JP2021139043A - Case housing frame, taking-out method for taking out frame housed in case, housing method for housing frame in case, and frame housing body - Google Patents

Abstract

To provide a case suppressing a frame from deforming, a taking-out method for taking the frame out of the case, a housing method for housing the frame in the case, and a frame housing body.SOLUTION: A case which houses a frame comprises: a bottom part 15; a side part 20 which includes a lower end 201 located on a bottom part side and an upper end 202 located on the opposite side from the lower end, and also has a side opening formed reaching the upper end; a closing tool 30 which takes a closed state in which the side part opening is closed and an open state in which the side part opening is open; a frame support tool which includes a frame support surface supporting the frame above the bottom part; and a cover which is located above the upper end of the side part.SELECTED DRAWING: Figure 4

Description

Embodiments of the present disclosure relate to a case for storing a frame, a method for taking out the frame from the case, a storage method for storing the frame in the case, and a frame storage body.

Organic EL display devices are attracting attention in the field of display devices used in portable devices such as smartphones and tablet PCs. As a method and device for manufacturing an organic semiconductor device such as an organic EL display device, a method and a device for forming pixels in a desired pattern using a mask in which through holes arranged in a desired pattern are formed are known. .. For example, first, a mask fixed to a frame is combined with a substrate for an organic EL display device. Subsequently, the vapor-deposited material containing the organic material is attached to the substrate through the through holes of the mask. By carrying out such a thin-film deposition step, it is possible to form a pixel having a thin-film deposition layer containing a thin-film deposition material on the substrate with a pattern corresponding to the pattern of the through holes of the thin-film deposition mask.

Japanese Patent No. 5382259

When the frame is deformed, the position accuracy of the through holes of the mask fixed to the frame may decrease, and the position accuracy of the vapor-deposited material adhering to the substrate may also decrease. Therefore, it is required to handle the frame so as to suppress the deformation of the frame.

The case for storing the frame according to the embodiment of the present disclosure is
At the bottom
A side portion including a lower end located on the bottom side and an upper end located on the side opposite to the lower end, and a side opening forming a side opening reaching the upper end.
A closing tool capable of taking a closed state in which the side opening is closed and an open state in which the side opening is opened,
A frame support including a frame support surface that supports the frame above the bottom,
A cover located above the upper end of the side portion is provided.

According to the present disclosure, it is possible to prevent the frame from being deformed.

It is a figure which shows an example of the vapor deposition apparatus provided with a mask. It is sectional drawing which shows an example of the organic EL display apparatus manufactured using the vapor deposition apparatus. It is a top view which shows an example of a mask device. It is a perspective view which shows an example of the case which the door is in a closed state. It is a perspective view which shows an example of the case which the door is in an open state. It is a top view which shows an example of the case with the cover removed. It is a top view which shows the state which took out the frame from the case of FIG. It is a perspective view which shows an example of the frame support of a case. It is sectional drawing which shows an example of a frame support. It is sectional drawing which shows an example of the case in which a frame is housed. FIG. 5 is a cross-sectional view showing a state in which the cover is removed from the case of FIG. 10 and the door is opened. It is a top view which shows the state which the cover was removed from the case of FIG. 10, and the door was opened. It is a top view which shows the process of inserting a fork into a case through a side opening of a case. It is sectional drawing which shows the process of inserting a fork into a case through a side opening of a case. It is sectional drawing which shows the process of lifting a frame by a fork. It is sectional drawing which shows the frame lifted by a fork. It is a top view which shows an example of the case with the cover removed. It is sectional drawing of the case of FIG. It is sectional drawing of the case of FIG. It is a top view which shows an example of the case with the cover removed. It is a top view which shows an example of the case in a state where a cover is removed and a door is opened. It is a top view which shows an example of the case in a state where a cover is removed and a door is opened. It is a top view which shows an example of the case with the cover removed. It is a top view which shows an example of a lifter 70. FIG. 2 is a cross-sectional view of the fork and receiver of FIG. 22 along line CC.

In the present specification and the drawings, unless otherwise specified, the term "substrate", "base material", "board", "sheet", "film", etc. , Not distinguished from each other based solely on the difference in designation.

Unless otherwise specified in the present specification and the present drawings, the terms such as "parallel" and "orthogonal" and the values of length and angle, etc., which specify the shape and geometric conditions and their degrees, are used. Is to be interpreted including the range in which similar functions can be expected without being bound by the strict meaning.

In the present specification and the drawings, unless otherwise specified, a configuration such as a member or region may be "above" or "below" another configuration such as another member or region. The terms "upper" and "lower", or "upward" and "downward" include cases where one configuration is in direct contact with another. Further, it also includes the case where another configuration is included between one configuration and another configuration, that is, the case where they are indirectly in contact with each other. Further, unless otherwise specified, the terms "upper", "upper", "upper", or "lower", "lower", and "lower" may be reversed in the vertical direction.

Unless otherwise specified, the same parts or parts having similar functions may be designated by the same reference numerals or similar reference numerals, and the repeated description thereof may be omitted in the present specification and the present drawings. Further, the dimensional ratio of the drawing may differ from the actual ratio for convenience of explanation, or a part of the configuration may be omitted from the drawing.

Unless otherwise specified herein and in the drawings, one embodiment of the present specification may be combined with other embodiments without conflict. In addition, other embodiments can be combined as long as there is no contradiction.

Unless otherwise specified in the present specification and the present drawings, when a plurality of steps are disclosed with respect to a method such as a manufacturing method, other steps not disclosed are carried out between the disclosed steps. You may. In addition, the order of the disclosed steps is arbitrary as long as there is no contradiction.

Unless otherwise specified in the present specification and the drawings, the numerical range represented by the symbol "~" includes numerical values placed before and after the symbol "~". For example, the numerical range defined by the expression "34 to 38% by mass" is the same as the numerical range defined by the expression "34% by mass or more and 38% by mass or less".

Hereinafter, one embodiment of the present disclosure will be described in detail with reference to the drawings. The embodiments shown below are examples of the embodiments of the present disclosure, and the present disclosure is not construed as being limited to these embodiments.

The first aspect of the present disclosure is a case for accommodating a frame.
At the bottom
A side portion including a lower end located on the bottom side and an upper end located on the side opposite to the lower end, and a side opening forming a side opening reaching the upper end.
A closing tool capable of taking a closed state in which the side opening is closed and an open state in which the side opening is opened,
A frame support including a frame support surface that supports the frame above the bottom,
A case comprising a cover located above the upper end of the side portion.

In the second aspect of the present disclosure, the case according to the first aspect described above may include a bottom support that supports the bottom from below.

A third aspect of the present disclosure is that in the case of the second aspect described above, the bottom support may include casters.

A fourth aspect of the present disclosure is that in each of the cases according to each of the first to third aspects described above, the closure is rotatable around a shaft attached to the side or bottom. Doors may be included.

In a fifth aspect of the present disclosure, in each of the cases according to each of the above-mentioned first aspect to the above-mentioned third aspect, the closing tool may include a closing member separable from the side portion.

In the sixth aspect of the present disclosure, in each of the cases according to the first aspect to the fifth aspect described above, the frame support includes a resin and includes a frame base constituting the frame support surface. You may.

A seventh aspect of the present disclosure is the case according to the sixth aspect described above, wherein the frame support may be located between the frame base and the bottom and include a support column containing metal.

An eighth aspect of the present disclosure is, in the case according to the sixth aspect described above or the seventh aspect described above, the frame base is a convex portion protruding upward from the frame supporting surface along the inner surface of the side portion. Including
The frame support may include a resin and is attached to the upper surface of the convex portion, and may include a press that includes a facing region facing the frame support surface of the frame base.

A ninth aspect of the present disclosure may include a guide for guiding the foam inserted through the side opening in the case according to each of the first to eighth aspects described above. ..

A tenth aspect of the present disclosure is the case according to the ninth aspect described above, wherein the guide may include a guide protrusion protruding upward from the bottom.

In the eleventh aspect of the present disclosure, in each of the cases according to the first aspect described above to the tenth aspect described above, the side opening includes a first side opening and a second side opening.
The side portion may include an intermediate support that is located between the first side opening and the second side opening and extends vertically from the bottom to the cover.

A twelfth aspect of the present disclosure includes a pair of first side portions and a pair of second side portions in the case according to each of the first aspect described above and the eleventh aspect described above. The dimension of the first side portion may be 1200 mm or more, and the dimension of the second side portion may be 1800 mm or more.

