TWI475736B - Manufacturing method of electroluminescent display apparatus and plating machine - Google Patents

Description

Electroluminescent display device manufacturing method and coating machine

The present invention relates to a display device, and more particularly to a method of fabricating an electroluminescent display device and a coating machine.

The Organic Light Emittine Diode (OLED) has excellent characteristics such as simple structure, no need for external backlight, high resolution, good pixel independent color performance, and short reaction time. It has been widely used in flat panel displays. Full color process technology.

The method for fabricating an organic light-emitting diode display device is to deposit an organic light-emitting material on a glass substrate by using a shadow mask and a pixel alignment technique to form a patterned organic light-emitting layer, wherein the shadow mask is composed of a shadow mask. A metal film and a frame connected to the peripheral region of the metal film are formed. The frame is used to fix the metal film and apply tension to the metal film to maintain the flatness of the metal film.

In recent years, as the production technology of glass substrates has progressed, the size of glass substrates has been increasing, and therefore, it has been required to use a large-sized shadow mask. However, the increase in the size of the shadow mask can cause problems, such as an increase in the size of the frame, which leads to an increase in weight and an easy deformation. Therefore, the handling of personnel and the design of the machine during the storage, handling, and manufacturing process add a lot of difficulty. As a result, the manufacturing cost is increased; the size of the metal film is limited by the supplier, so that it is difficult to obtain a large-sized metal film; and as the size of the metal film increases, the tool for processing the metal film must also be enlarged, so that the manufacturing cost A substantial increase.

An embodiment of the present invention provides a method for fabricating an electroluminescent display device, including providing a substrate having a first side and a second side opposite to each other; and arranging a magnetic element on the first side of the substrate; a shadow mask unit; the shadow mask unit is aligned with the second side of the substrate; the magnetic element applies a magnetic force to each of the shadow mask units that have been aligned, so that the shadow mask units that have been aligned are pasted The second side of the substrate, wherein the shadow mask unit of the substrate is formed with a shadow mask, the shadow mask has an opening pattern exposing the substrate; and a deposition process is performed on the second side of the substrate to shield the shadow A patterned electroluminescent layer is deposited in the opening pattern; and the shadow mask is removed.

An embodiment of the present invention provides a coating machine for forming a patterned electroluminescent layer on a substrate, the coating machine includes a coating cavity, and a magnetic chuck disposed in the coating cavity and adapted to fix the substrate And a plurality of shadow mask units fixedly disposed on the substrate by magnetic force, the shadow mask unit forms a shadow mask, and the shadow mask has an opening pattern exposing the substrate; and a coating source is located in the coating cavity. And suitable for plating an electroluminescent material into the opening pattern.

The manner of making and using the embodiments of the present invention will be described in detail below. It should be noted, however, that the present invention provides many inventive concepts that can be applied in various specific forms. The specific embodiments discussed herein are merely illustrative of specific ways of making and using the invention, and are not intended to limit the scope of the invention. Moreover, repeated numbers or labels may be used in different embodiments. These repetitions are merely for the purpose of simplicity and clarity of the invention and are not to be construed as a limitation of the various embodiments and/or structures discussed. Furthermore, when a first material layer is referred to or on a second material layer, the first material layer is in direct contact with or separated from the second material layer by one or more other material layers. In the drawings, the shape or thickness of the embodiment may be expanded to simplify or facilitate the marking. Furthermore, elements not shown or described in the figures are in the form known to those of ordinary skill in the art.

1A to 1D are cross-sectional views showing processes of an electroluminescence display device according to an embodiment of the present invention. 2A to 2D are lower views of the substrate of FIGS. 1A to 1D, and FIGS. 1A to 1D are cross-sectional views taken along line II' of FIGS. 2A to 2D. . 3A and 3B are top views of the substrate and the electromagnet of FIGS. 1A to 1B.

In this embodiment, a plurality of small-sized shadow mask units are used instead of the conventional large shadow masks as vapor deposition masks. In detail, in this embodiment, the shadow mask units of the small pieces are paired and magnetically It is adsorbed (or bonded) on a substrate to constitute an evaporation mask.

