JP2022103119A - Method of controlling pressure bonding device, and pressure bonding device for use in practicing that control method - Google Patents

Abstract

To provide a method of controlling a pressure bonding device for properly controlling a pressing force while accommodating instability in the output from a driving device, and a pressure bonding device for use in practicing the control method.SOLUTION: In the method of controlling a pressure bonding device, a driving force for moving downward exerted by a driving rod first acts on a load detection unit placed atop a pressurizing unit in a pressure bonding module, and the driving force via the load detection unit drives a pressurizing mold, which is placed under the pressurizing rod of the pressurizing unit, to pressurize a pressurization target.SELECTED DRAWING: Figure 2

Description

The present invention relates to a method for controlling a crimping device and a crimping device used for executing the control method, and in particular, a method for controlling a crimping device for pressing and adhering a pressure target using an upper die and a lower die. The present invention relates to a crimping device used to carry out the control method.

In the normal chip packaging process, the heat dissipation gel is first applied to the substrate, then the die is attached to the substrate, then the heat dissipation gel is further applied on the die, and then the heat dissipation gel covering the die and the substrate is applied to the heat dissipation gel. The method of adhering to is adopted. Further, a method of using a heat dissipation pad having a heat dissipation effect instead of the heat dissipation gel used in such a method has been proposed, but when the heat dissipation sheet is adhered on the heat dissipation pad, the heat dissipation sheet is used. By crimping to the heat dissipation pad, the heat dissipation sheet covering the heat dissipation pad is fixed to the substrate.

Conventionally, when such crimping is performed, the heat dissipation sheet is pressed against the heat dissipation pad by using the upper mold and the lower mold to adhere to the heat dissipation pad, but the pressing force at this time is due to the instability of the output of the drive device. Since it is variable and difficult to control, there is room for improvement in the crimping process in mass production.

Taiwan Patent No. I638421 Gazette

Therefore, it is an object of the present invention to provide a control method of a crimping device that appropriately controls a pressing force in response to instability of the output of a driving device, and a crimping device used for executing the control method.

In order to achieve the above object, the present invention is a drive module having a fixed base provided with a plurality of drive means including a drive rod capable of being driven up and down, and a drive module located below and above the drive module. A plurality of pressurizing units having a load detecting unit at the top of the upper end and a pressurizing rod means having a pressurizing die at the lower end, corresponding to each of the driving means in the above. A step to prepare a crimping module with a mold base to be provided, and
The drive rod is moved downward by a driving force to first act on the load detection unit in the pressurizing unit in the crimping module, and the driving force causes the pressurizing unit via the load detecting unit. Provided is a control method of a crimping device, characterized in that a step of driving a pressurizing die below a pressurizing rod to pressurize a pressurizing object and performing a pressurizing die.

Further, the present invention comprises a drive module having a fixed base provided with a plurality of drive means including a drive rod that can be moved up and down.
A crimping module, which is located below the drive module and has a die base on which a plurality of pressurizing units corresponding to each of the drive means above the drive module are provided.
The crimping module is provided with a pressure rod means provided with a pressure rod having a load detection unit provided at the top portion at the upper end and a pressure mold provided at the lower end, and is moved downward by the drive rod. A driving force is applied to the load detection unit, and the driving force drives the pressurizing die below the pressurizing rod of the pressurizing unit via the load detecting unit to pressurize the target. Also provided is a crimping device characterized by pressurization.

Further, the present invention also provides a crimping device used for executing the control method of the crimping device.

As described above, in the present invention, the driving force moving downward by the driving rod is first received by the load detecting unit above the pressurizing unit in the crimping module, and then the driving force is used to pass through the load detecting unit. Since the pressurizing mold below the pressurizing rod of the pressurizing unit is driven to pressurize the pressurizing target, the output by the drive module is appropriately adjusted according to the detection result of the load detection unit. And it can be adjusted immediately.

It is a perspective view which shows the structure of a part of the crimping apparatus which concerns on this invention. It is a side view which shows the structure of a part of the crimping apparatus which concerns on this invention. It is a perspective view which shows the structure of one pressurizing unit which a crimping apparatus which concerns on this invention has. It is a side view which shows the structure of one pressurizing unit which a crimping apparatus which concerns on this invention has. It is sectional drawing which shows the structure of one pressurizing unit which a crimping apparatus which concerns on this invention has.

Hereinafter, the control method of the crimping device of the present invention and the crimping device used for executing the control method will be described in more detail with reference to FIGS. 1 to 5.

