in the X direction by being In addition, the second driving section 35 has a widthwise moving section 92 between the second conveying section 34 and the horizontal moving section 91 , and the widthwise moving section 92 moves the second conveying section 34 . , the attachment transport mechanism 71 and the removal transport mechanism 72 can be reciprocated in the Y direction, which is the vertical direction toward or away from the measurement reference surface 61 a of the B-surface measurement unit 33 .

The third transfer section 36 is composed of a disk holding section (not shown) and a transfer drive section (not shown). The third transfer section 36 receives the disc 10 in the vertical posture from the delivery side transfer section 52 , holds the disc 10 while maintaining the vertical posture in the disc holding section, and delivers the disc 10 to the entry side delivery section 51 of the second delivery section 32 . have a configuration.

As shown in FIG. 3, the transport drive section of the third transport section 36 has a configuration that reciprocates the disk holding section of the third transport section 36 in the Y direction.

The control unit includes a central processing unit that performs arithmetic processing and a memory that stores a control program, and operates each component that constitutes the measuring device 20, that is, receives the disk 10 from the first robot transport unit 21, and It is configured to measure the flatness of the A surface and the B surface and control each operation until the disk 10 for which the measurement has been completed is transferred to the second robot transport unit 31 .

Next, the operation of the measuring device 20 according to this embodiment will be described with reference to the drawings.
Since the operation of each component of the measuring device 20 is controlled by the control unit, the operation of each component will be mainly described, and the explanation that each operation of each component is controlled by the control unit will be explained. are omitted. All the operations of each component of the measuring device 20 are automatically performed.

The measuring device 20 first measures the flatness of the A side of the disc 10 with the A side measuring section 23 and then measures the flatness of the B side of the disc 10 with the B side measuring section 33 .

(Measurement of flatness of surface A)
In the measuring device 20, first, the disk 10 at a predetermined location is held in the vertical posture shown in FIGS. It moves in the X direction, the Y direction, and the Z direction from a predetermined place and is conveyed to the entry side transfer section 51 of the first transfer section 22 .

As shown in FIG. 8A, the conveyed disc 10 is transferred from the disc holding portion 43 to the entry-side transfer portion 51 of the first transfer portion 22. When transferred, the disc 10 is tilted, for example, from the vertical direction. It is held by the entry-side transfer section 51 of the first transfer section 22 after being converted into a 5° tilted posture.

Next, as shown in FIG. 8(b), the entry-side transfer section 51 is moved in the X direction by the horizontal movement section 91 and reaches the attachment conveying mechanism 71 of the first conveying section 24, whereupon the disc 10 enters. It is transferred from the side transfer section 51 to the holding section 81 of the mounting transport mechanism 71 . At this time, the transferred disk 10 is maintained in an inclined posture.

Next, the first conveying unit 24 is moved in the X direction by the horizontal moving unit 91, and the holding unit 81 of the mounting conveying mechanism 71 moves to the A surface measuring unit as shown in FIGS. 8(c) and 9(a). 23 is arranged at a position facing the measurement reference surface 61a. Then, the holding portion 81 of the mounting transport mechanism 71 is lifted from the position shown in FIG. 9(a) in the Z direction indicated by the arrow a, and continues along the Y direction as shown in FIG. 9(b). The disc 10 is placed at a position where the support 62 is inserted into the through hole h of the disc 10 by moving in a direction approaching the surface 61a.

After stopping, the holding portion 81 of the mounting transport mechanism 71 descends along the Z direction and hangs the disk 10 on the support 62 to hold the disk 10 on the measurement reference surface 61a. Next, in the mounting transport mechanism 71, the first transport portion 24 is moved in the Y direction by the width direction moving portion 92, separated from the measurement reference surface 61a, and returned to the position shown in FIG. 9(a). Then, as shown in FIG. 10( a ), the first conveying portion 24 is moved in the X direction by the horizontal moving portion 91 , and the holding portion 81 of the removal conveying mechanism 72 moves to the measurement reference surface 61 a of the A-surface measuring portion 23 . is placed opposite to the

When the mounting transport mechanism 71 returns to the position shown in FIG. 10(a), the sensor 63 of the A-surface measuring section 23 is moved by the sensor moving mechanism in the direction of the arrow a shown in FIG. 5(a). , passes over the A side of the disk 10. FIG. By passing the sensor 63 over the A side of the disc 10, the flatness of the A side is measured. In the example shown in FIG. 5( a ), the sensor 63 moves in the direction of the arrow a from a state in which the sensor 63 is waiting at a position biased toward the entry-side transfer section 51 relative to the holding section 81 . is on standby at a position closer to the delivery side transfer section 52 than the holding section 81, the flatness is measured by moving in the direction opposite to the direction of the arrow a.

