JP2021156519A - Air conditioning system of clean room - Google Patents

Abstract

To provide an air conditioning system of a clean room capable of suppressing increase of costs, saving energy, and effectively utilizing an object space, while satisfying a temperature and a cleanliness required for the object space.SOLUTION: In a state that a region requiring higher cleanliness in comparison with other regions is determined as a high cleanliness region S1, and a region excluding the high cleanliness region S1 is determined as a non-high cleanliness region S2 in an object space S, a blower unit 8 disposed in a manner of being hung at an upper part of the object space S and supplying cleaned air A to the object space S is disposed to blow out the air A in a lateral direction with respect to an upper space of the high cleanliness region S1, the air A blown out in the lateral direction is bent downward at the upper space and directed toward the high cleanliness region S1, and the air A supplied to the high cleanliness region S1 flows downward in the high cleanliness region S1, reaches the non-high cleanliness region S2, and raises in the non-high cleanliness region S2 to return to the blower unit 8.SELECTED DRAWING: Figure 4

Description

The present invention relates to a clean room air conditioning system.

12 to 14 show an example of an air conditioning system in a conventional industrial clean room. In the target space S, a raised floor 1a is formed above the floor slab by a punching panel, grating, or the like, and equipment 2 such as various production devices is placed on the raised floor 1a. A transport device 5 for transporting the workpiece 4 is provided at a position above the raised floor 1a in the target space S. The target space S is, for example, a work room of a semiconductor production facility, and the workpiece 4 is, for example, a wafer as a base material forming a semiconductor integrated circuit, a substrate-like article such as a substrate of a flat panel display, or a plurality of them. A storage container or the like containing a substrate-like article.

The transport device 5 includes a transport rail 6 and a transport vehicle 7 that can move along the transport rail 6, and the transport vehicle 7 is between the device 2 while loading and moving the workpiece 4. The work piece 4 is delivered at. A suspended ceiling 3a is suspended from the upper slab surface as a ceiling surface, and the transport rail 6 is suspended from the constituent material of the suspended ceiling 3a or the upper slab surface along the suspended ceiling 3a. Can be installed. In the vertical direction, as shown in FIG. 14, the workpiece 4 on the load / unload portion on the front surface of the device 2 is delivered by a transport vehicle or the like that can move in the vertical direction (not shown).

A ventilation unit 8 for sending air A to the target space S is further installed in the suspended ceiling 3a. The blower unit 8 is called a fan filter unit (FFU) or the like, and is a device provided with a fan and a high-performance filter such as a HEPA filter or a ULPA filter, and drives the air A above the suspended ceiling 3a to drive the fan. The air A is drawn in and blown onto the filter, and the purified air A is sent downward to the lower target space S. Between the space between the raised floor 1a and the floor slab (underfloor space) and the space between the floor slab on the upper floor and the suspended ceiling 3a (under-ceiling space), a retan shaft 10 is provided so as to communicate these. The air A that is provided and sent into the target space S by the blower unit 8 escapes from the opening 9 of the raised floor 1a to the underfloor space, and the space behind the ceiling facing the suction port of the fan of the blower unit 8 is the target space. The pressure becomes more negative than S, and due to the pressure difference, it is sent from the underfloor space to the ceiling space through the letan shaft 10, and is again supplied from the blower unit 8 to the target space S. Since there is a loss of ventilation resistance, the degree of negative pressure on the target space S increases in the order of the underfloor space, the letan shaft, and the attic space, and the underfloor space is also small and negative pressure, so the opening 9 of the raised floor 1a to the inside of the target space S It sucks in air.

As shown in FIG. 13, the ventilation units 8 are sparsely arranged on the suspended ceiling 3a. Further, a cooling unit 11 is installed at any position of the path from the underfloor space to the attic space through the retan shaft 10 (here, the entrance of the retan shaft 10), and the cooling unit 11 is installed from the retan shaft 10 to the attic. It is designed to cool the oncoming air A. The cooling unit 11 is, for example, a dry coil through which a refrigerant W such as cold water flows inside, and draws a low-temperature refrigerant W from an external cold heat source (not shown) through a refrigerant going pipe 12 and circulates around the dry coil. After indirectly exchanging heat with the air A, the refrigerant W whose temperature has risen is returned to the cold heat source through the refrigerant return pipe 13.

In this way, the air A circulates from the target space S to the underfloor space and further from the retan shaft 10 to the attic space, and in the process, the air A sent to the target space S is purified by the blower unit 8 and discharged from the device 2. The air A containing heat is cooled by the cooling unit 11. Such circulation of the air A is driven by the operation of the fan in the blower unit 8 (however, if necessary, a fan or the like may be separately provided to assist the driving of the air A).

Prior art documents related to this type of clean room air conditioning system include, for example, the following Patent Document 1.

Jitsufuku No. 6-48256

In the air conditioning system as described above, the blowing temperature of the air A is determined based on, for example, the amount of exhaust heat in the entire target space S. Explaining an example of the temperature distribution of air A in various places with the air conditioning system shown in FIGS. 12 to 14 in mind, the indoor air condition determined by the product process and the like in the production apparatus (here, equipment 2) is, for example, the dry-bulb temperature. The temperature is 23 ° C. and the relative humidity is 45%. In this case, the temperature of the air A sent to the target space S is 15 ° C. (that is, the blowing temperature is 15 ° C.) in the vicinity of the blower unit 8 in the area where the heat generation density of the device 2 is high, and the air escapes from here to the underfloor space. In the meantime, the exhaust heat of the device 2 is received and the temperature rises to about 23 ° C. Then, it is cooled to 15 ° C. in the cooling unit 11 and sent to the blower unit 8 again.

Such a setting regarding the temperature of the air A takes into consideration not only keeping the temperature around the device 2 at an appropriate temperature but also considering that the moisture in the air A does not condense in the cooling unit 11. Assuming that the dry-bulb temperature in the work space (here, equipment 2 and its surroundings) is 23 ° C and the relative humidity is 45% under the condition of 1 atm, the dew point temperature of air A is about 10.5 ° C. be. The blowing temperature in the cooling unit 11 is 15 ° C., but at this temperature, the relative humidity is about 75%, condensation does not occur in the coil portion of the cooling unit 11, and a dry coil can be realized.

Here, the temperature of the refrigerant W (inlet water temperature) in the refrigerant going pipe 12 is about 10 ° C., but if the refrigerant W is to be kept at such a low temperature regardless of the season, the coolant is used in the cold heat source. Even when the outside air that exchanges heat with exhaust heat is about 33 ° C in summer, it is necessary to work on a compressor that realizes a refrigeration cycle that can cool the refrigerant to the temperature of the refrigerant W in the evaporator, and appropriate energy consumption is required. It will be. In general, in the middle season and winter season, free cooling (cooling that uses the cold heat of the outside air regardless of the refrigerator etc.) may be performed to cool the refrigerant W, but the inlet water temperature is set to 10 ° C. In this case, free cooling requires a condition that the outside temperature is much lower than 10 ° C. Therefore, in the climate of Japan, the period during which free cooling can be performed is short. As described above, in the above-mentioned air conditioning system, there is a limit to energy saving of temperature control.

