JP2021009143A - 2次元多層厚測定 - Google Patents
2次元多層厚測定 Download PDFInfo
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
- G01B11/00—Measuring arrangements characterised by the use of optical techniques
- G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
- G01B11/06—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material
- G01B11/0616—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating
- G01B11/0625—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection
- G01B11/0633—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness for measuring thickness ; e.g. of sheet material of coating with measurement of absorption or reflection using one or more discrete wavelengths
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/0016—Operational features thereof
- A61B3/0025—Operational features thereof characterised by electronic signal processing, e.g. eye models
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/02—Subjective types, i.e. testing apparatus requiring the active assistance of the patient
- A61B3/028—Subjective types, i.e. testing apparatus requiring the active assistance of the patient for testing visual acuity; for determination of refraction, e.g. phoropters
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/101—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for examining the tear film
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- A—HUMAN NECESSITIES
- A61—MEDICAL OR VETERINARY SCIENCE; HYGIENE
- A61B—DIAGNOSIS; SURGERY; IDENTIFICATION
- A61B3/00—Apparatus for testing the eyes; Instruments for examining the eyes
- A61B3/10—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions
- A61B3/102—Objective types, i.e. instruments for examining the eyes independent of the patients' perceptions or reactions for optical coherence tomography [OCT]
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0012—Biomedical image inspection
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/60—Analysis of geometric attributes
- G06T7/62—Analysis of geometric attributes of area, perimeter, diameter or volume
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/20—Special algorithmic details
- G06T2207/20048—Transform domain processing
- G06T2207/20056—Discrete and fast Fourier transform, [DFT, FFT]
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30004—Biomedical image processing
- G06T2207/30041—Eye; Retina; Ophthalmic
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- Quality & Reliability (AREA)
- Geometry (AREA)
- Eye Examination Apparatus (AREA)
- Length Measuring Devices By Optical Means (AREA)
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Abstract
Description
この出願は、2019年6月28日に出願された「2D MULTI−LAYER THICKNESS MEASUREMENT(2次元多層厚測定)」と題する米国仮特許出願第62/868,568号に基づく優先権を主張するものであり、その全体を参照により本明細書に援用する。
理論的な干渉縞画像強度及び反射情報を導出することができ、後述する実験的に測定された干渉縞画像及び反射情報と比較することが可能である。
Claims (14)
- 厚い層と薄い層とを含む多層物体の干渉縞画像を取得し、
前記干渉縞画像を反射率情報に変換し、
前記反射率情報の周波数解析を実行し、
前記反射率情報の前記周波数解析に基づいて前記物体の全層厚を求め、
求められた前記全層厚に基づいて前記厚い層の厚さを求め、
前記反射率情報の前記周波数解析と前記物体の理論モデルの周波数解析との比較を実行し、
前記比較に基づいて前記薄い層の厚さを求め、
求められる前記厚さは、前記干渉縞画像が取得された前記物体の位置における厚さである、
厚さ測定方法。 - 更に、
前記物体の異なる位置から複数の干渉縞画像を取得し、
前記複数の干渉縞画像のそれぞれのぼけ値を求め、
求められた複数のぼけ値に基づいて測定信頼性指標を生成する、
請求項1の方法。 - 更に、前記物体の複数の位置から求められた厚さに基づいて前記物体の厚さマップを生成する、
請求項1の方法。 - 前記周波数解析は、フーリエ変換である、
請求項1の方法。 - 前記周波数解析は、ハーモニック周波数変調を含む、
請求項1の方法。 - 前記物体は涙液層であり、前記薄い層は油層であり、前記厚い層は水層である、
請求項1の方法。 - 更に、ムチン−水層のインデックスマップを生成し、及び/又は、ムチン−水層の散乱マップを生成する、
請求項6の方法。 - 前記インデックスマップは、前記反射率情報の前記周波数解析と前記物体の前記理論モデルの前記周波数解析とにおける対応するピークの振幅の比に基づく、
請求項7の方法。 - 前記インデックスマップは、前記反射率情報の前記周波数解析と前記物体の前記理論モデルの前記周波数解析とにおける対応するピークの振幅の差に基づく、
請求項7の方法。 - 前記散乱マップは、前記反射率情報の前記周波数解析と前記物体の前記理論モデルの前記周波数解析とにおける対応するピークの半値全幅又は半値半幅の比に基づく、
請求項7の方法。 - 前記散乱マップは、前記反射率情報の前記周波数解析と前記物体の前記理論モデルの前記周波数解析とにおける対応するピークの半値全幅又は半値半幅の差に基づく、
請求項7の方法。 - 更に、
生成された前記ムチン−水層の前記インデックスマップ及び/又は前記ムチン−水層の前記散乱マップに基づいてスケール因子を求め、
取得された前記干渉縞画像を前記スケール因子に基づき調整する、
請求項7の方法。 - 前記方法は、前記物体を撮像しながらリアルタイムで実行される、
