JP2012202558A - Clean room air conditioning system - Google Patents

Abstract

PROBLEM TO BE SOLVED: To carry out cooling according to the heat generating temperatures of manufacturing apparatus without providing local cooling means in a clean room where the manufacturing apparatus of different heat generating temperatures coexist.SOLUTION: This clean room air conditioning system includes FFUs (fan filter units) 40 disposed at a ceiling frame; opening means 30 disposed at the ceiling frame to return air to a ceiling plenum chamber 4 from the clean room 1; a grating floor disposed at a floor of the clean room 1 to exhaust air to an underfloor chamber 3 from the clean room 1; and FCUs (fan coil units) 50 equipped with blowers. The arranged positions and the arranged number of the FFUs 40 and opening means 30 are set according to the heat generating temperatures of the respective manufacturing apparatus 10, 20. The FFUs 40 are adjustable in the blowing amount to maintain the temperature around the respective manufacturing apparatus 10, 20 to a predetermined temperature, and indoor air returned from the underfloor chamber 3, and air cooled by the FCUs to have a lower temperature than an indoor temperature, are mixed and supplied to the clean room 1.

Description

  The present invention relates to a clean room in which manufacturing apparatuses having different heat generation temperatures are mixed, and more particularly to a clean room air conditioning system capable of equalizing the temperature in a clean room without providing a local cooling means in the vicinity of the production apparatus.

  In a clean room used for the production of electronic parts such as semiconductors, electronic materials, and other industrial products, a variety of processes are mixed in one room, and a process using a manufacturing apparatus that generates heat during operation, such as an exposure apparatus or a diffusion furnace, is used. There is also. In such a case, if air that has been cooled in accordance with the process with the smallest equipment heat generation is supplied to the room, the process with the large equipment heat generation will be insufficiently cooled, and the temperature rises due to the heat generated by the manufacturing equipment itself. Failures are likely to occur and may interfere with the manufacturing process.

  However, when a local cooling device is provided in the vicinity of the manufacturing apparatus, not only the space for the process increases, but also the equipment cost increases. In addition, if you try to supply air that has been cooled in accordance with the process that generates the greatest amount of equipment heat, the operating cost of the cooling device will rise, and in the process that produces a small amount of equipment heat, the relative humidity will increase due to a decrease in temperature. However, for example, if the relative humidity exceeds 50%, condensation occurs inside the apparatus of the manufacturing apparatus, which may cause a failure and may cause a problem in the manufacturing process.

  Such a failure of the manufacturing apparatus has an effect on the entire manufacturing process because production of the process is stopped, and the manufacturing apparatus is expensive, so that economic loss is significant.

  In recent years, a mini-environment system that keeps cleanliness at a low cost by cleaning a small space has been used instead of a system that cleans the entire area. For example, even in an industrial clean room that manufactures electronic components and electronic materials, a turbulent clean room is used for the transport space of objects to be processed and the walking space for workers that do not require a high degree of cleanliness. It is also possible to provide a high degree of cleanness by limiting to a space having a truly high degree of cleanliness. As described above, a clean room that supplies laminar air only to a space that is truly necessary, rather than keeping the entire room clean, is called a ball room clean room. However, in this turbulent clean room, while the equipment cost is low, it is also known that a heat pool is inevitable and dust accumulates in this heat pool.

  As a technology related to the construction of a clean room that refers to measures for increasing the temperature in the clean room, a technology related to a clean room construction system that can flexibly deal with layout changes and cope with changes in room temperature settings (see, for example, Patent Document 1) and pollutants. There is known a technology related to a clean room (for example, refer to Patent Document 2) for the purpose of catching the water and preventing the temperature influence on the surroundings. Further, a technique related to a clean room structure of a bleed-in type cold air mixing and supplying method (for example, see Patent Document 3) is known.

Japanese Patent No. 2515593 JP-A-8-247512 Japanese Patent No. 2627613

  However, in Patent Document 1, it is essential to employ a “dry coil unit” as a local cooling device and to install this ceiling. Moreover, in patent document 2, although the hot air of a manufacturing apparatus is suck | inhaled and it discharges indoors, it aims at prevention of turbulence of an air current, and in order to compensate indoor temperature, the cooling coil as a local cooling device is put on the back of a ceiling. It is necessary to provide it. Furthermore, in Patent Document 3, there is a problem that the temperature cannot be made uniform when manufacturing apparatuses having different heat generation temperatures are mixed in the room or when air of different temperatures is mixed. In other words, for example, the airflow that has passed through the cooling coil from the re-tandem plenum area and the airflow that has passed through the bypass path are not mixed in the duct shaft, resulting in uneven temperature distribution. Since the temperature is lowered, the air supplied from the fan filter unit (FFU) into the clean room may have a different temperature depending on the position.