Further, the air conditioning system as described above is designed to keep the entire object space S uniformly clean, and it is necessary to purify a large amount of air A. Therefore, it is necessary to install a considerable number of blower units 8 and to replace the filter frequently. In addition, the cooling unit 11 is also required to have a large heat exchange area, which has led to an increase in cost.

In addition, when considering the case of installing a device 2 that generates a large amount of heat, a ceiling cell or the like is laid over the entire suspended ceiling 3a in order to install the blower unit 8, and the suspended ceiling 3a is constructed. Will incur a great cost.

Moreover, in recent years, the amount of heat generated by the device 2 in the clean room tends to increase due to the improvement in the degree of product integration of the workpiece 4. The larger the calorific value, the larger the updraft derived from the exhaust heat of the device 2, and in order to suppress this, the blower unit 8 is required to have a certain amount of air flow. As a result, it is still necessary to install a certain number of blower units 8.

Further, in the above-mentioned conventional example, the total amount of air A supplied from the blower unit 8 to the target space S is increased, guided to the underfloor space through the opening 9 of the floor 1a, cooled by the cooling unit 11, and then returned to the attic space. I have to. Therefore, a retan shaft 10 that communicates the underfloor space and the attic space is required, and the usable flat area and standing area are narrowed by the amount of the retan shaft 10, and the space utilization efficiency is lowered.

Further, in the conventional example, in order to purify the entire target space S set as a large space with the minimum necessary circulating air volume, air A is drawn into the underfloor space from the opening 9 of the raised floor 1a configured by a punching panel or the like. Forming a downward airflow. This is to ensure that the air A is circulated with as little air volume as possible, but this also limits the use of the underfloor space.

In view of such circumstances, the present invention aims to provide a clean room air-conditioning system that can satisfy the temperature and cleanliness required in the target space, suppress the increase in cost, save energy, and effectively use the target space. To do.

In the present invention, the area of the target space that requires higher cleanliness than other areas is set as a highly clean area, and the area other than the highly clean area is set as a non-highly clean area, and the target space is set. The blower unit that is hung above the space and supplies purified air to the target space is installed so as to send air sideways to the space above the highly clean area, and the air that is sent out sideways is the upper space. The air supplied to the high-level clean area is bent downward at and heads for the high-level clean area, descends to the high-level clean area, reaches the non-high-level clean area, and rises in the non-high-level clean area to blow air. It pertains to a clean room air conditioning system characterized by being configured to return to the unit.

In the air-conditioning system of the clean room of the present invention, a hanging wall extending in the downward direction is provided at a position above the floor between the highly clean area and the non-highly clean area, and the blower unit has a blowing surface. It can be installed by being positioned at the opening opened in the hanging wall. The downward direction of the hanging wall may be vertical or may be inclined within 45 degrees with respect to the vertical. The position where the hanging wall is extended along the downward direction may be the boundary position between the highly cleaned area and the non-highly cleaned area, or may be a position set back to the non-highly cleaned area side.

In the clean room air-conditioning system of the present invention, the blower units are arranged so as to face each other across the space above the highly clean area, and the air sent from the blower units collides with each other and bends downward in the upper space. , Can be configured to form a downflow in the highly clean area.

In the air-conditioning system of the clean room of the present invention, a guide plate is installed in the blower unit so as to face the blower unit with the space above the highly clean area sandwiched between them, and the air sent from the blower unit collides with the guide plate to form the upper space. It may be configured to be bent downward at the site to form a downflow in the highly clean area.

In the clean room air conditioning system of the present invention, an air supply chamber as an air passage is defined at a position above the equipment in the non-altitude clean area, and the air blowing unit uses the air in the air supply chamber at the altitude. The air supply chamber is installed on the side wall of the air supply chamber facing the highly clean area so as to supply to the space above the clean area, and the air supply chamber is a temperature stratification formed in the non-highly clean area from the suction port of the blower unit. It is a space that keeps the flow of warm air from the upper part away and greatly smoothes the vertical circulation of air in the target space. It may be supplied to the highly clean area.

In the clean room air-conditioning system of the present invention, an air supply duct that serves as an air passage for air that rises in the non-highly clean area and returns to the blower unit is installed at a position above the equipment in the non-highly clean area. A cooling unit may be provided at the inlet of the air supply duct so that the air in the non-highly clean area is cooled and passed through the air supply duct and supplied from the blower unit to the highly clean area.

In the clean room air-conditioning system of the present invention, the blower unit facing the intersection in the highly clean area may be arranged so as to blow air toward the center of the intersection in a plan view.

In the air-conditioning system of the clean room of the present invention, a transport rail constituting a transport device for transporting a work piece is installed in the target space, and an area around the transport rail is set as the highly clean area. You may be.

According to the air-conditioning system of the clean room of the present invention, it is possible to achieve an excellent effect that the temperature and cleanliness required in the target space can be satisfied, the cost increase can be suppressed, the energy can be saved, and the target space can be effectively used. .. Furthermore, since air is sent laterally to the space above the highly clean area in the target space and bent downward in the upper space toward the highly clean area, the height direction of the highly clean area can be effectively used. Can be played. Furthermore, not only the air transporting force of the fan of the blower unit is relied on, but also the rising force of warm air is used by the air stratification due to the heat generated by the production equipment in the target space, so that an excellent effect of energy saving can be achieved.

It is a schematic elevation view which shows an example of the form of the air-conditioning system of a clean room by carrying out this invention. It is a schematic plan view which shows the form of the air-conditioning system of the clean room of this Example. It is a schematic side sectional view which shows the form of the air-conditioning system of the clean room of this Example, and is the figure corresponding to the arrow III-III of FIG. It is a perspective view which shows the form of the air-conditioning system of the clean room of this Example. It is a schematic side sectional view which shows the form of the air-conditioning system of a clean room by another Example of this invention. It is a figure which shows an example of the air flow along the side cross section in the clean room to which this invention is applied. It is a figure which shows an example of the air flow along the side cross section in the clean room to which this invention is applied, and shows the cross section different from FIG. It is a schematic plan view which shows the reference example of the arrangement of the blower unit at the intersection of the highly clean area. It is a schematic plan view which shows an example of the arrangement of the blower unit in the intersection of the highly clean area. It is a schematic side sectional view which shows the installation example of the baffle plate as a guide plate. It is a schematic side sectional view which shows the installation example of the wall as a guide plate. It is a schematic elevation view which shows an example of the air-conditioning system of a clean room in a conventional clean room. It is a schematic plan view which shows an example of the air-conditioning system of a clean room in a conventional clean room. It is a schematic side sectional view which shows an example of the air-conditioning system of a clean room in a conventional clean room, and is the XIV-XIV arrow-pointing equivalent figure of FIG.

Hereinafter, embodiments of the present invention will be described with reference to the accompanying drawings.