The holding portion 81 of the removal transport mechanism 72 is placed at a position facing the support member 62 on the measurement reference surface 61a of the A-surface measuring unit 23 by the first driving unit 25, and the flatness measurement of the A-surface by the sensor 63 is completed. 9(a) and 9(b), the holding portion 81 of the removal conveying mechanism 72 is moved along the Y direction by the width direction moving portion 92 to the measurement reference plane 61a. is moved toward the The hook portion 81 a is inserted into the through hole h of the disc 10 , the lower disc receiver 81 b is arranged below the disc 10 , and the upper disc receiver 81 c is arranged to face the upper portion of the disc 10 .

Then, the holding portion 81 of the removal transport mechanism 72 raises the hook portion 81a and the lower disk receiver 81b along the Z direction, holds the disk 10 between it and the upper disk receiver 81c, and lifts the disk 10 to the measurement reference plane. Remove from 61a and hold. Then, the holding portion 81 is lifted in the Z direction to remove the disc 10 from the support 62, moved in the Y direction away from the measurement reference surface 61a, and further lowered in the Z direction to transport the disc 10 for mounting. As with the holding portion 81 of the mechanism 71, it returns to the position shown in FIG. 9A and stops.

In this state, the disk 10 is held in an inclined posture by the holding portion 81 of the removal transport mechanism 72 . Furthermore, the holding portion 81 of the mounting transport mechanism 71 and the holding portion 81 of the removal transport mechanism 72 simultaneously prepare for mounting the disk 10 to be measured next and remove the disk 10 that has finished measurement. It has a function of improving the transfer efficiency when continuously measuring the disk 10 of .

Next, the attachment transport mechanism 71 and the removal transport mechanism 72 of the first transport unit 24 are moved by the horizontal movement unit 91 along the X direction in a direction approaching the output side transfer unit 52, as shown in FIG. 10(b). Thus, the holding portion 81 of the removal transport mechanism 72 of the first transport portion 24 is stopped at a position facing the delivery side transfer portion 52 . Then, the disc 10 is transferred from the holding portion 81 of the removal transport mechanism 72 to the delivery side transfer portion 52 . Even in this state, the disc 10 is held in an inclined posture on the delivery side transfer section 52 .

Subsequently, as shown in FIG. 10(c), the output-side transfer section 52 moves away from the removal transport mechanism 72 and stops. At this time, the disk 10 is converted from the inclined posture to the vertical posture. Then, as shown in FIG. 3, the disc 10 is transferred from the delivery side transfer section 52 to a disc holding section (not shown) of the third transfer section 36 .

The third conveying section 36 is moved in the Y direction away from the delivery side transfer section 52 by a transfer driving section (not shown), and reaches the entry side transfer section 51 on the side of the B side measuring section 33 that measures the B side. Then, the disc 10 is transferred from the disc holding portion of the third conveying portion 36 to the entry side transfer portion 51 on the B side measuring portion 33 side.

(Measurement of flatness of B surface)
The measurement of the B side is performed in the same manner as the measurement of the A side. The conveying direction and the conveying direction of the disc 10 by the second conveying section 34 are opposite to each other. However, the disk 10 itself is transported from the start of transportation by the first robot transport unit 21 through the first transport unit 24, the third transport unit, and the second transport unit 34 to the completion of transport by the second robot transport unit 31. transported in one direction.

In the measurement of the B side, first, as shown in FIG. 3, the entry side transfer section 51 on the side of the B side measurement section 33 receives the disk 10 from the second transfer section 34, and is tilted, for example, by 5° from the vertical direction. tilted posture. Then, it moves in the X direction toward the output side of the second driving section 35 and passes it to the attachment conveying mechanism 71 of the second conveying section 34 . The disk 10 is transferred from the entry-side transfer section 51 to the holding section 81 of the mounting transfer mechanism 71 of the second transfer section 34 while maintaining the tilted posture of 5° from the vertical direction.