A thirteenth aspect of the present disclosure is the case according to the twelfth aspect described above, wherein the side opening is formed in the second side portion, and the first said first aspect with respect to the dimension of the second side portion. The ratio of the distance from one side to the side opening is 0.1 or more, and the ratio of the distance from the second first side to the side opening to the dimension of the second side is 0. It may be 1 or more.

A fourteenth aspect of the present disclosure is a method of taking out a frame housed in a case according to each of the thirteenth aspects described above from the first aspect described above.
A step of inserting a fork between the lower surface of the frame and the bottom of the case through the side opening in the open state.
The taking-out method includes a step of raising the fork and lifting the frame supported by the frame support by the fork.

In the fifteenth aspect of the present disclosure, in the extraction method according to the fourteenth aspect described above, the frame may be supported in a pulled state with a mask including a through hole.

The sixteenth aspect of the present disclosure is a storage method for accommodating a frame in a case according to each of the above-mentioned first aspect to the above-mentioned thirteenth aspect.
A step of inserting the frame and a fork supporting the frame from below into the inside of the case through the side opening in the open state.
It is a storage method including a step of lowering the fork and placing the frame on the frame support surface of the frame support.

According to the seventeenth aspect of the present disclosure, in the storage method according to the sixteenth aspect described above, the frame may be supported in a state in which a mask including a through hole is pulled.

The eighteenth aspect of the present disclosure includes cases according to each of the above-mentioned first aspect to the above-mentioned thirteenth aspect.
A frame accommodating body comprising a frame supported by the frame support of the case.

A nineteenth aspect of the present disclosure is the frame accommodating body according to the sixteenth aspect described above, in which a mask including a through hole may be supported in a pulled state.

According to the case according to the embodiment of the present disclosure, the frame housed in the case can be easily taken out. Therefore, it is possible to prevent the frame from being deformed due to the work of taking out the frame from the case.

First, a thin-film deposition apparatus 1 including a mask apparatus including a frame and a mask will be described with reference to FIG. The thin-film deposition apparatus 1 carries out a thin-film deposition process for depositing a vapor-deposited material on an object.

The vapor deposition apparatus 1 may include a vapor deposition source 6, a heater 8, and a mask apparatus 40 inside. Further, the vapor deposition apparatus 1 may further include an exhaust means for creating a vacuum atmosphere inside the vapor deposition apparatus 1. The vapor deposition source 6 is, for example, a crucible and accommodates a vapor deposition material 7 such as an organic light emitting material. The heater 8 heats the vapor deposition source 6 to evaporate the vapor deposition material 7 in a vacuum atmosphere. The mask device 40 is arranged so as to face the crucible 6.

As shown in FIG. 1, the mask device 40 may include at least one mask 50 and a frame 41 that supports the mask 50. The frame 41 may include a first frame surface 41a to which the mask 50 is fixed and a second frame surface 41b located on the opposite side of the first frame surface 41a. Further, the frame 41 may include an opening 42 penetrating from the first frame surface 41a to the second frame surface 41b. The mask 50 may be fixed to the frame 41 so as to cross the opening 42 in a plan view. Further, the frame 41 may support the mask 50 in a state of being pulled in the surface direction so as to prevent the mask 50 from bending.

As shown in FIG. 1, the mask device 40 is arranged in the thin-film deposition device 1 so that the mask 50 faces the substrate 110, which is the object to which the vapor deposition material 7 is attached. The mask 50 includes a plurality of through holes 56 through which the thin-film deposition material 7 flying from the thin-film deposition source 6 is passed. In the following description, among the surfaces of the mask 50, the surface located on the side of the substrate 110 is referred to as the first surface 55a, and the surface located on the opposite side of the first surface 55a is referred to as the second surface 55b.

As shown in FIG. 1, the vapor deposition apparatus 1 may include a magnet 4 arranged on the side of the surface of the substrate 110 opposite to the mask 50. By providing the magnet 4, the mask 50 can be attracted to the magnet 4 side by magnetic force. As a result, the gap between the mask 50 and the substrate 110 can be reduced or eliminated. As a result, it is possible to suppress the generation of shadows in the vapor deposition process, and it is possible to improve the dimensional accuracy and the position accuracy of the vapor deposition layer formed on the substrate 110. Although not shown, the mask 50 may be pulled toward the substrate 110 by using an electrostatic chuck that utilizes electrostatic force. The shadow is a phenomenon in which the adhesion of the vapor-deposited material to the substrate 110 is hindered by the wall surface of the through hole 56.

FIG. 2 is a cross-sectional view showing an example of an organic EL display device 100 manufactured by using the vapor deposition device 1 of FIG. The organic EL display device 100 may include a substrate 110 and pixels having a vapor deposition layer 98 containing a vapor deposition material 7 adhering to the substrate 110. Although not shown, the organic EL display device 100 may further include electrodes electrically connected to pixels including the vapor deposition layer 98. The electrodes may be provided on the substrate 110 in advance before the vapor deposition material 7 is attached to the substrate 110 by the thin-film deposition step. Further, the organic EL display device 100 may further include other components such as a sealing member that seals the space around the pixel including the vapor deposition layer 98 from the outside. Therefore, it can be said that the organic EL display device 100 of FIG. 2 is an organic EL display device intermediate produced in the intermediate stage of manufacturing the organic EL display device.

If it is desired to display colors in a plurality of colors, a thin-film deposition apparatus 1 on which a mask 50 corresponding to each color is mounted is prepared, and the substrate 110 is charged into each vapor deposition apparatus 1 in order. Thereby, for example, the organic light emitting material for red, the organic light emitting material for green, and the organic light emitting material for blue can be vapor-deposited on the substrate 110 in this order.

Next, the mask 50 will be described in detail. FIG. 3 is a plan view showing a case where the mask device 40 is viewed from the first surface 55a side of the mask 50. As shown in FIG. 3, the mask device 40 may include a plurality of masks 50. In the present embodiment, the shape of each mask 50 may be a rectangle extending in the first direction D1. In the mask device 40, the plurality of masks 50 are arranged in the second direction D2 which intersects the first direction D1 which is the longitudinal direction of the mask 50. Each mask 50 may be fixed to the frame 41 at both ends in the longitudinal direction of the mask 50, for example by welding.

The frame 41 may have a rectangular contour that includes a pair of first regions 411 extending in the first direction D1 and a pair of second regions 412 extending in the second direction D2. As shown in FIG. 3, the second region 412 to which the mask 50 is fixed may be longer than the first region 411. The opening 42 of the frame 41 may be surrounded by a pair of first regions 411 and a pair of second regions 412.

The dimension L1 of the first region 411 in the first direction D1 and the dimension L2 of the second region 412 in the second direction D2 are determined according to the dimensions of the substrate 110. When a large substrate 110 such as the 8th generation, the 9th generation, or the 10th generation is used, the dimensions L1 and L2 are also large.

The dimension L1 of the first region 411 may be, for example, 1000 mm or more, 1500 mm or more, or 2000 mm or more. The dimension L1 may be, for example, 3000 mm or less, 3500 mm or less, or 4000 mm or less. The range of dimension L1 may be defined by a first group consisting of 1000 mm, 1500 mm and 2000 mm and / or a second group consisting of 3000 mm, 3500 mm and 4000 mm. The range of dimension L1 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of dimension L1 may be defined by any combination of any two of the values included in the first group described above. The range of dimension L1 may be defined by any combination of two of the values included in the second group described above. For example, it may be 1000 mm or more and 4000 mm or less, 1000 mm or more and 3500 mm or less, 1000 mm or more and 3000 mm or less, 1000 mm or more and 2000 mm or less, 1000 mm or more and 1500 mm or less, 1500 mm or more and 4000 mm or less, or 1500 mm or more and 3500 mm or less. It may be 1500 mm or more and 3000 mm or less, 1500 mm or more and 2000 mm or less, 2000 mm or more and 4000 mm or less, 2000 mm or more and 3500 mm or less, 2000 mm or more and 3000 mm or less, 3000 mm or more and 4000 mm or less, 3000 mm or more and 3500 mm or less. It may be 3500 mm or more and 4000 mm or less.

