JP2022087126A - 2次元多層厚測定 - Google Patents
2次元多層厚測定 Download PDFInfo
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- 238000005259 measurement Methods 0.000 title claims description 44
- 238000000034 method Methods 0.000 claims abstract description 51
- 238000004458 analytical method Methods 0.000 claims abstract description 40
- 238000003384 imaging method Methods 0.000 claims description 25
- 230000003595 spectral effect Effects 0.000 claims description 21
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- 230000001427 coherent effect Effects 0.000 claims description 4
- 238000000691 measurement method Methods 0.000 abstract description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 39
- 239000010408 film Substances 0.000 description 25
- 230000003287 optical effect Effects 0.000 description 11
- 238000012014 optical coherence tomography Methods 0.000 description 6
- 230000008569 process Effects 0.000 description 6
- 150000002632 lipids Chemical class 0.000 description 5
- 238000012216 screening Methods 0.000 description 5
- 208000003556 Dry Eye Syndromes Diseases 0.000 description 4
- 206010013774 Dry eye Diseases 0.000 description 4
- 230000004888 barrier function Effects 0.000 description 4
- 239000011521 glass Substances 0.000 description 4
- 230000000694 effects Effects 0.000 description 3
- 238000012545 processing Methods 0.000 description 3
- 239000010409 thin film Substances 0.000 description 3
- 238000011282 treatment Methods 0.000 description 3
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- 238000005070 sampling Methods 0.000 description 2
- 230000003313 weakening effect Effects 0.000 description 2
- 206010015943 Eye inflammation Diseases 0.000 description 1
- 240000007594 Oryza sativa Species 0.000 description 1
- 235000007164 Oryza sativa Nutrition 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 210000004087 cornea Anatomy 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000003745 diagnosis Methods 0.000 description 1
- 201000010099 disease Diseases 0.000 description 1
- 208000037265 diseases, disorders, signs and symptoms Diseases 0.000 description 1
- 210000003560 epithelium corneal Anatomy 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000003889 eye drop Substances 0.000 description 1
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- 230000036541 health Effects 0.000 description 1
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/0016—Operational features thereof
- A61B3/0025—Operational features thereof characterised by electronic signal processing, e.g. eye models
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/02—Subjective types, i.e. testing apparatus requiring the active assistance of the patient
- A61B3/028—Subjective types, i.e. testing apparatus requiring the active assistance of the patient for testing visual acuity; for determination of refraction, e.g. phoropters
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/101—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for examining the tear film
-
- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/102—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0012—Biomedical image inspection
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
- G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20048—Transform domain processing
- G06T2207/20056—Discrete and fast Fourier transform, [DFT, FFT]
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30004—Biomedical image processing
- G06T2207/30041—Eye; Retina; Ophthalmic
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- General Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Public Health (AREA)
- Biophysics (AREA)
- Heart & Thoracic Surgery (AREA)
- Ophthalmology & Optometry (AREA)
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- Nuclear Medicine, Radiotherapy & Molecular Imaging (AREA)
- Signal Processing (AREA)
- Geometry (AREA)
- Quality & Reliability (AREA)
- Length Measuring Devices By Optical Means (AREA)
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- Investigating Or Analysing Materials By Optical Means (AREA)