Referring to FIG. 1A, FIG. 2A and FIG. 3A, a substrate 110 is provided. The substrate 110 has a first side 112 and a second side 114. The substrate 110 can have a plurality of fixed areas F1 and F2. F3, F4, F5, F6, F7, F8.

Next, referring to FIGS. 1A and 3A, a magnetic element 120 is disposed on the first side 112 of the substrate 110. The magnetic element 120 is, for example, an electromagnet element. In an embodiment, the magnetic element 120 includes a plurality of electromagnets E1, E2, E3, E4, E5, E6, E7, E8 separated from each other, and the electromagnets E1, E2, E3, E4, E5, E6, E7, E8 is located in the fixed areas F1, F2, F3, F4, F5, F6, F7, and F8, respectively.

Referring to FIG. 1A, a plurality of shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 are provided, wherein the shadow mask units S5, S6, S7, S8 are only shown in FIG. 2C. The shadow mask units S1, S2, S3, S4, S5, S6, S7, and S8 are, for example, metal thin films or other thin films suitable for magnetic adsorption. In detail, the shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 may be first disposed on a carrier 130, and the carrier 130 together with the shadow mask unit S1 thereon. S2, S3, S4, S5, S6, S7, and S8 are moved below the substrate 110. The carrier 130 can be a frame for supporting the shadow mask units S1, S2, S3, S4, S5, S6, S7, S8.

Thereafter, referring to FIG. 1A, FIG. 2A and FIG. 3A simultaneously, the shadow mask unit S1 is aligned with the second side 114 of the substrate 110 such that the shadow mask unit S1 is aligned with the fixed area F1. Then, the electromagnet E1 is made to have a magnetic force (for example, energizing the electromagnet E1) to attract the shadow mask unit S1 into the fixed area F1 of the substrate 110 and to conform to the second side 114 of the substrate 110. It should be noted that the electromagnets in Figures 1A to 1D and 3A and 3B represent the energized electromagnets (with magnetic properties) with squares filled with diagonal lines and unpowered with blank squares. Electromagnet (no magnetic).

Next, referring to FIG. 1B, the shadow mask unit S2 is aligned with the second side 114 of the substrate 110 to align the shadow mask unit S2 with the fixed area F2. Then, referring to FIG. 1B, FIG. 2B and FIG. 3B simultaneously, the electromagnet, E2 has a magnetic force to attract the shadow mask unit S2 into the fixed area F2 of the substrate 110 and to adhere to the second of the substrate 110. Side 114.

Thereafter, referring to FIG. 1C and FIG. 2C simultaneously, the shadow mask units S3, S4, S5, S6, S7, and S8 are respectively attracted to the fixed areas F3, F4, F5, F6, and F7 of the substrate 110 in the same manner. In F8, the second side 114 of the substrate 110 is bonded. At this time, the shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 of the bonding substrate 110 constitute a shadow mask S having an opening pattern OP exposing the substrate 110.

Then, a deposition process (for example, an evaporation process) is performed on the second side 114 of the substrate 110 to deposit a patterned electroluminescent layer 140 (shown in FIG. 1D) in the opening pattern OP of the shadow mask S.

After that, please refer to the 1D image and the 2D image at the same time, and remove the shadow mask S. For example, the magnetic force of the electromagnets E1, E2, E3, E4, E5, E6, E7, E8 disappears, that is, The electromagnets E1, E2, E3, E4, E5, E6, E7, and E8 are not energized. When the magnetic forces of the electromagnets E1, E2, E3, E4, E5, E6, E7, E8 disappear, the shadow mask S is returned by gravity to the carrier 130 located below the substrate 110.

It should be noted that, since the present embodiment uses a plurality of small-sized shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 to replace the conventional large shadow mask as a vapor deposition mask, It is only necessary to put the shadow mask units of these small pieces in a pair and magnetically adsorb (or fit) them on the substrate 110 to form an evaporation mask without using a conventional large frame and large metal. film.

In detail, since the shadow mask unit of the embodiment has a small size, it is easy to maintain the flatness of the shadow mask unit, so that it can be directly aligned with the substrate and affixed to the substrate without using a frame, or only It is necessary to use a frame having a small size and a low strength, and it is not necessary to use a large-sized frame having a large size and high strength because a large metal film is liable to be difficult to maintain flatness as in the prior art.