The dimension L2 of the second region 412 may be, for example, 1600 mm or more, 2100 mm or more, or 2600 mm or more. The dimension L2 may be, for example, 3300 mm or less, 3800 mm or less, or 4300 mm or less. The range of dimension L2 may be defined by a first group consisting of 1600 mm, 2100 mm and 2600 mm and / or a second group consisting of 3300 mm, 3800 mm and 4300 mm. The range of dimension L2 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of dimension L2 may be defined by any combination of two of the values included in the first group described above. The range of dimension L2 may be defined by any combination of two of the values included in the second group described above. For example, it may be 1600 mm or more and 4300 mm or less, 1600 mm or more and 3800 mm or less, 1600 mm or more and 3300 mm or less, 1600 mm or more and 2600 mm or less, 1600 mm or more and 2100 mm or less, 2100 mm or more and 4300 mm or less, or 2100 mm or more and 3800 mm or less. , 2100 mm or more and 3300 mm or less, 2100 mm or more and 2600 mm or less, 2600 mm or more and 4300 mm or less, 2600 mm or more and 3800 mm or less, 2600 mm or more and 3300 mm or less, 3300 mm or more and 4300 mm or less, 3300 mm or more and 3800 mm or less. It may be 3800 mm or more and 4300 mm or less.

When a large substrate 110 is used, the weight of the frame 41 also increases. The weight of the frame 41 may be, for example, 70 kg or more, 100 kg or more, or 150 kg or more. The weight of the frame 41 may be, for example, 300 kg or less, 400 kg or less, or 500 kg or less. The weight range of the frame 41 may be defined by a first group consisting of 70 kg, 100 kg and 150 kg and / or a second group consisting of 300 kg, 400 kg and 500 kg. The weight range of the frame 41 may be determined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The weight range of the frame 41 may be determined by any combination of any two of the values included in the first group described above. The weight range of the frame 41 may be determined by any combination of any two of the values included in the second group described above. For example, it may be 70 kg or more and 500 kg or less, 70 kg or more and 400 kg or less, 70 kg or more and 300 kg or less, 70 kg or more and 150 kg or less, 70 kg or more and 100 kg or less, 100 kg or more and 500 kg or less, 100 kg or more and 400 kg or less. , 100 kg or more and 300 kg or less, 100 kg or more and 150 kg or less, 150 kg or more and 500 kg or less, 150 kg or more and 400 kg or less, 150 kg or more and 300 kg or less, 300 kg or more and 500 kg or less, 300 kg or more and 400 kg or less. It may be 400 kg or more and 500 kg or less.

The mask device 40 may include a member that is fixed to the frame 41 and partially overlaps the mask 50 in the thickness direction of the mask 50. For example, the mask device 40 may include a support member 43 that extends in the second direction D2 that intersects the first direction D1 and supports the mask 50 from below. The support member 43 may be in contact with the mask 50. Alternatively, the support member 43 may indirectly support the mask 50 from below via other members. Further, although not shown, the mask device 40 may include a member fixed to the frame 41 and overlapping in the gap between two adjacent masks 50.

As shown in FIG. 3, the mask 50 may have a pair of ear portions 51 overlapping the frame 41 and an intermediate portion 52 located between the ear portions 51. The intermediate portion 52 may have at least one effective region 53 and a peripheral region 54 located around the effective region 53. In the example shown in FIG. 3, the intermediate portion 52 includes a plurality of effective regions 53 arranged at predetermined intervals along the first direction D1. The peripheral area 54 surrounds a plurality of effective areas 53. The effective region 53 may include a plurality of through holes 56 through which the vapor deposition material 7 passes. The thin-film deposition material that has passed through each through hole 56 of the effective region 53 and adheres to the substrate 110 may form the above-mentioned thin-film deposition layer 98.

The opening size r of the through hole 56 is determined according to the size of the thin-film deposition layer 98 formed on the substrate 110. The opening dimension r of the through hole 56 is a dimension in a plan view of the through region of the through hole 56 that penetrates the metal plate constituting the mask 50. The opening dimension r can be defined by light passing through the through hole 56. For example, parallel light is incident on one of the first surface 55a or the second surface 55b of the mask 50 along the normal direction of the mask 50, and is transmitted through the through hole 56 to pass through the other of the first surface 55a or the second surface 55b. Emit from. Then, the dimension of the region occupied by the emitted light in the surface direction of the mask 50 is adopted as the opening dimension r of the through hole 56.

The opening size r of the through hole 56 may be, for example, 10 μm or more, 15 μm or more, 20 μm or more, or 25 μm or more. Further, the opening dimension r of the through hole 56 may be, for example, 40 μm or less, 45 μm or less, 50 μm or less, or 55 μm or less. The range of the opening dimension r of the through hole 56 may be defined by a first group consisting of 10 μm, 15 μm, 20 μm and 25 μm and / or a second group consisting of 40 μm, 45 μm, 50 μm and 55 μm. The range of the opening dimension r of the through hole 56 is determined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. May be good. The range of the opening dimension r of the through hole 56 may be determined by any combination of any two of the values included in the first group described above. The range of the opening dimension r of the through hole 56 may be determined by any combination of any two of the values included in the second group described above. For example, it may be 10 μm or more and 55 μm or less, 10 μm or more and 50 μm or less, 10 μm or more and 45 μm or less, 10 μm or more and 40 μm or less, or 10 μm or more and 25 μm or less. It may be 10 μm or more and 20 μm or less, 10 μm or more and 15 μm or less, 15 μm or more and 55 μm or less, 15 μm or more and 50 μm or less, or 15 μm or more and 45 μm or less. It may be 15 μm or more and 40 μm or less, 15 μm or more and 25 μm or less, 15 μm or more and 20 μm or less, 20 μm or more and 55 μm or less, or 20 μm or more and 50 μm or less. It may be 20 μm or more and 45 μm or less, 20 μm or more and 40 μm or less, 20 μm or more and 25 μm or less, 25 μm or more and 55 μm or less, or 25 μm or more and 50 μm or less. It may be 25 μm or more and 45 μm or less, 25 μm or more and 40 μm or less, 40 μm or more and 55 μm or less, 40 μm or more and 50 μm or less, or 40 μm or more and 45 μm or less. It may be 45 μm or more and 55 μm or less, 45 μm or more and 50 μm or less, or 50 μm or more and 55 μm or less.

When a display device such as an organic EL display device is manufactured by using the mask 50, one effective region 53 may correspond to the display area of one organic EL display device. In addition, one effective area 53 may correspond to a plurality of display areas. Further, although not shown, a plurality of effective regions 53 may be arranged at predetermined intervals also in the width direction of the mask 50.

The effective region 53 may have a rectangular contour in plan view. Further, the effective region 53 may have contours having various shapes depending on the shape of the display region of the organic EL display device. For example, the effective region 53 may have a circular contour.

Next, the materials of the mask 50 and the frame 41 of the mask device 40 will be described. As the main material of the mask 50 and the frame 41, an iron alloy containing nickel can be used. The iron alloy may further contain cobalt in addition to nickel. For example, as a material for the mask 50 and the frame 41, iron having a total content of nickel and cobalt of 28% by mass or more and 54% by mass or less and a cobalt content of 0% by mass or more and 6% by mass or less. Alloys can be used. As a result, the difference between the coefficient of thermal expansion of the mask 50 and the frame 41 and the coefficient of thermal expansion of the substrate 110 containing glass can be reduced. Therefore, it is possible to prevent the dimensional accuracy and the position accuracy of the thin-film vapor deposition layer 98 formed on the substrate 110 from being lowered due to thermal expansion of the mask 50, the frame 41, the substrate 110, and the like.

The total content of nickel and cobalt in the iron alloy constituting the mask 50 and the frame 41 may be 28% by mass or more and 38% by mass or less. In this case, specific examples of the iron alloy include an Invar material, a Super Invar material, and an Ultra Invar material. The Invar material is an iron alloy containing 34% by mass or more and 38% by mass or less of nickel, and the balance of iron and unavoidable impurities. The superinvar material is an iron alloy containing 30% by mass or more and 34% by mass or less of nickel, cobalt, and the balance of iron and unavoidable impurities. The ultrainver material contains 28% by mass or more and 34% by mass or less of nickel, 2% by mass or more and 7% by mass or less of cobalt, 0.1% by mass or more and 1.0% by mass or less of manganese, and 0. It is an iron alloy containing 10% by mass or less of silicon, 0.01% by mass or less of carbon, and the balance of iron and unavoidable impurities.

The total content of nickel and cobalt in the iron alloy constituting the mask 50 and the frame 41 may be 38% by mass or more and 54% by mass or less. In this case, specific examples of the iron alloy include a low thermal expansion Fe—Ni based plating alloy. The low thermal expansion Fe—Ni based plating alloy is an iron alloy containing 38% by mass or more and 54% by mass or less of nickel, and the balance of iron and unavoidable impurities.