Next, the second conveying portion 34 is moved in the X direction toward the output side of the second driving portion 35, and the holding portion 81 of the attaching conveying mechanism 71 is provided on the measurement reference surface 61a of the B surface measuring portion 33. It stops at a position facing the support 62 where it is. Then, the holding portion 81 of the mounting transport mechanism 71 rises at one end in the Z direction and moves in the Y direction toward the support 62, and the support 62 is inserted into the through hole h of the disk 10. position.

After stopping, the holding portion 81 of the mounting transport mechanism 71 descends, and the disk 10 is mounted on the support 62 by hanging the disk 10 on the support 62 . Next, the mounting transport mechanism 71 moves in the Y direction away from the measurement reference surface 61a and returns to its original position. Then, the second conveying section 34 is moved in the X direction toward the entry side of the second driving section 35 , and the holding section 81 of the removal conveying mechanism 72 is placed in the original position facing the measurement reference surface 61 a of the B-surface measuring section 33 . position.

When the mounting transport mechanism 71 returns to its original position, the sensor 63 of the B-side measuring section 33 is moved by the sensor moving mechanism to pass over the B-side of the disc 10 . By passing the sensor 63 over the B side of the disc 10, the flatness of the B side is measured.

The holding portion 81 of the removal transport mechanism 72 is placed at a position facing the support member 62 on the measurement reference surface 61a of the surface B measuring unit 33 by the second driving unit 35, and the flatness measurement of the surface B by the sensor 63 is completed. Then, the holding portion 81 of the mounting transport mechanism 71 is moved along the Y direction by the width direction moving portion 92 in a direction approaching the measurement reference surface 61a. The hook portion 81 a is inserted into the through hole h of the disc 10 , the lower disc receiver 81 b is arranged below the disc 10 , and the upper disc receiver 81 c is arranged to face the upper portion of the disc 10 .

Then, the removal transport mechanism 72 removes the disk 10 from the support 62 by lifting the holding portion 81 in the Z direction, moves in the Y direction in a direction away from the measurement reference surface 61a, and further moves in the Z direction. Lower, return to original position and stop. In this state, the disk 10 is held in an inclined posture by the holding portion 81 of the removal transport mechanism 72 .

Next, the second transport section 34 is moved in the X direction toward the delivery side of the second drive section 35 , and the holding section 81 of the removal transport mechanism 72 is stopped at a position facing the delivery side transfer section 52 . Then, the disc 10 is transferred from the holding portion 81 of the removal transport mechanism 72 to the delivery side transfer portion 52 . In this state, the disc 10 is held in an inclined posture on the delivery side transfer section 52 .

Subsequently, the output-side transfer section 52 moves away from the removal transport mechanism 72 and stops. Then, as shown in FIG. 3 , the disc 10 is transferred from the delivery side transfer section 52 to the disc holding section 43 of the second robot transport section 31 .

At this time, the disc 10 is converted from the tilted posture to the vertical posture, and the second robot transport section 31 transports the disc 10 to a predetermined location. Subsequently, the operation from the start of transportation by the first robot transportation unit 21 to the end of transportation by the second robot transportation unit 31 is repeated, and the flatness of the A surface and the B surface of all the disks 10 is measured. is completed, the operation of the measuring device 20 ends.

The effect of the measuring device 20 according to this embodiment will be described below.
(1) The measuring device 20 according to the present embodiment includes an A-side measuring section 23 and a B-side measuring section 33 of the disc 10, and a first conveying section 24 and a second conveying section . The A-surface measuring section 23 and the B-surface measuring section 33 have a measurement reference plane 61a inclined at an inclination angle θ° from the vertical direction. It has a holding portion 81 that holds the disk 10 so as to be parallel to 61a. The holding portion 81 is configured to attach and detach the disc 10 to and from the A-side measuring portion 23 or the B-side measuring portion 33 while maintaining the tilted attitude of the disc 10 at the tilt angle θ°.