Since this embodiment does not require the use of a conventional large frame and a large metal film, the process of the present embodiment is relatively easy, the metal film raw material is easy to obtain, and the manufacturing cost is low.

In addition, the coating process of the embodiment may be performed in a coating machine P (as shown in FIG. 1A), and the coating machine P is adapted to form a patterned electroluminescent layer 140 on the substrate 110, and the coating machine P includes a plating chamber P1, a magnetic chuck P2, a coating source P3, and a holding structure P4. The holding structure P4 and the magnetic chuck P2 are located in the coating cavity P1, and the magnetic chuck P2 is fixed on the holding structure P4, and the magnetic chuck P2 is adapted to fix the substrate 110 and the shadow mask unit S1 fixed on the substrate 110 by magnetic force. , S2, S3, S4, S5, S6, S7, S8. The coating source P3 is located in the plating chamber P1 and is adapted to plate an electroluminescent material into the opening pattern OP.

In detail, the magnetic chuck P2 includes electromagnets E1, E2, E3, E4, E5, E6, E7, E8 (or permanent magnets) and a fixing device P21 suitable for fixing an electromagnet or a permanent magnet (hereinafter will be detailed) The structure of the fixing device P21 and the process of mounting the magnetic chuck P2 on the holding structure P4).

When the magnetic chuck P2 includes an electromagnet, the magnetic chuck P2 can control the electromagnets E1, E2, E3, E4, E5 by controlling the currents of the input electromagnets E1, E2, E3, E4, E5, E6, E7, E8, The magnetic force of E6, E7 and E8. The magnetic chuck P2 can eliminate its magnetic force by causing the electromagnet to be de-energized to remove the corresponding shadow mask unit. Alternatively, when the magnetic chuck P2 includes a permanent magnet, the shadow mask unit on the substrate 110 can be removed by separating the magnetic chuck P2 from the substrate 110.

Further, although FIG. 1C shows a horizontal vapor deposition process (the substrate 110 is disposed in the horizontal direction), in other embodiments, a rotation mechanism may be added to the plating chamber P1 to arrange the substrate 110 in the vertical direction. Then, a vertical evaporation process is performed.

It should be noted that, in this embodiment, eight electromagnets E1, E2, E3, E4, E5, E6, E7, E8, and eight shadow mask units S1, S2, S3, S4, S5, S6, and S7 are used. S8, eight fixed areas F1, F2, F3, F4, F5, F6, F7, F8 are taken as an example, but are not intended to limit the present invention, that is to say, in other embodiments, the electromagnetic field may be increased or decreased as appropriate. The number and arrangement of iron, shadow mask units and fixed areas.

11A and 11B are flow charts showing the fabrication of a fixing device according to an embodiment of the present invention. It should be noted that the electromagnets E5, E6, E7, and E8 are not shown in FIGS. 11A and 11B. Referring to FIG. 1 and FIG. 11A, the fixing device P21 includes an upper cover P21a and a lower cover P21b, wherein the lower cover P21b has an accommodating space A, which is adapted to receive the electromagnets E1, E2, E3, E4, E5, E6, E7, E8 (or permanent magnet).

Referring to FIG. 1 and FIG. 11B, the electromagnets E1, E2, E3, E4, E5, E6, E7, and E8 are placed in the accommodating space A, and the upper cover P21a is disposed on the lower cover P21b to seal the contents. Set space A. Then, the upper cover P21a can be selectively locked to the lower cover P21b by using a plurality of screws B to fix the electromagnets E1, E2, E3, E4, E5, E6, E7, E8 in the accommodating space A, and constitute Magnetic chuck P2. It should be noted that the upper cover P21a and the lower cover P21b may also be selectively joined in other manners, so the first figure does not show the screw B.

12A and 12B are elevational views showing a process of mounting a magnetic chuck on a holding structure according to an embodiment of the present invention. 13A and 13B are side views of the 12A and 12B drawings. It should be noted that, in order to simplify the description, the magnetic chuck P2 is only schematically illustrated in FIGS. 12A, 12B, 13A and 13B, and the detailed structure thereof is not shown.