If the temperatures of the mask 50, the frame 41 and the substrate 110 do not reach high temperatures during the vapor deposition process, the coefficient of thermal expansion of the mask 50 and the frame 41 needs to be set to a value equivalent to the coefficient of thermal expansion of the substrate 110. There is nothing in particular. In this case, a material other than the above-mentioned iron alloy may be used as the iron alloy constituting the mask 50 and the frame 41. For example, an iron alloy other than the above-mentioned nickel-containing iron alloy, such as an iron alloy containing chromium, may be used. As the iron alloy containing chromium, for example, a so-called stainless steel iron alloy can be used. Further, alloys other than iron alloys such as nickel and nickel-cobalt alloys may be used.

The thickness T1 of the mask 50 may be, for example, 8 μm or more, 10 μm or more, 13 μm or more, or 15 μm or more. Further, the thickness T1 of the mask 50 may be, for example, 20 μm or less, 30 μm or less, 40 μm or less, or 50 μm or less. The range of the thickness T1 of the mask 50 may be defined by a first group consisting of 8 μm, 10 μm, 13 μm and 15 μm and / or a second group consisting of 20 μm, 30 μm, 40 μm and 50 μm. The range of the thickness T1 of the mask 50 may be determined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. .. The range of the thickness T1 of the mask 50 may be determined by any combination of any two of the values included in the first group described above. The range of the thickness T1 of the mask 50 may be determined by any combination of two of the values included in the second group described above. For example, it may be 8 μm or more and 50 μm or less, 8 μm or more and 40 μm or less, 8 μm or more and 30 μm or less, 8 μm or more and 20 μm or less, or 8 μm or more and 15 μm or less. It may be 8 μm or more and 13 μm or less, 8 μm or more and 10 μm or less, 10 μm or more and 50 μm or less, 10 μm or more and 40 μm or less, or 10 μm or more and 30 μm or less. It may be 10 μm or more and 20 μm or less, 10 μm or more and 15 μm or less, 10 μm or more and 13 μm or less, 13 μm or more and 50 μm or less, or 13 μm or more and 40 μm or less. It may be 13 μm or more and 30 μm or less, 13 μm or more and 20 μm or less, 13 μm or more and 15 μm or less, 15 μm or more and 50 μm or less, or 15 μm or more and 40 μm or less. It may be 15 μm or more and 30 μm or less, 15 μm or more and 20 μm or less, 20 μm or more and 50 μm or less, 20 μm or more and 40 μm or less, or 20 μm or more and 30 μm or less. It may be 30 μm or more and 50 μm or less, 30 μm or more and 40 μm or less, or 40 μm or more and 50 μm or less.

By setting the thickness T1 of the mask 50 to 50 μm or less, the ratio of the vapor-deposited material 7 caught on the wall surface of the through-hole 56 before passing through the through-hole 56 can be reduced. Thereby, the utilization efficiency of the thin-film deposition material 7 can be improved. Further, by setting the thickness T1 of the mask 50 to 8 μm or more, the strength of the mask 50 can be ensured, and damage or deformation of the mask 50 can be suppressed.

The thickness T2 of the frame 41 may be, for example, 5 mm or more, 10 mm or more, 15 mm or more, or 20 mm or more. Further, the thickness T2 of the frame 41 may be, for example, 25 mm or less, 30 mm or less, 35 mm or less, or 40 mm or less. The range of the thickness T2 of the frame 41 may be defined by a first group consisting of 5 mm, 10 mm, 15 mm and 20 mm and / or a second group consisting of 25 mm, 30 mm, 35 mm and 40 mm. The range of the thickness T2 of the frame 41 may be determined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. .. The range of the thickness T2 of the frame 41 may be determined by any combination of two of the values included in the first group described above. The range of the thickness T2 of the frame 41 may be defined by any combination of two of the values included in the second group described above. For example, it may be 5 mm or more and 40 mm or less, 5 mm or more and 35 mm or less, 5 mm or more and 30 mm or less, 5 mm or more and 25 mm or less, or 5 mm or more and 20 mm or less. It may be 5 mm or more and 15 mm or less, 5 mm or more and 10 mm or less, 10 mm or more and 40 mm or less, 10 mm or more and 35 mm or less, or 10 mm or more and 30 mm or less. It may be 10 mm or more and 25 mm or less, 10 mm or more and 20 mm or less, 10 mm or more and 15 mm or less, 15 mm or more and 40 mm or less, or 15 mm or more and 35 mm or less. It may be 15 mm or more and 30 mm or less, 15 mm or more and 25 mm or less, 15 mm or more and 20 mm or less, 20 mm or more and 40 mm or less, or 20 mm or more and 35 mm or less. It may be 20 mm or more and 30 mm or less, 20 mm or more and 25 mm or less, 25 mm or more and 40 mm or less, 25 mm or more and 35 mm or less, or 25 mm or more and 30 mm or less. It may be 30 mm or more and 40 mm or less, 30 mm or more and 35 mm or less, or 35 mm or more and 40 mm or less.

By setting the thickness T2 of the frame 41 to 5 mm or more, it is possible to suppress deformation such as bending of the frame 41. Further, by setting the thickness T2 of the frame 41 to 40 mm or less, it is possible to prevent the weight of the frame 41 from becoming excessively large. Thereby, the handleability of the frame 41 can be improved. For example, the frame 41 can be conveyed using a small lifter.

As a method for measuring the thickness T1 of the mask 50 and the thickness T2 of the frame 41, a contact-type measuring method is adopted. As a contact type measurement method, a length gauge HEIDENHAIM-METRO "MT1271" manufactured by Heidenhain Co., Ltd., which is equipped with a ball bush guide type plunger, is used.

Next, the outline of the case 10 for accommodating the frame 41 of the mask device 40 will be described. FIG. 4 is a perspective view showing an example of the case 10 in the closed state, and FIG. 5 is a perspective view showing an example of the case 10 in the open state. The case 10 may include a bottom 15, a side 20, a frame support 25, a closure 30, and a cover 35.

FIG. 6 is a plan view showing an example of the case 10 with the cover 35 removed. The case 10 may have a contour corresponding to the frame 41 in a plan view. For example, the contour of the case 10 in a plan view may be rectangular like the frame 41.

The frame 41 may be housed in the case 10 with the first region 411 and the second region 412 parallel to each other in the horizontal direction. In this case, the bottom portion 15 of the case 10 may be a plate member that extends in the horizontal direction. As the material of the bottom portion 15, aluminum, stainless steel, or the like may be used. A bottom support 16 that supports the bottom 15 from below may be attached to the bottom 15. In this case, when the case 10 is placed on the floor, a gap can be provided between the surface of the floor and the bottom 15. As a result, the base 74 of the lifter 70, which will be described later, can be inserted into the gap between the floor surface and the bottom portion 15.

The bottom support 16 may include casters 161 that are rotatable around an axis that extends parallel to the plane of the bottom 15. By rotating the caster 161 the case 10 can be moved on the floor.

The distance H1 from the floor surface to the bottom 15 may be, for example, 50 mm or more, 100 mm or more, 150 mm or more, or 200 mm or more. Further, the distance H1 may be, for example, 250 mm or less, 300 mm or less, 350 mm or less, or 400 mm or less. The range of distance H1 may be defined by a first group consisting of 50 mm, 100 mm, 150 mm and 200 mm and / or a second group consisting of 250 mm, 300 mm, 350 mm and 400 mm. The range of the distance H1 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the distance H1 may be defined by any combination of any two of the values included in the first group described above. The range of the distance H1 may be defined by any combination of two of the values included in the second group described above. For example, it may be 50 mm or more and 400 mm or less, 50 mm or more and 350 mm or less, 50 mm or more and 300 mm or less, 50 mm or more and 250 mm or less, or 50 mm or more and 200 mm or less. It may be 50 mm or more and 150 mm or less, 50 mm or more and 100 mm or less, 100 mm or more and 400 mm or less, 100 mm or more and 350 mm or less, or 100 mm or more and 300 mm or less. It may be 100 mm or more and 250 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 400 mm or less, or 150 mm or more and 350 mm or less. It may be 150 mm or more and 300 mm or less, 150 mm or more and 250 mm or less, 150 mm or more and 200 mm or less, 200 mm or more and 400 mm or less, or 200 mm or more and 350 mm or less. It may be 200 mm or more and 300 mm or less, 200 mm or more and 250 mm or less, 250 mm or more and 400 mm or less, 250 mm or more and 350 mm or less, or 250 mm or more and 300 mm or less. It may be 300 mm or more and 400 mm or less, 300 mm or more and 350 mm or less, or 350 mm or more and 400 mm or less.