  The present invention provides a clean room air conditioning system that can solve the above-described problems and can make the temperature in the clean room uniform without providing a local cooling means in a clean room in which manufacturing apparatuses having different heat generation temperatures are mixed. It is an object.

  In order to solve the above-mentioned problems, the invention of claim 1 includes a ceiling plenum chamber, a clean room in which production devices having different heat generation temperatures are mixed, and a clean room into which air from the ceiling plenum chamber flows, A clean room air conditioning system for returning air exhausted from the underfloor chamber to the ceiling plenum chamber through a return air passage, and is provided at a ceiling portion of the ceiling plenum chamber. A fan filter unit that supplies clean air to the clean room; and opening means that is formed in the ceiling portion and sucks the air above the clean room into the ceiling plenum chamber using the suction force of the fan filter unit; Installed in either the underfloor chamber or the return airway And an air cooling means for cooling the air returned to the ceiling plenum chamber, and the fan filter unit has an arrangement position and an arrangement number corresponding to the heat generation temperature of the manufacturing apparatus of the clean room. The fan filter unit is capable of adjusting an air flow rate to the clean room so that a temperature around the manufacturing apparatus is maintained at a predetermined temperature, and the clean room returns to the ceiling plenum chamber from the underfloor chamber. The clean room air-conditioning system is characterized in that the air to be cooled and the air cooled by the air cooling means and supplied at a temperature lower than the room temperature of the clean room are mixed and supplied.

  According to the present invention, an appropriate amount of cooling air corresponding to the heat generation temperature is supplied from the fan filter unit to the production apparatus arranged in the clean room. A part of the high-temperature air located above the clean room is sucked back into the ceiling plenum chamber through the opening means.

  According to a second aspect of the present invention, in the clean room air conditioning system according to the first aspect, the fan filter unit includes an operating amount measuring unit that measures an operating amount of the manufacturing apparatus or a temperature measuring unit provided in the vicinity of the opening unit. The air flow rate to the clean room is controlled based on the measured value.

  According to a third aspect of the present invention, in the clean room air conditioning system according to the first or second aspect, the air cooling means includes a pressure fan and a heat exchanger, and the amount of cooling water supplied to the heat exchanger can be controlled. It is comprised from an air conditioner, The amount of the cooling water supplied to the said heat exchanger is controlled based on the indoor temperature measured by the indoor temperature measurement means provided in the said clean room, It is characterized by the above-mentioned.

  According to a fourth aspect of the present invention, in the clean room air conditioning system according to the third aspect, the return air passage is supplied with outside air whose temperature and humidity are adjusted by an external air conditioner, and is based on the pressure in the clean room. Then, by controlling the amount of outside air supplied from the external air conditioner, the pressure in the clean room is maintained at a positive pressure.

  According to a fifth aspect of the present invention, in the clean room air-conditioning system according to the fourth aspect, the temperature-adjusted air from the air cooling means and the air from the external air conditioner collide with each other in a counterflow in the return air passage. In addition, the air is mixed with room air from the clean room returned to the ceiling plenum chamber through the opening means, and blown out into the clean room through the fan filter unit.

  According to the first aspect of the present invention, an appropriate amount of cooled air is supplied to the manufacturing apparatus installed in the clean room from the fan filter unit whose arrangement position and number of arrangements are set in consideration of the heat generation temperature. Therefore, the temperature around the production apparatus in the clean room is made uniform. In addition, since a part of the high-temperature air located above the clean room is sucked back into the ceiling plenum chamber through the opening means, the temperature in the clean room is made uniform. Therefore, even when production apparatuses having different heat generation temperatures are arranged in a clean room, it is not necessary to provide a local cooling means for cooling the production apparatus as in the past, and the cost for making the temperature of the clean room uniform is reduced. be able to.

