JP2022082492A - 選択エミッタ太陽電池およびその製造方法 - Google Patents
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Abstract
Description
Claims (10)
- 半導体基板の表面における第1領域及び第2領域をエッチングし、前記半導体基板の表面における第1領域及び第2領域に、前記半導体基板の厚さ方向における断面形状が台形または台形様形状である複数の突起を有するテクスチャー面が形成されることと、
前記突起の少なくとも一部の領域を拡散処理して、P型ドープ元素またはN型ドープ元素を含む第1ドープ層を形成し、前記第1領域のみを覆う第1酸化層を形成することと、
前記第1酸化層をマスクとして前記半導体基板の表面を再エッチングすることにより、前記第2領域に位置する突起をエッチングしてピラミッド構造を形成し、前記第2領域における第1ドープ層をエッチングして前記第1ドープ層よりもドーピング濃度の小さい第2ドープ層を形成することと、
前記第1領域の第1ドープ層を残すように前記第1酸化層を除去し、前記第1領域の第1ドープ層と前記第2領域の第2ドープ層とが前記選択エミッタを構成することと、
を含むことを特徴とする選択エミッタ太陽電池の製造方法。 - 前記の前記突起の少なくとも一部の領域を拡散処理して第1ドープ層を形成し、前記第1領域のみを覆う第1酸化層を形成することは、具体的には、
前記突起の少なくとも一部の領域を拡散処理して第1ドープ層を形成し、前記テクスチャー面を覆う第2酸化層を形成することと、
前記第2酸化層に、前記第1領域のみを覆うマスク層が形成されることと、
前記マスク層をマスクとして、前記半導体基板が露出するまで前記第2酸化層をエッチングし、前記第2酸化層が、前記第1領域のみを覆う第1酸化層を形成するようにエッチングされることと、
前記マスク層を除去することと、
を含むことを特徴とする請求項1に記載の選択エミッタ太陽電池の製造方法。 - 前記半導体基板の厚さ方向における前記第2酸化層の厚さ寸法は、50nm~150nmである、
ことを特徴とする請求項2に記載の選択エミッタ太陽電池の製造方法。 - 前記半導体基板の表面における第1領域及び第2領域をエッチングすることは、具体的には、前記半導体基板を温度65℃~85℃の第1テクスチャリングソリューション中に置き、前記半導体基板の表面における第1領域および第2領域をエッチングすることを含み、
そのうち、前記第1テクスチャリングソリューションは、テクスチャリング添加剤、過酸化水素水、及び水酸化カリウムを含む、
ことを特徴とする請求項1に記載の選択エミッタ太陽電池の製造方法。 - 前記第1テクスチャリングソリューションにおけるテクスチャリング添加剤、過酸化水素水、及び水酸化カリウムの体積比は、2:8:3である、
ことを特徴とする請求項4に記載の選択エミッタ太陽電池の製造方法。 - 前記の前記第1酸化層をマスクとして前記半導体基板の表面を再エッチングすることは、具体的には、前記半導体基板を温度75℃~85℃の第2テクスチャリングソリューション中に置き、前記第1酸化層をマスクとして前記半導体基板の表面を再エッチングすることを含み、
そのうち、前記第2テクスチャリングソリューションは、テクスチャリング添加剤および水酸化カリウムを含む、
ことを特徴とする請求項1に記載の選択エミッタ太陽電池の製造方法。 - 前記第2テクスチャリングソリューションにおけるテクスチャリング添加剤と水酸化カリウムの体積比は、1:3である、
ことを特徴とする請求項6に記載の選択エミッタ太陽電池の製造方法。 - 半導体基板を備えた選択エミッタ太陽電池であって、
前記半導体基板には、選択エミッタが設けられ、前記選択エミッタと前記半導体基板の他の部分とは、PN接合構造を形成しており、
そのうち、前記半導体基板の表面は、第1領域および第2領域を有し、前記第1領域は複数の突起を含み、前記突起は、前記半導体基板の厚さ方向における断面形状が台形または台形様形状であり、前記突起の少なくとも一部の領域が、P型ドープ元素またはN型ドープ元素がドーピングされた第1ドープ層であり、前記第2領域は複数のピラミッド構造を含み、前記複数のピラミッド構造の少なくとも一部の領域は、P型ドープ元素またはN型ドープ元素がドーピングされた第2ドープ層であり、前記第1ドープ層のドーピング濃度は、前記第2ドープ層のドーピング濃度より大きく、前記第1ドープ層と前記第2ドープ層とは、前記選択エミッタを構成している、
ことを特徴とする選択エミッタ太陽電池。 - 前記第1ドープ層のシート抵抗は、60Ω/sq~120Ω/sqである、
ことを特徴とする請求項8に記載の選択エミッタ太陽電池。 - 前記第2ドープ層のシート抵抗は、150Ω/sqより大きい、
ことを特徴とする請求項8に記載の選択エミッタ太陽電池。
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