Next, the side portion 20 will be described. The side portion 20 includes a lower end 201 located on the bottom 15 side and an upper end 202 located on the opposite side of the lower end 201, and may extend in the vertical direction from the bottom 15 side to the cover 35 side. For example, the side portion 20 may be a plate member that extends in the vertical direction. As the material of the side portion 20, aluminum, stainless steel, or the like may be used.

The side portion 20 may be composed of a member separate from the bottom portion 15. Alternatively, the side portion 20 may be integrally formed with the bottom portion 15.

As shown in FIG. 6, the side portion 20 has a rectangular contour including a first side portion 21 extending in the first direction D1 and a second side portion 22 extending in the second side portion 22 in a plan view. You may be doing it. In the frame 41, the first region 411 of the frame 41 is parallel to the first side portion 21 of the side portion 20 of the case 10, and the second frame surface 41b is parallel to the second side portion 22 of the side portion 20. It may be stored in the case 10. The second side portion 22 of the side portion 20 may be longer than the first side portion 21.

The dimension L3 of the first side portion 21 in the first direction D1 and the dimension L4 of the second side portion 22 in the second direction D2 are determined according to the dimensions of the frame 41. When a large substrate 110 is used, the frame 41 becomes large, and the dimensions L3 and L4 also become large.

The dimension L3 of the first side portion 21 may be, for example, 1200 mm or more, 1700 mm or more, or 2200 mm or more. L3 may be, for example, 3200 mm or less, 3700 mm or less, or 4200 mm or less. The range of L3 may be defined by a first group consisting of 1200 mm, 1700 mm and 2200 mm and / or a second group consisting of 3200 mm, 3700 mm and 4200 mm. The range of L3 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of L3 may be defined by any combination of two of the values included in the first group described above. The range of L3 may be defined by any combination of two of the values included in the second group described above. For example, it may be 1200 mm or more and 4200 mm or less, 1200 mm or more and 3700 mm or less, 1200 mm or more and 3200 mm or less, 1200 mm or more and 2200 mm or less, 1200 mm or more and 1700 mm or less, 1700 mm or more and 4200 mm or less, or 1700 mm or more and 3700 mm or less. 1,700 mm or more and 3200 mm or less, 1700 mm or more and 2200 mm or less, 2200 mm or more and 4200 mm or less, 2200 mm or more and 3700 mm or less, 2200 mm or more and 3200 mm or less, 3200 mm or more and 4200 mm or less, 3200 mm or more and 3700 mm or less. It may be 3700 mm or more and 4200 mm or less.

The dimension L4 of the second side portion 22 may be, for example, 1800 mm or more, 2300 mm or more, or 2800 mm or more. L4 may be, for example, 3500 mm or less, 4000 mm or less, or 4500 mm or less. The range of L4 may be defined by a first group consisting of 1800 mm, 2300 mm and 2800 mm and / or a second group consisting of 3500 mm, 4000 mm and 4500 mm. The range of L4 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of L4 may be defined by any combination of two of the values included in the first group described above. The range of L4 may be defined by any combination of two of the values included in the second group described above. For example, it may be 1800 mm or more and 4500 mm or less, 1800 mm or more and 4000 mm or less, 1800 mm or more and 3500 mm or less, 1800 mm or more and 2800 mm or less, 1800 mm or more and 2300 mm or less, 2300 mm or more and 4500 mm or less, or 2300 mm or more and 4000 mm or less. , 2300 mm or more and 3500 mm or less, 2300 mm or more and 2800 mm or less, 2800 mm or more and 4500 mm or less, 2800 mm or more and 4000 mm or less, 2800 mm or more and 3500 mm or less, 3500 mm or more and 4500 mm or less, 3500 mm or more and 4000 mm or less. It may be 4000 mm or more and 4500 mm or less.

As shown in FIG. 5, a side opening 23 reaching the upper end 202 may be formed in a part of the side portion 20. As shown in FIG. 5, the side opening 23 may extend from the lower end 201 to the upper end 202. Alternatively, although not shown, the side opening 23 may reach the upper end 202 but not the lower end 201.

As shown in FIGS. 5 and 6, the side opening 23 may be formed on the second side 22 of the side 20. Further, the side opening 23 may include a first side opening 231 and a second side opening 232 located on the second side 22 of the side 20. In this case, the side portion 20 may include an intermediate support 24 located between the first side opening 231 and the second side opening 232. As shown in FIG. 5, the intermediate support 24 may extend vertically from the bottom 15 to the cover 35. By providing the intermediate support tool 24, it is possible to prevent the side portion 20 from being deformed due to a decrease in the rigidity of the side portion 20 when the side portion opening 23 is in the open state. As the intermediate support 24, a support column containing aluminum, stainless steel, or the like can be used.

Next, the closing tool 30 will be described. The closing tool 30 is an element capable of taking a closed state in which the side opening 23 is closed and an open state in which the side opening 23 is opened. The closure 30 may include a door 31 capable of closing the side opening 23. The door 31 may be rotatable around a shaft 311 attached to the side portion 20, as shown in FIGS. 4 and 5. Although not shown, the shaft 311 of the door 31 may be attached to the bottom 15.

As shown in FIG. 4, a handle 312 may be provided on the outer surface of the door 31. Further, a fixture 313 may be provided on the inner surface of the door 31. Further, the side portion 20 may be provided with a fixture 241 to which the fixture 313 is fixed by interacting with the fixture 313. For example, one of the fixture 313 and the fixture 241 may be a magnetic material such as iron, and the other may be a magnet that attracts the magnetic material. As shown in FIG. 5, the fixture 241 may be attached to the intermediate support 24. The "inner surface" is a surface of the components of the case 10 that is located on the side where the frame 41 is housed. The "outer surface" is a surface located on the opposite side of the "inner surface".

In the example shown in FIG. 6, the frame 41 housed in the case 10 may be supported from below by a frame support 25 (not shown). In this case, the case 10 may include a retainer 28 that is located above the frame 41 and is fixed to the frame support 25. As a result, it is possible to prevent the frame 41 housed in the case 10 from being displaced in the vertical direction.

Next, the cover 35 will be described. The cover 35 may be a plate member located above the upper end 202 of the side portion 20 and extending in the horizontal direction. The cover 35 can prevent foreign matter from entering the inside of the case 10. As the material of the cover 35, aluminum, stainless steel or the like may be used.

Next, the frame support 25 will be described with reference to FIGS. 7 to 9. FIG. 7 is a plan view showing a state in which the frame 41 is taken out from the case 10 of FIG. FIG. 8 is a perspective view showing an example of the frame support 25. FIG. 9 is a cross-sectional view showing an example of the frame support 25.

The frame support 25 is a member that supports the frame 41 from below above the bottom 15. As shown in FIG. 7, the frame support 25 may be installed on the bottom 15 at a plurality of positions inside the case 10. At least one frame support 25 may be installed for each first side portion 21 or one second side portion 22. For example, two or more frame supports 25 may be installed on one first side portion 21, and two or more frame supports 25 may be installed on one second side portion 22. As shown in FIG. 7, the frame support 25 may not be installed at the position of the door 31.

As shown in FIGS. 8 and 9, the frame support 25 may include a frame base 26 and a support column 27. The frame base 26 is a member including a frame support surface 261 that supports the frame 41 from below. The frame base 26 may contain a resin. For example, the frame support surface 261 may be made of resin. As a result, it is possible to prevent damage caused by contact with the frame base 26 from occurring in the frame 41 as compared with the case where the frame support surface 261 is made of metal. As the resin constituting the frame support surface 261, polyvinyl chloride, silicone resin, or the like can be used. The portion of the frame base 26 other than the frame support surface 261 may contain a material other than resin. For example, the frame base 26 may include a main body containing a metal such as aluminum or stainless steel, and a resin sheet such as a silicone resin sheet located on the upper surface of the main body and forming the frame support surface 261. Since the resin sheet functions as a cushioning material, it is possible to prevent damage caused by contact with the frame base 26 from occurring in the frame 41.

As shown in FIG. 9, the frame base 26 may include an outer surface 263 facing the inner surface 203 of the side portion 20. The outer surface 263 may or may not be in contact with the inner surface 203.

