CN114647073B - 光学系统和平面分光设备 - Google Patents

光学系统和平面分光设备 Download PDF

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Publication number
CN114647073B
CN114647073B CN202111525655.7A CN202111525655A CN114647073B CN 114647073 B CN114647073 B CN 114647073B CN 202111525655 A CN202111525655 A CN 202111525655A CN 114647073 B CN114647073 B CN 114647073B
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CN
China
Prior art keywords
reflecting
light beam
reflecting portion
optical system
curved mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN202111525655.7A
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English (en)
Chinese (zh)
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CN114647073A (zh
Inventor
助川隆
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Publication of CN114647073A publication Critical patent/CN114647073A/zh
Application granted granted Critical
Publication of CN114647073B publication Critical patent/CN114647073B/zh
Active legal-status Critical Current
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Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/021—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows using plane or convex mirrors, parallel phase plates, or particular reflectors
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/02—Details
    • G01J3/0205—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows
    • G01J3/0243—Optical elements not provided otherwise, e.g. optical manifolds, diffusers, windows having a through-hole enabling the optical element to fulfil an additional optical function, e.g. a mirror or grating having a throughhole for a light collecting or light injecting optical fiber
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/2803—Investigating the spectrum using photoelectric array detector
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/31—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry
    • G01N21/35—Investigating relative effect of material at wavelengths characteristic of specific elements or molecules, e.g. atomic absorption spectrometry using infrared light
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B17/00—Systems with reflecting surfaces, with or without refracting elements
    • G02B17/02—Catoptric systems, e.g. image erecting and reversing system
    • G02B17/06—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror
    • G02B17/0647—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors
    • G02B17/0652—Catoptric systems, e.g. image erecting and reversing system using mirrors only, i.e. having only one curved mirror using more than three curved mirrors on-axis systems with at least one of the mirrors having a central aperture
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/1006—Beam splitting or combining systems for splitting or combining different wavelengths
    • G02B27/1013—Beam splitting or combining systems for splitting or combining different wavelengths for colour or multispectral image sensors, e.g. splitting an image into monochromatic image components on respective sensors
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/10—Beam splitting or combining systems
    • G02B27/14—Beam splitting or combining systems operating by reflection only
    • G02B27/143—Beam splitting or combining systems operating by reflection only using macroscopically faceted or segmented reflective surfaces
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2201/00—Features of devices classified in G01N21/00
    • G01N2201/06—Illumination; Optics
    • G01N2201/063—Illuminating optical parts
    • G01N2201/0636—Reflectors

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Optics & Photonics (AREA)
  • Biochemistry (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Health & Medical Sciences (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Elements Other Than Lenses (AREA)
  • Lenses (AREA)
  • Diffracting Gratings Or Hologram Optical Elements (AREA)
CN202111525655.7A 2020-12-17 2021-12-14 光学系统和平面分光设备 Active CN114647073B (zh)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP2020-209578 2020-12-17
JP2020209578A JP2022096461A (ja) 2020-12-17 2020-12-17 光学系及び面分光装置

Publications (2)

Publication Number Publication Date
CN114647073A CN114647073A (zh) 2022-06-21
CN114647073B true CN114647073B (zh) 2025-06-13

Family

ID=78827839

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202111525655.7A Active CN114647073B (zh) 2020-12-17 2021-12-14 光学系统和平面分光设备

Country Status (4)

Country Link
US (1) US11880025B2 (https=)
EP (1) EP4016016A1 (https=)
JP (2) JP2022096461A (https=)
CN (1) CN114647073B (https=)

Family Cites Families (24)

* Cited by examiner, † Cited by third party
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JPS5136090B1 (https=) * 1971-04-17 1976-10-06
JPH0782117B2 (ja) * 1989-02-23 1995-09-06 オリンパス光学工業株式会社 反射型結像光学系
JPH03189602A (ja) * 1989-12-20 1991-08-19 Nippon Telegr & Teleph Corp <Ntt> 光ビーム制御装置
US20060072109A1 (en) * 2004-09-03 2006-04-06 Andrew Bodkin Hyperspectral imaging systems
US20040057049A1 (en) * 2002-09-20 2004-03-25 Applied Photonics Worldwide, Inc. Micromechanical monochromator with integrated slit aperture for microspectrometers in the UV, visible and infrared range
JP4287794B2 (ja) * 2004-06-30 2009-07-01 株式会社フォトロン 多画面分光撮影装置
JP2006350023A (ja) * 2005-06-16 2006-12-28 Fujitsu Ltd 可変分散補償器
JP4839845B2 (ja) * 2006-01-13 2011-12-21 横河電機株式会社 分光装置
JP2009000708A (ja) * 2007-06-20 2009-01-08 Nikon Corp 光照射装置と、これを具備するレーザ加工装置
EP2203787B1 (en) * 2007-10-26 2014-05-14 Carl Zeiss SMT GmbH Imaging optical system and projection exposure installation for micro-lithography with an imaging optical system of this type
JP2009141154A (ja) * 2007-12-06 2009-06-25 Canon Inc 走査露光装置及びデバイス製造方法
JP2010008487A (ja) * 2008-06-24 2010-01-14 Fujitsu Ltd 光モジュールおよび分散補償装置
TWI408356B (zh) * 2008-09-02 2013-09-11 Ind Tech Res Inst 反射式散射儀
JP5483955B2 (ja) * 2009-08-20 2014-05-07 キヤノン株式会社 照明光学系および投射型表示装置
US9529083B2 (en) * 2009-11-20 2016-12-27 Faro Technologies, Inc. Three-dimensional scanner with enhanced spectroscopic energy detector
JP5335729B2 (ja) * 2010-04-01 2013-11-06 浜松ホトニクス株式会社 分光モジュール
JP2012098050A (ja) * 2010-10-29 2012-05-24 Mitaka Koki Co Ltd モニター可能な分光計測装置
JP2012237647A (ja) 2011-05-11 2012-12-06 Univ Of Tokyo 多焦点共焦点ラマン分光顕微鏡
TWI573650B (zh) * 2011-12-16 2017-03-11 應用材料股份有限公司 輻射源及用於結合同調光束的光束組合器
KR102491749B1 (ko) * 2015-03-01 2023-01-25 아카이브 코퍼레이션 파노라마 입체 이미징 시스템
JP6317050B1 (ja) * 2016-06-17 2018-04-25 オリンパス株式会社 対物光学系及びそれを備えた内視鏡装置
US10185133B1 (en) * 2017-09-15 2019-01-22 Raytheon Company Reflective triplet foreoptics for multi-channel double-pass dispersive spectrometers
CN111183342B (zh) * 2017-11-30 2023-05-02 安捷伦科技有限公司 多色仪系统和方法
CN110989182A (zh) * 2019-11-29 2020-04-10 中国科学院长春光学精密机械与物理研究所 一种合束光源装置

Also Published As

Publication number Publication date
EP4016016A1 (en) 2022-06-22
US20220196997A1 (en) 2022-06-23
US11880025B2 (en) 2024-01-23
JP2025083525A (ja) 2025-05-30
CN114647073A (zh) 2022-06-21
JP2022096461A (ja) 2022-06-29

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