JP2021513677A - 微細な線及びパターンを生成し且つ焼結する為の方法及び装置 - Google Patents
微細な線及びパターンを生成し且つ焼結する為の方法及び装置 Download PDFInfo
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- 238000007711 solidification Methods 0.000 claims abstract description 155
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Abstract
Description
Claims (15)
- 選択的な材料堆積の為の方法であって、
第1の材料を基板上に堆積させることと、引き続き、
1以上のエネルギービームにより、第1の固化パターンで選択的に該第1の材料を固化することと、引き続き、
タイミング、エネルギー及び強度において制御された大面積フォトニック曝露により、該基板から固化されていない材料を取り除いて、該第1の材料の該第1の固化パターンを残すこと
を含む、前記方法。 - 大面積フォトニック曝露により該基板から該固化されていない材料を取り除く前に、1以上のエネルギービームにより、第2の固化パターンで選択的に該第1の材料を固化することを含み、上記第2の固化パターンが、該第1の固化パターンに相補的であり、且つ取り除かれるときに固化されていない材料をばらばらにするように構築されている、請求項1に記載の方法。
- 該第2の固化パターンが、連続的な線、破線、又は点線によって形成される固化部を含む、請求項2に記載の方法。
- 該第1の固化パターンと該第2の固化パターンとの間の最小距離が、5〜250ミクロンである、請求項2又は3に記載の方法。
- 該第2の固化パターンが、該第1のパターンから離れる方向において、少なくとも50ミクロンにわたる固化されていない材料に面する固化部だけを含む、請求項2〜4のいずれか1項に記載の方法。
- 該第1の固化パターンが、固化されていない材料を該基板から取り除く間に縁にかかる力を平均化する為のノッチを有する縁を備えている、請求項1〜5のいずれか1項に記載の方法。
- 該第1の固化パターンが、縁部分とコア部分とを備え、該縁部分が、所望の固化パターンの該コア部分よりも永く、該1以上のエネルギービームに曝露されて、該第1の固化パターンが該縁部分において強化される、請求項1〜6のいずれか1項に記載の方法。
- 該固化されていない材料を取り除いた後に、該第1の材料の該固化したパターンを焼結することをさらに含む、請求項1〜7のいずれか1項に記載の方法。
- 該大面積フォトニック曝露が、複数の短いエネルギーパルスによって実行される、請求項1〜8のいずれか1項に記載の方法。
- 該大面積フォトニック曝露が、3〜50kW/cm2のエネルギー密度を有するフラッシュシステムによって生成される、請求項1〜9のいずれか1項に記載の方法。
- 該第1の材料がバルクで堆積される、請求項1〜10のいずれか1項に記載の方法。
- 該第1の材料が、非接触堆積技法を使用して選択的に堆積される、請求項1〜11のいずれか1項に記載の方法。
- 該堆積技法が液滴堆積技法である、請求項1〜12のいずれか1項に記載の方法。
- 該エネルギービームが、300〜1200ナノメートルの波長を有するレーザによって生成される、請求項1〜13のいずれか1項に記載の方法。
- 該1以上のエネルギービームが、1以上の可動ミラーによって該基板に方向付けられる、請求項1〜14のいずれか1項に記載の方法。
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EP18154524.5A EP3520928A1 (en) | 2018-01-31 | 2018-01-31 | Method and apparatus for creating and sintering fine lines and patterns |
PCT/NL2019/050051 WO2019151854A1 (en) | 2018-01-31 | 2019-01-30 | Method and apparatus for creating and sintering fine lines and patterns |
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EP (2) | EP3520928A1 (ja) |
JP (2) | JP2021513677A (ja) |
CN (1) | CN111683770B (ja) |
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CN113597107A (zh) * | 2021-07-28 | 2021-11-02 | 广东工业大学 | 一种微小液滴辅助式纳米金属精细线路的加工方法 |
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CN111781897B (zh) * | 2020-07-14 | 2022-07-19 | 上海柏楚电子科技股份有限公司 | 加工控制方法、控制装置、加工控制系统及存储介质 |
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- 2019-01-30 EP EP19714852.1A patent/EP3746243A1/en active Pending
- 2019-01-30 TW TW108103576A patent/TW201938000A/zh unknown
- 2019-01-30 JP JP2020541787A patent/JP2021513677A/ja active Pending
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US20210023772A1 (en) | 2021-01-28 |
US11691199B2 (en) | 2023-07-04 |
CN111683770B (zh) | 2023-10-27 |
TW201938000A (zh) | 2019-09-16 |
CN111683770A (zh) | 2020-09-18 |
JP2024037786A (ja) | 2024-03-19 |
EP3520928A1 (en) | 2019-08-07 |
EP3746243A1 (en) | 2020-12-09 |
WO2019151854A1 (en) | 2019-08-08 |
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