  According to the second aspect of the present invention, the fan filter unit is supplied to the clean room based on the measured value from the operating amount measuring means for measuring the operating amount of the manufacturing apparatus or the temperature measuring means provided in the vicinity of the opening means. Since the air volume is controlled, it is possible to distribute conditioned air that eliminates unevenness in the room temperature of the clean room based on the difference in heat generation temperature of the manufacturing apparatus. Thereby, the uniformity of the temperature in the clean room can be further increased.

  According to the invention described in claim 3, since the air cooled by the air conditioner can be efficiently mixed with the indoor air in the return plenum by the stirring action of the pressure fan, the uneven distribution of the air temperature in the cross section of the air path Can be prevented and the temperature can be made uniform. In addition, since the air is recirculated and the number of ventilations is small and the mixing rate of the outside air is low, the heat loss associated with the mixing of the outside air can be reduced. Can be reduced. In addition, since the air temperature can be controlled by controlling the amount of cold water supplied to the heat exchanger, air that has been cooled to an appropriate temperature is supplied to the production area where the manufacturing equipment with a large exothermic temperature is installed. can do.

  According to the fourth aspect of the present invention, the pressure inside the clean room is maintained at a positive pressure (positive pressure) by controlling the amount of outside air supplied from the external conditioner based on the pressure inside the clean room. It is possible to reliably prevent fine foreign substances from entering the inside.

  According to the fifth aspect of the present invention, the temperature-adjusted air from the air cooling means and the air from the external air conditioner collide with each other on the return air passage in a counter flow, and the ceiling plenum chamber via the opening means. Since the air is mixed with the room air from the clean room returned to the air, air having a uniform temperature and humidity can be distributed to the ceiling plenum chamber without uneven distribution. Therefore, air having a uniform temperature and humidity can be supplied to the clean room, and the temperature and humidity in the clean room can be made uniform.

It is a schematic block diagram of the clean room which concerns on embodiment of this invention. It is a characteristic view which shows the external air mixing simulation result of the clean room of FIG. It is a perspective view which shows the object area | region of the external air mixing simulation of the clean room of FIG.

  1 to 3 show an embodiment of the present invention. As shown in FIG. 1, for example, a factory building R such as precision equipment and pharmaceuticals has a clean room 1, a ceiling plenum chamber 2, an underfloor chamber 3, a return airway 4, an outside air adjustment room 5, and auxiliary equipment. A storage chamber 6 is provided. The upper surface of the ceiling plenum chamber 2 is composed of a ceiling slab C1. The underfloor chamber 3 is located between the floor slab F1 of the building R and the floor portion F2 of the clean room 1, and is provided with a fan coil unit (FCU) 50 as air cooling means described later. An auxiliary equipment storage chamber 6 is formed below the underfloor chamber 3. The underfloor chamber 3 and the accessory storage chamber 6 are partitioned by a floor slab F1. The outside air adjustment chamber 5 is partitioned from the clean room 1, the ceiling plenum chamber 2, and the underfloor chamber 3 by a wall portion F3 extending in the vertical direction.

  The clean room 1 is located between the ceiling plenum chamber 2 and the underfloor chamber 3. The floor F2 located in the lower part of the clean room 1 is formed by stretching a porous material such as a grating material in the horizontal direction so as to allow the conditioned air A3 to pass therethrough. The ceiling C2 of the clean room 1 is located below the ceiling slab C1 of the ceiling plenum chamber 2 by a predetermined distance, and is composed of a ceiling frame stretched horizontally. In this embodiment, the interior of the clean room 1 constitutes a large space without partitioning, and a transfer device (not shown) connects the processes. Furthermore, the amount of air discharged from the clean room 1 is the same as the amount of outside air taken in from the external air conditioner 101 (the amount of supplied outside air), and the pressure in the clean room 1 is always kept constant.

  The return air passage 4 is formed outside both ends of the clean room 1 in the longitudinal direction. The return air passage 4 communicates the ceiling plenum chamber 2 and the underfloor chamber 3. Thereby, an air circulation system for supplying air A3 to the clean room 1 is formed in the building R.

  A first production apparatus 10 and a second production apparatus 0 having different heat generation temperatures are installed on the floor F2 of the clean room 1. The first manufacturing apparatus 10 and the second manufacturing apparatus 20 are each provided with an exhaust duct for exhausting the exhaust to the outside. Here, the first manufacturing apparatus 10 is a high heat generation apparatus having a high heat generation temperature, and the second manufacturing apparatus 20 is a low heat generation apparatus having a low heat generation temperature.