Referring to FIGS. 12A and 13A, a portion of the lower surface P41 of the holding structure P4 (of the holding structure P4) opposite to the two outer edges P42, 43 is provided with a plurality of L-shaped holding members P44, and the holding structures P4 and L are disposed. There is a groove R between the retainers P44. Thereafter, referring to FIGS. 12B and 13B, the magnetic chuck P2 is inserted into the recess R to fix the magnetic chuck P2 to the holding structure P4 by the L-shaped holder P44.

4A to 4D are cross-sectional views showing processes of an electroluminescent display device according to an embodiment of the present invention. 5A to 5D are lower views of the substrate of FIGS. 4A to 4D, and FIGS. 4A to 4D are cross-sectional views taken along line I-I' of FIGS. 5A to 5D. .

This embodiment is similar to the foregoing embodiments of FIGS. 1A to 1D. The main difference between the two is that the present embodiment uses a mechanical arm to align the shadow mask unit with the substrate.

It is to be noted that the elements of the present embodiment are similar to the elements of FIGS. 1A to 1D, and therefore, the elements of the present embodiment have the same reference numerals as those of the first to third figures, representing both. The materials and structures are similar and will not be described here.

Please refer to FIG. 4A and FIG. 5A simultaneously to provide a substrate 110. Next, a magnetic element 410 is disposed on the first side 112 of the substrate 110, and the magnetic element 410 is, for example, a permanent magnet element. In an embodiment, the magnetic element 410 can be a plurality of permanent magnets 412 separated from each other, and the permanent magnets 412 can be respectively located in the fixed areas F1, F2, F3, F4, F5, F6, F7, F8 of the substrate 110 ( The arrangement is similar to that of the electromagnets E1, E2, E3, E4, E5, E6, E7, and E8 in Fig. 3A).

In another embodiment, the magnetic element 410 can be a continuous layer of permanent magnets that can cover the fixed areas F1, F2, F3, F4, F5, F6, F7, F8 of the first side 112. In an embodiment, the magnetic element 410 can be an electromagnet element.

Next, a shadow mask unit S1 is placed on a robot arm 420, and the shadow mask unit S1 is aligned with the second side 114 of the substrate 110 by the robot arm 420 to align the shadow mask unit S1 with the fixed area. F1. Thereafter, the shadow mask unit S1 is attracted to the fixed area F1 of the substrate 110 by the magnetic force of the magnetic element 410, and is bonded to the second side 114 of the substrate 110.

Then, referring to FIG. 4B and FIG. 5B simultaneously, a shadow mask unit S2 is placed on the robot arm 420, and the shadow mask unit S2 is aligned with the second side 114 of the substrate 110 by the robot arm 420. In order to align the shadow mask unit S2 with the fixed area F2. Thereafter, the shadow mask unit S2 is attracted to the fixed area F2 of the substrate 110 by the magnetic force of the magnetic member 410, and is bonded to the second side 114 of the substrate 110.

Thereafter, referring to FIG. 4C and FIG. 5C simultaneously, the shadow mask units S3, S4, S5, S6, S7, and S8 are respectively attached to the fixed areas F3, F4, F5, and F6 of the substrate 110, in the same manner. F7, F8. At this time, the shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 of the bonding substrate 110 constitute a shadow mask S having an opening pattern OP exposing the substrate 110.

Then, a deposition process (for example, an evaporation process) is performed on the second side 114 of the substrate 110 by using a plating source P3 to deposit a patterned electroluminescent layer 140 in the opening pattern OP of the shadow mask S (eg, 4D). Figure shows).

Thereafter, please refer to FIGS. 4D and 5D simultaneously, and remove the shadow mask S so that the shadow mask S falls onto the robot arm 420 below the substrate 110. When the magnetic element 410 is a permanent magnet, the method of removing the shadow mask S may be to remove the magnetic element 410 from the substrate 110. In addition, when the magnetic element 410 is an electromagnet, the method of removing the shadow mask S may be to make the magnetic force of the magnetic element 410 disappear.

6A to 6F are cross-sectional views showing processes of an electroluminescence display device according to an embodiment of the present invention. 7A to 7C are top views of the substrate of FIGS. 6A to 6C, and FIGS. 7D to 7F are lower views of the substrate of FIGS. 6D to 6F, and FIG. 6A to FIG. The 6F diagram shows a cross-sectional view along line I-I' in the 7A to 7F drawings.