In this embodiment, a crimping device used in the process of adhering the heat radiating sheet will be described as an example, but when the present invention is carried out, the pressurizing target E is pressed by using the upper die and the lower die. The pressurizing target E is an assembly in which a die is placed on a substrate and a heat dissipation gel is applied in the semiconductor manufacturing process, or a heat dissipation pad is adhered and then covered with a heat dissipation sheet.

As shown in FIGS. 1 and 2, the crimping device includes a drive module AB having a fixed base A provided with a plurality of drive means B having a drive rod B1 movable up and down at the bottom, and the drive module AB. It is provided with a crimping module CD having a rectangular mold base C, which is located below and is provided with a plurality of matrix-arranged pressurizing units D corresponding to each of the driving means above. be.

A plurality of rollers A1 arranged apart from each other are provided at locations corresponding to the two short sides of the drive module AB, and are spaced from each other at locations corresponding to the two short sides of the crimping module CD. A plurality of rollers C1 that are opened and arranged are provided. Further, the bottom end of the drive rod B1 of each drive means B of the drive module AB and the top end of each pressurization unit D in the corresponding crimping module CD below the drive rod B1 when not driven. It is designed to form a separated state that maintains a predetermined distance d. Further, a rectangular mold frame C2 is provided below the mold base C of the crimping module CD.

As shown in FIG. 2, since each pressurizing unit D has a similar structure, the configuration thereof will be described in detail below with one of the pressurizing units D as a representative. As shown in FIG. 3, the pressurizing unit D is provided with a pressurizing rod means D1 and a fixing means D2, and a load detecting unit D3 is provided at the top of the upper end of the pressurizing unit D. ing.

As shown in FIGS. 3 to 5, the pressure rod means D1 is provided with a pressure rod D11, and the load detection unit D3 is provided at the upper end top portion of the pressure rod D11 and the lower end portion. Is provided with a pressure die D12.

The pressure rod D11 has a hollow tubular shape, and a pipe D111 is provided in the center of the pipe. The upper end of the pipe D111 is located at the lower end of the load detection unit D3, and is provided so that an opening D113 communicating with the outside from the pipe wall D112 of the pipe D111 can be opened. The lower end of the pipe D111 is formed by a fixed base D114 at the lower end of the pressure rod D11 and communicates with a chamber D115 located between the fixed base D114 and the pressure mold D12, and the pipe wall. A ventilation hole D116 communicating with the outside is provided on the opposite side of the D112 facing the opening D113.

The load detection unit D3 is provided with a cover D31 that covers the upper end top portion of the pressure rod D11. A pressure touching means D33 is provided on the upper end of the load detector D32 in the cover D31 so as to project outside the cover D31, and the pressure rod D11 is provided on the lower end of the load detector D32. A bottom pad D34 fitted in the upper end opening of the pipe D111 is provided. The drive rod B1 is driven by a downwardly moving driving force and first acts on the load detecting unit D3 on the pressurizing unit D in the crimping module CD, and the driving force further acts on the load detecting unit D3. The pressurizing die D12 below the pressurizing rod D11 of the pressurizing unit D is indirectly driven via the unit D3 to execute pressing against the pressurizing target E.

The pressure mold D12 is made of a non-metal material having pressure resistance and high temperature resistance, for example, polyetherimide (PEI), and is provided with a temperature sensor D121. When the pressurizing die D12 crimps the pressurizing die E, the temperature sensor D121 senses the temperature transferred from the heating of the lower die F to the pressurizing die D12 by the pressurizing die D12. Further, the temperature sensor D121 is linear and extends from the opening D113 to the outside via the pipe D111 of the pressure rod D11. The pressurizing die D12 is provided with a plurality of air passages D122 so as to be located around the temperature sensor D121, and each air passage D122 is a fixed base D114 whose one end is at the lower end of the pressure rod D11. It communicates with the chamber D115 and the other end communicates with the area below the pressurizing die D12. With this configuration, the gas entering from the ventilation hole D116 of the pressure rod D11 can reach the chamber D115 via the pipe D111, and further diffuses from the chamber D115 to each of the ventilation passages D122 to add the gas. It becomes possible to spray the pressure target E below the pressure mold D12, whereby the pressure mold D12 and the pressure mold D12 are pressed when the pressure is raised after the crimping by the pressure mold D12 is completed. It becomes easy to separate from the target E.