  The opening means 30 is provided in the lattice-like opening of the ceiling part C2. The opening means 30 is comprised from the punching board which has many ventilation holes, for example. The opening means 30 made of a punching plate is provided with a packing having a sealing function on the outer periphery, and is attached to the lattice-like opening of the ceiling portion C2 by its own weight. The opening means 30 is for sucking the indoor air A3 by the suction force of the FFU 40, and has a suction port with a shutter whose suction amount can be adjusted. That is, the opening means 30 is composed of, for example, a grill-type suction port with a shutter or an HS type, and the shutter opening (suction amount) is manually adjusted during a trial operation. This opening area is designed according to the degree of heat generation of each of the manufacturing apparatuses 10 and 20, and has a variable opening ratio structure so that it can be adjusted during a trial run. Further, the number and arrangement positions of the opening means 30 are determined by the heat generation temperatures of the manufacturing apparatuses 10 and 20 installed in the clean room 1 as will be described later. For example, a small number of opening means 30 are installed above the high heat generating equipment as in the first manufacturing apparatus 10, and a large number of opening means 30 are installed above the low heat generating equipment as in the second manufacturing apparatus 20. To do.

  The fan filter unit (FFU) 40 can adjust the amount of air blown to the clean room 1 so that the temperature around the manufacturing apparatus is maintained at a predetermined temperature, and is provided in a lattice-like opening in the ceiling C2. The FFU 40 includes a high-performance filter and a blower, and is configured to suck in air A3 from above (upper surface side) and blow out air A3 from below (bottom surface side). Specifically, the FFU 40 includes a fan, a variable speed motor (DC brushless motor) that drives the fan, and a high-performance filter in the casing, and takes in the air A3 in the ceiling plenum chamber 2 into the casing. , Dust and the like are removed and cleaned by a high-performance filter and supplied into the clean room 1. The FFU 40 can adjust the amount of air blown by the rotational speed of the blower (fan). The number of FFUs 40 installed and their positions are determined by the heat generation temperatures of the manufacturing apparatuses 10 and 20 installed in the clean room 1 as will be described later. For example, a large number of FFUs 40 are installed above the high heat generating equipment as in the first manufacturing apparatus 10, and a small number of FFUs 40 are installed above the low heat generating equipment as in the second manufacturing apparatus 20.

  A blank panel (not shown) for closing the lattice opening of the ceiling portion C2 is provided with a packing having a sealing function on the outer periphery, and is attached to the lattice opening of the ceiling portion C2 by its own weight. Further, the blank panel is installed in a place where the opening means 30 and the FFU 40 of the ceiling part C2 are not installed, so that the gap between the ceiling plenum chamber 2 and the clean room 1 is closed, and the uncleaned air is in the clean room 1 or the like. To prevent intrusion. Furthermore, since the pressure in the clean room 1 becomes higher than the pressure in the ceiling plenum chamber 2 when the clean room 1 is in operation, members such as a blank panel placed on the ceiling frame 11 do not float by the suction force of the FFU 40. The structure takes into account the mass and fixing method.

  An FCU (fan coil unit) 50 that is an air conditioner as an air cooling means is installed in the return air passage 4. The FCU 50 includes a pressure fan 50A as a constant speed blower, and a heat exchanger 50B in which cold medium flows inside. The FCU 50 can control the amount of cooling water supplied to the heat exchanger 50B by a valve, and controls the amount of cooling water supplied to the heat exchanger 50B based on the room temperature measured by a thermometer provided in the clean room 1. . Here, the amount of cooling water is adjusted so that the production area of the manufacturing apparatus having the highest heat generation temperature among the manufacturing apparatuses 10 and 20 has an appropriate temperature. The heat exchanger 50B has a heat source such as a refrigerator or a heat storage tank, and is set to be returned at 14 ° C. when, for example, 7 ° C. cold water is supplied. In addition, an automatic valve is provided in the outgoing pipe led to the heat exchanger 50B. The pressure fan 50 </ b> A is designed with a static pressure that sucks the air A <b> 4 in the underfloor chamber 3 and discharges it to the upper part of the return air passage 4, and is provided with the blade axis horizontal to the top surface of the FCU 50. The FCU 50 has a function of taking outside air from outside the building R and discharging air outside the building R.