This embodiment is similar to the foregoing embodiments of FIGS. 4A to 4D. The main difference between the two is that the present embodiment uses a robotic arm to assemble a plurality of shadow mask units on the substrate outside the evaporation chamber to form a A combination of a substrate, a shadow mask unit, and a magnetic element, and the assembly is moved into the vapor deposition chamber by a robot arm, and the assembly is removed from the evaporation chamber by a robot arm after the vapor deposition process is completed.

It is to be noted that the elements of the present embodiment are similar to the elements of FIGS. 1A to 1D and FIGS. 4A to 4D, and therefore, the labels of the elements in the present embodiment and FIGS. 1A to 1D and The components of FIGS. 4A to 4D are the same, and the materials and structures of the two are similar, and will not be described herein.

Referring to FIG. 6A and FIG. 7A simultaneously, a substrate 110 is provided outside the evaporation chamber, and a shadow mask unit S1 is placed on a robot arm 610 to shield the shadow mask unit S1 by the robot arm 610. After being moved over the substrate 110 and aligned with the fixed area F1 of the second side 114, it is placed in the fixed area F1 of the second side 114.

Next, please refer to FIG. 6B and FIG. 7B simultaneously, and place a shadow mask unit S2 on the robot arm 610 to move the shadow mask unit S2 to the upper side of the substrate 110 and the second side 114 by the robot arm 610. After the fixed area F2 is aligned, it is placed in the fixed area F2 of the second side 114.

Then, referring to FIG. 6C and FIG. 7C at the same time, the shadow mask units S3, S4, S5, S6, S7, and S8 are respectively placed in the fixed areas F3, F4, F5, F6, and F7 of the substrate 110 in the same manner. , F8. Then, the magnetic element 620 is disposed on the first side 112 of the substrate 110 such that the shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 disposed on the second side 114 are bonded to the substrate 110. .

At this time, the shadow mask units S1, S2, S3, S4, S5, S6, S7, S8 of the bonding substrate 110 constitute a shadow mask S having an opening pattern OP exposing the substrate 110, and The substrate 110, the magnetic element 620, and the shadow mask S constitute an assembly 630.

Thereafter, referring to FIG. 6D and FIG. 7D simultaneously, flipping the assembly 630 to face the shadow mask S downward, and placing the assembly 630 on the robot arm 610 to move the assembly 630 by the robot arm 610 to The chamber 642 is vapor-deposited (as shown in Fig. 6E).

Next, referring to FIG. 6E and FIG. 7E, the second side 114 of the substrate 110 is vapor-deposited by an evaporation source 644 in the evaporation chamber 642 to be steamed in the opening pattern OP of the shadow mask S. A patterned electroluminescent layer 140 is plated (as shown in Figure 6F).

Thereafter, referring to FIG. 6F and FIG. 7F, the assembly 630 and the patterned electroluminescent layer 140 plated thereon are placed on the robot arm 610 to move the assembly 630 to the steam by the robot arm 610. The plating chamber 642 is outside.

Then, the shadow mask S is removed, and the 7F is a bottom view of the substrate 110 after the shadow mask S is removed. In an embodiment, the magnetic element 620 can be a permanent magnet element, and the method of removing the shadow mask S can be to remove the permanent magnet element from the substrate 110.

In addition, although the foregoing embodiments all use a magnetic force to fix the shadow mask unit, the present invention is not limited thereto. In other embodiments, the shadow mask unit may also be fixed by a clamp.

Figure 8 is a top plan view of a plurality of shadow mask units in accordance with an embodiment of the present invention. In one embodiment, as shown in FIG. 8, a plurality of shadow mask units 810 are disposed on a substrate 110. The unit opening pattern 812 of each of the shadow mask units 810 corresponds to a pattern of an electroluminescent layer of an electroluminescent display device (for example, a small-sized display panel). That is, a shadow mask unit 810 can be utilized to define a pattern of electroluminescent layers of an electroluminescent display device. Therefore, the patterns of the electroluminescent layers of the plurality of electroluminescent display devices can be simultaneously defined on the substrate 110 by using the plurality of shadow mask units 810 disposed on the substrate 110.