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Abstract
Description
この出願は、2019年6月28日に出願された「2D MULTI-LAYER THICKNESS MEASUREMENT(2次元多層厚測定)」と題する米国仮特許出願第62/868,568号に基づく優先権を主張するものであり、その全体を参照により本明細書に援用する。
理論的な干渉縞画像強度及び反射情報を導出することができ、後述する実験的に測定された干渉縞画像及び反射情報と比較することが可能である。
Claims (9)
- 湾曲した表面を有し厚い層と薄い層とを含む多層物体の厚さを測定する方法であって、
前記湾曲した表面に対して垂直になるように入射される入射光を用いて前記物体の干渉縞画像を取得し、
前記干渉縞画像を反射率情報に変換し、
前記反射率情報の周波数解析を実行し、
前記反射率情報の前記周波数解析に基づいて前記物体の全層厚を求め、
求められた前記全層厚に基づいて前記厚い層の厚さを求め、
前記反射率情報の前記周波数解析と前記物体の理論モデルの周波数解析との比較を実行し、
前記比較に基づいて前記薄い層の厚さを求め、
求められる前記厚さは、前記干渉縞画像が取得された前記物体の位置における厚さである、
方法。 - 前記入射光は、前記湾曲した表面に対して垂直になるようにレンズによって集光される、
請求項1の方法。 - 前記入射光は、前記湾曲した表面に対して垂直になるように2つのレンズによって集光される、
請求項2の方法。 - 更に、
前記物体の異なる位置から複数の干渉縞画像を取得し、
前記複数の干渉縞画像のそれぞれのぼけ値を求め、
求められた複数のぼけ値に基づいて測定信頼性指標を生成する、
請求項1~3のいずれかの方法。 - 前記複数の干渉縞画像の大部分が低いぼけ値を有する場合、又は、前記複数の干渉縞画像の大部分が高品質であると他の方法によって確認された場合、高値の測定信頼性指標が生成される、
請求項4の方法。 - 撮像システムを用いて前記干渉縞画像を取得し、
前記撮像システムのスペクトル応答のキャリブレーションに基づいて前記干渉縞画像を前記反射率情報に変換する、
請求項1~5のいずれかの方法。 - 前記全層厚を前記厚い層の厚さに設定し、
設定された前記厚い層の前記厚さに基づいて前記反射率情報の前記周波数解析と前記物体の前記理論モデルの前記周波数解析との前記比較を実行する、
請求項1~6のいずれかの方法。 - 前記方法は、前記物体を撮像しながらリアルタイムで実行される、
請求項1~7のいずれかの方法。 - 前記干渉縞画像は、離散的狭スペクトルバンドを用いた干渉撮像システムを用いて前記物体を撮像することによって取得される、
請求項1~8のいずれかの方法。
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JP2023116948A JP2023126539A (ja) | 2019-06-28 | 2023-07-18 | 2次元多層厚測定 |
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Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US201962868568P | 2019-06-28 | 2019-06-28 | |
US62/868,568 | 2019-06-28 | ||
US16/911,094 | 2020-06-24 | ||
US16/911,094 US20200405146A1 (en) | 2019-06-28 | 2020-06-24 | 2d multi-layer thickness measurement |
JP2020110188A JP7068389B2 (ja) | 2019-06-28 | 2020-06-26 | 2次元多層厚測定 |
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JP2022087126A true JP2022087126A (ja) | 2022-06-09 |
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JP2022044873A Active JP7318046B2 (ja) | 2019-06-28 | 2022-03-22 | 2次元多層厚測定 |
JP2023116948A Pending JP2023126539A (ja) | 2019-06-28 | 2023-07-18 | 2次元多層厚測定 |
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Citations (4)
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JP2012522594A (ja) * | 2009-04-01 | 2012-09-27 | テイアサイエンス・インコーポレーテツド | 眼球涙液膜の画像形成、処理および/または表示を行いおよび/または眼球涙液膜層の厚さを測定する、眼球表面の干渉分光(osi)装置、システムおよび方法 |
WO2013061417A1 (ja) * | 2011-10-26 | 2013-05-02 | 三菱電機株式会社 | 膜厚測定方法 |
JP2016080668A (ja) * | 2014-10-22 | 2016-05-16 | 株式会社島津製作所 | 表面処理状況モニタリング装置及び表面処理状況モニタリング方法 |
JP2018149284A (ja) * | 2017-03-14 | 2018-09-27 | 株式会社トプコン | 涙液層厚み測定装置及び方法 |
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JPS6176904A (ja) * | 1984-09-21 | 1986-04-19 | Oak Seisakusho:Kk | 膜厚測定方法 |
US9642520B2 (en) * | 2009-04-01 | 2017-05-09 | Tearscience, Inc. | Background reduction apparatuses and methods of ocular surface interferometry (OSI) employing polarization for imaging, processing, and/or displaying an ocular tear film |
US8602557B2 (en) * | 2011-12-02 | 2013-12-10 | Abbott Medical Optics Inc. | Method for calculating tear film lipid and aqueous layer thickness and corneal surface refractive index from interferometry data |
JP2017044596A (ja) | 2015-08-27 | 2017-03-02 | 東レエンジニアリング株式会社 | 膜厚測定装置および膜厚測定方法 |
WO2020013763A1 (en) * | 2018-07-13 | 2020-01-16 | Agency For Science, Technology And Research | Systems and methods for dry eye analysis using terahertz radiation |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2012522594A (ja) * | 2009-04-01 | 2012-09-27 | テイアサイエンス・インコーポレーテツド | 眼球涙液膜の画像形成、処理および/または表示を行いおよび/または眼球涙液膜層の厚さを測定する、眼球表面の干渉分光(osi)装置、システムおよび方法 |
WO2013061417A1 (ja) * | 2011-10-26 | 2013-05-02 | 三菱電機株式会社 | 膜厚測定方法 |
JP2016080668A (ja) * | 2014-10-22 | 2016-05-16 | 株式会社島津製作所 | 表面処理状況モニタリング装置及び表面処理状況モニタリング方法 |
JP2018149284A (ja) * | 2017-03-14 | 2018-09-27 | 株式会社トプコン | 涙液層厚み測定装置及び方法 |
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JP2021009143A (ja) | 2021-01-28 |
JP7318046B2 (ja) | 2023-07-31 |
JP7068389B2 (ja) | 2022-05-16 |
US20200405146A1 (en) | 2020-12-31 |
EP3760969A1 (en) | 2021-01-06 |
JP2023126539A (ja) | 2023-09-07 |
DE20182927T1 (de) | 2021-05-06 |
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