The fixing means D2 is pivotally supported by a first positioning unit D21 that provides vertical movement of the pressurizing rod D11 while maintaining the position of the pressurizing rod D11 in the horizontal radial direction. A second positioning unit D22 that maintains the vertical position of the pressurizing rod D11 is provided.

The first position-determining unit D21 is provided with a shaft sleeve D211 and an abutment D212. A shaft hole D213 extending along the Z axis (vertical direction) is formed in the shaft sleeve D211, and the pressure rod D11 inserted into the shaft hole D213 can move up and down along the shaft hole D213. It is pivotally supported by the sleeve D211. Further, a flange portion D214 having a circular radial cross-sectional diameter larger than the outer diameter of the shaft sleeve D211 is provided at the upper end of the shaft sleeve D211. The abutment D212 is provided with a pivot hole D215 on which the shaft sleeve D211 can be pivotally supported, and a flange base D216 extending outward from the radial direction of the abutment D212 at the lower end of the abutment D212. Is provided. The radial width of the flange base D216 is greater than the radial width of the abutment D212.

The second position-fixing unit D22 is provided with a first position-fixing table D221 and a second position-fixing table D222. The first positioning table D221 is located adjacent to the lower side of the load detection unit D3, and the first engaging means D2211 and the second engaging means D2212, which are a pair of members, are radially oriented. The pressure rod D11 is sandwiched and engaged and fixed by being screwed and fixed to each other so as to face each other.

Here, the first engaging means D2211 is formed with an air guide hole D2213 that communicates with the ventilation hole D116 in the pressure rod D11, and a positive pressure gas is formed from the air guide hole D2213. Can be drawn in and output to the pipe D111 of the pressure rod D11 via the ventilation hole D116. The second position-determining table D222 is a pair of members located below the first position-determining table D221 and arranged at a distance from each other, that is, a first support frame D2221 and a second support frame. D2222 is arranged so as to surround the pressure rod D11 in the radial direction facing each other on the outside of the position moving section D2223 outside the outer diameter of the pressure rod D11. A curved section D2224 that surrounds a part of the outer peripheral annular diameter of the position moving section D2223 is formed at the upper end of the first support frame D2221, and the lower end of the first support frame D2221 is the first. It is fixed to the flange base D216 of the pivot base D212 of the positioning unit D21. The lower end of the second support frame D2222 is fixed to the flange base D216 of the pivot base D212 of the first position-determining unit D21, and a shaft pin D2225 that moves up and down and projects from the upper end is provided. ing. The bottom of the second engaging means D2212 is fixed to the upper end surface of the shaft pin D2225.

A spring unit D23 configured by a spring is provided between the first position-fixing unit D21 and the second position-fixing unit D22. The lower end of the spring unit D23 abuts on the upper surface of the flange portion D214 of the shaft sleeve D211 of the first positioning unit D21, and the upper end thereof is the first engaging means D2211 of the second positioning unit D22. It is attached to the outside of the pressurizing rod D11 and arranged in the position moving section D2223 so as to abut on the lower end edge of the rod.

When the pressure rod D11 interlocks with the vertical movement of the first engaging means D2211 and the shaft pin D2225 of the second position-determining unit D22, the shaft pin D2225 prevents the rotation of the pressure rod D11. Then, when the driving force for moving the pressurizing rod D11 downward is canceled by the returning force of the spring unit D23 to be compressed, the first engaging means D2211 of the second positioning unit D22 moves upward. In conjunction with this, the pressure rod D11 also moves upward and returns to its original fixed position.

Flange-corresponding sides D217 parallel to each other are formed on both sides of the flange portion D214 of the shaft sleeve D211 of the first positioning unit D21, and the outer diameters on both sides of the abutment D212 are parallel to each other. Diameter-corresponding sides D218 are formed respectively. The flange-corresponding side D217 and the outer diameter-corresponding side D218 correspond to each other vertically so as to overlap each other. The first position-fixing table D221 and the second position-fixing table D222 of the second position-fixing unit D22 correspond to both sides where the flange-corresponding side D217 and the outer diameter-corresponding side D218 overlap. By being attached to the shaft sleeve D211, the relative rotation between the shaft sleeve D211 and the abutment D212 is restricted.