In the measuring device 20 according to the present embodiment, the A-surface measuring section 23 and the B-surface measuring section 33 have a measurement reference plane 61a inclined at an angle of θ° from the vertical direction, and the disk 10 is positioned on the measurement reference plane 61a. supported along. As a result, it is possible to effectively suppress the deflection of the disk caused by the disk being horizontally held on the measuring table, which is a problem in the conventional measuring apparatus, and to obtain the effect that the flatness can be measured more accurately. .

Further, the holding portion 81 is configured to attach and detach the disk 10 to and from the A-surface measuring portion 23 or the B-surface measuring portion 33 while maintaining the tilted attitude of the disk 10 at the tilt angle of θ°. there is As a result, the inclined posture can be maintained with high precision, and the disk 10 can be smoothly attached to and removed from the A-side measuring portion 23 or the B-side measuring portion 33 . Furthermore, the influence of deflection due to its own weight can be suppressed, and the posture of the object to be measured when placed on the measuring device can be stabilized.

Further, the measuring apparatus 20 according to the first embodiment includes a first robot transport section 21 and a second robot transport section 31, and after the disc 10 is transported from the first robot transport section 21, the second Since the discs 10 are automatically measured until they are transported by the robot transport unit 31, there is an effect that a large number of discs 10 can be measured relatively quickly.

(2) In the measuring device 20 according to the present embodiment, the first transport section 24 has the attachment transport mechanism 71 and the removal transport mechanism 72 . Then, the disk 10 is attached to the A-surface measuring section 23 or the B-surface measuring section 33 by the mounting transport mechanism 71, and the disk 10 is removed from the A-surface measuring section 23 or the B-surface measuring section 33 by the removing transport mechanism 72. be done. As a result, the disc 10 can be transported quickly, and the disc 10 can be smoothly attached to and detached from the A-side measuring portion 23 or the B-side measuring portion 33, and can be transported efficiently. effect is obtained.

(3) In the measuring device 20 according to the present embodiment, when the first conveying unit 24 conveys the disc 10 facing the A-surface measuring unit 23, and when the second conveying unit 34 conveys the disc 10 to the B-surface measuring unit 33, When the disk 10 is conveyed facing each other, the disk 10 is conveyed parallel to the measurement reference plane 61a. As a result, it is possible to efficiently transport a large number of discs 10 without applying unnecessary stress to the discs 10 .

(4) In the measuring device 20 according to the present embodiment, the A-side measuring unit 23 and the B-side measuring unit 33 are arranged to face each other, so that the arrangement space for the components of the measuring device 20 is reduced. The effect that the device 20 can be made compact can be obtained.

(5) In the measuring device 20 according to the present embodiment, the first conveying section 24 is arranged to face the A-plane measuring section 23, the second conveying section 34 is arranged to face the B-plane measuring section 33, and the The conveying direction of the first conveying portion 24 and the conveying direction of the second conveying portion 34 are configured to be opposite to each other. As a result, the space for arranging the first conveying section 24 and the A-surface measuring section 23 and the second conveying section 34 and the B-surface measuring section 33 are reduced, and the measuring apparatus 20 can be made compact. can get.

(6) The measuring device 20 according to the present embodiment is arranged between a vertical posture in which the disk 10 is positioned along the vertical direction and an inclined posture in which the disk 10 is positioned at an inclination angle of θ° from the vertical direction. and a tilted attitude. As a result, the disc 10 transported from the first robot transport unit 21 in a vertical posture can be smoothly changed to an inclined posture by the first transfer unit 22 , and the disc 10 transported in an inclined posture can be transferred to the second transfer unit 32 . It smoothly converts to a vertical posture. That is, there is no need for the process of converting the posture to an inclined posture in the transport section, and the effects of suppressing unnecessary stress generated in the disk 10 and stabilizing the posture of the object to be measured when placed on the measuring apparatus are obtained. be done.

(7) The measuring device 20 according to the present embodiment has a horizontal movement section 91 that drives the first conveying section 24, and the first driving section 25 is arranged below the measuring section main body 61 in the vertical direction. there is With this configuration, fine particles generated from the first driving section 25 fall downward as they are, and are less likely to adhere to the measurement section main body 61 positioned above the first driving section 25 . Therefore, the risk of contamination of the measurement unit main body 61 by the generated dust is reduced.