1 to 4 show an example of an air-conditioning system for a clean room according to the implementation of the present invention, and in the drawings, the parts having the same reference numerals as those in FIGS. 12 to 14 represent the same objects. The configuration shown in FIGS. 1 to 4 is, for example, a part of the target space S provided with the air conditioning system, and a plurality of similar configurations may be continuous vertically and horizontally in a plan view. Further, for convenience of explanation, some or all of the constituent elements are not shown in some figures. For example, in FIGS. 1 and 2, the workpiece 4 and the transport vehicle 7 are not shown, and in FIG. 4, the transport rail 6 is also omitted in addition to these. Further, also in FIGS. 6 and 7 to be described later, the work piece 4, the transfer rail 6, and the transfer vehicle 7 are not shown. In addition to this, some components are not shown as appropriate in each drawing in order to avoid complicating the drawings.

The equipment 2 is placed on the floor 1 of the target space S, and a transport device 5 for transporting the workpiece 4 is installed at a height above the floor 1. The transport device 5 includes a transport rail 6 and a transport vehicle 7 that can move along the transport rail 6. The transport vehicle 7 loads the workpiece 4 and moves along the transport rail 6. , The work piece 4 is delivered to and from the device 2.

The above configurations are generally the same as those of the above-mentioned conventional examples shown in FIGS. 12 to 14, but in the case of this embodiment, the arrangement of the blower unit 8 is characteristic, and the floor 1 and the ceiling 3 are accompanied by this. The configuration of the retan shaft 10 is also different from that of the conventional example.

First, in this embodiment, the blower unit 8 is not evenly arranged above the target space S as in the conventional example (see FIG. 13), but the target space S is divided into the highly clean area S1 and the non-highly clean area S2. The air A blown out from the blower unit 8 is concentratedly supplied to the area set in the highly clean area S1. Here, the "highly clean area" refers to an area of the target space that requires a higher degree of cleanliness than other areas, and the "non-highly clean area" is the target space that is highly clean. Refers to areas other than areas.

For example, when an industrial clean room is assumed as the target space S, an article such as a substrate and a work piece 4 which is a storage container thereof may be exposed in the area where the cleanliness should be secured most in the target space S. The place. In the case of this embodiment, the place where the workpiece 4 is transported by the transport vehicle 7 and the workpiece 4 is delivered between the transport vehicle 7 and the device 2, that is, the area around the transport rail 6 corresponds to this. do. Unless foreign matter such as dust reaches the work piece 4 itself, a place where the work piece 4 does not exist is not required to have a high degree of cleanliness. Further, since the inside of the device 2 is structurally isolated from the target space S and the cleanliness is maintained, the region where the supply of clean air A by the blower unit 8 is most required is the transport rail 6 in a plan view. It is the area around. Therefore, the area around the transport rail 6 is set to the highly clean area S1 so that the cleanliness is kept particularly high. The set cleanliness of the high-level clean area S1 is, for example, classes 5 to 6 (in that case, the space is actually cleaner than the set cleanliness), and the non-high-level clean area S2 may be about class 6. .. It should be noted that this is an example, and the cleanliness of each region can be appropriately set in carrying out the present invention, and the set cleanliness of each region is set lower even if it is set higher than illustrated here. But it can be fully established.

Here, it is preferable that the flat area of the non-highly clean area S2 is set to be the same as or larger than the flat area of the highly clean area S1. This is because of the circulation of air A, which will be described later.

As for the floor 1, unlike the raised floor 1a of the conventional example, the opening 9 through which the air A passes is not indispensable, and in this embodiment, the floor surface is configured as a completely closed floor surface. Further, although an example in which the floor 1 is configured as a raised floor is shown here, the raised floor is not an essential configuration either. As for the ceiling 3, unlike the suspended ceiling 3a of the conventional example, the suspended structure is not indispensable, and in the case of this embodiment, the ceiling 3 has a straight ceiling structure with the upper slab surface as the ceiling 3 (or close to the slab surface). A ceiling 3 may be provided separately at the height). Further, the retan shaft 10 is omitted. The overall flow of air A is also significantly different from that of the conventional example.

The arrangement of the equipment 2, the transport rail 6, and the blower unit 8 in and around the highly clean area S1 will be described in more detail.

In the case of this embodiment, the transport rail 6 is installed so as to be suspended from the ceiling 3 which is the floor slab surface of the upper floor, and both of the transport rails 6 are hung on the floor 1 below the transport rail 6 in a plan view. The device 2 is arranged at a position corresponding to the side.

For the equipment 2, cleanliness is particularly required in the front surface portion 2a where the load / unload portion for transferring the workpiece 4 to and from the transport vehicle 7 is provided. Therefore, as shown in FIGS. 2 and 3, only the front surface portion 2a of the device 2 slightly protrudes into the highly clean area S1 below the transport rail 6, and the devices other than the front surface portion 2a are located in the non-highly clean area S2. Be placed. The exhaust heat of the device 2 is discharged from other than the front portion 2a (rear portion 2b, etc.).

Further, as shown in FIGS. 2 to 4, the blower unit 8 is arranged at a position where the transport rail 6 is sandwiched from both sides in a plan view so that the front surface faces the space above the highly clean area S1. That is, the blower units 8 face each other with the space above the highly clean area S1 set around the transport rail 6 interposed therebetween.

On the back side of the blower unit 8, an air supply chamber 14 is defined as an air passage through which warm air A in the upper part of the temperature stratification formed in the non-highly clean area S2 flows. The air supply chamber 14 is a space that keeps the flow of warm air A above the temperature stratification formed in the non-highly clean area S2 away from the suction port of the blower unit 8 and greatly smoothes the vertical circulation of the air A in the target space S. Yes, in the case of this embodiment, the entire air supply chamber 14 is defined above the floor 1 and above the device 2 in the non-highly clean area S2. A part (referred to as the front surface 15a) of the side wall 15 of the air supply chamber 14 also serves as the upper part of the hanging wall 16 described later and faces the highly clean area S1, where the HEPA filter blowing surface of the blower unit 8 is located. It is provided.

Of the side wall 15, the other surface (referred to as the side surface 15b and the back surface 15c) faces the non-highly clean area S2, and a cooling unit 11 is provided on a part of the side wall 15 (in the case of the example shown here, the side surface 15b). It is provided. The cooling unit 11 is, for example, a device (dry coil) similar to the cooling unit 11 in the above-mentioned conventional example (see FIGS. 12 to 14), includes a cooling coil inside which a refrigerant W such as cold water flows, and is external. A low-temperature refrigerant W is drawn from a cold heat source (not shown) through a refrigerant going pipe 12, indirectly exchanges heat with the surrounding air A, and then returned to the cold heat source through a refrigerant return pipe 13. (See Fig. 1). The upper surface of the air supply chamber 14 is formed by utilizing the surface of the ceiling 3, and the side wall 15 and the bottom surface are installed so as to be suspended from the ceiling 3.