The fixing means D2 is fitted into a circular groove-shaped positioning portion C3 recessed in the upper surface of the mold base C by the flange base D216 of the pivot base D212 of the first positioning unit D21. Rarely, the fixing means D4 having a substantially rectangular frame shape is attached to the outside of the shaft sleeve D211 of the second positioning table D222 and the first positioning unit D21 of the second positioning unit D22. Moreover, it is screwed and fixed to the upper surface of the mold base C. The fixing means D4 has a thin plate shape, and the fixing means D4 is provided in the sleeve hole D41 by providing a sleeve hole D41 having a central opening whose inner diameter is smaller than the outer diameter of the flange base D216 of the pivot base D212. The peripheral edge portion is simultaneously pressed against the upper surface of the flange base D216 to limit the pivot base D212 into the positioning portion C3 of the mold base C.

A circular hollow passage hole C32 is provided in the bottom portion C31 of the positioning portion C3, and an annular support pad D5 is provided in the bottom portion C31 so as to support the bottom portion C31. A hollow hole D51 having substantially the same size is provided corresponding to the passing hole C32 of the bottom portion C31 of the positioning portion C3, and the passing hole C32 and the hollow hole D51 are inserted into the shaft sleeve D211. It is formed to be larger than the outer diameter of the shaft sleeve D211 of the first positioning unit D21 so as to be possible. The fixed base D114 at the lower end of the pressure rod D11 and the pressure mold D12 fixed thereto are housed in a mold chamber C21 partitioned by a mold frame C2 below the mold base C. ing. A quadrangular opening C22 is formed in the lower portion of the mold chamber C21, and the upper portion communicates with the passage hole C32. The pressure mold D12 can move up and down in the mold chamber C21 in conjunction with the pressure rod D11.

The diameter of the sleeve hole D41 of the fixing means D4 is wider than the outer diameter of the shaft sleeve D211, and four fine adjustment sections D42 are recessed in the four corners of the inner peripheral edge of the fixing means D4. In each of the fine adjustment sections D42, a fine adjustment means D6 formed on a bar screw is provided. The fine adjustment means D6 is provided so as to be screwed onto the upper surface of the flange base D216 of the pivot base D212 of the first position determination unit D21, and a tip portion extending downward is provided on the support pad D5. Since it abuts on the upper surface, the two fine adjustment means D6 are arranged on opposite sides of the shaft sleeve D211 and screwed through the abutment D212 so that their respective tips abut on the support pad D5. By adjusting the degree of screwing with respect to the abutment D212, the first positioning unit D21 causes the second positioning unit D22 and the pressurizing mold D12 at the lower end of the pressurizing rod D11. The angle of the bottom surface of the pressure mold D12 can be adjusted by interlocking the pressure mold D12 so as to be tilted to one side. Further, since the mold base C is made of an aluminum material, by arranging the support pad D5 of the iron material, it is possible to avoid a situation in which the bottom portion of the position-determining portion C3 is worn by the contact of the fine adjustment means D6 and breaks down. However, in the present invention, the support pad D5 can be omitted.

The crimping device and its control method described in this embodiment provide a driving force for the drive module AB to move downward by the drive rod B1, and the crimp module CD is the pressurizing unit D at the mold base C. When the drive rod B1 receives a driving force that moves downward, it first acts on the load detection unit D3 in the pressurizing unit D in the crimping module CD, and then the driving force is applied. Since the pressurizing mold D12 below the pressurizing rod D11 of the pressurizing unit D indirectly pressurizes the pressurizing target E via the load detecting unit D3, the drive module AB. The driving force from the driving rod B1 is detected first by the load detecting unit D3, so that the driving force can be controlled, thereby improving the quality of the manufacturing process.

Although embodiments of the present invention have been described above, the present invention is not limited thereto, and includes all modifications and equal configurations as various configurations included within the spirit and scope of the broadest interpretation. It shall be.

A Fixed base A1 Roller AB Drive module B Drive means B1 Drive rod C Mold base C1 Roller C2 Mold frame C3 Positioning part C31 Bottom part C32 Hollow passage hole CD Crimping module D Pressurizing unit D1 Pressurizing rod means D111 Pipe D112 Pipe wall D113 Opening D114 Fixing base D115 Chamber D116 Vent hole D11 Pressurizing rod D12 Pressurizing mold D121 Temperature sensor D122 Ventilation channel D2 Fixing means D21 First positioning unit D211 Shaft sleeve D212 Axial stand D213 Shaft hole D214 Part D215 Pivot hole D216 Flange base D217 Flange compatible side D218 Outer diameter compatible side D22 Second position determination unit D221 First position determination table D2211 First engagement means D2211 First engagement means D2212 Second engagement Measures D2213 Air guide hole D2222 Second position determination table D2221 First support frame D2222 Second support frame D2223 Position movement section D2224 Curved section D2225 Shaft pin D23 Spring unit D3 Load detection unit D31 Cover D32 Load detector D333 Pressurized touching means D34 Bottom pad D5 Support pad D51 Hollow hole
E Pressurized target F Lower mold d Distance

