JP2021535407A - 少なくとも１つの物体の位置を決定する測定ヘッド - Google Patents

少なくとも１つの物体の位置を決定する測定ヘッド Download PDF

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Publication number
JP2021535407A
JP2021535407A JP2021534824A JP2021534824A JP2021535407A JP 2021535407 A JP2021535407 A JP 2021535407A JP 2021534824 A JP2021534824 A JP 2021534824A JP 2021534824 A JP2021534824 A JP 2021534824A JP 2021535407 A JP2021535407 A JP 2021535407A
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JP
Japan
Prior art keywords
optical
fiber
measuring head
light
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
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JP2021534824A
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English (en)
Japanese (ja)
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JP2021535407A5 (https=
JPWO2020039084A5 (https=
Inventor
モハン オイゲン，セラル
ゼント，ロベルト
ブルーダー，イングマル
Original Assignee
トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング
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Application filed by トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング filed Critical トリナミクス ゲゼルシャフト ミット ベシュレンクテル ハフツング
Publication of JP2021535407A publication Critical patent/JP2021535407A/ja
Publication of JP2021535407A5 publication Critical patent/JP2021535407A5/ja
Publication of JPWO2020039084A5 publication Critical patent/JPWO2020039084A5/ja
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • G02B6/3624—Fibre head, e.g. fibre probe termination

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
JP2021534824A 2018-08-24 2019-08-23 少なくとも１つの物体の位置を決定する測定ヘッド Pending JP2021535407A (ja)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18190749.4 2018-08-24
EP18190749 2018-08-24
PCT/EP2019/072622 WO2020039084A1 (en) 2018-08-24 2019-08-23 A measurement head for determining a position of at least one object

Publications (3)

Publication Number Publication Date
JP2021535407A true JP2021535407A (ja) 2021-12-16
JP2021535407A5 JP2021535407A5 (https=) 2022-08-30
JPWO2020039084A5 JPWO2020039084A5 (https=) 2022-08-30

Family

ID=63405075

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2021534824A Pending JP2021535407A (ja) 2018-08-24 2019-08-23 少なくとも１つの物体の位置を決定する測定ヘッド

Country Status (6)

Country Link
US (1) US20210364610A1 (https=)
EP (1) EP3841351A1 (https=)
JP (1) JP2021535407A (https=)
KR (1) KR20210046044A (https=)
CN (1) CN113015882A (https=)
WO (1) WO2020039084A1 (https=)

Families Citing this family (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN111587384B (zh) 2017-11-17 2024-06-14 特里纳米克斯股份有限公司 用于确定至少一个对象的位置的检测器
DE102018128962A1 (de) * 2018-11-19 2020-05-20 Rheinmetall Waffe Munition Gmbh Verfahren zur Bestimmung der Position eines Objektes, Vorrichtung zur Bestimmung der Position eines Objektes und System
US20240263937A1 (en) 2021-07-02 2024-08-08 Trinamix Gmbh Measurement head
US20230023043A1 (en) * 2021-07-21 2023-01-26 Waymo Llc Optimized multichannel optical system for lidar sensors
CN114413750B (zh) * 2021-12-01 2023-09-15 广西交科集团有限公司 基于激光散射光斑的定位传感器、定位系统及定位方法
US20250306467A1 (en) * 2024-04-02 2025-10-02 Taiwan Semiconductor Manufacturing Company, Ltd. Lithographic apparatus, inspection method, and method for performing lithography process
CN118688915B (zh) * 2024-07-19 2024-12-31 烟台新药创制山东省实验室 一种激光共聚焦光路中单模光纤耦合装置及方法

Citations (6)

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JP2005287900A (ja) * 2004-04-01 2005-10-20 Hamamatsu Univ School Of Medicine 内視鏡
JP2013186808A (ja) * 2012-03-09 2013-09-19 Lintec Corp タッチパネル部材貼付用粘着剤、タッチパネル部材貼付用粘着シート、及びタッチパネル装置
US20160015259A1 (en) * 2014-07-16 2016-01-21 Microcube, Llc Minimally invasive access channels into bodily regions
JP2016015248A (ja) * 2014-07-02 2016-01-28 株式会社豊田自動織機 蓄電装置ユニット
US20180084981A1 (en) * 2016-09-23 2018-03-29 Canon Usa Inc. Spectrally encoded endoscopy apparatus and methods
WO2018091640A2 (en) * 2016-11-17 2018-05-24 Trinamix Gmbh Detector for optically detecting at least one object

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US6786099B2 (en) * 2002-02-14 2004-09-07 Kla-Tencor Technologies Corporation Surface photo-acoustic film measurement device and technique
NL2006260A (en) * 2010-02-23 2011-08-24 Asml Netherlands Bv Lithographic apparatus and device manufacturing method.
EP3029485B1 (en) 2011-02-15 2019-12-11 Basf Se Detector for optically detecting at least one object
GB2501542A (en) * 2012-04-28 2013-10-30 Bae Systems Plc Abnormal behaviour detection in video or image surveillance data
US9664626B2 (en) * 2012-11-01 2017-05-30 Sio2 Medical Products, Inc. Coating inspection method
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3008485A1 (en) 2013-06-13 2016-04-20 Basf Se Detector for optically detecting at least one object
US9593941B2 (en) 2014-09-24 2017-03-14 Hood Technology Corporation Clearance detection system and method using frequency identification

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005287900A (ja) * 2004-04-01 2005-10-20 Hamamatsu Univ School Of Medicine 内視鏡
JP2013186808A (ja) * 2012-03-09 2013-09-19 Lintec Corp タッチパネル部材貼付用粘着剤、タッチパネル部材貼付用粘着シート、及びタッチパネル装置
JP2016015248A (ja) * 2014-07-02 2016-01-28 株式会社豊田自動織機 蓄電装置ユニット
US20160015259A1 (en) * 2014-07-16 2016-01-21 Microcube, Llc Minimally invasive access channels into bodily regions
US20180084981A1 (en) * 2016-09-23 2018-03-29 Canon Usa Inc. Spectrally encoded endoscopy apparatus and methods
WO2018091640A2 (en) * 2016-11-17 2018-05-24 Trinamix Gmbh Detector for optically detecting at least one object

Also Published As

Publication number Publication date
WO2020039084A1 (en) 2020-02-27
US20210364610A1 (en) 2021-11-25
EP3841351A1 (en) 2021-06-30
KR20210046044A (ko) 2021-04-27
CN113015882A (zh) 2021-06-22

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