Further, a hanging wall 16 is installed between the highly clean area S1 and the non-highly clean area S2. In the case of this embodiment, the front surface 15a of the air supply chamber 14 forms a part of the boundary between the highly clean area S1 and the non-highly clean area S2, and a part of the vertical wall 16 is the front surface of the air supply chamber 14. It is provided so as to extend downward from 15a along the vertical direction. Further, in the case of this embodiment, the hanging wall 16 extends to a portion of the air supply chamber 14 where the side wall 15 is not provided, and forms a part of the boundary between the highly cleaned area S1 and the non-highly cleaned area S2. The installation position of the hanging wall 16 may be the boundary between the high-level clean area S1 and the non-high-level clean area S2, or may be a position set back from the boundary to the non-high-level clean area S2 side.

The lower end of the hanging wall 16 is located above the floor 1, and the hanging wall 16 incompletely separates the highly cleaned area S1 and the non-highly cleaned area S2 so that the lower parts of both spaces communicate with each other. ing. As shown here, the surface formed by the hanging wall 16 does not necessarily have to coincide with the surface formed by the side wall 15 of the air supply chamber 14, and is arranged between the highly cleaned area S1 and the non-highly cleaned area S2. Just do it. For example, it may be installed at a position farther from the transfer rail 6 than the front surface 15a of the air supply chamber 14 in a plan view.

The dimensions from the ceiling 3 to the lower end of the hanging wall 16 should be set as follows. First, the position of the lower end of the hanging wall 16 is set above the floor 1 so as not to interfere with the relocation of the device 2 on the floor 1. Further, when the hanging wall 16 comes into contact with the device 2, it also hinders the relocation of the device 2, so that the lower end of the hanging wall 16 is preferably located above the upper end of the device 2. On the other hand, from the viewpoint of the circulation of air A, which will be described later, it is preferable that the floor 1 and the lower end of the hanging wall 16 are brought close to each other to some extent while maintaining a certain distance, and the flow velocity of the air A flowing below the hanging wall 16 is kept small to some extent. .. In order to achieve both the circulation of air A and the degree of freedom of relocation of the device 2, it is most preferable that the hanging wall 16 has a size such that the lower end is about 10 cm higher than the upper end of the device 2. In this embodiment, the lower end of the hanging wall 16 is continuous at the same height with a vertical distance from the upper end of the device 2, and there is no obstacle between the devices 2. The hanging wall 16 may be made of a hard material such as a panel, or may be made of a soft material such as a vinyl sheet. Regarding the hanging wall 16 and the guide plates 18 and 19 described later, "extending along the downward direction" does not necessarily mean having an accurate vertical plane, and the downward direction of the hanging wall 16 includes vertical. It may have an inclination of 45 degrees or less with respect to the vertical. The direction along the vertical direction means a direction including the vertical direction as a component.

The air A introduced and flows through the air supply chamber 14 against the coil ventilation resistance of the cooling unit 11 at the inlet thereof is conveyed to the inside of the ventilation unit 8 by using the static pressure on the suction side of the fan of the ventilation unit 8 as a conveying force. After passing through a high-performance filter due to the static pressure on the discharge side, the air is supplied to the highly clean area S1 at a constant wind speed. Subsequently, the air A and the air A blown out facing each other collide with each other by the blower unit 8 installed so as to face each other across the upper space of the highly clean area S1 and bend downward in the upper space to descend downward. It becomes a flow and blows down the highly clean area S1. After that, the air A that slowly flows into the non-high-level clean area S2 below the vertical wall 16 below the high-level clean area S1 and between the devices 2 generates heat from the device 2 in the non-high-level clean area S2. As the air around the equipment warmed by the above rises, a temperature stratification is formed in the height direction of the non-highly clean area S2, and the heat generated by the equipment 2 is generated by the slow replacement of the temperature stratification layers of the entire non-highly clean area S2. It is converted to and flows ascending, and returns to the air supply chamber 14 while being cooled by the cooling unit 11 in the upper part of the non-highly clean area S2. The transport force applied to the circulation of the air A is covered by the static pressure of the blower unit 8 between the inlet of the air supply chamber 14 and the highly clean area S1, and the air layer slowly rises due to temperature stratification in the non-highly clean area S2. It is not necessary to separately arrange a mechanism for blowing air with respect to the passage of air A in the cooling unit 11 and the flow of air A in the air supply chamber 14 (however, in carrying out the present invention, blowing air is required. If the transporting force is insufficient only with the unit 8, a mechanism for blowing air may be appropriately installed in the cooling unit 11, the air supply chamber 14, or the like to supplement the transporting force).

The configuration of the air passage or the air supply chamber 14 and the arrangement of the cooling unit 11 are not limited to the examples shown here. As long as the air accumulated above the non-highly clean area S2 can be cooled and appropriately supplied to the highly clean area S1 through the blower unit 8, various types of air passages and cooling units can be adopted. For example, depending on the arrangement in the clean room, the cooling unit 11 may be installed on the back surface 15c instead of the side surface 15b of the air supply chamber 14 (not shown). Alternatively, as shown in another embodiment in FIG. 5, instead of the air supply chamber 14, the air supply duct 17 as an air passage is connected to the floor 1 in the non-high clean area S2 so as to connect the cooling unit 11 and the air blower unit 8. It may be provided at a higher position.

The circulation of air A in the above-described embodiment will be described in more detail. Blower units 8 are installed facing each other facing the space above the highly clean area S1, and the clean air A blown out sideways from the blower unit 8 collides with each other in the upper space and goes down. It forms a flow and descends in the highly clean area S1 (see FIG. 3). The air A flows downward from the periphery of the transport rail 6 to the front surface portion 2a of the device 2 to which the workpiece 4 is delivered. The air A that bypasses the lower end of the hanging wall 16 and the end face of the device 2 while removing dust and slowly flows into the non-high clean area S2 is warmed by the heat generated by the device 2 in the non-high clean area S2. As the ambient air rises, a temperature stratification is formed in the height direction of the non-high clean area S2, and the heat generated by the device 2 is converted into air temperature and rises due to the slow replacement of the temperature stratification layers of the entire non-high clean area S2. And be pushed out. In the non-highly clean area S2, the air A becomes an upflow toward the inlet (the portion provided with the cooling unit 11) of the air supply chamber 14 located above the floor 1.

The blowing temperature in the blower unit 8 is, for example, 20 ° C. That is, the temperature of the air A that is cooled by the cooling unit 11 and then blown out from the filter of the blower unit 8 is 20 ° C. The air A supplied from the air supply chamber 14 through the blower unit 8 at 20 ° C. is sent to the highly clean area S1 to deliver the transport rail 6 to which the workpiece 4 is transported and the workpiece 4 to be delivered. It is sprayed onto the front surface portion 2a of the device 2 (see FIGS. 1 to 4). The workpiece 4 transported in the highly clean area S1 by the transport vehicle 7 is kept clean by being blown with clean air A which has been purified by the blower unit 8.

Next, the air A passes between the devices 2, between the devices 2 and the hanging wall 16, and between the hanging wall 16 and the floor 1, and moves to the non-highly clean area S2. Since the workpiece 4 is not delivered or transported in the non-highly clean area S2, even if the cleanliness of the air A deteriorates on the way from the highly clean area S1 to the non-highly clean area S2, the air in that state There is no risk that A will come into direct contact with the workpiece 4.

