JP2021533558A - 垂直入射現場プロセス監視センサ - Google Patents
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Abstract
Description
本出願は2018年7月31日に出願された「NORMAL−INCIDENT IN−SITU PROCESS MONITOR SENSOR」と題する米国仮特許出願第16/051,082号の優先権を主張するものであり、同仮特許出願はその全体が参照により本明細書に組み込まれる。
Claims (20)
- プラズマ処理室における現場エッチング監視のための装置であって、
連続波広帯域光源と、
基板に対して垂直入射で方向付けられる入射光線で、前記基板上の領域を照明するように構成された照明系と、
前記基板上の照明領域から反射する反射光線を収集し、前記反射光線を検出器に方向付けるように構成された収集系と、
前記反射光線を処理して背景光を抑制し、前記背景光を抑制するために処理される、参照光線及び前記反射光線に基づく前記基板又はその上に形成される構造の特性を判定し、且つ、前記判定された特性に基づいてエッチング処理を制御する、ように構成された処理回路構成と、を備える、装置。 - 前記連続波広帯域光源からの前記入射光線を周期的に遮断して、それに応じて前記収集系に前記背景光を収集させるように構成されたシャッタを更に備える、請求項1に記載の装置。
- 2つの位置間で前記シャッタを移動させるように構成されたステッピングモータを更に備え、第1の位置では、前記シャッタが前記入射光線が前記プラズマ処理室に到達することを遮断するように構成され、且つ第2の位置では、前記シャッタが前記入射光線が前記プラズマ処理室に入ることを可能にするように構成されている、請求項2に記載の装置。
- 前記シャッタが、チョッパホイールである、請求項2に記載の装置。
- 前記参照光線が、前記入射光線の一部をビームスプリッタ又はミラーを通して分割することにより前記照明系によって生成され、その後、前記検出器に方向付けられる、請求項1に記載の装置。
- 前記連続波広帯域光源が、波長範囲が190nm〜2000nmのレーザ駆動広帯域光源である、請求項1に記載の装置。
- 前記照明系が、第1のローション偏光子を含み、前記入射光線が、前記基板に方向付けられる前に前記第1のローション偏光子を通過する、請求項1に記載の装置。
- 前記収集系が、第2のローション偏光子を含み、前記反射光線が、前記検出器に方向付けられる前に前記第2のローション偏光子を通過する、請求項1に記載の装置。
- 前記照明系が、第1の軸外放物面ミラーと、前記入射光線を前記基板に方向付けるためのビームスプリッタとを含む、請求項1に記載の装置。
- 前記収集系が、前記反射光線を前記検出器に方向付けるための第2の軸外放物面ミラーと折り返しミラーとを含む、請求項1に記載の装置。
- 前記検出器が、前記反射光線を受け取るための測定チャネルと、前記参照光線を受け取るための参照チャネルとを含む、デュアルチャネル広帯域高SNR(信号対比)分光計である、請求項1に記載の装置。
- プラズマ処理システムであって、
プラズマ処理室と、
垂直入射反射率計であって、
連続波広帯域光源と、
検出器と、
前記プラズマ処理室内に配置された基板上の領域を、前記基板に対して垂直入射で方向付けられる入射光線で照明するように構成された照明系と、
前記基板上の照明領域から反射する反射光線を収集し、前記反射光線を前記検出器に方向付けるように構成された収集系と、
前記反射光線を処理して背景光を抑制し、前記背景光を抑制するために処理される、参照光線及び前記反射光線に基づく前記基板又はその上に形成される構造の特性を判定し、且つ、前記判定された特性に基づいてエッチング処理を制御する、ように構成された処理回路構成と、
を備える、プラズマ処理システム。 - 前記照明系及び前記収集系が、管の内部に設置されている、請求項12に記載のシステム。
- 前記管が、ステンレス鋼又はアルミニウム合金で作製されており、前記プラズマ処理室の上壁を通して前記プラズマ処理室内に挿入されている、請求項13に記載のシステム。
- 前記管が、真空シールとして機能するように構成された上窓と、汚染を防止するように構成された下窓とを含む、請求項13に記載のシステム。
- 前記管が、処理ガス又はパージガスを前記プラズマ処理室に注入するように構成されたガス供給パイプを含む、請求項13に記載のシステム。
- 前記垂直入射反射率計が、前記広帯域光源からの前記入射光線を周期的に遮断して、それに応じて前記収集系に前記背景光を収集させるように構成されたシャッタを更に備える、請求項12に記載のシステム。
- 前記照明系が、第1のローション偏光子を含み、前記入射光線が、前記基板に方向付けられる前に前記第1のローション偏光子を通過する、請求項12に記載のシステム。
- 前記収集系が、第2のローション偏光子を含み、前記反射光線が、前記検出器に方向付けられる前に前記第2のローション偏光子を通過する、請求項12に記載のシステム。
- 現場エッチング監視のための方法であって、
プラズマ処理室内に配置された基板に対して垂直入射で入射光線を方向付けることであって、前記入射光線が前記基板の表面上に照明領域を生成する、ことと、
前記入射光線の一部を検出器に分割して、参照光線を収集することと、
プラズマから背景光を収集し、前記照明領域から反射光線を収集することと、
前記反射光線を処理して前記背景光を抑制することと、
アルゴリズム又は参照ライブラリを使用することによって、前記参照光線及び前記反射光線に基づいて、前記基板又はその上に形成された構造の特性を判定することと、
前記判定された特性に基づいて、エッチング処理を制御することと、を含む方法。
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US16/051,082 US10978278B2 (en) | 2018-07-31 | 2018-07-31 | Normal-incident in-situ process monitor sensor |
US16/051,082 | 2018-07-31 | ||
PCT/US2019/043087 WO2020028105A1 (en) | 2018-07-31 | 2019-07-23 | Normal-incidence in-situ process monitor sensor |
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JP2021533558A true JP2021533558A (ja) | 2021-12-02 |
JP7395099B2 JP7395099B2 (ja) | 2023-12-11 |
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JP2021504491A Active JP7395099B2 (ja) | 2018-07-31 | 2019-07-23 | 垂直入射現場プロセス監視センサ |
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WO2020236165A1 (en) * | 2019-05-22 | 2020-11-26 | Raytheon Company | Monitoring mirror reflectance using solar illumination |
US20220406667A1 (en) * | 2020-03-11 | 2022-12-22 | Hitachi High-Tech Corporation | Plasma processing apparatus and plasma processing method |
EP4113574B1 (en) * | 2021-07-02 | 2024-01-03 | Comet AG | Method for machine learning a detection of at least one irregularity in a plasma system |
EP4242904A3 (en) * | 2021-07-02 | 2023-11-01 | Comet AG | Method for machine learning a detection of at least one irregularity in a plasma system |
US20230078146A1 (en) * | 2021-09-15 | 2023-03-16 | Applied Materials, Inc. | Virtual measurement of conditions proximate to a substrate with physics-informed compressed sensing |
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KR20210027487A (ko) | 2021-03-10 |
WO2020028105A1 (en) | 2020-02-06 |
US11961721B2 (en) | 2024-04-16 |
CN112514043A (zh) | 2021-03-16 |
US20210193444A1 (en) | 2021-06-24 |
US20200043710A1 (en) | 2020-02-06 |
TW202018810A (zh) | 2020-05-16 |
SG11202013071YA (en) | 2021-01-28 |
US10978278B2 (en) | 2021-04-13 |
JP7395099B2 (ja) | 2023-12-11 |
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