Reference numeral L5 in FIG. 9 represents the distance from the outer surface 263 to the inner end of the frame support surface 261. The distance L5 is measured along the normal direction of the inner surface 203 of the side portion 20 to which the frame base 26 is attached. The distance L5 is determined according to the width of the frame 41. The distance L5 may be, for example, 60 mm or more, 100 mm or more, or 150 mm or more. The distance L5 may be, for example, 250 mm or less, 300 mm or less, or 400 mm or less. The range of the distance L5 may be defined by a first group consisting of 60 mm, 100 mm and 150 mm and / or a second group consisting of 250 mm, 300 mm and 400 mm. The range of the distance L5 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the distance L5 may be defined by any combination of any two of the values included in the first group described above. The range of the distance L5 may be defined by any combination of any two of the values included in the second group described above. For example, it may be 60 mm or more and 400 mm or less, 60 mm or more and 300 mm or less, 60 mm or more and 250 mm or less, 60 mm or more and 150 mm or less, 60 mm or more and 100 mm or less, 100 mm or more and 400 mm or less, 100 mm or more and 300 mm or less. , 100 mm or more and 250 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 400 mm or less, 150 mm or more and 300 mm or less, 150 mm or more and 250 mm or less, 250 mm or more and 400 mm or less, 250 mm or more and 300 mm or less. It may be 300 mm or more and 400 mm or less.

The support column 27 is a member that is located between the frame base 26 and the bottom portion 15 and contains metal. As the metal of the support column 27, aluminum, stainless steel, or the like can be used.

As shown in FIGS. 8 and 9, the frame base 26 may include a convex portion 262 that projects upward from the frame support surface 261 along the inner surface 203 of the side portion 20. The height of the convex portion 262 may be equal to or greater than the thickness of the frame 41. In this case, the above-mentioned pressing tool 28 may be attached to the upper surface of the convex portion 262 by a fastener 282 or the like.

Reference numeral L6 in FIG. 9 represents the width of the convex portion 262. The width L6 is the maximum value of the dimension of the convex portion 262 measured along the normal direction of the inner surface 203 of the side portion 20 to which the frame base 26 is attached. The width L6 may be, for example, 20 mm or more, 40 mm or more, or 70 mm or more. The width L6 may be, for example, 100 mm or less, 150 mm or less, or 200 mm or less. The range of width L6 may be defined by a first group consisting of 20 mm, 40 mm and 70 mm and / or a second group consisting of 100 mm, 150 mm and 200 mm. The range of the width L6 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the width L6 may be defined by any combination of any two of the values included in the first group described above. The range of the width L6 may be defined by any combination of two of the values included in the second group described above. For example, it may be 20 mm or more and 200 mm or less, 20 mm or more and 150 mm or less, 20 mm or more and 100 mm or less, 20 mm or more and 70 mm or less, 20 mm or more and 40 mm or less, 40 mm or more and 200 mm or less, 40 mm or more and 150 mm or less. , 40 mm or more and 100 mm or less, 40 mm or more and 70 mm or less, 70 mm or more and 200 mm or less, 70 mm or more and 150 mm or less, 70 mm or more and 100 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less. It may be 150 mm or more and 200 mm or less.

As shown in FIG. 9, the presser foot 28 may include an opposing region 281 that faces the frame supporting surface 261 of the frame base 26 in the vertical direction. The facing region 281 may overlap the frame 41 housed in the case 10 in a plan view.

The facing region 281 of the presser foot 28 may or may not be in contact with the frame 41. When the facing region 281 of the holding tool 28 is not in contact with the frame 41, the gap between the facing region 281 of the holding tool 28 and the frame 41 may be, for example, 1 mm or more, or 2 mm or more. It may be 3 mm or more, or 5 mm or more. Further, the gap may be, for example, 10 mm or less, 20 mm or less, 30 mm or less, or 50 mm or less. The range of the gap may be defined by a first group consisting of 1 mm, 2 mm, 3 mm and 5 mm and / or a second group consisting of 10 mm, 20 mm, 30 mm and 50 mm. The range of the gap may be determined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the gap may be defined by any combination of any two of the values included in the first group described above. The range of the gap may be defined by any combination of two of the values included in the second group described above. For example, it may be 1 mm or more and 50 mm or less, 1 mm or more and 30 mm or less, 1 mm or more and 20 mm or less, 1 mm or more and 10 mm or less, or 1 mm or more and 5 mm or less. It may be 1 mm or more and 3 mm or less, 1 mm or more and 2 mm or less, 2 mm or more and 50 mm or less, 2 mm or more and 30 mm or less, or 2 mm or more and 20 mm or less. It may be 2 mm or more and 10 mm or less, 2 mm or more and 5 mm or less, 2 mm or more and 3 mm or less, 3 mm or more and 50 mm or less, or 3 mm or more and 30 mm or less. It may be 3 mm or more and 20 mm or less, 3 mm or more and 10 mm or less, 3 mm or more and 5 mm or less, 5 mm or more and 50 mm or less, or 5 mm or more and 30 mm or less. It may be 5 mm or more and 20 mm or less, 5 mm or more and 10 mm or less, 10 mm or more and 50 mm or less, 10 mm or more and 30 mm or less, or 10 mm or more and 20 mm or less. It may be 20 mm or more and 50 mm or less, 20 mm or more and 30 mm or less, and 30 mm or more and 50 mm or less.

The presser foot 28 may contain a resin. For example, the lower surface of the facing region 281 of the presser foot 28 may be made of resin. As a result, it is possible to prevent damage caused by contact with the presser foot 28 from occurring in the frame 41 as compared with the case where the presser foot 28 is made of metal. As the resin of the presser foot 28, polyvinyl chloride, silicone resin, or the like can be used. The portion of the presser foot 28 other than the lower surface of the facing region 281 may contain a material other than resin. For example, the presser foot 28 may include a main body containing a metal such as aluminum or stainless steel, and a resin sheet such as a silicone resin sheet located on the lower surface of the main body and forming the lower surface of the presser foot 28. Since the resin sheet functions as a cushioning material, it is possible to prevent damage caused by contact with the presser foot 28 from occurring in the frame 41.

As shown in FIG. 9, the presser foot 28 may include an outer surface 283 facing the inner surface 203 of the side portion 20. The outer surface 283 may or may not be in contact with the inner surface 203.

Reference numeral L7 in FIG. 9 represents the distance from the outer surface 283 to the inner end of the lower surface of the presser foot 28. The distance L7 is larger than the width L6 of the convex portion 262. The distance L7 may be, for example, 30 mm or more, 50 mm or more, or 100 mm or more. The distance L7 may be, for example, 150 mm or less, 200 mm or less, or 250 mm or less. The range of the distance L7 may be defined by a first group consisting of 30 mm, 50 mm and 100 mm and / or a second group consisting of 150 mm, 200 mm and 250 mm. The range of the distance L7 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the distance L7 may be defined by any combination of any two of the values included in the first group described above. The range of the distance L7 may be defined by any combination of two of the values included in the second group described above. For example, it may be 30 mm or more and 250 mm or less, 30 mm or more and 200 mm or less, 30 mm or more and 150 mm or less, 30 mm or more and 100 mm or less, 30 mm or more and 50 mm or less, 50 mm or more and 250 mm or less, and 50 mm or more and 200 mm or less. , 50 mm or more and 150 mm or less, 50 mm or more and 100 mm or less, 100 mm or more and 250 mm or less, 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 250 mm or less, 150 mm or more and 200 mm or less. It may be 200 mm or more and 250 mm or less.

As shown in FIG. 9, the upper surface of the frame 41 is located on the second frame surface 41b side in the vertical direction and is located on the outer side in the horizontal direction with respect to the first frame surface 41a to which the mask 50 is fixed. It may contain 41c. In this case, the facing region 281 of the holding tool 28 may overlap with the third frame surface 41c of the frame 41 in a plan view. Further, the frame 41 may include an inner side surface 41d that is displaced outward as it goes from the first frame surface 41a side to the second frame surface 41b side. The “outside” is the side away from the center point of the opening 42 of the frame 41 in a plan view.

As shown in FIG. 9, the presser foot 28 includes an upper surface 284. The upper surface 284 is located on the opposite side of the lower surface of the holding tool 28 facing the frame 41 in the vertical direction D3. As shown in FIG. 9, the upper surface 284 may be located above the first frame surface 41a. As a result, it is possible to prevent the operator or the instrument from coming into contact with the frame 41 or the mask 50 fixed to the frame 41 when the operator or the instrument removes the holding tool 28. Although not shown, the upper surface 284 may be located on the same plane as the first frame surface 41a, or may be located below the first frame surface 41a.