Figure 9 is a top plan view of a plurality of shadow mask units in accordance with an embodiment of the present invention. In one embodiment, as shown in FIG. 9, a plurality of shadow mask units 910 are disposed on a substrate 110. The unit opening pattern 912 of each of the shadow mask units 910 corresponds to a pattern of a portion of the electroluminescent layer of an electroluminescent display device (eg, a large-sized display panel). Therefore, the cell opening patterns 912 of the shadow mask units 910 can be arranged to form a pattern of all of the electroluminescent layers on the electroluminescent display device. In this way, the shadow mask unit 910 can be used to define a pattern of all electroluminescent layers on a single electroluminescent display device on the substrate 110.

FIG. 10A is a top view of a shadow mask unit according to an embodiment of the present invention. Figure 10B is a cross-sectional view of the shadow mask unit of Figure 10A taken along line I-I'. In an embodiment, as shown in FIGS. 10A and 10B, the shadow mask unit 1010 has a metal film 1012 and a unit frame 1014, wherein the metal film 1012 has a unit opening pattern 1012a, and the unit frame 1014 is located in the metal. The peripheral region 1012b of the film 1012.

The unit frame 1014 is joined to the metal film 1012, for example, by soldering or gluing, and the unit frame 1014 is used to provide tension of the metal film 1012 to maintain the flatness of the metal film 1012. The thickness T1 of the unit frame 1014 is, for example, 0.2 mm to 1 mm. The thickness T2 of the metal thin film 1012 is, for example, 0.03 mm to 0.05 mm. The thickness T1 of the unit frame 1014 is, for example, 6 to 20 times the thickness T2 of the metal thin film 1012. The material of the unit frame 1014 is, for example, metal.

In summary, the present invention replaces a conventional large shadow mask with a plurality of small-sized shadow mask units as an evaporation mask, so that the shadow mask units of the small pieces need only be paired and magnetically It can be adsorbed on a substrate to form an evaporation mask without using a conventional large frame and a large metal film. In this way, the process of the present invention is relatively easy, the metal film raw material is easy to obtain, and the manufacturing cost is low.

The present invention has been disclosed in the above preferred embodiments, and is not intended to limit the scope of the present invention. Any one of ordinary skill in the art can make a few changes without departing from the spirit and scope of the invention. The scope of protection of the present invention is therefore defined by the scope of the appended claims.

110. . . Substrate

112. . . First side

114. . . Second side

120, 410, 620. . . Magnetic component

130. . . vehicle

140. . . Patterned electroluminescent layer

412. . . permanent magnet

420, 610. . . Mechanical arm

630. . . Combination

642. . . Evaporation chamber

644. . . Evaporation source

810, 910, 1010, S1, S2, S3, S4, S5, S6, S7, S8. . . Shadow mask unit

812, 912, 1012a. . . Unit opening pattern

1012. . . Metal film

1012b. . . Surrounding area

1014. . . Unit frame

E1, E2, E3, E4, E5, E6, E7, E8. . . Electromagnet

F1, F2, F3, F4, F5, F6, F7, F8. . . Fixed area

OP. . . Opening pattern

P. . . Coating machine

P1. . . Coating cavity

P2. . . Magnetic chuck

P21. . . Fixtures

P21a. . . Upper cover

P21b. . . lower lid

P3. . . Coating source

P4. . . Holding structure

P44. . . L-shaped retaining member

S. . . Shadow mask

T1, T2. . . thickness

1A to 1D are cross-sectional views showing processes of an electroluminescence display device according to an embodiment of the present invention.

2A to 2D are lower views of the substrate of FIGS. 1A to 1D, and FIGS. 1A to 1D are cross-sectional views taken along line II' of FIGS. 2A to 2D. .

3A and 3B are top views of the substrate and the electromagnet of FIGS. 1A to 1B.

4A to 4D are cross-sectional views showing processes of an electroluminescent display device according to an embodiment of the present invention.

5A to 5D are lower views of the substrate of FIGS. 4A to 4D, and FIGS. 4A to 4D are cross-sectional views taken along line I-I' of FIGS. 5A to 5D. .

6A to 6F are cross-sectional views showing processes of an electroluminescence display device according to an embodiment of the present invention.