The front surface 2a of the device 2 is arranged so as to slightly project into the highly clean area S1, and the air A is from the front surface 2a of the device 2 before moving from the highly clean area S1 to the non-highly clean area S2. Receive exhaust heat. The exhaust heat received by the air A from the front surface portion 2a in this process is, for example, about 30% of the heat generated by the entire device 2.

When the air A enters the non-highly clean area S2, it receives exhaust heat from a portion other than the front portion 2a (rear portion 2b, etc.) of the device 2 and raises the temperature. In the non-high-level clean area S2, the high-temperature air A that forms the temperature stratification rises in the non-high-level clean area S2 to the vicinity of the ceiling 3 and forms a heat pool. The temperature of the air A in the heat pool is about 30 ° C. That is, as a result of receiving the exhaust heat of the entire device 2, the air A is calculated to rise from the blowing temperature of about 20 ° C to 10 ° C. As described above, the exhaust heat received by the air A from the device 2 in the highly clean area S1 is about 30% of the heat generated by the entire device 2, so the temperature of the air A immediately before the transition to the non-high clean area S2 is about 23 ° C. be. This is an appropriate temperature for the workpiece 4 such as a substrate. In the cooling unit 11, in order to maintain an appropriate temperature of 23 ° C. on the front surface portion 2a of the device 2, the temperature of the air A immediately before the transition to the non-high cleaning area S2 is measured as a control point, and the amount of heat exchange by the refrigerant W is controlled. do. In order to measure the temperature of the control point, a temperature sensor is installed near the boundary with the non-high-level clean area S2 in the lower part of the high-level clean area S1, but the illustration is omitted here.

When the heated air A rises in the non-highly clean area S2, the side wall 15 of the air supply chamber 14 and the hanging wall 16 surround the non-highly clean area S2 and act like a vertical reverse tank, and are raised. The air A to which the ascending flow due to the heat generated by the device 2 is added to the flow is slowly transported upward while forming a temperature stratification in this reverse tank-like space. Here, when the flat area of the non-highly clean area S2 is set to be equal to or larger than the flat area of the highly clean area S1, a slow flow of air A is likely to be formed as a whole, and a stable temperature stratification is likely to be formed. ..

The temperature of the air A below the temperature stratification is around 25 ° C. because it mixes with the surrounding cold air A while receiving the exhaust heat from the device 2. Above the temperature stratification, it is about 30 ° C. as described above.

Further, the hanging wall 16 separates the high-level clean area S1 and the non-high-level clean area S2 so that the air A is clean and has a relatively low temperature that has just been supplied from the blower unit 8 to the high-level clean area S1. It also has a function of suppressing mixing of air A in the non-highly clean area S2. By dividing the flow of air A downward from the blower unit 8 and the flow of air A upward from the vicinity of the device 2 by the hanging wall 16, the state of air A in the non-highly clean area S2 (temperature and cleanliness). The degree) is prevented from having a great influence on the state of the air A in the highly clean area S1.

However, if a certain number of blower units 8 are arranged at positions facing the highly clean area S1 and the amount of air blown is secured, even if the hanging wall 16 is not installed, it is strong to some extent in the highly clean area S1. Since a downflow is formed, it is possible to maintain a constant cleanliness. However, in order to more reliably maintain the cleanliness in the highly clean area S1, it is still preferable to install the hanging wall 16. The hanging wall 16 is also useful in securing the temperature difference of the air A between the highly clean area S1 and the non-highly clean area S2. As will be described later, from the viewpoint of circulation of air A, it is advantageous that the temperature difference of air A between the two regions is kept high to some extent.

A cooling unit 11 is provided on the side surface 15b of the air supply chamber 14 provided above the non-highly clean area S2, and the air A having a temperature of about 30 ° C. forming a heat pool above the non-highly clean area S2 is provided. , It is sucked into the air supply chamber 14 while being cooled by the cooling unit 11. The temperature of the refrigerant W supplied to the cooling unit 11 is 15 ° C. in the refrigerant flowing pipe 12, and the air A exchanges heat with the refrigerant W to be cooled to a blowing temperature of 20 ° C. or lower. The temperature of the refrigerant W rises as a result of heat exchange with the air A, and reaches about 20 ° C. in the refrigerant return pipe 13. In this way, the air A is returned to the air supply chamber 14 at a temperature of about 20 ° C., and is supplied again from the blower unit 8 to the highly clean area S1. The air A receives the heat generated by the fan in the blower unit 8, but the amount of heat is insignificant, and the blowout temperature in the blower unit 8 remains approximately 20 ° C. (the blowout temperature in the cooling unit 11). ..

The circulation of the air A as described above is mainly driven by the operation of the fan in the blower unit 8, but in addition to this, the difference in the specific gravity of the air A also functions. That is, while air A of about 20 ° C. is supplied to the highly clean area S1, air A having a relatively high temperature of about 25 ° C. to 30 ° C. and a small specific gravity is located in the non-highly clean area S2. With the help of such a difference in specific densities, the air A that wraps around below the hanging wall 16 from the highly cleaned area S1 is surrounded by the hanging wall 16 and the side wall 15 of the air supply chamber 14 in the non-highly clean area S2. It will rise inside.

As described above, in the air conditioning system of this embodiment, the temperature of the air A and the temperature of the refrigerant W are different from those of the conventional examples shown in FIGS. 12 to 14, and the average temperature of the entire air conditioning system is set to the conventional example. It is possible to control the temperature around the device 2 to be around 25 ° C in the non-highly clean area S2 and maintain an appropriate temperature of about 23 ° C in the front part 2a facing the highly clean area S1 while raising the bottom. It has become. In such temperature setting, the set temperature is determined based on the amount of exhaust heat in the entire target space S, and the temperature of the entire target space S is not uniformly managed, but a region in which the temperature of the air A is relatively high in the target space S. In the case of this embodiment, the region requiring cooling (in the case of this embodiment, the periphery of the device 2 in particular, the vicinity of the front portion 2a) is set as a low region, and the other region (in the case of this embodiment, above the non-high cleaning area S2). ) Is on the upstream side.

By doing so, in a cold heat source (not shown), the set temperature of the refrigerant W in the refrigerant going pipe 12 can be made higher than that in the conventional example (in the conventional example, the inlet temperature is 10 ° C. and the outlet temperature is 15 ° C.). In this embodiment, the inlet temperature is 15 ° C. and the outlet temperature is 20 ° C.), and even when the outside air that exchanges heat with the condenser is high, the temperature of the refrigerant W in the evaporator is 5 ° C. higher than, for example. Therefore, the work of the compressor that realizes the refrigeration cycle is reduced, the cooling efficiency of the refrigerant W in the cold heat source is improved, and the energy required for cooling is reduced. In addition, the period during which free cooling is possible in the cold heat source is also extended (that is, in the conventional example, heat exchange was possible only under the condition that the outside air was significantly lower than 10 ° C., but in this embodiment, the temperature is 10 ° C. or higher 13 It is possible even under conditions below ℃), so a significant energy saving effect can be expected at the same time.