請求項1の方法。 - 前記干渉縞画像は、離散的狭スペクトルバンドを用いた干渉撮像システムを用いて前記物体を撮像することによって取得される、
請求項1の方法。
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JP2022044873A JP7318046B2 (ja) | 2019-06-28 | 2022-03-22 | 2次元多層厚測定 |
JP2023116948A JP7559155B2 (ja) | 2019-06-28 | 2023-07-18 | 2次元多層厚測定 |
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US201962868568P | 2019-06-28 | 2019-06-28 | |
US62/868,568 | 2019-06-28 | ||
US16/911,094 US20200405146A1 (en) | 2019-06-28 | 2020-06-24 | 2d multi-layer thickness measurement |
US16/911,094 | 2020-06-24 |
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JP2020110188A Active JP7068389B2 (ja) | 2019-06-28 | 2020-06-26 | 2次元多層厚測定 |
JP2022044873A Active JP7318046B2 (ja) | 2019-06-28 | 2022-03-22 | 2次元多層厚測定 |
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US (1) | US20200405146A1 (ja) |
EP (1) | EP3760969B1 (ja) |
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DE (1) | DE20182927T1 (ja) |
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US11580631B2 (en) * | 2020-02-20 | 2023-02-14 | The Board Of Trustees Of The Leland Stanford Junior University | Platform and methods for dynamic thin film measurements using hyperspectral imaging |
US20240288838A1 (en) * | 2023-02-23 | 2024-08-29 | Applied Materials, Inc. | Residual thickness compensation |
Citations (4)
Publication number | Priority date | Publication date | Assignee | Title |
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JP2012522594A (ja) * | 2009-04-01 | 2012-09-27 | テイアサイエンス・インコーポレーテツド | 眼球涙液膜の画像形成、処理および/または表示を行いおよび/または眼球涙液膜層の厚さを測定する、眼球表面の干渉分光(osi)装置、システムおよび方法 |
WO2013061417A1 (ja) * | 2011-10-26 | 2013-05-02 | 三菱電機株式会社 | 膜厚測定方法 |
US20130141698A1 (en) * | 2011-12-02 | 2013-06-06 | Abbott Medical Optics Inc. | Method for calculating tear film lipid and aqueous layer thickness and corneal surface refractive index from interferometry data |
JP2017044596A (ja) * | 2015-08-27 | 2017-03-02 | 東レエンジニアリング株式会社 | 膜厚測定装置および膜厚測定方法 |
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JPS6176904A (ja) * | 1984-09-21 | 1986-04-19 | Oak Seisakusho:Kk | 膜厚測定方法 |
US9642520B2 (en) * | 2009-04-01 | 2017-05-09 | Tearscience, Inc. | Background reduction apparatuses and methods of ocular surface interferometry (OSI) employing polarization for imaging, processing, and/or displaying an ocular tear film |
EP3113668B1 (en) | 2014-03-06 | 2018-09-26 | ADOM Advanced Optical Technologies Ltd. | System and method for performing tear film structure measurement and evaporation rate measurements |
JP2016080668A (ja) | 2014-10-22 | 2016-05-16 | 株式会社島津製作所 | 表面処理状況モニタリング装置及び表面処理状況モニタリング方法 |
JP7068869B2 (ja) | 2017-03-14 | 2022-05-17 | 株式会社トプコン | 涙液層厚み測定装置及び方法 |
US20210259540A1 (en) * | 2018-07-13 | 2021-08-26 | Agency For Science, Technology And Research | Systems and methods for dry eye analysis using terahertz radiation |
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Publication number | Priority date | Publication date | Assignee | Title |
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JP2012522594A (ja) * | 2009-04-01 | 2012-09-27 | テイアサイエンス・インコーポレーテツド | 眼球涙液膜の画像形成、処理および/または表示を行いおよび/または眼球涙液膜層の厚さを測定する、眼球表面の干渉分光(osi)装置、システムおよび方法 |
WO2013061417A1 (ja) * | 2011-10-26 | 2013-05-02 | 三菱電機株式会社 | 膜厚測定方法 |
US20130141698A1 (en) * | 2011-12-02 | 2013-06-06 | Abbott Medical Optics Inc. | Method for calculating tear film lipid and aqueous layer thickness and corneal surface refractive index from interferometry data |
JP2017044596A (ja) * | 2015-08-27 | 2017-03-02 | 東レエンジニアリング株式会社 | 膜厚測定装置および膜厚測定方法 |
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DE20182927T1 (de) | 2021-05-06 |
US20200405146A1 (en) | 2020-12-31 |
JP2022087126A (ja) | 2022-06-09 |
JP2023126539A (ja) | 2023-09-07 |
JP7068389B2 (ja) | 2022-05-16 |
EP3760969B1 (en) | 2024-10-16 |
EP3760969A1 (en) | 2021-01-06 |
JP7318046B2 (ja) | 2023-07-31 |
JP7559155B2 (ja) | 2024-10-01 |
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