  A thermometer (not shown) as a temperature measuring means is for measuring the operating amount of each manufacturing apparatus 10, 20, that is, a heat generation temperature, and is installed in the vicinity of each manufacturing apparatus 10, 20. Further, the air volume (or wind speed) of the FFU 40 is instructed based on the temperature measured by the thermometer. Here, the thermometer is not installed in the vicinity of each of the manufacturing apparatuses 10 and 20, but is provided immediately below the FFU 40, and the air flow rate of the FFU 40 with a calculated value that anticipates the heat generation temperature of each of the manufacturing apparatuses 10 and 20 in this region. You may make it control.

  A barometer (not shown) is installed indoors and measures indoor pressure. The barometer outputs measurement values to a controller (not shown) for operating the MD of the external air handler 101 as needed. The installation position of this barometer is not limited as long as it is in the clean room 1, but here, for example, it is provided in the lower part of the FFU 40 closest to the return plenum 4, and the indoor pressure measured by this barometer is , The indoor pressure in the lower part of the FFU 40.

  The outside air conditioner 101 is installed in the outside air adjustment chamber 5 outside the air circulation system of the clean room 1, and the intake amount is set according to the exhaust amount from the room, and the fresh outside air taken from the outside is dedusted and temperature-controlled. The humidity is adjusted and supplied into the return plenum 4. Here, dust removal is performed by a filter, temperature control is performed by a heater or cooler temperature control device configured by a coil or the like, and humidity control is performed by the cooler in the case of dehumidification, and by a humidifier in the case of humidification. In addition, even if these apparatuses are not integrated in the external air handler 101, they may be configured as separate bodies. The external air conditioner 101 is connected to the discharge port 103 via a duct 102 (herein, an outside air intake duct to the external air conditioner 101) in which a motor damper (hereinafter referred to as “MD”) is interposed. The discharge port 103 is disposed downward in the middle portion of the return plenum 4. Here, the MD has a controller for adjusting the opening degree, and the controller controls the opening degree based on the pressure in the clean room 1. For example, when the indoor pressure measured by the barometer is input to the controller, the controller converts the input measurement value into the pressure of the entire chamber, and when it is determined that the pressure of the entire chamber has decreased, the MD is opened. When the degree is increased and it is determined that the pressure of the entire chamber has increased, the opening degree of the MD is controlled to be decreased.

  Further, the intake amount of outside air from the external air conditioner 101 and the exhaust amount from the air circulation system are set so that the inside of the clean room 1 is maintained at a positive pressure (positive pressure). For this reason, the purified air A3 is supplied from the ceiling plenum chamber 2 to the clean room 1 through the FFU 40. Thereby, the air A3 supplied into the room of the clean room 1 is discharged to the underfloor chamber 3 through the floor portion F2. The air A4 discharged to the underfloor chamber 3 is sent to the ceiling plenum chamber 2 through the return air passage 4, cleaned again by the FFU 40, and supplied into the clean room 1. In this way, air A1, A2, A3, A4 in the building R is circulated in one direction through the ceiling plenum chamber 2, the clean room 1, the underfloor chamber 3, and the return airway 4 while maintaining a predetermined cleanliness. A system is formed.

  Next, the temperature control method of the clean room 1 having such a configuration will be described.

  First, air A <b> 3 cleaned by the FFU 40 installed in the ceiling plenum chamber 2 is supplied into the clean room 1. The temperature of the air A3 in the clean room 1 rises due to the heat generated by the manufacturing apparatuses 10 and 20 in the production area.

  A part of the air A3 located above the clean room 1 passes through the floor F2 and is discharged to the underfloor chamber 3. The air A4 discharged to the underfloor chamber 3 is cooled by the FCU 50. Further, the cooling air A2 is blown out above the return air path 4 by the pressure fan 50A. Further, a part of the air A3 in the clean room 1 is sucked back to the ceiling plenum chamber 2 through the opening means 30.

  Outside air OA outside the building R is dedusted, temperature-controlled, and humidity-controlled by the external air conditioner 101, and is directed downward from the discharge port 103 installed in the return airway 4 through the duct 102 in which MD is interposed. A1 is blown out. In the return air passage 4, the cooling air A2 from the FCU 50 and the outside air A1 temperature-controlled and humidity-controlled by the external air conditioner 101 collide with each other as an opposing flow, and the cooling air A2 and the outside air A1 are mixed. . In the ceiling plenum chamber 2, the air A 3 mixed with the cold air supplied from the return air passage 4 and the air A 3 from the clean room 1 sucked back from the opening means 30 are mixed while being diffused, and the air A3 is sucked and cleaned by the FFU 40 with the temperature and humidity adjusted, and blown out into the clean room 1.