(8) In the measuring apparatus 20 according to the present embodiment, the first conveying section 24 is configured to be able to reciprocate in the horizontal direction and in the direction perpendicular to the measurement reference plane. The effect of being able to be transported and hung on the support 62 of the A-surface measuring section 23 is obtained. In addition, since the first conveying unit 24 conveys the disc 10 from the entry side to the exit side of the measuring device while maintaining the direction of the main surface on the measurement reference surface side, a large number of discs 10 can be measured quickly without waste, It is possible to obtain the effect that the disc 10 can be transported.

(9) The measuring device 20 according to the present embodiment has a through-hole through which the disk 10 penetrates in the plate thickness direction. , it is possible to stably hold the disk 10 in an inclined posture without generating excessive stress.

(10) The measuring device 20 according to this embodiment has a support 62 that supports the disc 10 on the measurement reference surface 61a and a steady rest 64 that contacts the disc 10 supported by the support 62 . As a result, vibration of the disk 10 supported by the support 62 is suppressed, and the posture of the disk 10 is maintained and stabilized.

In addition, in the measuring apparatus 20 according to the first embodiment, the case where the A-surface measuring section 23 and the B-surface measuring section 33 are arranged facing each other has been described. However, the measuring apparatus according to the present invention may be configured with a structure other than the structure in which the A-surface measuring section 23 and the B-surface measuring section 33 are arranged facing each other.

For example, the measuring apparatus 20A may be configured to have a structure in which the A-plane measuring section 23 and the B-plane measuring section 33 are arranged in parallel in the same direction, and the A-plane measuring section 23 and the B-plane measuring section 33 may be oriented in the same direction. The measuring device 20B may have a structure in which they are arranged in parallel in different directions.

In the present embodiment, the measurement apparatus 20 has both the A-surface measurement unit 23 and the B-surface measurement unit 33. However, only one of them may be used. At least one of the surface measuring units 33 may be provided.

(Second embodiment)
A measuring device 20A according to the second embodiment will be described below with reference to the drawings.
As shown in FIG. 11, in a measuring device 20A according to the second embodiment, unlike the measuring device 20 according to the first embodiment, the A-plane measuring section 23 and the B-plane measuring section 33 are arranged in parallel in the same direction. It is In addition, the same code|symbol as the measuring device 20 which concerns on 1st Embodiment is attached|subjected to the component similar to the measuring device 20 which concerns on 1st Embodiment, and detailed description is abbreviate|omitted.

A measuring apparatus 20A according to the second embodiment includes an A-side measuring unit 11, a B-side measuring unit 12, and a front/back reversing mechanism 13. As shown in FIG. The measuring device 20A measures the flatness of the A side of the disc 10 with the A side measuring unit 11, reverses the front and back of the disc 10 with the front/back reversing mechanism 13, and measures the flatness of the B side of the disc 10 with the B side measuring unit 12. is configured to measure

The A-side measurement unit 11 includes an entry-side delivery section 51 , a first transport section 24 , an A-side measurement section 23 , and a horizontal movement section 91 . The B-side measuring unit 12 includes a B-side measuring section 33 , a second conveying section 34 , and an exit-side transfer section 52 .

The front/back reversing mechanism 13 is composed of a known reversing mechanism (not shown). When the disc 10 is received from the A-side measuring unit 11 with the A-side of the disc 10 facing the measurement reference surface 61 a of the A-side measuring unit 23 , the front/back inversion mechanism 13 receives the disc 10 from the B-side measuring unit 33 . The disc 10 is passed to the B-side measurement unit 12 while maintaining its posture so that the disc 10 faces the measurement reference surface 61a. The disc 10 is reversed between the A side and the B side by the front/back reversing mechanism 13 .

Next, operation of the measuring device 20A according to the second embodiment will be described with reference to the drawings. The operations of the components denoted by the same reference numerals as those of the measuring device 20 according to the first embodiment operate in the same manner as the components of the measuring device 20, so they will be briefly described.

In the measurement apparatus 20A, first, when the disk 10 is received by the entrance-side transfer section 51 shown in FIG. It moves in a direction approaching the conveying section 24 and stops at a position where the disc is transferred to the first conveying section 24 .