Next, a method of taking out the frame 41 housed in the case 10 will be described with reference to FIGS. 10 to 15B. FIG. 10 is a cross-sectional view showing an example of the case 10 in which the frame 41 is housed. The case 10 in which the frame 41 is stored is also referred to as a frame storage body. 11 and 12 are a cross-sectional view and a plan view showing a state in which the cover 35 is removed from the case 10 of FIG. 10 and the door 31 is opened. 13 and 14 are a plan view and a cross-sectional view showing a step of inserting the fork 71 into the case 10 through the side opening 23 of the case 10. FIG. 15A is a cross-sectional view showing a step of lifting the frame 41 by the fork 71. The cross-sectional views of FIGS. 10, 11, 14, and 15A are cross-sectional views when the case 10 is cut at the position of line AA shown in FIG.

First, as shown in FIGS. 11 and 12, the cover 35 is removed from the upper end 202 of the side portion 20. Further, the closing tool 30 such as the door 31 is moved to open the side opening 23 of the side portion 20. If the case 10 includes a retainer 28, an operator or instrument removes the retainer 28.

Further, as shown in FIG. 12, the lifter 70 is prepared. The lifter 70 may include a fork 71, a fork frame 72, a frame 73, and a base 74. The fork 71 may be attached to the fork frame 72. The fork frame 72 can be driven in the vertical direction along the frame 73 by a drive mechanism (not shown). The base 74 may support the frame 73 from below. The base 74 may be supported from below by a moving mechanism such as a caster. Alternatively, although not shown, the base 74 may be supported from below by a member such as a support column that does not move along the floor surface 9.

As shown in FIG. 12, the second side portion 22 includes a first boundary surface 221 and a second boundary surface 222. The first boundary surface 221 defines the first end of the side opening 23 in the second direction D2. The second boundary surface 222 defines the second end of the side opening 23 in the second direction D2. Reference numeral L8 represents the distance in the second direction D2 from the first first side portion 21 to the first boundary surface 221. Reference numeral L9 represents the distance in the second direction D2 from the second first side portion 21 to the second boundary surface 222. The distances L8 and L9 may be set so that the fork 71 comes into contact with the second region 412 at a position some distance from the first region 411. As a result, the distances L10 and L11, which will be described later, can be increased.

The distances L8 and L9 may be, for example, 200 mm or more, 300 mm or more, or 500 mm or more. The distances L8 and L9 may be, for example, 700 mm or less, 1000 mm or less, or 1300 mm or less. The range of distances L8, L9 may be defined by a first group consisting of 200 mm, 300 mm and 500 mm and / or a second group consisting of 700 mm, 1000 mm and 1300 mm. The range of the distances L8 and L9 may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the distances L8 and L9 may be defined by any combination of any two of the values included in the first group described above. The range of the distances L8 and L9 may be defined by any combination of two of the values included in the second group described above. For example, it may be 200 mm or more and 1300 mm or less, 200 mm or more and 1000 mm or less, 200 mm or more and 700 mm or less, 200 mm or more and 500 mm or less, 200 mm or more and 300 mm or less, 300 mm or more and 1300 mm or less, or 300 mm or more and 1000 mm or less. , 300 mm or more and 700 mm or less, 300 mm or more and 500 mm or less, 500 mm or more and 1300 mm or less, 500 mm or more and 1000 mm or less, 500 mm or more and 700 mm or less, 700 mm or more and 1300 mm or less, 700 mm or more and 1000 mm or less. It may be 1000 mm or more and 1300 mm or less. The distance L8 may be the same as or different from the distance L9.

L8 / L4, L9 / L4, which is the ratio of the distances L8 and L9 to the dimension L4 of the second side portion 22, may be, for example, 0.1 or more, 0.15 or more, or 0.20 or more. L8 / L4 and L9 / L4 may be, for example, 0.25 or less, 0.30 or less, or 0.35 or less. The range of L8 / L4, L9 / L4 is defined by the first group consisting of 0.1, 0.15 and 0.20 and / or the second group consisting of 0.25, 0.30 and 0.35. May be done. The range of L8 / L4, L9 / L4 is defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. May be good. The range of L8 / L4, L9 / L4 may be defined by any combination of two of the values included in the first group described above. The range of L8 / L4, L9 / L4 may be defined by any combination of two of the values included in the second group described above. For example, it may be 0.1 or more and 0.35 or less, 0.1 or more and 0.30 or less, 0.1 or more and 0.25 or less, 0.1 or more and 0.20 or less, and 0.1 or more. It may be 0.15 or less, 0.15 or more and 0.35 or less, 0.15 or more and 0.30 or less, 0.15 or more and 0.25 or less, and 0.15 or more and 0.25 or less. , 0.20 or more and 0.35 or less, 0.20 or more and 0.30 or less, 0.20 or more and 0.25 or less, 0.25 or more and 0.35 or less, 0.25 or more and 0 It may be .30 or less, and may be 0.30 or more and 0.35 or less.

Subsequently, as shown in FIGS. 13 and 14, an insertion step of inserting the fork 71 between the lower surface of the frame 41 and the bottom 15 of the case 10 along the first direction D1 is performed through the side opening 23. do. For example, one of the two forks 71 is inserted into the first side opening 231 and the other is inserted into the second side opening 232. In the present embodiment, since the frame 41 is supported above the bottom 15 by the frame support 25 described above, the fork 71 can be inserted as shown in FIG.

As shown in FIG. 14, the maximum distance H2 of the base 74 or casters 75 from the floor surface 9 may be smaller than the distance H1 from the floor surface 9 to the bottom 15. As a result, the base 74 and casters 75 of the lifter 70 can be inserted between the surface 9 of the floor and the bottom 15 of the case 10.

Subsequently, as shown in FIG. 15A, an ascending step of raising the fork 71 and lifting the frame 41 supported by the frame support 25 by the fork 71 is performed. For example, as shown in FIG. 15A, the fork 71 is raised to a position above the upper end 202 of the side portion 20 of the case 10. In this way, the frame 41 can be taken out from the case 10.

FIG. 15B is a cross-sectional view showing the frame 41 being lifted by the fork 71. FIG. 15B is a cross-sectional view of the case 10 when the case 10 is cut at the position of line BB shown in FIG. The frame 41 includes an opening 42. The weight of the frame 41 including the opening 42 is smaller than that in the case where the frame 41 does not include the opening 42. Therefore, when the frame 41 is lifted by the fork 71 in a state where the frame 41 is parallel to the horizontal direction, the frame 41 is less likely to bend. If a member such as a glass plate that does not include an opening is lifted by the fork 71, it is expected that a large amount of bending will occur.

Reference numerals L10 and L11 in FIG. 15B represent the dimensions of the portion of the frame 41 located outside the fork 71. By increasing the distances L8 and L9 described above, the dimensions L10 and L11 can be increased. This facilitates the work of the fork 71 placing the frame 41 on a table such as a stage.

After that, the frame 41 may be carried into the mounting device for mounting the mask 50 on the frame 41. For example, a fork 71 may be used to place the frame 41 on a stage inside the mounting device. In the mounting device, the mask 50 may be mounted on the frame 41 so that the mask 50 including the through hole 56 is supported by the frame 41 in a state of being pulled in the surface direction of the mask 50. In this way, the mask device 40 including the frame 41 and the mask 50 can be obtained.

After the mask 50 is attached to the frame 41 to produce the mask device 40, the mask device 40 may be housed in the case 10. 16 and 17A are a plan view and a cross-sectional view showing the case 10 in which the mask device 40 is housed and the cover 35 is removed. As shown in FIG. 17A, the upper surface 284 of the presser foot 28 may be located below the first surface 55a of the mask 50.

FIG. 17B is a cross-sectional view showing another example of the case 10 with the cover 35 removed. As shown in FIG. 17B, the upper surface 284 of the presser foot 28 may be located above the first surface 55a of the mask 50.

In the storage method for storing the mask device 40 or the frame 41 in the case 10, a procedure opposite to the above-mentioned removal method may be performed.

For example, first, an insertion step of inserting the frame 41 and the fork 71 supporting the frame 41 from below into the inside of the case 10 through the side opening 23 in the open state is performed. Subsequently, the fork 71 is lowered to carry out a lowering step of placing the frame 41 on the frame support surface 261 of the frame support tool 25. After that, the fork 71 is pulled out from the case 10. Further, the door 31 is moved to close the side opening 23. Further, the cover 35 is put on the upper end 202 of the side portion 20. In this way, the case 10 in which the frame 41 or the mask device 40 is housed can be obtained.

Further, as a method of taking out the mask device 40 housed in the case 10, the above-mentioned taking-out method may be used.

