CN113015882A - 用于确定至少一个对象的位置的测量头 - Google Patents

用于确定至少一个对象的位置的测量头 Download PDF

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Publication number
CN113015882A
CN113015882A CN201980066485.5A CN201980066485A CN113015882A CN 113015882 A CN113015882 A CN 113015882A CN 201980066485 A CN201980066485 A CN 201980066485A CN 113015882 A CN113015882 A CN 113015882A
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CN
China
Prior art keywords
optical
fiber
light
light receiving
sensor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201980066485.5A
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English (en)
Chinese (zh)
Inventor
C·M·奥古恩
R·森德
I·布鲁德
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
TrinamiX GmbH
Original Assignee
TrinamiX GmbH
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by TrinamiX GmbH filed Critical TrinamiX GmbH
Publication of CN113015882A publication Critical patent/CN113015882A/zh
Pending legal-status Critical Current

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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/02—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness
    • G01B11/026—Measuring arrangements characterised by the use of optical techniques for measuring length, width or thickness by measuring distance between sensor and object
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4818—Constructional features, e.g. arrangements of optical elements using optical fibres
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B11/00—Measuring arrangements characterised by the use of optical techniques
    • G01B11/24—Measuring arrangements characterised by the use of optical techniques for measuring contours or curvatures
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/08—Systems determining position data of a target for measuring distance only
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/02—Systems using the reflection of electromagnetic waves other than radio waves
    • G01S17/06—Systems determining position data of a target
    • G01S17/42—Simultaneous measurement of distance and other co-ordinates
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S17/00—Systems using the reflection or reradiation of electromagnetic waves other than radio waves, e.g. lidar systems
    • G01S17/88—Lidar systems specially adapted for specific applications
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4811—Constructional features, e.g. arrangements of optical elements common to transmitter and receiver
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01S—RADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48—Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481—Constructional features, e.g. arrangements of optical elements
    • G01S7/4817—Constructional features, e.g. arrangements of optical elements relating to scanning
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/08—Optical devices or arrangements for the control of light using movable or deformable optical elements for controlling the direction of light
    • G02B26/10—Scanning systems
    • G02B26/103—Scanning systems having movable or deformable optical fibres, light guides or waveguides as scanning elements
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/02—Optical fibres with cladding with or without a coating
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00—Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24—Coupling light guides
    • G02B6/36—Mechanical coupling means
    • G02B6/3616—Holders, macro size fixtures for mechanically holding or positioning fibres, e.g. on an optical bench
    • G02B6/3624—Fibre head, e.g. fibre probe termination

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • Computer Networks & Wireless Communication (AREA)
  • Radar, Positioning & Navigation (AREA)
  • Remote Sensing (AREA)
  • Electromagnetism (AREA)
  • Optics & Photonics (AREA)
  • Length Measuring Devices By Optical Means (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201980066485.5A 2018-08-24 2019-08-23 用于确定至少一个对象的位置的测量头 Pending CN113015882A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
EP18190749.4 2018-08-24
EP18190749 2018-08-24
PCT/EP2019/072622 WO2020039084A1 (en) 2018-08-24 2019-08-23 A measurement head for determining a position of at least one object

Publications (1)

Publication Number Publication Date
CN113015882A true CN113015882A (zh) 2021-06-22

Family

ID=63405075

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980066485.5A Pending CN113015882A (zh) 2018-08-24 2019-08-23 用于确定至少一个对象的位置的测量头

Country Status (6)

Country Link
US (1) US20210364610A1 (https=)
EP (1) EP3841351A1 (https=)
JP (1) JP2021535407A (https=)
KR (1) KR20210046044A (https=)
CN (1) CN113015882A (https=)
WO (1) WO2020039084A1 (https=)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026016955A1 (zh) * 2024-07-19 2026-01-22 烟台新药创制山东省实验室 一种激光共聚焦光路中单模光纤耦合装置及方法

