JP2022096461A - 光学系及び面分光装置 - Google Patents

光学系及び面分光装置 Download PDF

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Publication number
JP2022096461A
JP2022096461A JP2020209578A JP2020209578A JP2022096461A JP 2022096461 A JP2022096461 A JP 2022096461A JP 2020209578 A JP2020209578 A JP 2020209578A JP 2020209578 A JP2020209578 A JP 2020209578A JP 2022096461 A JP2022096461 A JP 2022096461A
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JP
Japan
Prior art keywords
reflecting
reflecting portion
optical system
light
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP2020209578A
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English (en)
Japanese (ja)
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JP2022096461A5 (https=
Inventor
隆 助川
Takashi Sukegawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP2020209578A priority Critical patent/JP2022096461A/ja
Priority to EP21213503.2A priority patent/EP4016016A1/en
Priority to US17/547,023 priority patent/US11880025B2/en
Priority to CN202111525655.7A priority patent/CN114647073B/zh
Publication of JP2022096461A publication Critical patent/JP2022096461A/ja
Publication of JP2022096461A5 publication Critical patent/JP2022096461A5/ja
Priority to JP2025041446A priority patent/JP2025083525A/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0652—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
JP2020209578A 2020-12-17 2020-12-17 光学系及び面分光装置 Pending JP2022096461A (ja)

Priority Applications (5)

Application Number Priority Date Filing Date Title
JP2020209578A JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置
EP21213503.2A EP4016016A1 (en) 2020-12-17 2021-12-09 Optical system and plane spectroscopic device
US17/547,023 US11880025B2 (en) 2020-12-17 2021-12-09 Optical system and plane spectroscopic device
CN202111525655.7A CN114647073B (zh) 2020-12-17 2021-12-14 光学系统和平面分光设备
JP2025041446A JP2025083525A (ja) 2020-12-17 2025-03-14 光学系及び面分光装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP2020209578A JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP2025041446A Division JP2025083525A (ja) 2020-12-17 2025-03-14 光学系及び面分光装置

Publications (2)

Publication Number Publication Date
JP2022096461A true JP2022096461A (ja) 2022-06-29
JP2022096461A5 JP2022096461A5 (https=) 2023-06-19

Family

ID=78827839

Family Applications (2)

Application Number Title Priority Date Filing Date
JP2020209578A Pending JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置
JP2025041446A Pending JP2025083525A (ja) 2020-12-17 2025-03-14 光学系及び面分光装置

Family Applications After (1)

Application Number Title Priority Date Filing Date
JP2025041446A Pending JP2025083525A (ja) 2020-12-17 2025-03-14 光学系及び面分光装置

Country Status (4)

Country Link
US (1) US11880025B2 (https=)
EP (1) EP4016016A1 (https=)
JP (2) JP2022096461A (https=)
CN (1) CN114647073B (https=)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019916A (ja) * 2004-06-30 2006-01-19 Photron Ltd 多画面分光撮影装置
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems

Family Cites Families (22)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5136090B1 (https=) * 1971-04-17 1976-10-06
JPH0782117B2 (ja) * 1989-02-23 1995-09-06 オリンパス光学工業株式会社 反射型結像光学系
JPH03189602A (ja) * 1989-12-20 1991-08-19 Nippon Telegr & Teleph Corp <Ntt> 光ビーム制御装置
US20040057049A1 (en) * 2002-09-20 2004-03-25 Applied Photonics Worldwide, Inc. Micromechanical monochromator with integrated slit aperture for microspectrometers in the UV, visible and infrared range
JP2006350023A (ja) * 2005-06-16 2006-12-28 Fujitsu Ltd 可変分散補償器
JP4839845B2 (ja) * 2006-01-13 2011-12-21 横河電機株式会社 分光装置
JP2009000708A (ja) * 2007-06-20 2009-01-08 Nikon Corp 光照射装置と、これを具備するレーザ加工装置
EP2203787B1 (en) * 2007-10-26 2014-05-14 Carl Zeiss SMT GmbH Imaging optical system and projection exposure installation for micro-lithography with an imaging optical system of this type
JP2009141154A (ja) * 2007-12-06 2009-06-25 Canon Inc 走査露光装置及びデバイス製造方法
JP2010008487A (ja) * 2008-06-24 2010-01-14 Fujitsu Ltd 光モジュールおよび分散補償装置
TWI408356B (zh) * 2008-09-02 2013-09-11 Ind Tech Res Inst 反射式散射儀
JP5483955B2 (ja) * 2009-08-20 2014-05-07 キヤノン株式会社 照明光学系および投射型表示装置
US9529083B2 (en) * 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP2012098050A (ja) * 2010-10-29 2012-05-24 Mitaka Koki Co Ltd モニター可能な分光計測装置
JP2012237647A (ja) 2011-05-11 2012-12-06 Univ Of Tokyo 多焦点共焦点ラマン分光顕微鏡
TWI573650B (zh) * 2011-12-16 2017-03-11 應用材料股份有限公司 輻射源及用於結合同調光束的光束組合器
KR102491749B1 (ko) * 2015-03-01 2023-01-25 아카이브 코퍼레이션 파노라마 입체 이미징 시스템
JP6317050B1 (ja) * 2016-06-17 2018-04-25 オリンパス株式会社 対物光学系及びそれを備えた内視鏡装置
US10185133B1 (en) * 2017-09-15 2019-01-22 Raytheon Company Reflective triplet foreoptics for multi-channel double-pass dispersive spectrometers
CN111183342B (zh) * 2017-11-30 2023-05-02 安捷伦科技有限公司 多色仪系统和方法
CN110989182A (zh) * 2019-11-29 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种合束光源装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006019916A (ja) * 2004-06-30 2006-01-19 Photron Ltd 多画面分光撮影装置
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems

Also Published As

Publication number Publication date
EP4016016A1 (en) 2022-06-22
US20220196997A1 (en) 2022-06-23
US11880025B2 (en) 2024-01-23
JP2025083525A (ja) 2025-05-30
CN114647073A (zh) 2022-06-21
CN114647073B (zh) 2025-06-13

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