  In this way, the air A1, A2, A3, A4 in the building R circulates in one direction through the ceiling plenum chamber 2, the clean room 1, the underfloor chamber 3, and the return airway 4 while maintaining a predetermined cleanliness. It is like that.

  Next, a temperature control method for the clean room 1 corresponding to the heat generation temperatures of the manufacturing facilities 10 and 20 will be described.

  In the ceiling frame above the first manufacturing apparatus 10 having a high heat generation temperature, there are many FFUs 40 and few opening means 30. For this reason, in the periphery of the manufacturing apparatus 10, the return amount of the high-temperature air A3 to the ceiling plenum chamber 2 is reduced. In addition, in the ceiling part C2 above the second manufacturing apparatus 20 having a low heat generation temperature, the number of FFUs 40 is small, and many opening means 30 are installed. For this reason, in the periphery of the second manufacturing apparatus 20, the return amount of the high-temperature air A3 to the ceiling plenum chamber 2 increases. In this way, the air A3 returned from the opening means 30 is mixed with the air A3 mixed with the cold air supplied from the return air passage 4 in the ceiling plenum chamber 2, and reaches a predetermined temperature at each position. Then, the air is blown into the clean room 1 from the adjacent FFU 40.

  In this way, the temperature of the air A3 blown out to the production areas of the manufacturing apparatuses 10 and 20 in the clean room 1 is adjusted to an appropriate value corresponding to the heat generation temperature of the manufacturing apparatuses 10 and 20, respectively.

  In the clean room 1, (1) control for measuring the temperature of the production area of the manufacturing apparatus having the maximum indoor heat generation temperature (maximum load) and adjusting the temperature of the air A3 supplied to the room; Control to measure the pressure and adjust the intake amount of the outside air, and (3) Control to measure the temperature of the FFU lower area or the FFU blowout temperature and adjust the air volume or wind speed of the FFU blower Can do. Of these controls, the highest priority is the outside air intake amount control (2). On the assumption of this, the temperature of the air A3 is controlled (1), and (3) FFU variable air volume (wind speed) control is performed. Note that the air volume of the FFU 40 is controlled to be equal to or higher than a predetermined air volume necessary for maintaining the cleanliness in the clean room 1.

  FIG. 2 shows a simulation result in the case where air cooling is performed by controlling the heat exchanger 50B of the FCU 50 so that the production area of the manufacturing apparatus having the maximum heat generation temperature is kept at an appropriate temperature, and the opening means 30 is not provided. ing. As shown in FIG. 3, the total length of the building R in this embodiment is L1, but the simulation of FIG. 2 is limited to the area (length L2) of the cut surface K in FIG.

  For example, 15 ° C. cold air is discharged by the pressure fan 50A of the FCU 50 and mixed with the return air from the underfloor chamber 3 at 25 ° C., and further, 13 ° C. air from the external air conditioner 101 is mixed with this mixed air. In the case of being performed, the air is supplied from each FFU 40 to the clean room 1 at 20 ° C. In this case, if the circulating air cooled by the heat exchanger 50B is 35, the circulating air (exhaust) to be mixed without being cooled by the heat exchanger 50B is 45. The temperature-controlled humidity is 20. At this time, the air that has been mixed to 19 ° C. is sucked into each FFU 40, and is heated by a motor and supplied at 20 ° C. Further, the production area of the manufacturing apparatus having the maximum heat generation temperature is 23 ° C., and the exhaust in the underfloor chamber 3 is 25 ° C.

  As this result shows, the FCU 50 cools only part of the circulating air at a temperature difference of 10 ° C., that is, an intake temperature of 25 ° C. and an outlet temperature of 15 ° C. That the temperature difference is 10 ° C. in this way means that the power for transporting cold water as a heating medium is greatly improved. Here, the water supply temperature from the heat source to the heat exchanger 50B is 7 ° C., and the cold water return temperature from the heat exchanger 50B is 14 ° C.