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CN111587384B (zh) 2017-11-17 2024-06-14 特里纳米克斯股份有限公司 用于确定至少一个对象的位置的检测器
DE102018128962A1 (de) * 2018-11-19 2020-05-20 Rheinmetall Waffe Munition Gmbh Verfahren zur Bestimmung der Position eines Objektes, Vorrichtung zur Bestimmung der Position eines Objektes und System
US20240263937A1 (en) 2021-07-02 2024-08-08 Trinamix Gmbh Measurement head
US20230023043A1 (en) * 2021-07-21 2023-01-26 Waymo Llc Optimized multichannel optical system for lidar sensors
CN114413750B (zh) * 2021-12-01 2023-09-15 广西交科集团有限公司 基于激光散射光斑的定位传感器、定位系统及定位方法
US20250306467A1 (en) * 2024-04-02 2025-10-02 Taiwan Semiconductor Manufacturing Company, Ltd. Lithographic apparatus, inspection method, and method for performing lithography process

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US20030150272A1 (en) * 2002-02-14 2003-08-14 Gary Janik Surface photo-acoustic film measurement device and technique
WO2011104173A1 (en) * 2010-02-23 2011-09-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
WO2013160688A1 (en) * 2012-04-28 2013-10-31 Bae Systems Plc Abnormal object track determination using a gaussian processes based variational bayes expectation maximisation
CN104854257A (zh) * 2012-11-01 2015-08-19 Sio2医药产品公司 涂层检查方法
US20180084981A1 (en) * 2016-09-23 2018-03-29 Canon Usa Inc. Spectrally encoded endoscopy apparatus and methods
WO2018091640A2 (en) * 2016-11-17 2018-05-24 Trinamix Gmbh Detector for optically detecting at least one object

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JP2005287900A (ja) * 2004-04-01 2005-10-20 Hamamatsu Univ School Of Medicine 内視鏡
EP3029485B1 (en) 2011-02-15 2019-12-11 Basf Se Detector for optically detecting at least one object
JP2013186808A (ja) * 2012-03-09 2013-09-19 Lintec Corp タッチパネル部材貼付用粘着剤、タッチパネル部材貼付用粘着シート、及びタッチパネル装置
US9389315B2 (en) 2012-12-19 2016-07-12 Basf Se Detector comprising a transversal optical sensor for detecting a transversal position of a light beam from an object and a longitudinal optical sensor sensing a beam cross-section of the light beam in a sensor region
EP3008485A1 (en) 2013-06-13 2016-04-20 Basf Se Detector for optically detecting at least one object
JP2016015248A (ja) * 2014-07-02 2016-01-28 株式会社豊田自動織機 蓄電装置ユニット
US11540875B2 (en) * 2014-07-16 2023-01-03 Microcube, Llc Minimally invasive access channels into bodily regions
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US20030150272A1 (en) * 2002-02-14 2003-08-14 Gary Janik Surface photo-acoustic film measurement device and technique
WO2011104173A1 (en) * 2010-02-23 2011-09-01 Asml Netherlands B.V. Lithographic apparatus and device manufacturing method
WO2013160688A1 (en) * 2012-04-28 2013-10-31 Bae Systems Plc Abnormal object track determination using a gaussian processes based variational bayes expectation maximisation
CN104854257A (zh) * 2012-11-01 2015-08-19 Sio2医药产品公司 涂层检查方法
US20180084981A1 (en) * 2016-09-23 2018-03-29 Canon Usa Inc. Spectrally encoded endoscopy apparatus and methods
WO2018091640A2 (en) * 2016-11-17 2018-05-24 Trinamix Gmbh Detector for optically detecting at least one object

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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2026016955A1 (zh) * 2024-07-19 2026-01-22 烟台新药创制山东省实验室 一种激光共聚焦光路中单模光纤耦合装置及方法

Also Published As

Publication number Publication date
JP2021535407A (ja) 2021-12-16
WO2020039084A1 (en) 2020-02-27
US20210364610A1 (en) 2021-11-25
EP3841351A1 (en) 2021-06-30
KR20210046044A (ko) 2021-04-27

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Application publication date: 20210622