After the disc 10 is stopped, the disc 10 is transferred to the holding portion 81 of the attachment transport mechanism 71 of the first transport portion 24 while maintaining the tilted posture, and the attachment transport mechanism 71 is moved by the horizontal movement portion 91 to move the disc 10. is hung on the support 62 of the A-plane measuring section 23 . Subsequently, the sensor 63 is moved to measure the flatness of the A surface of the disk 10. FIG. Then, the disc 10 is removed from the support 62 by the removal transport mechanism 72 , and the removal transport mechanism 72 is moved by the horizontal movement section 91 and stops at the position where the disc 10 is transferred to the front/back reversing mechanism 13 .

After the disk 10 is stopped, the disk 10 is transferred to the front/back reversing mechanism 13, and the front/back of the disk 10 is reversed. When the disc 10 is reversed, the front/back reversing mechanism 13 changes the tilted attitude of the disc 10 to the tilted attitude toward the B-surface measuring section 33 side. As a result, the tilted posture of the disc 10 is maintained in the same direction as before it was transferred to the front/back reversing mechanism 13 .

The disk 10 whose front and back sides have been reversed is transferred to the holding portion 81 of the mounting transport mechanism 71 of the second transport portion 34 while maintaining the inclined posture. The disk 10 is hung on the support 62 of the B-side measuring section 33 by the mounting transport mechanism 71 .

Subsequently, the sensor 63 is moved to measure the flatness of the B surface of the disk 10. FIG. Then, the disk 10 is removed from the supporting body 62 by the removal transport mechanism 72, and the removal transport mechanism 72 is moved by the horizontal movement part 91 and stopped at the position where it is handed over to the next transport step.

Effects of the measuring device 20A according to the second embodiment will be described below. The measurement device 20A is configured in the same manner as the measurement device 20 according to the first embodiment, and operates in the same manner as the measurement device 20. Therefore, the measurement device 20A can obtain the same effects as the measurement device 20.

That is, the measurement apparatus 20A according to the second embodiment has the effect of solving the problem of the deflection of the disk in the conventional measurement apparatus. In addition, since there is no possibility that the disk 10 is bent, the flatness can be measured more accurately.

Further, the holding portion 81 of the first conveying portion 24 of the measuring apparatus 20A according to the second embodiment holds the disk 10 and moves it in the vertical direction while maintaining the tilted attitude of the disk 10 at the tilt angle of θ°. , and is configured to be attached to and detached from the A-side measuring portion 23 or the B-side measuring portion 33 of the disk 10 . As a result, it is possible to smoothly attach and detach the disk 10 to and from the A-side measuring portion 23 or the B-side measuring portion 33 . Furthermore, the influence of deflection due to its own weight can be suppressed, and the posture of the object to be measured when placed on the measuring device can be stabilized.

In addition, in the measuring apparatus 20A according to the second embodiment, the front/back reversing mechanism 13 turns the disk 10 upside down, faces the disk 10 toward the A-surface measuring unit 23, and rotates the disk 10 without changing the inclination posture of the disk 10. The flatness of the B surface of the disc 10 may be measured by the A surface measuring unit 23 so as to be passed to the first transport unit 24 of the surface measuring unit 11 . This configuration eliminates the need for the B-surface measurement unit 12 for measuring the B-surface, thereby obtaining the effect of simplifying the configuration.

(Third embodiment)
As shown in FIG. 12, the measuring apparatus 20B according to the third embodiment is different from the measuring apparatus 20 according to the first embodiment and the measuring apparatus 20A according to the second embodiment. 33 are arranged in parallel in different directions. Components similar to those of the measuring device 20 according to the first embodiment are denoted by the same reference numerals as those of the measuring device 20 according to the first embodiment, and detailed description thereof is omitted.

A measuring apparatus 20B according to the third embodiment includes an A-plane measuring unit 11, a B-plane measuring unit 12, and an inclination conversion mechanism 14, as shown in FIG. The measuring device 20B measures the flatness of the A side of the disc 10 with the A side measuring unit 11, converts the tilt attitude of the disc 10 with the tilt conversion mechanism 14, and measures the flatness of the B side of the disc 10 with the B side measuring unit 12. It has a configuration for measuring the degree.