Regarding the energy that drives the circulation of the air A, in this embodiment, the ratio of being driven by the difference in the specific gravity of the air A is large, and the energy saving effect can be obtained here as well. That is, in the above-mentioned conventional example, the blowing temperature of the air A was about 15 ° C., the temperature after receiving the exhaust heat of the device 2 was about 23 ° C., and the temperature difference was about 8 ° C., but in this embodiment, The blowing temperature of the air A is about 20 ° C., the temperature of the air A forming a heat pool above the non-highly clean area S2 is about 30 ° C., and the temperature difference is about 10 ° C. Since the difference in the specific gravity of the air A is proportional to the temperature difference, in the case of this embodiment, the driving force due to the difference in the specific gravity of the air A increases as described above, so that the fan driving required for the circulation of the air A in the blower unit 8 is driven. The energy is small.

Here, if the inlet of the air supply chamber 14 which is the air passage (the portion where the cooling unit 11 is installed in this embodiment) is installed directly under the ceiling 3, a heat pool is formed above the non-high cleaning area S2. Air A having a high temperature of about 30 ° C. is constantly sucked in from the inlet of the air supply chamber 14 to be cooled. The temperature difference of the air A that carries cold heat was 8 ° C in the above conventional example, but in this embodiment it becomes a large temperature difference of 10 ° C, so the air volume required to carry the same amount of heat is 8/10. , The amount of air blown can be reduced by 20%. It is also more advantageous in obtaining the driving force due to the difference in specific gravity.

Further, the fact that the temperature of the air A is high as a whole is also advantageous in preventing the dehumidification of the air A. As explained above, assuming air A having a relative humidity of 45% at 23 ° C. under the condition of 1 atm, the dew point temperature is about 10 ° C., but in the air conditioning system of this embodiment, the temperature is the highest. Since the inlet temperature of the refrigerant W in the low cooling unit 11 is 15 ° C., the surface temperature of the coil tube constituting the cooling unit 11 does not fall below the dew point temperature of the air A, and the surface of the coil tube is in the air A. A situation in which water vapor condenses and air A is dehumidified rarely occurs.

In addition to the above-mentioned energy advantages related to temperature control, the air conditioning system of this embodiment also has quality and cost advantages in cleanliness control. That is, in this embodiment, as described above, the air A from the blower unit 8 is centrally supplied to the highly clean area S1 of the target space S to uniformly clean the air A in the large space. It is also possible to reduce the number of installed blower units 8 required in comparison. In this way, high cleanliness is realized in the highly clean area S1 while reducing the cost for purifying the air.

At this time, one of the advantages in this embodiment is that a large space without a partition can be set as the target space S for air purification. Due to the centralized arrangement of the blower units 8, it is possible to locally set a highly clean area S1 with high cleanliness even if there is no partition on the floor 1, and it is possible to use the target space S, which is a large space, with high cleanliness. It is possible to achieve both degrees of freedom. Here, if the hanging wall 16 is installed at a position above the floor 1 or the device 2 at the boundary between the highly clean area S1 and the non-highly clean area S2, the reliability of the cleanliness is further improved in the highly clean area S1. While maintaining this, it is possible to flexibly respond to changes in the layout of the device 2 on the floor 1.

Here, in the processing of the work piece in the clean room, it may be necessary to temporarily stock the work piece in a part of the target space in order to adjust the time between each process. Regarding the stock location of the work piece, in the partition type old type clean room, for example, a vertical shelf type stocker was provided on the floor of the target space, but in the clean room adopting the transport device 5 as in this embodiment. In this case, it is possible to provide a stock shunt line on the transport rail 6 so that the function of the stocker can be replaced by the transport device 5. By doing so, it has succeeded in reducing the degree of freedom in arranging equipment by providing a partition on the floor and reducing the initial cost of expensive on-floor transportation.

However, it is undeniable that the transport device 5 also has some inconveniences regarding relocation. That is, the transport rail 6 is suspended from the ceiling 3 and firmly fixed, and the work of changing the arrangement or relocating the rail 6 so as not to affect the cleanliness is troublesome and costly. Therefore, in the end, the transfer route of the workpiece 4 is fixed to some extent, and the arrangement of the equipment 2 is also affected by the arrangement of the transfer rail 6. Therefore, also in this embodiment, the position of the highly clean area S1 in the target space S is fixed to some extent. However, in this embodiment, it is advantageous as compared with the above-mentioned conventional example in that the number of blower units 8 according to the amount of blown air can be freely installed in the highly clean area S1 which is fixed to some extent while considering heat generation. Is. Further, in the non-highly clean area S2, the arrangement of the device 2 can be freely changed.

Further, in this embodiment, the retan shaft 10 (see FIG. 12) as in the conventional example is not required, and the target space S can be used more effectively. That is, in the above-mentioned conventional example, the retan shaft 10 for returning the air A supplied to the target space S from the underfloor space to the attic space is required, and the target space is wasted by the amount of the retan shaft 10. The utilization efficiency of S was reduced. On the other hand, in the case of this embodiment, the air A sent to the high-level clean area S1 in the target space S rises in the non-high-level clean area S2, which is another area in the same target space S, and the air supply chamber 14 Return to. So to speak, each side wall 15 and the hanging wall 16 of the air supply chamber 14 and the non-highly clean area S2 surrounded by them substitute for the retan shaft 10, but the side wall 15 and the hanging wall 16 of the air supply chamber 14 are formed. Is above the floor 1 as described above, and the dimensions of the hanging wall 16 are set so as not to hinder the movement of the device 2. Therefore, these do not reduce the degree of freedom regarding the use of the target space S. In this way, in this embodiment, the utilization efficiency of the clean space, which requires a lot of cost for maintenance, is improved.

Further, in the air-conditioning system of the embodiment, after the downflow in the highly clean area S1, the flow is changed to the upflow in the non-highly clean area S2 through the hanging wall 16 in the boundary area, so that the air does not pass through the underfloor space. Air A is circulated. In the above-mentioned conventional example, in order to surely circulate the air A with a smaller air volume than that of the old type clean room, the air A is drawn into the underfloor space from the opening 9 of the raised floor 1a to form a downward air flow. rice field. On the other hand, in this embodiment, it is not necessary to use the underfloor space for the circulation of the air A. Therefore, the underfloor space can be used for another purpose, for example, a dedicated area for installing an auxiliary machine of the device 2, a space for some work, or the like. Alternatively, although the floor 1 is shown as a raised floor in FIGS. 1 to 3, depending on the purpose of the clean room, the raised floor may not be provided and may be placed on the floor surface of the slab floor or on the floor surface of the slab floor without being raised. It is also possible to use the floor surface provided along the line as the floor 1 as it is. Further, in the above-mentioned conventional example, it takes time and effort to adjust the suction airflow from the opening 9, but such an operation becomes unnecessary.