  In addition, the production area of the manufacturing apparatus with the lowest heat generation temperature is 21 ° C., the relative humidity of the production area is increased, and it is predicted that condensation occurs inside the manufacturing apparatus. Therefore, when the blower of the FFU 40 is operated at a low speed, for example, when the rotational speed of the blower is maximum, 100%, the rotational speed is reduced to 50%, which is equal to or higher than a predetermined air volume that can maintain the cleanliness in the clean room 1. At the same time, it is understood that the heated air in the room may be sucked and mixed from the opening means 30. That is, for example, an inverter may be used as the variable air volume mechanism in the FFU 40 above the manufacturing apparatus having a low heat generation temperature, and a brushless motor may be connected to reduce electromagnetic noise. Here, the ratio of the supply air amount from the FFU 40 and the return air amount from the opening means 30 in this production area is about 9: 2 (for example, 200 CMH with respect to 900 CMH).

  As described above, according to the invention according to the first embodiment, each of the manufacturing apparatuses 10 and 20 installed in the clean room 1 includes the FFU 40 in which the arrangement position and the number of arrangements are set in consideration of the heat generation temperature. Since an appropriate amount of cooled air A3 is supplied, the temperature around the production apparatuses 10 and 20 in the clean room 1 is made uniform. Moreover, since a part of the high-temperature air A3 located above the clean room 1 is sucked back into the ceiling plenum chamber 2 through the opening means 30, the temperature in the clean room 1 is made uniform. Therefore, even when the production apparatuses 10 and 20 having different heat generation temperatures are arranged in the clean room 1, a local cooling means for cooling the production apparatuses 10 and 20 is provided as in the past, or the production apparatuses 10 and 20 are provided. It is not necessary to install a plurality of FCUs in accordance with the temperature of the air A3 to be supplied to the air, and the cost for making the temperature of the clean room 1 uniform can be reduced.

  Further, the FFU 40 controls the air flow rate to the clean room 1 based on the measured value from the thermometer provided in the vicinity of the operating amount measuring means or the opening means 30 for measuring the operating amount of each manufacturing apparatus 10, 20. Distribution of the conditioned air A3 that eliminates unevenness in the room temperature of the clean room 1 based on the difference in heat generation temperature between the manufacturing apparatuses 10 and 20 is possible. Thereby, the uniformity of the temperature in the clean room 1 can further be improved.

  Further, in the production area where the heat generation temperature is the highest, the FFU 40 is operated at the maximum air volume (wind speed) of the variable air volume mechanism to eliminate the retention of heat and dust, and the life expectancy of air (period in which the indoor air supply stays indoors) Can be shortened. Also, in the production area with the lowest heat generation temperature, a relatively small amount of air A3 heated by mixing the air A3 from the room is supplied, and the production area can also maintain the set temperature. No worries.

  Further, since the air A2 cooled by the FCU 50 can be efficiently mixed with the air A1 in the return air passage 4 by the stirring action of the pressure fan 50A, uneven distribution of different air temperatures in the air passage cross section can be prevented, and the temperature can be adjusted. It can be made uniform. In addition, since the air A4 is recirculated and the number of ventilations is small and the mixing rate of the outside air is low, the heat loss associated with the mixing of the outside air can be reduced. Can be reduced. Further, since the air temperature can be controlled by controlling the amount of cold water supplied to the heat exchanger 50B, the air cooled to an appropriate temperature in the production area where the manufacturing apparatus 10 having a large exothermic temperature is installed. A3 can be supplied.

  Moreover, the pressure in the clean room 1 can be maintained at a positive pressure (positive pressure) by controlling the amount of outside air supplied to each external air conditioner 101 based on the pressure in the clean room 1. Thereby, it can prevent reliably that a fine foreign material penetrate | invades into the clean room 1 from the outside.

  Furthermore, the temperature-adjusted air A2 from the FCU 50 and the air A1 from the external air conditioner 101 collide with each other in the counter airflow in the return air passage 4, and are sucked back into the ceiling plenum chamber 2 through the opening means 30. Since the air is mixed with the indoor air A3 from the clean room 1, the air A3 having a uniform temperature and humidity can be distributed to the ceiling plenum chamber 2 without uneven distribution. Therefore, the air A3 having a uniform temperature and humidity can be supplied to the clean room 1, and the temperature and humidity in the clean room 1 can be made uniform.