The A-side measurement unit 11 includes an entry-side delivery section 51 , a first transport section 24 , an A-side measurement section 23 , and a horizontal movement section 91 . The B-side measuring unit 12 has a B-side measuring section 33 , a second conveying section 34 , and a delivery side transfer section 52 . The A-surface measuring section 23 and the B-surface measuring section 33 are arranged separately on the right side, which is one side in the width direction, and the left side, which is the other side in the width direction, with respect to the movement direction of the horizontal movement section 91 .

The tilt conversion mechanism 14 is composed of an entry-side transfer portion 14a, an exit-side transfer portion 14b, and a known conversion mechanism (not shown). The conversion mechanism receives the disk 10 from the A-surface measuring unit 11 in a posture in which the A-surface of the disk 10 faces the measurement reference surface of the A-surface measuring unit 23 in parallel. Then, the posture of the disc 10 is changed so that the B side of the disc 10 faces the B side measuring section 33 in parallel, and the disc 10 is transferred to the B side measuring unit 12 .

Next, operation of the measuring device 20B according to the third embodiment will be described with reference to the drawings. The operations of the components denoted by the same reference numerals as those of the measuring device 20 according to the first embodiment operate in the same manner as the components of the measuring device 20, so they will be briefly described.

In the measurement apparatus 20B, first, when the disk 10 is received by the entry-side transfer section 51, the disk 10 is converted into a tilted posture that is tilted toward the A-surface measurement section 23 side. Then, while the disc 10 remains in the tilted posture, the entry-side transfer section 51 moves in the X direction toward the first transport section 24 and stops at the position where the disc 10 is delivered to the first transport section 24 .

After the disc 10 is stopped, it is transferred to the holding portion 81 of the mounting transport mechanism 71 of the first transport portion 24 while maintaining the tilted posture, and the mounting transport mechanism 71 is moved by the horizontal movement portion 91 so that the disc 10 is moved to the A side. It is hung on the support 62 of the measuring part 23 . Subsequently, the sensor 63 is moved to measure the flatness of the A surface of the disk 10. FIG. Then, the disk 10 is removed from the support 62 by the removal transport mechanism 72, and the removal transport mechanism 72 is moved by the horizontal movement part 91 to transfer the disk 10 to the input side delivery part 14a of the tilt conversion mechanism 14. stop at .

After the disc 10 is stopped, the disc 10 is transferred to the input side transfer section 14a of the tilt conversion mechanism 14, and the tilt of the disc 10 is converted to the tilt to the opposite side. That is, the tilted posture tilted toward the A-plane measuring section 23 side is converted to the tilted posture tilted toward the B-plane measuring section 33 side. Then, the disk 10 is conveyed to the exit-side transfer section 14 b of the tilt conversion mechanism 14 . The disk 10 is transferred to the mounting transport mechanism 71 at the output-side transfer portion 14 b and hung on the support 62 of the B-surface measuring portion 33 by the mounting transport mechanism 71 .

Subsequently, the sensor 63 is moved to measure the flatness of the B surface of the disk 10. FIG. Then, the disk 10 is removed from the supporting body 62 by the removal transport mechanism 72, and the removal transport mechanism 72 is moved by the horizontal movement part 91 and stopped at the position where it is handed over to the next transport step.

The effect of the measuring device 20B according to the third embodiment will be described below.
The measurement device 20B is configured in the same manner as the measurement device 20A and the measurement device 20 according to the first embodiment, and operates in the same manner as the measurement device 20. Therefore, the measurement device 20B has the same effects as the measurement device 20. be done.

In other words, the measuring device 20B according to the third embodiment has the effect of solving the problem of the deflection of the disc in the conventional measuring device. In addition, since there is no possibility that the disk 10 is bent, the flatness can be measured more accurately.

Further, the holding portion 81 of the first conveying portion 24 of the measuring device 20B according to the third embodiment holds the disk 10 and moves it in the vertical direction while maintaining the tilted attitude of the disk 10 at the tilt angle of θ°. , and is configured to be attached to and detached from the A-side measuring portion 23 or the B-side measuring portion 33 of the disk 10 . As a result, it is possible to smoothly attach and detach the disk 10 to and from the A-side measuring portion 23 or the B-side measuring portion 33 . Furthermore, the influence of deflection due to its own weight can be suppressed, and the posture of the object to be measured when placed on the measuring device can be stabilized.