Further, in this embodiment, the target space S can be used more effectively by arranging the blower unit 8. In the conventional example shown in FIGS. 12 to 14, in order to form a downflow of clean air A, the air A is blown downward from the blower unit 8, but in this case, the blower unit 8 Since a certain amount of space (a space for people to enter for maintenance or the like) is required on the upper side, it is necessary to install the suspended ceiling 3a below the slab surface and arrange the blower unit 8 here. Therefore, the space above the suspended ceiling 3a cannot be used as a highly clean area, which hinders the efficiency of using the clean room. Further, in order to support the weight of the blower unit 8, the suspended ceiling 3a and its support must have appropriate strength, which has been a factor in increasing the construction cost.

On the other hand, in the case of this embodiment, the blower units 8 are arranged to face each other, and the air A is sent out sideways to the space above the highly clean area S1 so that the air A collides with each other to form a downflow. .. In this way, when installing the blower unit 8, it is not necessary to provide the suspended ceiling 3a as in the conventional example, and the upper space which is a slight airflow direction change place directly below the ceiling 3 along the upper slab surface. The entire lower space can also be effectively used as the highly clean area S1. For example, as shown in FIG. 3, the transport device 5 can be installed vertically in a plurality of stages (two stages in the example shown here), or in a room where the ceiling is low and it is difficult to install a suspended ceiling. Even if there is, it can be used as an efficient clean room with a highly clean area. Further, since it is not necessary to install a high-strength suspended ceiling that can support the weight of the blower unit 8, the construction cost can be reduced. In the case of this embodiment, the bottom surface of the air supply chamber 14 is provided as a structure similar to the suspended ceiling 3a of the conventional example, but it is necessary to install a heavy object such as a blower unit 8 in the air supply chamber 14. Therefore, the required strength is lower than that of the suspended ceiling 3a as shown in the conventional example, and the construction cost can be reduced. Further, when the air supply duct 17 is provided as an air passage as shown in FIG. 5 instead of the air supply chamber 14, the construction cost can be further reduced.

6 and 7 show an example of the detailed flow of the air A sent out from the blower unit 8. 6 and 7 show the results of simulating the flow of air A in each part in a vertical cross section with arrows, FIG. 6 shows the cross section corresponding to the gap between the devices 2, and FIG. 7 shows the position of the device 2. Each cross section is shown. The arrangement of the devices in the examples shown here is slightly different from the examples shown in FIGS. 1 to 5, and the cooling unit 11 is provided not on the side surface of the air supply chamber 14 but on the back surface side.

The air A is sent out from the opposing blower units 8 to the space above the high-level clean area S1, but in the space where the air A is sent out (upper part of the high-level clean area S1), the air A faces the front of the flow of the air A. There is a flow of air A sent out from the blower unit 8 to be blown, and there is a flow of air A sent out from the adjacent blower unit 8 on the side (see FIGS. 1 to 4). Further, the ceiling 3 is located above. Therefore, the flow of air A collides with each other at an intermediate position between the blower units 8 facing each other, and then turns downward to form a downflow. As a result, as shown in FIGS. 6 and 7, the circulation of air A as described above (the air is supplied sideways from the air supply chamber 14 to the high-level clean area S1 through the blower unit 8 and enters the high-level clean area S1. (Going downward, passing through the lower side of the hanging wall 16 and the gap of the device 2, exiting to the non-highly clean area S2, rising and returning to the air supply chamber 14) is established.

The direction in which the air A is sent out from the blower unit 8 does not have to be exactly the same as the horizontal direction. Regarding the direction of the air A, "sideways" here means that the motion vector of the air A contains a horizontal component, and if a downflow can be formed as a result, the air is blown. The posture in which the unit 8 is installed and the direction in which the air A is sent out can be changed as appropriate. For example, the blower units 8 are arranged so as to face diagonally downward, and the air A sent diagonally downward from the facing blower units 8 collide with each other diagonally below each blower unit 8 to form a downflow. May be good.

Here, as shown in FIG. 2, it is considered that the flow of air A as described above is formed without any problem in a place where the blower units 8 are lined up on both sides of the highly clean area S1 extending along a certain direction. However, depending on the configuration in the clean room, it can be assumed that the downflow is not formed well if the blower unit 8 is simply arranged in this way. For example, as shown in FIG. 8 as a reference example, when there is an area where the high-level clean area S1 intersects (referred to as the intersection C) in a plan view, if the blower unit 8 is arranged along the extending direction of the high-level clean area S1. Since there are no blower units 8 facing each other at the intersection C, there is a possibility that a sufficient downflow may not be formed here. In such a case, as shown in FIG. 9, a part of the blower unit 8 located near the intersection C is arranged so as to face the intersection C, and air A is blown from there to the central portion of the intersection C. Try to send it out. In this way, even at the intersection C, the air A sent out from the opposing blower units 8 can collide with each other, and a downflow can be efficiently formed.

Further, although the case where the air A sent out from the blower units 8 arranged facing each other collide with each other has been described above, the flow is guided to form a downflow without directly colliding the air A with each other in this way. It is possible. For example, as shown in FIG. 10, a baffle plate 18 forming a surface along the vertical direction is provided as a guide plate for guiding the air A so as to face the air outlet of the blower unit 8, and the air A is a baffle plate 18 It may be guided downward by colliding with. Alternatively, as shown in FIG. 11, the blower unit 8 may be installed so as to face the wall 19 and the air A may collide with the wall 19 to be guided downward (in this case, the wall 19 serves as a guide plate). Will work). When the blower unit 8 is arranged so as to face the intersection C as shown in FIGS. 8 and 9, for example, an obstacle plate 18 as shown in FIG. 10 may be provided in the intersection C (not shown). Is omitted).

In this embodiment, a workpiece 4 such as a semiconductor wafer or a substrate is assumed as an object whose cleanliness should be kept high, and a region along a transport rail 6 on which the workpiece 4 is transported or delivered is defined. Although it is set as the highly clean area S1, the shape and configuration of the highly clean area S1 are not limited to this. In the present specification, as described above, "a region of the target space S that requires higher cleanliness than other regions" is defined as a highly clean region S1, but the use of the target space S, etc. Depending on the case, various "regions that require higher cleanliness as compared with other regions" may be set as the highly clean region S1 in addition to the periphery of the transport rail 6 as in the present embodiment. Further, the arrangement of the highly clean area S1 naturally differs depending on the shape of the target space S itself. The arrangement and configuration of the highly clean area are set according to these various cases, and various highly clean areas having a configuration different from the examples shown in FIGS. 1 to 4 and 9 are assumed. Of course it can be done.

As described above, in the clean room air conditioning system of the present embodiment, the area of the target space S that requires higher cleanliness than the other areas is set in the high-level clean area S1 and the high-level clean area S1. The blower unit 8 that sets the area other than the high-level clean area S2 and is suspended above the target space S and supplies the purified air A to the target space S is oriented sideways with respect to the space above the high-level clean area S1. The air A is installed so as to be sent out to the high-level clean area S1, and the air A sent out sideways is bent downward in the upper space toward the high-level clean area S1, and the air A supplied to the high-level clean area S1 is the high-level clean area. It is configured to descend the region S1 to reach the non-high clean area S2, ascend in the non-high clean area S2, and return to the blower unit 8. By doing so, it is possible to reduce the cost related to the purification of the air A and to realize a high degree of cleanliness in the highly clean area S1. Further, the air A can be supplied in a downflow to the highly clean area S1 while effectively utilizing the space.