According to this embodiment, the frame 41 or the mask device 40 can be taken out from the case 10 by using a machine such as a lifter 70. Therefore, the stability of the taking-out process can be improved as compared with the case where a person lifts the frame 41 or the mask device 40 and takes out the frame 41 or the mask device 40 from the case 10. As a result, it is possible to prevent damage such as deformation of the frame 41 and the mask device 40 from occurring.

It is possible to make various changes to the above-described embodiment. Hereinafter, other embodiments will be described with reference to the drawings as necessary. In the following description and the drawings used in the following description, the same reference numerals as those used for the corresponding portions in the above-described embodiment shall be used for the portions that can be configured in the same manner as in the above-described embodiment. Duplicate explanations will be omitted. Further, when it is clear that the action and effect obtained in one embodiment described above can be obtained in other embodiments, the description thereof may be omitted.

In the above-described embodiment, an example is shown in which the side opening 23 is formed in the second side portion 22 of the side portion 20 of the case 10, which is longer than the first side portion 21. However, the present invention is not limited to this, and as shown in FIG. 18, a side opening 23 is formed in the first side portion 21 which is shorter than the second side portion 22, and a closing tool such as a door 31 is formed in the side opening 23. 30 may be provided.

In the above embodiment, an example is shown in which the door 31 is rotatable around the shaft 311. However, the form of the door 31 is not particularly limited. For example, as shown in FIG. 19, the door 31 may be configured to slide along the second direction D2.

In the example shown in FIG. 19, the dimension of the case 10 in the first direction D1 is larger than that of the example shown in FIG. 6 by the thickness of the door 31. From the viewpoint of miniaturization of the case 10, the case 10 shown in FIG. 6 is more advantageous than the case shown in FIG.

In the above-described embodiment, an example is shown in which the closing tool 30 provided in the side opening 23 includes a door 31 that is rotatable around a shaft 311 attached to the side 20 or the bottom 15. That is, an example is shown in which the closing tool 30 is attached to the side portion 20 or the bottom portion 15 in both the closed state and the open state. However, the closure is not limited to this, and the closure 30 may include a closure member 32 that is separable from the side portion 20, as shown in FIG. That is, the closing tool 30 may be an element separated from the side portion 20 in the open state. The closing member 32 is, for example, a plate. When the closing tool 30 is a member separated from the side portion 20 in the open state, the closing tool 30 may be a member integrated with the cover 35 or a member separate from the cover 35.

FIG. 21 is a plan view showing an example of the case 10 in a state where the cover 35 is removed and the frame 41 is not housed. As shown in FIG. 21, the bottom 15 may include a guide 18 that guides the fork 71 inserted through the side opening 23. As a result, it is possible to prevent the insertion direction of the fork 71 from deviating from the first direction D1 or the second direction D2.

The guide 18 may include, for example, a guide protrusion 181 projecting upward from the bottom 15. In this case, the space between the guide protrusions 181 may be an introduction path for guiding the fork 71. The width of the introduction path is determined by the distance W between the guide protrusions 181 in the direction orthogonal to the insertion direction of the fork 71.

The distance W may be, for example, 100 mm or more, 150 mm or more, 200 mm or more, or 250 mm or more. Further, the distance W may be, for example, 300 mm or less, 350 mm or less, 400 mm or less, or 450 mm or less. The range of the distance W may be defined by a first group consisting of 100 mm, 150 mm, 200 mm and 250 mm and / or a second group consisting of 300 mm, 350 mm, 400 mm and 450 mm. The range of the distance W may be defined by a combination of any one of the values included in the first group described above and any one of the values included in the second group described above. The range of the distance W may be defined by any combination of any two of the values included in the first group described above. The range of the distance W may be defined by any combination of two of the values included in the second group described above. For example, it may be 100 mm or more and 450 mm or less, 100 mm or more and 400 mm or less, 100 mm or more and 350 mm or less, 100 mm or more and 300 mm or less, or 100 mm or more and 250 mm or less. It may be 100 mm or more and 200 mm or less, 100 mm or more and 150 mm or less, 150 mm or more and 450 mm or less, 150 mm or more and 400 mm or less, or 150 mm or more and 350 mm or less. It may be 150 mm or more and 300 mm or less, 150 mm or more and 250 mm or less, 150 mm or more and 200 mm or less, 200 mm or more and 450 mm or less, or 200 mm or more and 400 mm or less. It may be 200 mm or more and 350 mm or less, 200 mm or more and 300 mm or less, 200 mm or more and 250 mm or less, 250 mm or more and 450 mm or less, or 250 mm or more and 400 mm or less. It may be 250 mm or more and 350 mm or less, 250 mm or more and 300 mm or less, 300 mm or more and 450 mm or less, 300 mm or more and 400 mm or less, or 300 mm or more and 350 mm or less. It may be 350 mm or more and 450 mm or less, 350 mm or more and 400 mm or less, or 400 mm or more and 450 mm or less.

FIG. 22 is a plan view showing an example of the lifter 70. The lifter 70 may include a receiver 76 located on the fork 71. When the lifter 70 lifts the frame 41, the receiver 76 is located between the frame 41 and the fork 71.

The receiver 76 may contain a resin. As a result, it is possible to prevent damage caused by contact with the lifter 70 from occurring in the frame 41. As the resin constituting the receiver 76, polyvinyl chloride, silicone resin, or the like can be used.

FIG. 23 is a cross-sectional view of the fork 71 and the receiver 76 of FIG. 22 along the line CC. The receiver 76 may include a first portion 761, a second portion 762 and a third portion 763. The first portion 761 supports the frame 41 from below. The second portion 762 and the third portion 763 may protrude upward from the first portion 761. The frame 41 may be located between the second portion 762 and the third portion 763 in the horizontal direction. The second portion 762 and the third portion 763 can suppress the movement of the frame 41 in the horizontal direction.

Claims (19)

A case for storing the frame
At the bottom
A side portion including a lower end located on the bottom side and an upper end located on the side opposite to the lower end, and a side opening forming a side opening reaching the upper end.
A closing tool capable of taking a closed state in which the side opening is closed and an open state in which the side opening is opened,
A frame support including a frame support surface that supports the frame above the bottom,
A case comprising a cover located above the upper end of the side portion. The case according to claim 1, further comprising a bottom support that supports the bottom from below. The case according to claim 2, wherein the bottom support includes casters. The case according to any one of claims 1 to 3, wherein the closure includes a door that is rotatable around an axis attached to the side or bottom. The case according to any one of claims 1 to 3, wherein the closing tool includes a closing member that can be separated from the side portion. The case according to any one of claims 1 to 5, wherein the frame support includes a resin and includes a frame base constituting the frame support surface. The case according to claim 6, wherein the frame support is located between the frame base and the bottom and includes a support column containing metal. The frame base includes a convex portion that projects upward from the frame support surface along the inner surface of the side portion.
6. The case described. The case according to any one of claims 1 to 8, wherein the bottom portion includes a guide for guiding a fork inserted through the side opening. The case according to claim 9, wherein the guide includes a guide protrusion protruding upward from the bottom. The side opening includes a first side opening and a second side opening.
One of claims 1 to 10, wherein the side portion is located between the first side opening and the second side opening and includes an intermediate support extending vertically from the bottom to the cover. The case described in. The side portion includes a pair of first side portions and a pair of second side portions.
The dimension of the first side portion is 1200 mm or more.
The case according to any one of claims 1 to 11, wherein the dimension of the second side portion is 1800 mm or more. The side opening is formed on the second side.
The ratio of the distance from the first side portion to the side opening is 0.1 or more with respect to the dimension of the second side portion.
The case according to claim 12, wherein the ratio of the distance from the first side portion to the side opening is 0.1 or more with respect to the dimension of the second side portion. A method of taking out a frame housed in the case according to any one of claims 1 to 13.
A step of inserting a fork between the lower surface of the frame and the bottom of the case through the side opening in the open state.
An extraction method comprising a step of raising the fork and lifting the frame supported by the frame support by the fork. The extraction method according to claim 14, wherein a mask including a through hole is supported in the frame in a pulled state. A storage method for storing the frame in the case according to any one of claims 1 to 13.
A step of inserting the frame and a fork supporting the frame from below into the inside of the case through the side opening in the open state.
A storage method comprising a step of lowering the fork and placing the frame on the frame support surface of the frame support. The storage method according to claim 16, wherein a mask including a through hole is supported in the frame in a pulled state. The case according to any one of claims 1 to 13 and
A frame storage body comprising a frame supported by the frame support of the case. The frame accommodating body according to claim 18, wherein a mask including a through hole is supported in the frame in a pulled state.

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