7A to 7C are top views of the substrate of FIGS. 6A to 6C, and FIGS. 7D to 7F are lower views of the substrate of FIGS. 6D to 6F, and FIG. 6A to FIG. The 6F diagram shows a cross-sectional view along line I-I' in the 7A to 7F drawings.

Figure 8 is a top plan view of a plurality of shadow mask units in accordance with an embodiment of the present invention.

Figure 9 is a top plan view of a plurality of shadow mask units in accordance with an embodiment of the present invention.

FIG. 10A is a top view of a shadow mask unit according to an embodiment of the present invention.

Figure 10B is a cross-sectional view of the shadow mask unit of Figure 10A taken along line I-I'.

11A and 11B are flow charts showing the fabrication of a fixing device according to an embodiment of the present invention.

12A and 12B are elevational views showing a process of mounting a magnetic chuck on a holding structure according to an embodiment of the present invention.

13A and 13B are side views of the 12A and 12B drawings.

110. . . Substrate

112. . . First side

114. . . Second side

120. . . Magnetic component

130. . . vehicle

S1, S2, S3, S4. . . Shadow mask unit

E1, E2, E3, E4. . . Electromagnet

F1, F2, F3, F4. . . Fixed area

P1. . . Coating cavity

P2. . . Magnetic chuck

P21. . . Fixtures

P21a. . . Upper cover

P21b. . . lower lid

P3. . . Coating source

P4. . . Holding structure

P44. . . L-shaped holder.

Claims (15)