Further, in the above embodiment, a hanging wall 16 extending in the downward direction is provided at a position above the floor 1 between the highly cleaned area S1 and the non-highly cleaned area S2, and the blower unit 8 is provided with a blowing surface. Is located at the opening opened in the hanging wall 16. By doing so, the flow of air A downward from the blower unit 8 in the high-level clean area S1 and the flow of air A upward in the non-high-level clean area S2 are divided by the vertical wall 16 to perform non-high cleanliness. It is possible to prevent the state of the air A in the area S2 from significantly affecting the state of the air A in the highly clean area S1.

Further, in the above embodiment, the downward direction of the hanging wall 16 is an inclination of 45 degrees or less with respect to the vertical including the vertical.

Further, in the above embodiment, the position where the hanging wall 16 is extended along the downward direction is set back to the boundary position between the high-level clean area S1 and the non-high-level clean area S2, or to the non-high-level clean area S2 side. It is provided at the designated position.

Further, in the above embodiment, the blower units 8 are arranged so as to face each other across the space above the highly clean area S1, and the air A sent out from the blower unit 8 collides with each other and bends downward in the upper space. It is configured to form a downflow in the highly clean area S1.

Further, in some examples, the guide plates 18 and 19 are installed on the blower unit 8 so as to face each other with the space above the advanced clean area S1 interposed therebetween, and the air A sent out from the blower unit 8 is the guide plate 18, It is configured to collide with 19 and be bent downward in the upper space to form a downflow in the highly clean area S1.

Further, in the above embodiment, the air supply chamber 14 as an air passage is defined at a position above the device 2 in the non-highly clean area S2, and the air supply unit 8 is the air A in the air supply chamber 14. Is installed on the side wall 15 of the air supply chamber 14 facing the high-level clean area S1 so as to supply the air to the space above the high-level clean area S1. It is a space that keeps the flow of warm air above the temperature stratification formed in the region S2 away and greatly smoothes the vertical circulation of the air in the target space, and the air A in the non-highly clean zone S2 is the air supply chamber. It is cooled and stored in 14, and is supplied from the blower unit 8 to the highly clean area S1.

Further, in some examples, air is supplied to a position above the device 2 in the non-high clean area S2, which is an air passage through which the air A that rises in the non-high clean area S2 and returns to the blower unit 8 passes. A duct 17 is installed, a cooling unit 11 is provided at the inlet of the air supply duct 17, and the air A in the non-high cleaning area S2 is cooled, passes through the air supply duct 17, and is highly cleaned from the ventilation unit 8. It is designed to be supplied to the region S1.

Further, in some examples, the blower unit 8 facing the intersection C of the highly clean area S1 is arranged so as to blow out the air A toward the central portion of the intersection C in a plan view. In this way, the downflow can be efficiently formed even at the intersection C.

Further, in the above embodiment, the transport rail 6 constituting the transport device 5 for transporting the workpiece 4 is installed in the target space S, and the area around the transport rail 6 is set as the highly clean area S1. Has been done.

Therefore, according to each of the above embodiments, it is possible to suppress the increase in cost, save energy, and effectively use the target space while satisfying the temperature and cleanliness required in the target space.

The clean room air conditioning system of the present invention is not limited to the above-described embodiment, and it goes without saying that various modifications can be made without departing from the gist of the present invention.

1 Floor 2 Equipment 4 Workpiece 5 Conveyance device 6 Conveyance rail 8 Blower unit 11 Cooling unit 14 Air passage (air supply chamber)
16 Hanging wall 17 Air passage (air supply duct)
18 Guide plate (obstruction plate)
19 Guide plate (wall)
A Air C Intersection S Target space S1 Highly clean area S2 Non-highly clean area

Claims (10)

Of the target space, the area that requires higher cleanliness than other areas is set as the high-level clean area, and the area other than the high-level clean area is set as the non-high-level clean area.
The blower unit, which is suspended above the target space and supplies purified air to the target space, is installed so as to send air sideways to the space above the highly clean area.
The air sent out sideways is bent downward in the upper space toward the highly clean area, and the air supplied to the highly clean area descends from the highly clean area to reach the non-highly clean area. An air conditioning system for a clean room, characterized in that it is configured to climb within the non-highly clean area and return to the blower unit. A hanging wall extending in the downward direction is provided at a position above the floor between the highly cleaned area and the non-highly cleaned area, and the blower unit has a blowing surface located at an opening provided in the hanging wall. The clean room air conditioning system according to claim 1, wherein the air conditioning system is installed in a clean room. The air-conditioning system for a clean room according to claim 2, wherein the downward direction of the hanging wall is inclined within 45 degrees with respect to the vertical including the vertical. 2. Alternatively, the air conditioning system for a clean room according to claim 3. The blower unit is arranged so as to face each other across the space above the highly clean area.
Any of claims 1 to 4, wherein the air sent out from the blower unit collides with each other and bends downward in the upper space to form a downflow in the highly clean area. The clean room air conditioning system according to item 1. A guide plate is installed on the blower unit so as to face the air blower unit with the space above the highly clean area in between.
Claims 1 to 4 are characterized in that the air sent out from the blower unit collides with the guide plate and is bent downward in the upper space to form a downflow in the highly clean area. The air conditioning system for a clean room according to any one of the above. An air supply chamber as an air passage is defined at a position above the equipment in the non-highly clean area.
The blower unit is installed on the side wall of the air supply chamber facing the highly clean area so as to supply the air in the air supply chamber to the space above the highly clean area.
The air supply chamber is a space that keeps the flow of warm air above the temperature stratification formed in the non-highly clean area away from the suction port of the blower unit and greatly facilitates the longitudinal circulation of air in the target space.
The air in the non-highly clean area is cooled and stored in the air supply chamber, and is supplied from the blower unit to the highly clean area according to any one of claims 1 to 4. The described clean room air conditioning system. An air supply duct that serves as an air passage for air that rises in the non-highly clean area and returns to the blower unit is installed at a position above the equipment in the non-highly clean area.
Claim 1 is characterized in that a cooling unit is provided at the inlet of the air supply duct, and the air in the non-highly clean area is cooled, passes through the air supply duct, and is supplied from the blower unit to the highly clean area. The air conditioning system for a clean room according to any one of claims 4. One of claims 1 to 8, wherein the blower unit facing the intersection of the highly clean area is arranged so as to send air toward the central portion of the intersection in a plan view. Clean room air conditioning system as described in. In the target space, a transport rail constituting a transport device for transporting the workpiece is installed.
The air-conditioning system for a clean room according to any one of claims 1 to 9, wherein an area around the transport rail is set as the highly clean area.

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