As described above, the first to third embodiments of the present invention have been described in detail, but the present invention is not limited to the above-described first to third embodiments, and is described in the scope of claims. Various design changes can be made without departing from the gist of the present invention.
In particular, in each of the above-described embodiments, the case where the measuring device according to the present invention is used as a measuring device for measuring an object to be measured has been described as an example, but the present invention is not limited to this. It can also be used as an inspection device for inspection or as a sorting device for sorting non-defective products and defective products after inspection.

10... Disk (object to be measured)
REFERENCE SIGNS LIST 11: Surface A measurement unit 12: Surface B measurement unit 13: Front/back reversing mechanism 14: Tilt conversion mechanism 14a, 51: Entrance side transfer section (transfer section)
14b, 52... delivery side delivery section (delivery section)
20, 20A, 20B... Measuring device 21... First robot transport section 22... First delivery section (delivery section)
23 ... A surface measurement unit (measurement means, first measurement means)
24 . . . First conveying section (conveying means, first conveying means)
25... First driving unit (driving means)
31 Second robot transport section 32 Second delivery section (delivery section)
33 ... B surface measuring unit (measuring means, second measuring means)
34 . . . second conveying section (conveying means, second conveying means)
35 . . . second driving section (driving means)
36... Third conveying parts 41, 42... Arm 43... Disc holding part 43a... Upper disc receiver 43b... Grooved hook 61... Measurement part main body 61a... Measurement reference surface 61b... Supporting part 62... Supporting body 63... Sensor 64... Anti-vibration 71... Mounting transport mechanism (first mounting transport part)
72... Removal transport mechanism (second removal transport unit)
81... Holding portion 81a... Hook portion (holding portion)
81b: Lower disc receiver (holding portion)
81c Upper disc receiver (holding portion)
81d... Frame 91... Horizontal movement section (conveyance driving section)
92... Width direction moving part ?... Tilt angle (predetermined angle)

Claims (10)

A measuring device for measuring an object to be measured,
measuring means for measuring the shape of at least one of the front surface and the back surface of the object to be measured;
a transport means for transporting the object to be measured,
The measuring means has a measurement reference plane inclined by a predetermined angle from the vertical direction,
the conveying means has a holding portion that holds the object to be measured so that the object to be measured is parallel to the measurement reference plane;
The measuring apparatus, wherein the holding section attaches and detaches the object to be measured to and from the measuring means while maintaining a posture in which the object to be measured is inclined by the predetermined angle. 2. The measuring apparatus according to claim 1, wherein said conveying means has an attaching holding portion for attaching said object to be measured to said measuring means and a removing holding portion for removing said object to be measured from said measuring means. 3. The object to be measured is conveyed parallel to the measurement reference plane when the conveying means conveys the object to be measured facing the measuring means. The measuring device according to . 2. Measuring device according to claim 1, characterized in that the measuring means comprise a first measuring means and a second measuring means arranged opposite each other. The conveying means has first conveying means for conveying the object to be measured facing the first measuring means, and second conveying means for conveying the object to be measured facing the second measuring means. 5. The measuring apparatus according to claim 4, wherein the conveying direction of said first conveying means and the conveying direction of said second conveying means are opposite to each other. A receiver for converting the vertical posture and the tilted posture between a vertical posture in which the object to be measured is positioned along the vertical direction and an inclined posture in which the object to be measured is positioned at a predetermined angle from the vertical direction of the object to be measured. 6. The measuring device according to any one of claims 1 to 5, further comprising a cross section. 2. The measuring apparatus according to claim 1, further comprising driving means for driving said conveying means, said driving means being arranged vertically below said measuring means. The conveying means is configured to be able to reciprocate horizontally and vertically with respect to the measurement reference plane. 2. The measuring device according to claim 1, wherein the measuring device is conveyed from the inlet side to the outlet side of the device. 2. The measuring apparatus according to claim 1, wherein the object to be measured has a through hole penetrating in a plate thickness direction, and the holding portion holds an inner wall portion of the through hole. 2. The measuring apparatus according to claim 1, wherein the measurement reference surface has a support for supporting the object to be measured, and a steady rest that contacts the object to be measured supported by the support.

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