A method for fabricating an electroluminescent display device includes: providing a substrate having an opposite first side and a second side; disposing a magnetic element on the first side of the substrate; providing a plurality of shadow masks a screen unit; aligning each of the shadow mask units with the second side of the substrate; applying a magnetic force to each of the shadow mask units that have been aligned with the magnetic element, so that the shadows of the aligned positions are completed The mask unit is attached to the second side of the substrate, wherein the shadow mask units that are attached to the substrate form a shadow mask, the shadow mask has an opening pattern exposing the substrate; The second side performs a deposition process to deposit a patterned electroluminescent layer in the opening pattern of the shadow mask; and remove the shadow mask, wherein the shadow mask unit includes at least a first shadow mask a screen unit and a second shadow mask unit, wherein each of the shadow mask units is aligned with the second side of the substrate, and the magnetic element applies a magnetic force to each of the shadow mask units that have been aligned, So that the pair has been completed The step of bonding the shadow mask unit to the second side of the substrate sequentially includes: aligning the first shadow mask unit with the second side of the substrate; and the magnetic element pair has been aligned Applying a magnetic force to the first shadow mask unit to conform the first shadow mask unit to the second side of the substrate; aligning the second shadow mask unit with the second side of the substrate; Applying a magnetic force to the second shadow mask unit that has been aligned with the magnetic element, so that the second shadow mask unit is attached to the second side of the substrate, The substrate has at least one first fixed area and a second fixed area, and the magnetic element includes at least one first electromagnet and one second electromagnet separated from each other, and the first electromagnet and the second electromagnet are respectively located In the first fixing area and the second fixing area, wherein the magnetic element applies a magnetic force to the first shadow mask unit that has been aligned, so that the first shadow mask unit fits the first part of the substrate Two sides, and applying a magnetic force to the second shadow mask unit that has been aligned with the magnetic element, such that the second shadow mask unit is attached to the second side of the substrate comprises: After the shadow mask unit is aligned with the second side of the substrate, the first electromagnet has a magnetic force to attract the first shadow mask unit into the first fixing area of the substrate; After the second shadow mask unit is aligned with the second side of the substrate, the second electromagnet has a magnetic force to attract the second shadow mask unit into the second fixing area of the substrate. The method for fabricating an electroluminescent display device according to claim 1, wherein the first and second shadow mask units are aligned with the second side of the substrate, and the substrate is bonded to the substrate. The step of the second side includes: placing the first shadow mask unit on a robot arm to align the first shadow mask unit with the substrate by the mechanical arm; The shadow mask unit is attracted to the second side of the substrate; the second shadow mask unit is placed on the robot arm to align the second shadow mask unit with the substrate by the mechanical arm; And attracting the second shadow mask unit to the substrate with the magnetic element On the second side. The method for fabricating an electroluminescent display device according to claim 2, wherein the step of removing the shadow mask is: removing the magnetic force of the magnetic component or removing the magnetic component to make the shadow mask The curtain falls onto the robotic arm below the substrate. The method for fabricating an electroluminescent display device according to claim 1, wherein the magnetic component is an electromagnet component, and the step of removing the shadow mask is: causing the magnetic force of the electromagnet component to disappear. The method of fabricating an electroluminescent display device according to claim 1, wherein the magnetic component is a permanent magnet component, and the step of removing the shadow mask is: removing the permanent magnet component from the substrate. The method of fabricating an electroluminescent display device according to claim 1, wherein the deposition process comprises an evaporation process. The method for fabricating an electroluminescent display device according to claim 6, wherein the evaporation process is performed in an evaporation chamber, the shadow mask unit comprising at least a first shadow mask unit and a second shadow mask unit, wherein the magnetic component is disposed on the first side of the substrate, such that the shadow mask unit is aligned with the substrate, and the shadow mask of the magnetic component pair has been aligned Applying a magnetic force to the screen unit such that each of the shadow mask units that have been aligned is attached to the second side of the substrate, and the step of performing the deposition process includes: applying the first shadow mask outside the evaporation chamber Curtain unit placed on a machine Positioning on the second side of the arm by moving the first shadow mask unit over the substrate and after aligning with the second side; placing the second shadow mask unit on the arm Positioning on the second arm on the robot arm to move the second shadow mask unit over the substrate and after being aligned with the second side; the first side of the substrate Disposing the magnetic component such that the first shadow mask unit disposed on the second side and the second shadow mask unit are attached to the substrate, thereby forming a substrate, the magnetic component, and the first a combination of a second shadow mask unit; the assembly being placed on the robot arm to move the assembly into the evaporation chamber by the robot arm; the second of the substrate Performing the vapor deposition process on the side to evaporate the patterned electroluminescent layer in the opening pattern of the shadow mask; and placing the assembly together with the patterned electroluminescent layer coated thereon On the arm, the assembly is moved to the vapor deposition chamber by the robot arm . The method of fabricating an electroluminescent display device according to claim 1, wherein the unit opening pattern of one of the shadow mask units corresponds to a pattern of the electroluminescent layer of the at least one electroluminescent display device. The method for fabricating an electroluminescent display device according to claim 1, wherein the unit opening pattern of one of the shadow mask units corresponds to a pattern of a portion of the electroluminescent layer of the electroluminescent display device. An electroluminescent display device as described in claim 1 The manufacturing method, wherein each of the shadow mask units comprises a metal film. The method for fabricating an electroluminescent display device according to claim 10, wherein each of the shadow mask units further comprises a unit frame, and the unit frame is located in a peripheral region of the metal film. A coating machine is adapted to form a patterned electroluminescent layer on a substrate, the coating machine comprising: a coating cavity; a magnetic chuck disposed in the coating cavity and adapted to fix the substrate and Magnetically fixing a plurality of shadow mask units disposed on the substrate, the shadow mask units forming a shadow mask, and the shadow mask has an opening pattern exposing the substrate; and a coating source located on the coating The cavity is adapted to plate an electroluminescent material into the opening pattern, wherein the substrate has at least a first fixing area and a second fixing area, wherein the shadow mask unit comprises at least a first shadow a mask unit and a second shadow mask unit, wherein the magnetic chuck comprises a magnetic element, the magnetic element comprising at least one first electromagnet and a second electromagnet separated from each other, the first electromagnet being used for The first shadow mask unit is attracted to the first fixing area of the substrate, and the second electromagnet is used to attract the second shadow mask unit into the second fixing area of the substrate. The coating machine of claim 12, wherein the magnetic chuck further comprises a fixing device, wherein the fixing device comprises an upper cover and a lower cover, the upper cover and the lower cover form an accommodation space and fix the magnetic element. The coating machine of claim 13 further comprising a holding structure for fixing the magnetic chuck, wherein the outer edge of the lower surface of the holding structure is provided with an L-shaped holder, the L-shaped holder and the The lower surface of the retaining structure forms a recess and the magnetic chuck is secured in the recess. The coating machine of claim 12, wherein the magnetic chuck comprises a permanent magnet element.