  Although the embodiment of the present invention has been described above, the specific configuration is not limited to the above embodiment, and even if there is a design change or the like without departing from the gist of the present invention, Included in the invention. For example, in the above-described embodiment, the opening means 30 has been described as a suction port with a shutter. However, the opening unit 30 has an opening with an MD, measures the wind speed of the air A3 blown from the FFU 40, and determines the MD based on the measurement result. The opening degree may be adjusted. Moreover, it is not necessary to make all the FFUs 40 have a variable air volume (wind speed) mechanism, and FFUs having a required air volume capacity are always installed on the ceiling of the production area of the manufacturing apparatus 10 having a large heat generation temperature. Alternatively, a constant air volume operation may be performed.

  Moreover, although the means for measuring the operating amount of each of the manufacturing apparatuses 10 and 20 has been described as a thermometer, the operating amount of the manufacturing apparatus itself may be measured. The operating amount of the manufacturing apparatus can be measured by, for example, the motor rotation speed of the manufacturing apparatus, the flow rate of the apparatus heat generation / cooling water, or the amount of power used by the manufacturing apparatus. And you may make it supply the air A3 of low temperature to a production area with a large operation amount from a production area with a small operation amount.

  In addition, the positive pressure control of the ceiling plenum chamber 2 may be performed by using the measured value of a differential pressure gauge that measures the differential pressure inside and outside the room as an input value. The opening degree may be controlled.

  Furthermore, the air cooling means may adopt a direct expansion method by employing a heat pump. In this case, the rotational speed of the compressor is controlled by the measured value of the room temperature.

  Furthermore, the number of the opening means 30 is the same number above the manufacturing apparatuses 10 and 20, the opening area is small above the high heat generating device (small opening, including fully closed), and above the low heat generating device. The opening area may be increased (the opening degree is increased).

  The present invention can be suitably applied to clean rooms such as electrical and electronic equipment factories, machine shops such as precision machines, and large-scale research and experiment facilities.

DESCRIPTION OF SYMBOLS 1 Clean room 2 Ceiling plenum chamber 3 Underfloor chamber 4 Return air path 10 1st manufacturing apparatus 20 2nd manufacturing apparatus 30 Opening means 40 FFU (fan filter unit)
50 FCU (air cooling means)
50A pressure fan (blower)
50B heat exchanger 101 air conditioner 103 outlet

Claims (5)

A clean room in which a ceiling plenum chamber, production devices having different heat generation temperatures are arranged and in which air from the ceiling plenum chamber flows in, and an underfloor chamber in which air from the clean room flows in, are discharged from the underfloor chamber A clean room air conditioning system for returning air to the ceiling plenum chamber via a return airway,
A fan filter unit provided in a ceiling portion of the ceiling plenum chamber for supplying clean air to the clean room;
Opening means for sucking the air above the clean room formed in the ceiling portion back into the ceiling plenum chamber using the suction force of the fan filter unit;
An air cooling means that is provided in any of the underfloor chamber and the return air passage, and cools the air returned to the ceiling plenum chamber;
With
The fan filter unit has an arrangement position and arrangement number corresponding to the heat generation temperature of the manufacturing apparatus of the clean room,
The fan filter unit is capable of adjusting the air flow rate to the clean room so that the temperature around the manufacturing apparatus is maintained at a predetermined temperature.
The clean room is supplied with a mixture of air recirculated from the underfloor chamber to the ceiling plenum chamber and air cooled by the air cooling means and having a temperature lower than the room temperature of the clean room.
A clean room air conditioning system. The fan filter unit controls an air flow rate to the clean room based on a measured value from an operating amount measuring unit that measures an operating amount of the manufacturing apparatus or a temperature measuring unit provided in the vicinity of the opening unit,
2. The clean room air conditioning system according to claim 1, wherein: The air cooling means includes a pressure fan and a heat exchanger, and is composed of an air conditioner capable of controlling the amount of cooling water supplied to the heat exchanger, and an indoor temperature measuring means provided in the clean room Controlling the amount of cooling water supplied to the heat exchanger based on the indoor temperature measured in
The clean room air conditioning system according to claim 1 or 2. The return airway is supplied with outside air whose temperature and humidity are adjusted by an outside air conditioner, and by controlling the amount of outside air supplied from the outside air conditioner based on the pressure inside the clean room, Maintaining the pressure at a positive pressure,
The clean room air conditioning system according to claim 3. The temperature-adjusted air from the air cooling means and the air from the external air conditioner collide in a counterflow in the return air passage, and are sucked back into the ceiling plenum chamber through the opening means. Mixed with room air from a clean room, blown out to the clean room through the fan filter unit,
The clean room air conditioning system according to claim 4.