Claims (13)

A drive module having a fixed base provided with a plurality of drive means having a drive rod capable of being driven up and down, and an upper end corresponding to each of the drive means located below the drive module and above the drive module. Prepare a crimping module having a mold stand provided with a plurality of pressure units provided with a pressure rod means provided with a pressure rod provided with a load detection unit at the top portion and a pressure mold provided at the lower end. Steps and
The drive rod is moved downward by a driving force to first act on the load detection unit in the pressurizing unit in the crimping module, and the driving force causes the pressurizing unit via the load detecting unit. A method of controlling a crimping device, characterized in that a step of driving a pressurizing die below a pressurizing rod to pressurize a pressurizing object and performing. The control method for a crimping device according to claim 1, wherein the temperature of the pressurizing die is detected by using a temperature sensor. When the crimping by the pressurizing die is completed and the pressurizing die is raised, the pressurizing die is released from the pressurizing object by blowing gas on the pressurizing object below the pressurizing die. The method for controlling a crimping device according to claim 1, wherein the crimping device is easily separated. The control method for a crimping device according to claim 1, wherein the pressure rod is held horizontally by a first position-determining unit of the fixing means and is pivotally supported so as to be vertically movable. The method for controlling a crimping device according to claim 1, wherein the pressure rod is held vertically by a second positioning unit of the fixing means. The pressure rod does not rotate when it moves up and down, and by providing a return force that cancels the driving force that moves the pressure rod downward, the pressure rod is moved upward to the original position. The method for controlling a crimping device according to claim 1, wherein the crimping device is returned to a position. The lower part of the pressure rod by adjusting the degree of screwing of the fine adjustment means screwed and inserted into the first position determination unit holding the pressure rod with respect to the first position determination unit. The control method of the crimping apparatus according to claim 4 or 5, wherein the posture of the pressurizing mold is adjusted. A drive module having a fixed base provided with a plurality of drive means having a drive rod that can be moved up and down, and a drive module.
A crimping module, which is located below the drive module and has a die base on which a plurality of pressurizing units corresponding to each of the drive means above the drive module are provided.
The pressurizing unit is provided with a pressurizing rod means having a pressurizing rod provided with a load detecting unit at the upper end portion and a pressurizing mold at the lower end portion, and is moved downward by the drive rod. The driving force is applied to the load detection unit, and the driving force drives the pressurizing mold below the pressurizing rod of the pressurizing unit via the load detecting unit to pressurize the target. A crimping device characterized by pressurizing. The pressure rod is provided with a pipe provided with an opening communicating with the outside, so that a linearly formed temperature sensor extends from the opening to the outside via the pipe of the pressure rod. The crimping device according to claim 8, wherein the crimping device is arranged in a manner. The pressure rod is provided with a pipe, and a ventilation hole communicating with the outside is provided in the pipe wall of the pipe, and the fixing table formed on the fixing table at the lower end of the pressure rod and the pressure are applied. At least one in which the lower end of the pipe communicates with the chamber between the molds, one end of the pressure mold communicates with the chamber, and the other end communicates with the area below the pressure mold. The crimping device according to claim 8, wherein one air passage is provided. A pipe is provided on the pressure rod, and the pressure rod is provided with a pipe.
The load detection unit is provided with a cover that covers the top portion of the upper end of the pressure rod, and the pressure touching means is provided at the upper end of the load detector in the cover so as to project out of the cover. The crimping device according to claim 8, wherein a bottom pad fitted to the upper end opening of the pipe of the pressure rod is provided at the lower end of the load detector. The pressurizing unit is provided with a fixing means including a first positioning unit having a shaft sleeve and an abutment.
The shaft sleeve is provided with a shaft hole capable of installing the pressure rod on the shaft and moving up and down, and the shaft abutment is provided with a shaft hole on which the shaft sleeve is pivotally supported. The crimping device according to claim 8, wherein a flange base is provided below the pivot base. A crimping device used to execute the control method for the crimping device according to any one of claims 1 to 7.

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